公开(公告)号：US20100307150A1

公开(公告)日：2010-12-09

申请号：US12743499

申请日：2008-12-15

Applicant: Lei Wu ,  Huikai Xie

Inventor： Lei Wu ,  Huikai Xie

IPC: F03G7/06

CPC classification number: B81B3/0024 ,  B81B2201/032 ,  B81B2201/047 ,  B81B2203/053

Abstract: A microactuator for displacing a platform vertically with respect to a substrate includes a first rigid frame, a first flexible bimorph beam connecting the first frame to the substrate, a second rigid frame, a second flexible bimorph beam connecting the second frame to the first frame, and a third flexible bimorph beam connecting a platform to the second frame. Activation of the first, second, and third flexible bimorph beams allows vertical displacement of the platform with respect to the substrate, with negligible lateral shift. A microactuator assembly includes a substrate, a plurality of first rigid frames, a plurality of first flexible bimorph beams, a plurality of second rigid frames, a plurality of second flexible bimorph beams, a platform, and a plurality of third flexible bimorph beams. Activation of the first, second, and third bimorph beams allows vertical displacement of the platform with respect to the substrate, with negligible lateral shift. A further embodiment with four identical such microactuators oriented at four sides of the platform, can achieve 1D or 2D angular scanning of the mirror plate by the activation of 1 or 2 adjacent microactuators.

Abstract translation: 用于使平台相对于衬底垂直移位的微致动器包括第一刚性框架，将第一框架连接到衬底的第一柔性双压电晶片梁，第二刚性框架，将第二框架连接到第一框架的第二柔性双压电晶片梁， 以及将平台连接到第二框架的第三柔性双压电晶片。 第一，第二和第三柔性双晶片束的激活允许平台相对于衬底的垂直位移，具有可忽略的横向偏移。 微致动器组件包括基板，多个第一刚性框架，多个第一柔性双压电晶片梁，多个第二刚性框架，多个第二柔性双压电晶片梁，平台和多个第三柔性双压电晶片。 第一，第二和第三双晶片束的激活允许平台相对于衬底的垂直位移，具有可忽略的横向偏移。 具有四个相同的这样的微致动器的另一实施例在平台的四个侧面定向，可以通过激活1或2个相邻微致动器来实现镜板的1D或2D角扫描。

公开(公告)号：US07830068B2

公开(公告)日：2010-11-09

申请号：US12354182

申请日：2009-01-15

Applicant: Michihiko Nishigaki ,  Toshihiko Nagano ,  Kazuhiko Itaya ,  Takashi Kawakubo

Inventor： Michihiko Nishigaki ,  Toshihiko Nagano ,  Kazuhiko Itaya ,  Takashi Kawakubo

IPC: H01L41/08

CPC classification number: H01H57/00 ,  B81B3/0021 ,  B81B2201/032 ,  H01G5/18 ,  H01H2057/006 ,  H01L41/094 ,  H01L41/0973

Abstract: An actuator includes a first beam, a first fixed part, a second beam, a first connective part, and a first fixed electrode. The first beam extends from a first fixed end to a first connective end, and the first fixed part connects the first fixed end and the substrate and supports the first beam above a main surface of the substrate with a gap. The second beam extends from a second connective end to a first action end and is provided in parallel to the first beam, and has a first division part divided by a first slit extending from the first action end toward the second connective end. The first connective part connects the first connective end and the second connective end and holds the second beam above the main surface of the substrate with a gap. The first fixed electrode is provided on the main surface of the substrate being configured to be opposed to a part of the first division part on a side of the first action end.

Abstract translation: 致动器包括第一光束，第一固定部分，第二光束，第一连接部分和第一固定电极。 第一光束从第一固定端延伸到第一连接端，并且第一固定部分连接第一固定端和衬底，并且将第一光束以间隙支撑在衬底的主表面上方。 第二光束从第二连接端部延伸到第一动作端部并且平行于第一光束提供，并且具有由从第一动作端向第二连接端部延伸的第一狭缝分割的第一分割部分。 第一连接部分连接第一连接端和第二连接端，并且将第二光束以间隙保持在基板的主表面上方。 第一固定电极设置在基板的主表面上，该主表面被配置为与第一动作端侧的第一分割部分的一部分相对。

