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    코팅 디바이스 및 코팅 방법
    333.
    发明公开
    코팅 디바이스 및 코팅 방법 有权
    涂层设备和涂层方法

    公开(公告)号：KR1020150033533A

    公开(公告)日：2015-04-01

    申请号：KR1020140116146

    申请日：2014-09-02

    Applicant: 티피케이 터치 솔루션스 인코포레이션

    Inventor： 후앙준야오 ,  첸잉체 ,  훙포핀 ,  치앙이쳉

    IPC: H01L21/67 ,  G03F7/16

    CPC classification number: H01L21/6715 ,  B05B3/18 ,  B05C5/005 ,  B05C5/0254 ,  B05C5/0266 ,  B05C9/02 ,  B05C11/00 ,  B05C11/1036 ,  B05D1/26 ,  B29C47/16 ,  G03F7/16

    Abstract: 기판상에코팅액을코팅하기위한코팅디바이스는, 코팅액출구를구비하며코팅액출구를통과한코팅액으로기판을코팅할수 있고기판에대해제1 축방향을따라이동하도록되어있는코팅헤드; 코팅헤드에연결되며코팅액출구의개구의크기를조절하기위해제2 축방향을따라이동하도록되어있고코팅액출구에근접하게배치되는가동패드를포함하는조절유닛; 그리고제2 축방향을따라조절유닛이이동하도록제어하기위해조절유닛에연결되는구동어셈블리를포함한다. 추가적으로코팅방법이제시된다.

    Abstract translation: 一种在基材上涂布涂布液的涂布装置，其特征在于，包括：具有涂布液入口的涂布头，涂布液通过涂布液入口涂布基板，并相对于基板沿着第一轴方向移动 ; 连接到涂布头的控制单元沿着第二轴线方向移动以控制涂布溶液入口的开口的尺寸，并且具有接近涂布溶液入口的移动垫; 以及驱动组件，其连接到所述控制单元以控制所述控制单元沿着所述第二轴线方向的移动。 另外，建议使用涂布方法。

    웨이퍼 세정 장치
    334.
    发明公开
    웨이퍼 세정 장치 审中-实审
    装置清洁

    公开(公告)号：KR1020140070236A

    公开(公告)日：2014-06-10

    申请号：KR1020120138487

    申请日：2012-11-30

    Applicant: 에스케이실트론 주식회사

    Inventor： 정홍일

    IPC: H01L21/302

    CPC classification number: H01L21/67057 ,  B05C11/1036

    Abstract: A wafer cleaning device of an embodiment comprises a cleaning tub in which a wafer to be cleaned is stored; a chemical liquid circulation pipe for circulating a chemical liquid supplied to the cleaning tub; a chemical liquid supply pipe for supplying the chemical liquid to the cleaning tub; a three-way valve part disposed at the chemical liquid supply pipe; and a cleaning solution pipe connected to the valve part. The valve part selects either the chemical solution discharged to a discharge part of the chemical liquid supply pipe or the cleaning solution moved through the cleaning solution pipe.

    Abstract translation: 实施方式的晶片清洗装置包括清洗槽，待清洗的晶片被保存在该清洗槽中; 用于循环供给到清洗桶的药液的化学液体循环管; 用于将化学液体供应到清洗桶的化学液体供给管; 设置在药液供给管上的三通阀部; 以及与阀部连接的清洗液管。 阀部选择排出到化学液体供给管的排出部的化学溶液或通过清洗液管移动的清洗液。

    라디에이터 커버용 실리콘 부착장치
    335.
    发明公开
    라디에이터 커버용 실리콘 부착장치 有权
    SILICON固定系统用于散热器盖

    公开(公告)号：KR1020100091809A

    公开(公告)日：2010-08-19

    申请号：KR1020090011174

    申请日：2009-02-11

    Applicant: 주식회사 고산

    Inventor： 박만홍 ,  강충실

    IPC: B05C9/00 ,  B05D3/00 ,  B05C5/02 ,  B05C1/14

    CPC classification number: B05C5/0225 ,  B05C9/14 ,  B05C11/1021 ,  B05C11/1036 ,  B05C13/02

