公开(公告)号：US20170067779A1

公开(公告)日：2017-03-09

申请号：US15233595

申请日：2016-08-10

Applicant: Samsung Electronics Co., Ltd. ,  Industry-Academic Cooperation Foundation, Yonsei University

Inventor： In-joong Kim ,  llgu Yun

IPC: G01J3/02 ,  G02B5/20 ,  G01J3/443 ,  G02B7/02

CPC classification number: G01J3/0208 ,  G01J3/0218 ,  G01J3/0229 ,  G01J3/024 ,  G01J3/443 ,  G02B5/205 ,  G02B7/021 ,  H01J37/32972 ,  H01J37/3299 ,  H01L21/67253

Abstract: Provided are a tube-type lens usable for accurately detecting a plasma state in a plasma process, an optical emission spectroscopy (OES) apparatus including the tube-type lens, a plasma monitoring system including the OES apparatus, and a method of manufacturing a semiconductor device by using the plasma monitoring system. The tube-type lens includes: a cylindrical tube; a first lens disposed at an entrance of the cylindrical tube, on which light is incident, the first lens including a central portion which prevents transmission of the light and a second lens disposed at an exit of the cylindrical tube, from which the light exits.

Abstract translation: 提供了一种可用于精确检测等离子体处理中的等离子体状态的管式透镜，包括管式透镜的光发射光谱（OES）装置，包括OES装置的等离子体监视系统以及半导体制造方法 装置采用等离子体监测系统。 管式透镜包括：圆柱形管; 第一透镜，设置在圆柱形管的入口处，光入射，第一透镜包括防止光的透射的中心部分和设置在圆柱形管的出口处的第二透镜，光从该光出射。

公开(公告)号：US20160091367A1

公开(公告)日：2016-03-31

申请号：US14860259

申请日：2015-09-21

Applicant: Innovative Science Tools, Inc.

Inventor： Ronald H. Micheels

IPC: G01J3/10 ,  F21V7/22 ,  F21V9/16 ,  F21V7/04 ,  F21K99/00

CPC classification number: G01J3/108 ,  G01J3/0216 ,  G01J3/024

Abstract: A light source for near-infrared transmission and reflection spectroscopy can be constructed from a combination of a high power blue or blue-green light emitting diode (LED) and a phosphor element based on an inorganic material. The phosphor element absorbs the LED light and, in response to the LED excitation, emits luminescence that continuously covers the 700-1050 nm range. One possible material that can be used for such a near-infrared emitting phosphor element is a single crystal rod of Ti+3 doped Sapphire. An alternative near-infrared emitting phosphor material is a disk or rectangular shaped composite of Ti+3 doped Sapphire powder embedded in a clear optical epoxy or silicone encapsulant. Such a combination of a blue LED for excitation of a phosphor element that emits in a broad wavelength band has been widely used in white LEDs where the emission is in the 400-700 nm range.

Abstract translation: 用于近红外透射和反射光谱的光源可以由高功率蓝光或蓝绿色发光二极管（LED）和基于无机材料的荧光体元件的组合构成。 荧光体元件吸收LED光，并且响应于LED激发，发射连续覆盖700-1050nm范围的发光。 可用于这种近红外发射磷光体元件的一种可能的材料是Ti + 3掺杂的蓝宝石的单晶棒。 替代的近红外发射磷光体材料是嵌入在透明光学环氧树脂或硅树脂密封剂中的Ti + 3掺杂的蓝宝石粉末的圆盘或矩形复合材料。 用于激发在宽波长带中发射的荧光体元件的蓝色LED的这种组合已广泛用于发射在400-700nm范围内的白色LED中。

公开(公告)号：US09164028B2

公开(公告)日：2015-10-20

申请号：US13445210

申请日：2012-04-12

Applicant: Ryutaro Oda

Inventor： Ryutaro Oda

IPC: G01J3/42 ,  G01N21/31 ,  G01N21/64 ,  G01J3/06 ,  G01J3/18 ,  G01J3/44 ,  G01J3/02 ,  G01N21/27 ,  G01J3/28

CPC classification number: G01N21/31 ,  G01J3/0208 ,  G01J3/0216 ,  G01J3/024 ,  G01J3/027 ,  G01J3/06 ,  G01J3/18 ,  G01J3/4406 ,  G01J2003/2869 ,  G01N21/274 ,  G01N21/64 ,  G01N2021/6417

Abstract: A spectrometric measurement device capable of determining an optimal wavelength for detecting an objective component is provided. One mode of the present invention is a fluorescence measurement device for casting an excitation light of a predetermined wavelength into or onto a sample and detecting a predetermined wavelength of light contained in the fluorescence generated from the sample irradiated with the excitation light.