公开(公告)号：US07735970B2

公开(公告)日：2010-06-15

申请号：US11685074

申请日：2007-03-12

Applicant: Gregory John McAvoy ,  Vincent Patrick Lawlor ,  Kia Silverbrook

Inventor： Gregory John McAvoy ,  Vincent Patrick Lawlor ,  Kia Silverbrook

IPC: B41J2/05

CPC classification number: B41J2/14427 ,  B41J2002/14435 ,  B41J2202/03 ,  B41J2202/15 ,  B81B3/0024 ,  B81B2201/032 ,  B81B2201/052

Abstract: A thermal bend actuator, having a plurality of elements, is provided. The actuator includes a first active element for connection to drive circuitry a second passive element mechanically cooperating with the first element. When a current is passed through the first element, the first element expands relative to the second element, resulting in bending of the actuator. The second element includes a material having negative thermal expansion.

Abstract translation: 提供具有多个元件的热弯曲致动器。 致动器包括用于连接到驱动电路的第一有源元件，与第一元件机械配合的第二无源元件。 当电流通过第一元件时，第一元件相对于第二元件膨胀，导致致动器的弯曲。 第二元件包括具有负热膨胀的材料。

公开(公告)号：US07732990B2

公开(公告)日：2010-06-08

申请号：US11683755

申请日：2007-03-08

Applicant: Michihiko Nishigaki ,  Toshihiko Nagano ,  Takashi Miyazaki ,  Kazuhiko Itaya ,  Takashi Kawakubo

Inventor： Michihiko Nishigaki ,  Toshihiko Nagano ,  Takashi Miyazaki ,  Kazuhiko Itaya ,  Takashi Kawakubo

IPC: H01L41/08

CPC classification number: B81B3/0072 ,  B81B2201/032 ,  H01G5/18 ,  H01H57/00 ,  H01H2057/006 ,  H01L41/094

Abstract: A MEMS device includes: a first actuator having a first fixed end, including a stacked structure of a first lower electrode, a first piezoelectric film, and a first upper electrode, and being able to be operated by applying voltages to the first lower electrode and the first upper electrode; a second actuator having a second fixed end, being disposed in parallel with the first actuator, including a stacked structure of a second lower electrode, a second piezoelectric film, and a second upper electrode, and being able to be operated by applying voltages to the second lower electrode and the second upper electrode; and an electric circuit element having a first action part connected to the first actuator and a second action part connected to the second actuator.

Abstract translation: MEMS器件包括：第一致动器，具有第一固定端，包括第一下电极，第一压电膜和第一上电极的堆叠结构，并且能够通过向第一下电极施加电压而操作， 第一上电极; 具有第二固定端的第二致动器，与所述第一致动器平行设置，包括第二下电极，第二压电膜和第二上电极的堆叠结构，并且能够通过向所述第二致动器施加电压而被操作 第二下电极和第二上电极; 以及具有连接到第一致动器的第一作用部分和连接到第二致动器的第二作用部分的电路元件。

公开(公告)号：US20100097681A1

公开(公告)日：2010-04-22

申请号：US12567498

申请日：2009-09-25

Applicant: Thomas KLOSE ,  Thomas Grasshoff ,  Holger Conrad

Inventor： Thomas KLOSE ,  Thomas Grasshoff ,  Holger Conrad

IPC: G02B26/10 ,  B81B7/02 ,  B81B3/00 ,  B81B5/00 ,  G05B1/06 ,  H02N2/06 ,  H01L41/09 ,  G01L1/16

CPC classification number: B81B3/0062 ,  B81B2201/032 ,  Y10T74/20341

Abstract: A micromechanical element includes a movable functional element, a first retaining element, a second retaining element, a third retaining element, and a fourth retaining element. The first retaining element and the functional element are connected at a first junction, the second retaining element and the functional element are connected at a second junction, the third retaining element and the functional element are connected at a third junction, and the fourth retaining element and the functional element are connected at a fourth junction. In addition, the first retaining element and the second retaining element each include a piezoelectric driving element, the driving element of the first retaining element and the driving element of the second retaining element being configured to move the functional element in accordance with electric excitation.

