公开(公告)号：EP1668313A1

公开(公告)日：2006-06-14

申请号：EP04784260.4

申请日：2004-09-15

Applicant: Cymer, Inc.

Inventor： RAO, Rajasekhar, M. ,  MELCHIOR, John, T. ,  GLATZEL, Hoger, K.

IPC: G01B9/02 ,  H01S3/13

CPC classification number: G01J3/26 ,  G01J3/02 ,  G01J3/027 ,  G01J9/0246

Abstract: A wavemeter and method for measuring bandwidth for a high repetition rate gas discharge laser having an output laser bean comprising a pulsed output of greater than or equal to 15 mJ per pulse, sub-nanometer bandwidth tuning range pulses having a femptometer bandwidth precision and tens of femptometers bandwidth accuracy range, for measuring bandwidth on a pulse to pulse basis at pulse repetition rates of 4000Hz and above, is disclosed which may comprise a focusing lens having a focal length; an optical interferometer creating an interference fringe pattern; an optical detection means positioned at the focal length from the focusing lens; and a bandwidth calculator calculating bandwidth from the position of interference fringes in the interference fringe pattern incident on the optical detection means, defining a DID and a DOD, the respective distances between a pair of first fringe borders and between a pair of second fringe borders in the interference pattern on an axis of the interference pattern, and according to the formula Δλ= λ0 [DOD2 _ DID2] / [8f2-D02] where λ0 is an assumed constant wavelength and D0 = (DOD - DID)2, and f is the focal length.

公开(公告)号：EP1649244A2

公开(公告)日：2006-04-26

申请号：EP04777419.5

申请日：2004-06-29

Applicant: Cymer, Inc.

Inventor： RAFAC, Robert, J.

IPC: G01B9/02

CPC classification number: G01J1/4257 ,  G01J1/0228 ,  G01J3/02 ,  G01J3/027 ,  G01J3/28 ,  G01J3/45

Abstract: A method and apparatus for measuring bandwidth of light emitted from a laser (12) is disclosed which may comprise: a first (30) and second (34) wavelength sensitive optical bandwidth etalon detectors providing, respectively, an output (32, 36) representative of a first parameter indicative of the bandwidth of the emitted light as measured respectively by the first anal second bandwidth detectors, and an actual bandwidth calculation apparatus (40) adapted to utilize these two outputs as part of a multivariable linear equation employing predetermined calibration variables specific to either the first or the second bandwidth detector, to calculate a first actual bandwidth parameter (FWXM) or a second actual bandwidth parameter (EX).

公开(公告)号：EP1634061A2

公开(公告)日：2006-03-15

申请号：EP04730607.1

申请日：2004-04-30

Applicant: McGill University

Inventor： BURNS, David, H. ,  LAFRANCE, Denis ,  LANDS, Larry

IPC: G01N21/35

CPC classification number: G01N21/359 ,  A61B5/14532 ,  A61B5/14546 ,  A61B5/1455 ,  A61B5/6826 ,  A61B5/6838 ,  G01J3/02 ,  G01J3/027 ,  G01J3/427 ,  G01J3/44 ,  G01J3/453 ,  G01N21/4738 ,  G01N21/65 ,  G01N2021/3148 ,  G01N2021/3595 ,  G01N2201/0618 ,  G01N2201/0627 ,  G01N2201/0636 ,  G01N2201/129 ,  G01N2201/1293 ,  Y10T436/143333

Abstract: There is described a system and method for the in vivo determination of lactate levels in blood using Near-Infrared Spectroscopy (NIRS)and/or Near-infrared Raman Spectroscopy (NIR-RAMAN). The method teaches measuring lactate in vivo comprising: optically coupling a body part (14) with a light source (10) and a light detector (18) the body part having tissues comprising blood vessels; injecting near-infrared (NIR) light at one or a plurality of wavelengths in the body part; detecting, as a function of blood volume variations in the body part, light exiting the body part at at least the plurality of wavelengths to generate an optical signal (20); and processing the optical signal as a function of the blood volume variations to obtain a lactate level in blood.

公开(公告)号：EP1417462A1

公开(公告)日：2004-05-12

申请号：EP02752594.8

申请日：2002-07-25

Applicant: Cymer, Inc.

Inventor： HAAS, Steven ,  SANDSTROM, Richard, L. ,  HOFMANN, Thomas ,  ERSHOV, Alexander, I.

IPC: G01J3/18

CPC classification number: G01J3/26 ,  G01J1/4257 ,  G01J3/02 ,  G01J3/027 ,  G01J3/12 ,  G01J3/1809 ,  G01J3/22 ,  G01J3/28 ,  G01J9/02

Abstract: A simple, reliable, easy to use method for calculating bandwidth data of very narrow band laser beams based on bandwidth data obtained with a spectrometer in circumstances where the laser bandwidths are not large compared to the slit function of the spectrometer. The slit function of the spectrometer is determined (20). Spectral data of the laser beam is measured with the spectrometer to produce a measured laser beam spectrum which represents a convolution of the laser beam spectrum and the spectrometer slit function (76). This measured laser spectrum is then mathematically convolved with the slit function of the spectrometer to produce a doubly convolved spectrum. Bandwidth values representing true laser bandwidths are determined from measured laser spectrum and the doubly convolved spectrum. Preferably the true laser bandwidths are calculated by determining the difference between 'twice a measured laser bandwidth' and a corresponding 'doubly convolved bandwidth.' This method provides an excellent estimate of the true laser bandwidth because 'twice the measured laser bandwidth' represents two laser bandwidths and two spectrometer slit function bandwidths and the 'doubly convolved bandwidth' represents one laser bandwidth and two spectrometer slit function bandwidths. Thus, the difference is a representation of the true laser bandwidth. In a preferred embodiment the bandwidth parameters measured are the full width half-maximum bandwidth and the 95% integral bandwidth.