Abstract translation: 提供能够确定用于检测目标成分的最佳波长的光谱测量装置。 本发明的一种模式是用于将预定波长的激发光投射到样品中或在样品上并检测由激发光照射的样品产生的荧光中包含的预定波长的荧光测量装置。

公开(公告)号：US08964176B2

公开(公告)日：2015-02-24

申请号：US13785436

申请日：2013-03-05

Applicant: Naohiro Kamijo ,  Kohei Shimbo ,  Yoichi Kubota ,  Manabu Seo

Inventor： Naohiro Kamijo ,  Kohei Shimbo ,  Yoichi Kubota ,  Manabu Seo

IPC: G01J3/28 ,  G01J3/40 ,  G01J3/42 ,  G01J3/02 ,  G01J3/18 ,  G01J3/50 ,  G03G15/00

CPC classification number: G01J3/42 ,  G01J3/0208 ,  G01J3/0229 ,  G01J3/024 ,  G01J3/0262 ,  G01J3/0297 ,  G01J3/18 ,  G01J3/24 ,  G01J3/2823 ,  G01J3/50 ,  G01J2003/503 ,  G03G15/00 ,  G03G15/5062

Abstract: A spectrometer includes a light source to project a light beam to a target object, an optical element including a plurality of apertures through which the light beam reflected by the target object transmits, a diffraction element to form diffracted images from a plurality of light beams having transmitted through the optical element, and a light receiving element to receive the diffracted images formed by the diffraction element and including an optical shield to block a diffracted image other than a certain-order diffracted image.

Abstract translation: 光谱仪包括将光束投射到目标物体的光源，包括由目标物体反射的光束透过的多个孔的光学元件，衍射元件，以从具有多个光束的多个光束形成衍射图像，所述多个光束具有 通过光学元件透射的光接收元件和用于接收由衍射元件形成的衍射图像的光接收元件，并且包括光学屏蔽件以阻挡除一定级衍射图像之外的衍射图像。

公开(公告)号：US20140368818A1

公开(公告)日：2014-12-18

申请号：US14361840

申请日：2012-12-11

Applicant: THERMO FISHER SCIENTIFIC (ECUBLENS) SARL

Inventor： Fabio Demarco ,  Jean-Luc Dorier ,  Edmund Halasz

IPC: G01J3/443 ,  G01J3/18 ,  G01J3/02 ,  G01N21/67

CPC classification number: G01J3/443 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/024 ,  G01J3/0294 ,  G01J3/18 ,  G01J3/2803 ,  G01N21/67

Abstract: A spark optical emission spectrometer comprising: a spark source for causing spark induced emission of light from a sample; a single entrance slit; a toroidal mirror for directing the light through the single entrance slit; a plurality of diffraction gratings for diffracting light that has been directed through the entrance slit by the mirror, whereby the plurality of diffraction gratings are simultaneously illuminated; and at least one array detector for detecting the diffracted light from the plurality of diffraction gratings, wherein the minor is for directing the light through the entrance slit such that light from different regions in the spark source is spatially separated in an image of the light at the gratings whereby a first diffraction grating is preferentially illuminated with light from a first region of the spark source and simultaneously a second diffraction grating is preferentially illuminated with light from a second region of the spark source.

Abstract translation: 一种火花光发射光谱仪，包括：火花源，用于引起火花诱发的来自样品的光的发射; 单个入口狭缝; 用于将光引导通过单个入口狭缝的环形镜; 多个用于衍射光的衍射光栅，所述衍射光栅通过所述反射镜被引导通过所述入射狭缝，由此所述多个衍射光栅同时被照亮; 以及用于检测来自多个衍射光栅的衍射光的至少一个阵列检测器，其中，次要用于引导光通过入口狭缝，使得来自火花源中的不同区域的光在光的图像中在空间上分离 其中由来自火花源的第一区域的光优先照射第一衍射光栅并且同时第二衍射光栅的光栅优先用来自火花源的第二区域的光照射。

公开(公告)号：US08729455B2

公开(公告)日：2014-05-20

申请号：US13427127

申请日：2012-03-22

Applicant: Axel Kulki ,  Frank Holstein ,  Bert Handschick ,  Gerhard Stanzel

Inventor： Axel Kulki ,  Frank Holstein ,  Bert Handschick ,  Gerhard Stanzel

IPC: G01J5/18 ,  G01J3/02

CPC classification number: G01J3/024 ,  G01J3/0208 ,  G01J3/10 ,  G01J3/108 ,  G01J3/18 ,  G01J3/2823 ,  G01J3/42 ,  G01J3/443 ,  G01J2003/102 ,  G01V8/12

