公开(公告)号：KR1020110016300A

公开(公告)日：2011-02-17

申请号：KR1020090073933

申请日：2009-08-11

Applicant: (주)엠투엔

Inventor： 채종현

IPC: H01L21/66

Abstract: PURPOSE: A wafer assemble body including a sub block body is provided to improve the productivity of a probe card substrate assembly by manufacturing a plurality of sub block bodies from one wafer assembly body through etching process on the wafer. CONSTITUTION: A plurality of sub block holes(110) is formed on a carrier substrate(100). The sub block body hole is arranged on the carrier substrate according to the pad alignment of the wafer. A sub block(200) is inserted into the carrier substrate by using the alignment frame. A plurality of probes(300) is inserted and fixed in the sub block body.

Abstract translation: 目的：提供包括子块体的晶片组装体，以通过在晶片上的蚀刻工艺从一个晶片组件主体制造多个子块体来提高探针卡基片组件的生产率。 构成：在载体基板（100）上形成多个子块孔（110）。 根据晶片的焊盘对准，将子块体体孔设置在载体基板上。 通过使用对准框将子块（200）插入到载体基板中。 多个探针（300）插入并固定在子块体中。

公开(公告)号：KR1020090050264A

公开(公告)日：2009-05-20

申请号：KR1020070116614

申请日：2007-11-15

Applicant: (주)엠투엔

Inventor： 채종현 ,  이학주

IPC: H01L21/66 ,  G01R1/073

CPC classification number: G01R1/07307 ,  G01R31/2601

Abstract: 본 발명은 프로브 카드 조립체에 관한 것으로서, 프로브 기판 소자를 탐침 검사하기 위한 프로브 카드 조립체에 있어서, 복수 개의 단자가 형성된 상부면 및 하부면을 포함하는 공간 변환기, 상기 공간 변환기의 하부면 상에 배치되는 인쇄 회로 기판, 2 개 이상의 프로브 기판을 포함하고, 상기 공간 변환기의 상부면 상에 배치되는 프로브 기판 조립체 및 인접하는 상기 프로브 기판의 사이에 삽입되어 상기 2 개 이상의 프로브 기판의 평탄도를 제어하는 볼팅 수단을 포함하는 프로브 카드 조립에 관한 것이다.
프로브 카드 조립체, 프로브 기판 조립체, 공간 변환기, 볼팅 수단

公开(公告)号：KR1020090006431A

公开(公告)日：2009-01-15

申请号：KR1020070069769

申请日：2007-07-11

Applicant: (주)엠투엔

Inventor： 채종현

IPC: H01L21/66 ,  G01R1/073

CPC classification number: G01R1/07307 ,  G01R31/2601

Abstract: The prove card is provided to improve the efficiency by using the planarization means for the probe card including the substrate assembly mounting probe. A plurality of probes(401) is arranged in the wafer contact surface of the probe substrate(402) with the regular interval. The probe substrate is positioned in the place which the probe substrate contacts the pad on the wafer which is the test object. In the lower surface, the probe contacting with the pad is mounted. The space transformer(404) is connected to the probe substrate in the lower surface and is connected to the interposer(416) in the upper surface. The combination(406) is mounted in the hole formed in the probe substrate and space transformer.

Abstract translation: 提供了证明卡，以通过使用包括基板组件安装探针的探针卡的平面化装置来提高效率。 多个探针（401）以规则的间隔布置在探针基板（402）的晶片接触表面中。 探针基板位于探针基板接触作为测试对象的晶片上的焊盘的位置。 在下表面安装与垫接触的探针。 空间变换器（404）在下表面连接到探针基板，并且连接到上表面中的插入件（416）。 组合（406）安装在形成在探针基板和空间变换器中的孔中。

公开(公告)号：KR1020090006430A

公开(公告)日：2009-01-15

申请号：KR1020070069768

申请日：2007-07-11

Applicant: (주)엠투엔

Inventor： 채종현

IPC: G01R1/073

CPC classification number: G01R1/07307 ,  G01R3/00 ,  G01R31/2601 ,  H01L22/30

Abstract: A board assembly of a probe card and a probe card having the same are provided to prevent the deformation of a probe board by making the probe board mounted with a probe and a space transformer in close contact entirely. A probe board(230) has a plurality of probes. A space transformer(220) has a plurality of terminals at upper and lower surfaces, wherein the terminals on the lower surface are electrically connected to the probes and the terminals on the upper surface are disposed at predetermined interval different from that of the terminals on the lower surface. At least one or more coupling elements(210) are mounted to the probe board and the space transformer for pressing the probe board and the space transformer to each other to be in close contact.

