公开(公告)号：BR112013023017A2

公开(公告)日：2018-07-03

申请号：BR112013023017

申请日：2012-03-20

Applicant: DELFMEMS

Inventor： CHRISTOPHE PAVAGEAU

IPC: H01P1/12 ,  H01H59/00

公开(公告)号：ZA201305325B

公开(公告)日：2014-12-23

申请号：ZA201305325

申请日：2013-07-15

Applicant: DELFMEMS

Inventor： PAVAGEAU CHRISTOPHE

IPC: H01H20060101 ,  H01P20060101

Abstract: The RF MEMS crosspoint switch (1) comprising a first transmission (10) line and a second transmission line (11) that crosses the first transmission line ; the first transmission line (10) comprises two spaced-apart transmission line portions (100, 101), and a switch element (12) that permanently electrically connects the said two spaced-apart transmission line portions (100, 101) ; the second transmission line (11) crosses the first transmission line (10) between the two spaced-apart transmission line portions (100, 101); the RF MEMS crosspoint switch (1) further comprises actuation means (121) for actuating the switch element (12) at least between a first position, in which the switch element (12) is electrically connecting the said two spaced-apart transmission line portions (100, 101) of the first transmission line (10) and the first (10) and second (11) transmission lines are electrically disconnected, and a second position, in which the switch element (12) is electrically connecting the said two spaced-apart transmission line portions (100, 101) of the first transmission line (10) and is also electrically connecting the two transmission lines (10, 11) together.

公开(公告)号：HRP20130938T1

公开(公告)日：2013-11-08

申请号：HRP20130938

申请日：2013-10-07

Applicant: DELFMEMS

Inventor： PAVAGEAU CHRISTOPHE

IPC: H01H59/00 ,  H01P1/12

公开(公告)号：SG193261A1

公开(公告)日：2013-10-30

申请号：SG2013065966

申请日：2012-03-20

Applicant: DELFMEMS

Inventor： PAVAGEAU CHRISTOPHE

Abstract: The RF MEMS crosspoint switch (1) comprising a first transmission (10) line and a second transmission line (11) that crosses the first transmission line; the first transmission line (10) comprises two spaced-apart transmission line portions (100, 101), and a switch element (12) that permanently electrically connects the said two spaced-apart transmission line portions (100, 101); the second transmission line (11) crosses the first transmission line (10) between the two spaced-apart transmission line portions (100, 101); the RF MEMS crosspoint switch (1) further comprises actuation means (121) for actuating the switch element (12) at least between a first position, in which the switch element (12) is electrically connecting the said two spaced-apart transmission line portions (100, 101) of the first transmission line (10) and the first (10) and second (11) transmission lines are electrically disconnected, and a second position, in which the switch element (12) is electrically connecting the said two spaced-apart transmission line portions (100, 101) of the first transmission line (10) and is also electrically connecting the two transmission lines (10, 11) together.

公开(公告)号：UA102728C2

公开(公告)日：2013-08-12

申请号：UAA201111172

申请日：2010-03-18

Applicant: DELFMEMS

Inventor： SEGUENI KARIM ,  LORPHELIN NICOLAS

IPC: H01H59/00

Abstract: МЭМС (MEMS)-структура, содержащаягибкуюмембрану (6), котораясостоитизосновнойпродольнойоси (6а), котораяопределяетпродольноенаправление (X), поменьшеймере, однуопору (3, 3 ') подгибкоймембраной (6), электрическийопускающийактивационныймеханизм (7), способныйсгибатьгибкуюмембрану (6) внижнеефорсированноеположение, электрическийподнимающийактивационныймеханизм (8), способныйсгибатьмембрану (6) вверхнеефорсированноеположение. Электрическийопускающийактивационныймеханизм (7) илиэлектрическийподнимающийактивационныймеханизм (8) содержатактивационнуюобласть (7сили 8с), котораяпроходитподчастьюмембраны (6) испособнасоздаватьсилынатяжения, которыевоздействуютнамембрану (6) одновременнопообестороныотуказанной, покрайнеймере, однойопоры (3) впродольномнаправлении (X).