Abstract: Systems and methods are disclosed for the detection and identification of objects, wherein an illumination device emits polychromatic light in the infrared range, creating a light curtain, or an essentially two-dimensional area of light in the X and Z axis. The light from the light curtain and light reflected or transmitted by an object in the light curtain is imaged, via aperture-imaging optics, onto an aperture that is in the optical path and behind the aperture-imaging optics. The aperture is an elongated opening extending along the Z axis. A wavelength-dispersive device, such as a grating, diffracts light admitted by the aperture wavelength-dispersively in a diffraction direction along the Y axis. An image sensor detects the diffraction image and generates image signals which are analyzed to identify the materials comprising the object. An output signal may be generated in response to the material identified.

Abstract translation: 公开了用于物体的检测和识别的系统和方法，其中照明装置发射红外范围的多色光，产生在X和Z轴上的光幕或基本上二维的光。 来自光幕的光和由光幕中的物体反射或透射的光通过孔径成像光学器件成像到光路中的光圈上并且在孔径成像光学器件的后面。 孔是沿Z轴延伸的细长开口。 诸如光栅的波长分散装置沿着Y轴在衍射方向上以孔径波长分散地衍射光。 图像传感器检测衍射图像并产生被分析以识别包括对象的材料的图像信号。 可以响应于所识别的材料而产生输出信号。

公开(公告)号：US08705154B2

公开(公告)日：2014-04-22

申请号：US13888504

申请日：2013-05-07

Applicant: Canon Kabushiki Kaisha

Inventor： Tokuji Takizawa ,  Kazumi Kimura ,  Nobuyuki Tochigi ,  Masayasu Teramura

IPC: H04N1/46 ,  G01J3/28 ,  G03G15/04 ,  G03G15/00

CPC classification number: G01N21/251 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0216 ,  G01J3/0237 ,  G01J3/024 ,  G01J3/0291 ,  G01J3/20 ,  G01J3/2803 ,  G01J3/50 ,  G03G15/0131 ,  G03G15/0194 ,  G03G15/50 ,  G03G2215/0132 ,  G03G2215/0164

Abstract: A spectral colorimetric apparatus for detecting a color of an image of a subject, including: an illumination optical system illuminating the subject on a detection surface; a spectral optical system including a spectral element spectrally separating the beam diffused by the subject and a light receiving element array detecting a spectral intensity distribution; and a guiding optical system for guiding a beam diffused by the subject, wherein: the detection surface is parallel to a spectral plane including a principal ray of a beam entering the spectral optical system and a principal ray of a beam spectrally separated; the principal ray of the beam enters the spectral optical system within the spectral plane obliquely to a line joining a center of the light receiving element array with a surface vertex of the spectral element; and a light receiving surface of the light receiving element array is orthogonal to the spectral plane.

Abstract translation: 一种用于检测被摄体的图像的颜色的光谱比色装置，包括：照射光学系统，在检测面上照射被摄体; 光谱光学系统，包括频谱分离由对象漫射的光束的光谱元件和检测光谱强度分布的光接收元件阵列; 以及引导光学系统，用于引导被对象漫射的光束，其中：所述检测表面平行于包括进入所述光谱系统的光束的主光线和光谱分离的光束的主光束的光谱平面; 光束的主射线进入光谱平面内的光谱系统，倾斜于连接光接收元件阵列的中心与光谱元件的表面顶点的线; 并且光接收元件阵列的光接收表面与光谱平面正交。

公开(公告)号：US08625092B2

公开(公告)日：2014-01-07

申请号：US12555046

申请日：2009-09-08

Applicant: Christina Tatarczyk ,  Joachim Tatarczyk

Inventor： Christina Tatarczyk ,  Joachim Tatarczyk

IPC: G01J3/28

CPC classification number: G01J3/02 ,  B41F33/0036 ,  G01J3/024 ,  G01J3/0262 ,  G01J3/0291 ,  G01J3/04 ,  G01J3/10 ,  G01J3/18 ,  G01N21/86 ,  G01N21/8901

Abstract: An apparatus (10) measures a spectral distribution of a translucent printed product (12) produced with a printing device. The apparatus (10) has an illuminating source (20) for illuminating the printed product (12), an optoelectronic measuring means (32) for measurer the transmittance value of a section of the spectrum of the light (26) transmitted through the printed product (12), an optical disperser (28) for dispersing the wavelengths of the transmitted light (26), and a light entry gap plane that is definitive for the disperser (28). The light entry gap plane that is definitive for the disperser (28) is created by the surface of the printed product (12) to be examined.