Abstract translation: 提供探针卡和具有该探针卡的探针卡的电路板组件，以通过使安装有探针和空间变换器的探针板完全紧密接触来防止探针板的变形。 探针板（230）具有多个探针。 空间变换器（220）在上表面和下表面具有多个端子，其中下表面上的端子电连接到探针，并且上表面上的端子以与端子上的端子的预定间隔不同 下表面。 至少一个或多个耦合元件（210）安装到探针板和空间变换器，用于将探针板和空间变压器彼此紧密接触。

公开(公告)号：KR100872066B1

公开(公告)日：2008-12-05

申请号：KR1020070059450

申请日：2007-06-18

Applicant: (주)엠투엔

Inventor： 채종현

IPC: G01R1/073

CPC classification number: G01R1/07307 ,  G01R1/07378 ,  G01R3/00 ,  G01R31/2601 ,  H01L22/30

Abstract: The probe substrate assembly is provided to prevent misalignment when connecting divided silicon substrates by the unevenness combination method. The probe substrate assembly including a plurality of segments comprises a plurality of segments, the sorter(400) unevenness-combinated with the segment. The sorter has the first concavo-convex region(410) and the second concavo-convex region(420) formed with the first concavo-convex region which has a different shape from the first concavo-convex region.

Abstract translation: 提供探针基板组件以防止通过不均匀组合方法连接分割的硅衬底时的未对准。 包括多个段的探针衬底组件包括多个段，分段器（400）不均匀 - 与段相结合。 分拣机具有形成有与第一凹凸区域不同的形状的第一凹凸区域的第一凹凸区域（410）和第二凹凸区域（420）。

公开(公告)号：KR100872065B1

公开(公告)日：2008-12-05

申请号：KR1020070059533

申请日：2007-06-18

Applicant: (주)엠투엔

Inventor： 채종현

IPC: G01R1/067 ,  G01R1/073

CPC classification number: G01R1/07307 ,  G01R1/06733 ,  G01R3/00 ,  G01R31/2601 ,  G01R31/2886

Abstract: The probe is provided to prevent the tilting of the probe tip and maintain the contact force between the probe tip and the test material and to reduce the vertical height to the probe tip from the base part of probe. The probe for the probe card comprises the base part(111), the probe tip(113) contacting the test material, the lateral support(112) adding the contact force of the test material and probe tip, the vertical support portion(115) connecting the base part and the lateral support, the tilting prevention unit(114) supporting the probe tip, the spacing support(116) connecting the tilting prevention unit and base part. The lateral part and base part of the probe tip are connected as 'L' shape.

Abstract translation: 提供探针以防止探针尖端的倾斜并且保持探针尖端和测试材料之间的接触力，并且减小探针尖端与探头基部的垂直高度。 用于探针卡的探针包括基部（111），与测试材料接触的探针尖端（113），增加测试材料和探针尖端的接触力的侧向支撑件（112），垂直支撑部分（115） 连接基部和侧支撑件，支撑探针头的倾斜防止单元（114），连接倾斜防止单元和基部的间隔支撑件（116）。 探针尖端的侧面部分和底部部分以“L”形连接。

公开(公告)号：KR1020080105346A

公开(公告)日：2008-12-04

申请号：KR1020070052828

申请日：2007-05-30

Applicant: (주)엠투엔

Inventor： 홍기필 ,  채종현 ,  이학주

IPC: H01L21/66

CPC classification number: G01R1/0491 ,  G01R1/07378 ,  G01R31/2601

Abstract: A probe substrate for the probe card and the probe card and a manufacturing method thereof are provided to mount the probe easily without attaching the tip to the space transformer. A probe card comprises the printed circuit board(500), the space transformer(200), and a plurality of probes(400). The probe substrate for the probe card is arranged between the space transformer and plurality of probes in order to make the electric connection. The probe substrate comprises the silicon substrate(100), and a plurality of conductive sockets. The conductive socket is formed through the silicon substrate. The conductive socket comprises the base part welded to the pad of the space transformer and the opening in which the probe is mounted.