公开(公告)号：AU2012234514A1

公开(公告)日：2013-07-25

申请号：AU2012234514

申请日：2012-03-20

Applicant: DELFMEMS

Inventor： PAVAGEAU CHRISTOPHE

IPC: H01H59/00 ,  H01P1/12

Abstract: The RF MEMS crosspoint switch (1) comprising a first transmission (10) line and a second transmission line (11) that crosses the first transmission line; the first transmission line (10) comprises two spaced-apart transmission line portions (100, 101), and a switch element (12) that permanently electrically connects the said two spaced-apart transmission line portions (100, 101); the second transmission line (11) crosses the first transmission line (10) between the two spaced-apart transmission line portions (100, 101); the RF MEMS crosspoint switch (1) further comprises actuation means (121) for actuating the switch element (12) at least between a first position, in which the switch element (12) is electrically connecting the said two spaced-apart transmission line portions (100, 101) of the first transmission line (10) and the first (10) and second (11) transmission lines are electrically disconnected, and a second position, in which the switch element (12) is electrically connecting the said two spaced-apart transmission line portions (100, 101) of the first transmission line (10) and is also electrically connecting the two transmission lines (10, 11) together.

公开(公告)号：DK2230679T3

公开(公告)日：2012-07-30

申请号：DK09370007

申请日：2009-03-20

Applicant: DELFMEMS

Inventor： SEGUENI KARIM ,  LORPHELIN NICOLAS

IPC: H01H59/00

公开(公告)号：MX2007011641A

公开(公告)日：2008-01-18

申请号：MX2007011641

申请日：2006-03-07

Applicant: DELFMEMS

Inventor： MILLET OLIVIER

IPC: H01H1/00 ,  H01H59/00

Abstract: El conmutador RF MEMS comprende medios de conmutacion micromecanica que estan portados por un sustrato (1) y que pueden activarse entre dos posiciones: una primera posicion (estado desactivado/figura 1) y una segunda posicion (estado activado), y unos medios de activacion para activar la posicion de los medios de conmutacion; los medios de conmutacion micromecanica comprenden una membrana flexible (6) la cual esta sostenida libremente por los medios de soporte (3), la cual puede doblarse bajo la accion de los medios de activacion (7) y la cual puede deslizarse libremente con relacion a los medios de soporte (3) durante su movimiento de doblez.

公开(公告)号：EP3038125A1

公开(公告)日：2016-06-29

申请号：EP14307127.2

申请日：2014-12-22

Applicant: DelfMEMS SAS

Inventor： Robin, Renaud ,  Lorphelin, Nicolas ,  Segueni, Karim

IPC: H01H59/00

CPC classification number: H01H59/0009 ,  B81B3/0086 ,  B81B2201/018 ,  B81B2203/0127 ,  B81C1/00158 ,  B81C2201/0188 ,  H01H49/00 ,  H01H2059/0027 ,  H01H2059/0036 ,  H01H2227/004

Abstract: The present invention relates to a method of manufacturing an MEMS device, in particular, an MEMS switch, comprising the steps of forming posts and a conduction (transmission) line over a substrate and forming a membrane over the posts and the conduction line comprising forming a first membrane layer and a second membrane layer over the first membrane layer in a region over one of the posts and/or a region over the conduction line such that the first membrane layer has a region where the second membrane layer is not formed adjacent to the region where the second membrane layer is formed. Moreover, it is provided an MEMS device, in particular, an MEMS switch, comprising posts and a conduction (transmission) line formed over a substrate and a membrane over the posts and the conduction line. The membrane comprises a first membrane layer and a second membrane layer formed over the first membrane layer in a region over one of the posts and/or a region over the conduction line such that the first membrane layer has a region where the second membrane layer is not formed adjacent to the region where the second membrane layer is formed.

Abstract translation: 本发明涉及一种制造MEMS器件，特别是MEMS开关的方法，包括以下步骤：在衬底上形成柱和导电（透射）线，并在柱上形成膜，导线包括形成 第一膜层和第二膜层之上的第一膜层和第二膜层上的第一膜层和第二膜层之间的区域，使得第一膜层具有不与第二膜层相邻的区域 形成第二膜层的区域。 此外，它提供了一种MEMS器件，特别是MEMS开关，其包括柱和形成在衬底上的导电（透射）线和在柱和导电线上的膜。 所述膜包括第一膜层和第二膜层，所述第一膜层和所述第二膜层形成在所述第一膜上方的区域中，并且在所述导电线上方的区域和/或所述导电线上的区域中形成在所述第一膜层上，使得所述第一膜层具有第二膜层 不与形成有第二膜层的区域相邻地形成。

公开(公告)号：EP2230679B1

公开(公告)日：2012-05-16

申请号：EP09370007.8

申请日：2009-03-20

Applicant: DELFMEMS

Inventor： Segueni, Karim ,  Lorphelin, Nicolas

IPC: H01H59/00

CPC classification number: H01H59/0009 ,  B81B5/00 ,  B81B2201/018