Abstract translation: 一种装置（10）测量由印刷装置生产的半透明印刷品（12）的光谱分布。 所述设备（10）具有用于照亮所述印刷品（12）的照明源（20），用于测量透过所述印刷品的所述光（26）的光谱的一部分的透射率值的光电测量装置（32） （12），用于分散透射光（26）的波长的光学分散器（28）和对分散器（28）确定的光入口间隙平面。 对于分散器（28）确定的光进入间隙平面由待检查的印刷品（12）的表面产生。

公开(公告)号：US08594470B2

公开(公告)日：2013-11-26

申请号：US13888708

申请日：2013-05-07

Applicant: Palo Alto Research Center Incorporated

Inventor： Peter Kiesel ,  Oliver Schmidt

IPC: G02B6/00 ,  G02B6/04

CPC classification number: G02F1/29 ,  G01J1/42 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0216 ,  G01J3/0218 ,  G01J3/024 ,  G01J3/0256 ,  G01J3/26 ,  G01J3/2803 ,  G01J9/00 ,  G02B5/008 ,  G02B5/284 ,  G02B6/29317 ,  G02B6/4204 ,  G02B6/4298

Abstract: Input light, such as from an optical sensor or stimulus-wavelength converter, includes one or more light or dark sub-bands. The input light is transmitted, such as through a transmissive layer or transmission component, to obtain effects due to transmission with lateral variation. A detector can, for example, obtain spectral information or other photon energy information about the sub-bands due to lateral variation. For each light or dark sub-band, a transmission component can, for example, provide a respective light or dark spot, and spot position can be used to obtain spectral information such as absolute wavelength or wavelength change. A photosensing component can sense or detect transmitted light or output photons, such as with a photosensor array or a position-sensitive detector. Circuitry can use photosensed quantities to obtain, e.g. a differential signal or information about time of wavelength change.

Abstract translation: 诸如来自光学传感器或刺激波长转换器的输入光包括一个或多个浅或暗的子带。 传输输入光，例如通过透射层或透射分量，以获得由于具有横向变化的透射而产生的影响。 检测器可以例如由于横向变化而获得关于子带的光谱信息或其他光子能量信息。 对于每个光或暗子带，透射分量可以例如提供相应的光斑或暗点，并且光斑位置可用于获得诸如绝对波长或波长变化的光谱信息。 感光组件可以感测或检测透射光或输出光子，例如用光电传感器阵列或位置敏感检测器。 电路可以使用光照量来获得，例如。 差分信号或有关波长变化时间的信息。

公开(公告)号：US20130308317A1

公开(公告)日：2013-11-21

申请号：US13474206

申请日：2012-05-17

Applicant: Kenneth J. Vachon, JR. ,  Walter J. Doherty, III ,  Leonid Y. Krasnobaev ,  Scott E. Miller

Inventor： Kenneth J. Vachon, JR. ,  Walter J. Doherty, III ,  Leonid Y. Krasnobaev ,  Scott E. Miller

IPC: F21V15/01 ,  F21V5/04

CPC classification number: G01N21/359 ,  G01J3/0202 ,  G01J3/024 ,  G01J3/0256 ,  G01J3/0264 ,  G01J3/0272 ,  G01J3/0283 ,  G01J3/0286 ,  G01J3/0291 ,  G01N21/01 ,  G01N21/031 ,  G01N2021/3595 ,  G01N2201/0221 ,  G01N2201/024

Abstract: In an embodiment, an apparatus includes a module assembly and a main assembly. The module assembly includes a module assembly housing, a first face plate and an analysis unit attached to the first face. The main assembly includes a main assembly housing, a second face plate and an engine unit rigidly attached to the second face plate. The engine unit generates a light that passes to the analysis unit via a first lens assembly and a second lens assembly. The first lens assembly is attached to the first face plate and the second lens assembly is attached to the second face plate. The module assembly when attached to the main assembly causes the first and second face plates to act as a single mechanical unit that moves independent of movement of the module assembly housing and/or the main assembly housing.

Abstract translation: 在一个实施例中，装置包括模块组件和主组件。 模块组件包括模块组件壳体，第一面板和附接到第一面的分析单元。 主组件包括主组件壳体，第二面板和刚性地附接到第二面板的发动机单元。 发动机单元产生经由第一透镜组件和第二透镜组件传递到分析单元的光。 第一透镜组件附接到第一面板，第二透镜组件附接到第二面板。 当附接到主组件时，模块组件使得第一和第二面板作为独立于模块组件壳体和/或主组件壳体的运动而移动的单个机械单元。