Abstract translation: 微机械元件包括可移动功能元件，第一保持元件，第二保持元件，第三保持元件和第四保持元件。 第一保持元件和功能元件在第一接合处连接，第二保持元件和功能元件在第二接合处连接，第三保持元件和功能元件在第三接合处连接，并且第四保持元件 并且功能元件在第四连接处连接。 此外，第一保持元件和第二保持元件各自包括压电驱动元件，第一保持元件的驱动元件和第二保持元件的驱动元件构造成根据电激励来移动功能元件。

公开(公告)号：US20100090565A1

公开(公告)日：2010-04-15

申请号：US12578619

申请日：2009-10-14

Applicant: Harish Bhaskaran ,  Michel Despont

Inventor： Harish Bhaskaran ,  Michel Despont

IPC: H01L41/00

CPC classification number: B81B3/0021 ,  B81B2201/032 ,  B81B2203/0118 ,  F16K31/004 ,  G02B26/0858 ,  H01G5/18 ,  H01H2057/006 ,  H01L41/094 ,  Y10T137/2213

Abstract: A micro-electro-mechanical device including a substrate with a main surface, a piezoelectric actuator with a first side mechanically coupled to the substrate, an elastic member with a first end mechanically coupled to the substrate, and a transfer member mechanically coupling a second side of the piezoelectric actuator to the elastic member. The piezoelectric actuator is positioned lateral to an unfixed region of the elastic member. The method includes applying a voltage to a piezoelectric actuator altering the piezoelectric actuator's dimension vertical to the main surface of the substrate; and mechanically transferring the alteration to a coupling point of an elastic member.

Abstract translation: 一种微电子机械装置，包括具有主表面的基板，具有机械耦合到所述基板的第一侧的压电致动器，具有机械耦合到所述基板的第一端的弹性构件，以及将第二侧 的压电致动器。 压电致动器位于弹性构件的未固定区域的侧面。 该方法包括向压电致动器施加电压，该压电致动器改变垂直于衬底的主表面的压电致动器的尺寸; 并将所述改变机械地转移到弹性构件的联接点。

公开(公告)号：US07696669B2

公开(公告)日：2010-04-13

申请号：US12363284

申请日：2009-01-30

Applicant: Yuji Kudoh

Inventor： Yuji Kudoh

IPC: H01L41/08

CPC classification number: F03G7/005 ,  B81B3/0075 ,  B81B2201/032 ,  B81B2203/0118 ,  Y10S310/80 ,  Y10T29/42

Abstract: An electrically conductive polymer actuator having a laminated structure including: a solid electrolyte membrane constituted with a mixture of an ionic liquid, and an organic polymer that contains at least one or more of a vinylidene fluoride/hexafluoropropylene copolymer [P(VDF/HFP)], polyvinylidene fluoride (PVDF), a perfluorosulfonic acid/PTFE copolymer, polymethyl methacrylate (PMMA), polyethylene oxide (PEO) and polyacrylonitrile (PAN); and an electrically conductive polymer membrane constituted with a mixture of polystyrene sulfonic acid (PSS) and polyethylenedioxythiophene (PEDOT) on at least one face of the solid electrolyte membrane, characterized in that polyethylene glycol is included in the electrically conductive polymer membrane.

Abstract translation: 一种具有叠层结构的导电聚合物致动器，包括：由离子液体和含有至少一种或多种偏二氟乙烯/六氟丙烯共聚物[P（VDF / HFP）]的混合物的混合物构成的固体电解质膜， ，聚偏二氟乙烯（PVDF），全氟磺酸/ PTFE共聚物，聚甲基丙烯酸甲酯（PMMA），聚环氧乙烷（PEO）和聚丙烯腈（PAN）; 以及在所述固体电解质膜的至少一个面上由聚苯乙烯磺酸（PSS）和聚亚乙基二氧噻吩（PEDOT）的混合物构成的导电性聚合物膜，其特征在于，在所述导电性高分子膜中包含聚乙二醇。

公开(公告)号：US20100045144A1

公开(公告)日：2010-02-25

申请号：US12545524

申请日：2009-08-21

Applicant: Nobuyuki Koike ,  Takashi Tamura

Inventor： Nobuyuki Koike ,  Takashi Tamura

IPC: H01L41/04 ,  H01L41/22

CPC classification number: B81B3/0081 ,  B81B2201/0207 ,  B81B2201/0235 ,  B81B2201/032 ,  G01C19/56 ,  G01C25/00 ,  H01L41/0933 ,  H01L41/1132 ,  H01L41/1136 ,  H01L41/316 ,  Y10T29/42