公开(公告)号：EP1238249B1

公开(公告)日：2004-03-31

申请号：EP00986478.6

申请日：2000-12-15

Applicant: PPG Industries Ohio, Inc.

Inventor： CORRIGAN, Victor, G. ,  MABREY, Bernard, L. ,  LEWIS, Mark, David

IPC: G01J3/46

CPC classification number: G01J3/02 ,  G01J3/0264 ,  G01J3/027 ,  G01J3/46 ,  G01J3/463 ,  Y10S707/99933 ,  Y10S707/99936

Abstract: A computer implemented method for matching paint on a vehicle, having the steps of receiving in a central computer, from a remote terminal, vehicle identifying information relating to a specific vehicle and a first set of paint color data from a portion of the body of the vehicle. The central computer includes a database with vehicle identifying information for a plurality of vehicles, associated with paint color data and their paint formulations. A first process determines a first best match paint formulation which relates submitted vehicle identifying information and submitted paint data to a paint formulation. The latter is transmitted to the remote terminal. The central computer receives a second set of paint color data from the remote terminal representing a surface of the specific vehicle painted with the first best paint formulation and compares by a second process the second paint color data to the first paint color data so as to establish accuracy data. The accuracy data is applied to the first process so as to be implemented in subsequent paint formulation identifications.

公开(公告)号：EP1339519A2

公开(公告)日：2003-09-03

申请号：EP01975156.9

申请日：2001-05-23

Applicant: Cymer, Inc.

Inventor： NEWMAN, Peter, C. ,  DUFFEY, Thomas, P. ,  PARTLO, William, N. ,  SANDSTROM, Richard, L. ,  MECHER, Paul, C. ,  JOHNS, David, M. ,  SAETHRE, Robert, B. ,  FLEUROV, Vladimir, B. ,  NESS, Richard, M. ,  RETTIG, Curtis, L. ,  SHANNON, Robert, A. ,  UJAZDOWSKI, Richard, C. ,  ROKNI, Shahryar ,  PAN, Xiaojiang, J. ,  KULGEYKO, Vladimir ,  SMITH, Scott, T. ,  ANDERSON, Stuart, L. ,  ALGOTS, John, M. ,  SPANGLER, Ronald, L. ,  Fomenkov, Igor V.

IPC: B23H1/00

CPC classification number: H01S3/225 ,  G01J1/4257 ,  G01J3/027 ,  G01J9/0246 ,  G03F7/70025 ,  G03F7/70041 ,  G03F7/70333 ,  G03F7/70483 ,  G03F7/70575 ,  G03F7/70933 ,  H01S3/02 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0385 ,  H01S3/0387 ,  H01S3/0404 ,  H01S3/041 ,  H01S3/08009 ,  H01S3/08036 ,  H01S3/097 ,  H01S3/09702 ,  H01S3/0971 ,  H01S3/0975 ,  H01S3/1024 ,  H01S3/104 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/1305 ,  H01S3/134 ,  H01S3/137 ,  H01S3/139 ,  H01S3/22 ,  H01S3/2207 ,  H01S3/223 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/2258 ,  H01S3/2308

Abstract: The present invention provides an excimer laser capable of producing a high quality pulsed laser beam at pulse rates of about 4,000 Hz at pulse energies of about 5mJ or greater. A preferred embodiments is an ArF excimer laser specifically designed as a light source for integrated circuit lithography. An improved wavemeter with special software monitors output beam parameters and controls a very fast PZT driven tuning mirror and the pulse power charging voltage to maintain wavelength and pulse energy within desired limits. In a preferred embodiment two fan motors drive a single tangential fan which provides sufficient gas flow to clear discharge debris from the discharge region during the approximately 0.25 milliseconds between pulses.