    Abstract: PURPOSE: A silicon attachment system for a radiator cover is provided to economically produce the cover, and to obtain a product in which the height and the width of silicon are uniform. CONSTITUTION: A silicon attachment system for a radiator cover comprises the following steps: a cover transfer unit transferring the radiator cover(10); a cover fixing jig(120) fixing multiple radiator covers; a cover unloading/loading unit installed on one side of the transfer unit; an impurity removal unit(140) combust-removing impurities from the cover; a dispensing unit(150) spreading silicon to the combination surface of the cover with a constant thickness; a curing unit(160) attaching the radiator cover while curing the silicon spread on the combination surface; and a cooling unit(170) cooling the cover fixing jig and the radiator cover.

    Abstract translation: 目的：提供一种用于散热器盖的硅连接系统，以经济地生产盖子，并获得硅的高度和宽度均匀的产品。 构成：用于散热器盖的硅附接系统包括以下步骤：传送散热器盖（10）的盖传送单元; 固定多个散热器盖的盖固定夹具（120）; 安装在传送单元一侧的盖卸载/装载单元; 杂质去除单元（140）从盖上燃烧除去杂质; 分配单元（150），其以恒定的厚度将硅铺展到所述盖的组合表面; 固化单元（160），其在固化在组合表面上扩散的硅的同时附接散热器盖; 以及冷却单元（170），其冷却盖固定夹具和散热器盖。

    BLADE DEVICE, AND PRINTER AND COATING APPARATUS PROVIDED WITH SAID BLADE DEVICE
    338.
    发明公开
    BLADE DEVICE, AND PRINTER AND COATING APPARATUS PROVIDED WITH SAID BLADE DEVICE 审中-公开
    刀片装置，以及提供有所述刀片装置的打印机和涂布装置

    公开(公告)号：EP3196020A1

    公开(公告)日：2017-07-26

    申请号：EP14901963.0

    申请日：2014-09-19

    Applicant: Chiba Machine Industry Corporation

    Inventor： SUMIYOSHI, Koji

    IPC: B41F9/10 ,  B05C1/08 ,  B05C11/10 ,  B41F31/20

    CPC classification number: B05C1/0834 ,  B05C1/08 ,  B05C11/10 ,  B05C11/1036 ,  B41F9/003 ,  B41F9/065 ,  B41F9/1045 ,  B41F9/1072 ,  B41F31/027 ,  B41F31/045 ,  B41F31/20 ,  B41F33/0045

    Abstract: Provided are a blade device equipped with a blade member which can accurately adjust pressing force due to a blade member, and a printing machine and a coating device equipped with the blade device.
    A blade device 40 according to the present invention has: a blade member 41 contacting with a plate roll 10 to which coating material is to be applied; an upper holder 43 contacting with the blade member from one surface side of the blade member; a lower holder 44 contacting with the blade member from another surface side of the blade member; a tube 42 contacting with the blade member and configured to expand and contract by pressure of fluid; and a tube positioning part 43a which is provided on the upper holder and positions the tube closer to the roller, in a direction in which the blade member extends, than a tip end of the lower holder is. The tube adjusts a pressing force, of the tip end of the blade member, against the roller by being expanded or contracted while being held by the tube positioning part and the blade member.

    Abstract translation: 本发明提供一种具备能够高精度地调整刀片部件的按压力的刀片部件的刀片装置以及具备该刀片装置的印刷机械及涂敷装置。 根据本发明的刀片装置40具有：刀片构件41，其与待涂覆涂覆材料的板辊10接触; 从叶片构件的一个表面侧与叶片构件接触的上支架43; 从刀片构件的另一表面侧与刀片构件接触的下部保持器44; 与叶片构件接触并且构造成通过流体的压力膨胀和收缩的管42; 以及管定位部分43a，该管定位部分43a设置在上部保持器上，并且使得管在刀片构件延伸的方向上比该下部保持器的末端更靠近辊定位。 该管通过在由管定位部和叶片构件保持的同时膨胀或收缩来调节叶片构件的末端的压力抵靠辊。

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