Abstract: A piezoelectric device is provided and includes a substrate, a first electrode film, a piezoelectric film, and a second electrode film. The first electrode film is formed on the substrate. The piezoelectric film is represented by Pb1+X(ZrYTi1−Y)O3+X(0≦X≦0.3, 0≦Y≦0.55) and a peak intensity of a pyrochlore phase measured by an X-ray diffraction method is 10% or less with respect to a sum of peak intensities of a (100) plane orientation, a (001) plane orientation, a (110) plane orientation, a (101) plane orientation, and a (111) plane orientation of a perovskite phase, the piezoelectric film being formed on the first electrode film with a film thickness of 400 nm or more and 1,000 nm or less. The second electrode film is laminated on the piezoelectric film.

Abstract translation: 提供一种压电装置，包括基板，第一电极膜，压电膜和第二电极膜。 第一电极膜形成在基板上。 压电薄膜由Pb1 + X（ZrYTi1-Y）O3 + X（0＆nlE; X＆lt; NlE; 0.3,0＆nlE; Y＆nlE; 0.55）表示，通过X射线衍射法测得的烧绿石相的峰强度为10％ 相对于钙钛矿相的（100）面取向，（001）面取向，（110）面取向，（101）面取向和（111）面取向的峰值强度之和小， 所述压电膜形成在所述第一电极膜上，膜厚度为400nm以上且1000nm以下。 第二电极膜层叠在压电膜上。

公开(公告)号：US07629664B1

公开(公告)日：2009-12-08

申请号：US11149882

申请日：2005-06-10

Applicant: Robert Faye Elliott ,  Philip John Reiner

Inventor： Robert Faye Elliott ,  Philip John Reiner

IPC: H01L31/058

CPC classification number: H01H37/52 ,  B81B3/0078 ,  B81B2201/032 ,  B81B2203/056 ,  H01H2001/0047 ,  H01H2037/008 ,  H01H2300/032

Abstract: The Lateral-Moving Micromachined Thermal Bimorph provides the capability of achieving in-plane thermally-induced motion on a microchip, as opposed to the much more common out-of-plane, or vertical, motion seen in many devices. The present invention employs a novel fabrication process to allow the fabrication of a lateral bimorph in a fundamentally planar set of processes. In addition, the invention incorporates special design features that allow the bimorph to maintain material interfaces.

Abstract translation: 横向移动微机械加热双压电晶片提供了在微芯片上实现面内热感应运动的能力，而不是在许多器件中看到的更常见的平面外或垂直运动。 本发明采用新颖的制造工艺，以允许在基本平面的工艺集合中制造横向双压电晶片。 此外，本发明还包含允许双压电晶体保持材料界面的特殊设计特征。

公开(公告)号：US20080179698A1

公开(公告)日：2008-07-31

申请号：US12079726

申请日：2008-03-28

Applicant: David B. Rich ,  Steven M. Crist

Inventor： David B. Rich ,  Steven M. Crist

IPC: H01L29/08

CPC classification number: B81C1/00142 ,  B81B2201/0235 ,  B81B2201/032 ,  B81B2203/0109 ,  B81B2203/0118 ,  B81B2203/0315 ,  B81C2201/016 ,  G01P15/0802 ,  G01P15/123 ,  G01P2015/0828

Abstract: A piezoresistive sensing structure includes an assembly formed of a semiconductor material and including a cavity and a plurality of piezoresistive elements implanted into the assembly. The assembly includes a central mass coupled to a peripheral frame with a plurality of beams. Each beam is about 15 microns in width and includes one of the piezoresistive elements. The assembly may also include a first wafer having the cavity formed into a first side, and a second wafer with a plurality of beams formed in a first side. The second side of the second wafer is bonded to the first side of the first wafer.

Abstract translation: 压阻感测结构包括由半导体材料形成并包括腔体和多个压电元件的组件，所述压电元件植入组件中。 组件包括耦合到具有多个梁的外围框架的中心质量。 每个光束的宽度约为15微米，并且包括压阻元件之一。 组件还可以包括具有形成为第一侧的空腔的第一晶片和在第一侧中形成有多个梁的第二晶片。 第二晶片的第二面被结合到第一晶片的第一侧。