Abstract translation: 提供了用于探针卡和探针卡的探针基板及其制造方法，以容易地安装探针而不将尖端附接到空间变压器。 探针卡包括印刷电路板（500），空间变换器（200）和多个探针（400）。 用于探针卡的探针衬底布置在空间变换器和多个探针之间，以进行电连接。 探针衬底包括硅衬底（100）和多个导电插座。 导电插座通过硅衬底形成。 导电插座包括焊接到空间变压器的焊盘的基部和安装探头的开口。

公开(公告)号：KR100851392B1

公开(公告)日：2008-08-11

申请号：KR1020070026000

申请日：2007-03-16

Applicant: (주)엠투엔

Inventor： 채종현

IPC: H01L21/66

CPC classification number: G01R1/07342 ,  G01R1/07364 ,  G01R31/2601

Abstract: A probe card having a planarization unit is provided to remove interference between a first planarization control unit and a second planarization control unit by coupling the first and second planarization control units to a probe substrate. A probe substrate(102) is electrically connected to a printed circuit board. The probe substrate has plural probes(101). A first planarization control unit(110) applies power to a central region of the probe substrate to control planarization of the probe substrate. A second planarization control unit(115) applies power to an external circumference region of the probe substrate to control the planarization of the probe substrate. A floating mount unit(114) is mounted on the probe substrate. The floating mount unit is arranged and separated from the printed circuit board. The first planarization control unit is arranged on a central region of the floating mount unit. A space deformer(103) is arranged between the printed circuit board and the probe substrate.

Abstract translation: 提供具有平坦化单元的探针卡，以通过将第一和第二平坦化控制单元耦合到探针基板来消除第一平坦化控制单元和第二平坦化控制单元之间的干扰。 探针基板（102）电连接到印刷电路板。 探针基板具有多个探针（101）。 第一平面化控制单元（110）向探针基板的中心区域施加功率以控制探针基板的平坦化。 第二平坦化控制单元（115）向探针基板的外周区域施加电力以控制探针基板的平坦化。 浮动安装单元（114）安装在探针基板上。 浮动安装单元与印刷电路板布置和分离。 第一平坦化控制单元布置在浮动安装单元的中心区域上。 空间变形器（103）布置在印刷电路板和探针基板之间。

公开(公告)号：KR1020070113782A

公开(公告)日：2007-11-29

申请号：KR1020060047513

申请日：2006-05-26

Applicant: (주)엠투엔

Inventor： 채종현

IPC: G01R1/073

CPC classification number: G01R1/07307 ,  G01R31/2601 ,  H01L22/30

Abstract: A probe of a probe card is provided to facilitate a maintenance of the probe by enabling a user to easily replace a connection pin, which is contaminated or damaged, which a new connection pin. A probe of a probe card includes a fixed connector(110), a contact probe(120) and a separation guide member(130). The fixed connector is inserted into a contact hole of the probe card. A connection pin is formed at one end of the fixed connector. The contact probe includes a base portion, which is integrated with the fixed connector. A contact tip is formed on the base portion, such that the contact probe is contacted with a DUT(Device Under Test). The separation guide member is formed on a connection portion between the contact probe and the fixed connector. When the contact probe is pulled from the fixed connector, the contact probe is separated from the fixed connector with respect to the separation guide member.

Abstract translation: 提供了探针卡的探针，以便通过使用户能够容易地更换被污染或损坏的连接销（这是新的连接销）来维护探针。 探针卡的探针包括固定连接器（110），接触探针（120）和分离引导构件（130）。 固定连接器插入探针卡的接触孔中。 连接销形成在固定连接器的一端。 接触探针包括与固定连接器集成的基部。 接触尖端形成在基部上，使得接触探针与DUT（被测设备）接触。 分离引导构件形成在接触探针和固定连接器之间的连接部分上。 当从固定连接器拉动接触探针时，接触探针相对于分离引导构件与固定连接器分离。

公开(公告)号：KR100753555B1

公开(公告)日：2007-08-31

申请号：KR1020060048019

申请日：2006-05-29

Applicant: (주)엠투엔

Inventor： 채종현

IPC: G01R1/073

Abstract: A probe of a probe card is provided to prevent damage generated in applying excessive load to an object by a contact tip and to test the object by holding the contact tip within a contact range of the object although the contact tip presses the object. A probe(100) of a probe card is composed of a base unit(110) placed on the probe card by inserting one side into a contact hole of the probe card in order to connect with an external substrate; an elastic support unit(120) protruded from the base unit; a contact tip(130) integrally formed at the elastic support unit, elastically supported, and contacted to an object; and a tilting prevention unit(140) for providing repulsive force to restrict tilting of the contact tip when the contact tip is pressed by the object.

Abstract translation: 提供探针卡的探针，以防止在由接触尖端向物体施加过大的负载时产生的损伤，并且通过将接触尖端保持在物体的接触范围内来测试物体，尽管接触尖端按压物体。 探针卡的探针（100）包括：基座单元（110），其通过将一侧插入到探针卡的接触孔中以便与外部基板连接而放置在探针卡上; 弹性支撑单元（120），其从基座单元突出; 接触尖端（130），其整体地形成在所述弹性支撑单元处，被弹性地支撑并且接触到物体; 以及倾斜防止单元（140），用于当接触尖端被物体按压时提供排斥力以限制接触尖端的倾斜。