公开(公告)号：EP1136812A1

公开(公告)日：2001-09-26

申请号：EP01113641.3

申请日：1996-06-04

Applicant: MASIMO CORPORATION

Inventor： The designation of the inventor has not yet been filed

IPC: G01N21/39 ,  G01N21/27 ,  G01J3/10 ,  A61B5/00

CPC classification number: A61B5/1495 ,  A61B5/0205 ,  A61B5/02427 ,  A61B5/14552 ,  A61B5/6826 ,  A61B5/6838 ,  A61B2562/08 ,  G01J3/02 ,  G01J3/0254 ,  G01J3/027 ,  G01J3/0275 ,  G01J3/0291 ,  G01J3/10 ,  G01J2003/2866 ,  G01N21/255 ,  G01N21/274 ,  G01N21/31 ,  G01N21/3151 ,  G01N21/39 ,  G01N2021/3144 ,  G01N2201/0627

Abstract: The method and apparatus of the present invention provides a system wherein light-emitting diodes (LEDs) (162) can be tuned within a given range by selecting their operating drive current in order to obtain a precise wavelength. The present invention further provides a manner in which to calibrate and utilize an LED probe (150), such that the shift in wavelength for a known change in drive current is a known quantity. In general, the principle of wavelength shift for current drive changes for LEDs is utilized in order to allow better calibration and added flexibility in the use of LED sensors, particularly in applications when the precise wavelength is needed in order to obtain accurate measurements. The present invention also provides a system in which it is not necessary to know precise wavelengths of LEDs where precise wavelengths were needed in the past. Finally, the present invention provides a method and apparatus for determining the operating wavelength of a light-emitting element such a light-emitting diode.

Abstract translation: 本发明的方法和装置提供了一种系统，其中可以通过选择它们的工作驱动电流来在给定范围内调节发光二极管（LED）162以获得精确的波长。 本发明还提供了校准和利用LED探针（150）的方式，使得已知量的驱动电流已知变化的波长偏移。 通常，利用LED的电流驱动变化的波长偏移原理，以便在使用LED传感器时更好地校准和增加灵活性，特别是在需要精确波长以获得精确测量的应用中。 本发明还提供了一种系统，其中不需要知道过去需要精确波长的LED的精确波长。 最后，本发明提供一种用于确定诸如发光二极管的发光元件的工作波长的方法和装置。

公开(公告)号：EP0444689B1

公开(公告)日：1995-12-20

申请号：EP91103052.6

申请日：1991-02-28

Applicant: X-RITE, INC.

Inventor： Cargill, Mark A. ,  Berg, Bernard J.

IPC: G01J3/46 ,  G01J3/51

CPC classification number: G01N21/474 ,  G01J3/02 ,  G01J3/027 ,  G01J3/0272 ,  G01J3/0291 ,  G01J3/465 ,  G01J3/51 ,  G01J3/513 ,  G01J3/524 ,  G01J2001/0257 ,  G01J2001/1636 ,  G01J2003/2866 ,  G01N21/274

公开(公告)号：EP0463600A3

公开(公告)日：1992-07-29

申请号：EP91110401.6

申请日：1991-06-24

Applicant: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.

Inventor： Okubo, Kazuaki

IPC: G01J3/36

CPC classification number: G01J3/20 ,  G01J3/027 ,  G01J3/2803 ,  G01J2003/2866

Abstract: In order to decrease errors in spectral measurement, the data measured at sampling wavelength intervals smaller than the wavelength sampling intervals are changed to data of wavelength sampling interval of spectral effective curve. If the wavelength half-bandwidths to be measured are different from the wavelength sampling intervals, the spectral data at wavelengths in correspondence with the wavelength sampling intervals are obtained with interpolation. In a spectroradiometer, wavelength scale is calibrated with use of a plurality of line spectra of specified wavelengths, and the photoelectric outputs are integrated with use of the addresses of elements as a weight factor.

公开(公告)号：EP0121404A2

公开(公告)日：1984-10-10

申请号：EP84302093.4

申请日：1984-03-28

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Minekane, Tomiharu c/o Patent Division

IPC: G01N21/25

CPC classification number: G01J3/42 ,  G01J3/02 ,  G01J3/027 ,  G01J3/10 ,  G01J3/427 ,  G01N21/255 ,  G01N2201/04 ,  G01N2201/0696

Abstract: A photometric light absorption measuring apparatus includes a central processing unit sending generator frequency data to a high power generator that pulses a light source intermittently to irradiate a liquid sample contained in a transparent receptacle. The intermittent light beams pass through optical guides, focusing lenses, light amplifiers and a slit aperture. A diffraction grating disperses the light beams and a light detector receives the spectral components and generates corresponding intensity signals which are passed through an amplifier and supplied to an arithmetical unit which receives frequency power generation signals from the central processing unit. A misfire detector sends signals to the arithmetical unit when the light source fails to flash. The arithmetical unit preselects two spectral components and calculates the concentration of a corresponding preselected constituent of the liquid sample from the average mean value of the intensity differences between the two preselected spectral components corrected to eliminate intensity data corresponding to non-flashes of the light source.

Abstract translation: 一种光度测定光吸收测定装置，具备：中央处理单元，向大功率发生器发送频率数据，该高功率发生器间歇地脉冲光源，照射容纳在透明容器内的液体样品。 间歇光束通过光导，聚焦透镜，光放大器和狭缝孔。 衍射光栅分散光束，光检测器接收光谱分量并产生相应的强度信号，其通过放大器并提供给从中央处理单元接收频率发电信号的算术单元。 当光源不能闪烁时，失火探测器向算术单元发送信号。 算术单位预先选择两个光谱分量，并从校正的两个预选光谱分量之间的强度差的平均平均值计算液体样品的相应预选成分的浓度，以消除对应于光源的非闪光的强度数据。