Bidirectional field emission devices, storage structures and fabrication
methods
    31.
    发明授权
    Bidirectional field emission devices, storage structures and fabrication methods 失效
    双向场发射装置,存储结构和制造方法

    公开(公告)号:US5530262A

    公开(公告)日:1996-06-25

    申请号:US541763

    申请日:1995-05-25

    CPC classification number: H01L27/10852 H01J9/025 H01L27/108 H01J2201/319

    Abstract: Bidirectional field emission devices (FEDs) and associated fabrication methods are described. A basic device includes a first unitary field emission structure and an adjacently positioned, second unitary field emission structure. The first unitary structure has a first cathode portion and a first anode portion, while the second unitary structure has a second cathode portion and a second anode portion. The structures are positioned such that the first cathode portion opposes the second anode portion so that electrons may flow by field emission thereto and the second cathode portion opposes the first anode portion, again so that electrons may flow by field emission thereto. A control mechanism defines whether the device is active, while biasing voltages applied to the first and second unitary structures define the direction of current flow. Multiple applications exist for such a bidirectional FED. For example, an FED DRAM cell is discussed, as are methods for fabricating the various devices.

    Abstract translation: 描述了双向场致发射器件(FED)和相关的制造方法。 基本装置包括第一单一场发射结构和相邻定位的第二单一场致发射结构。 第一单一结构具有第一阴极部分和第一阳极部分,而第二整体结构具有第二阴极部分和第二阳极部分。 结构被定位成使得第一阴极部分与第二阳极部分相对,使得电子可以通过场发射流动,并且第二阴极部分与第一阳极部分相反,使得电子可以通过场发射而流动。 控制机构定义设备是否有效,而施加到第一和第二单一结构的偏置电压限定电流的方向。 存在这种双向FED的多种应用。 例如,讨论了FED DRAM单元,以及用于制造各种器件的方法。

    Lateral field emission devices
    32.
    发明授权
    Lateral field emission devices 失效
    侧面场发射装置

    公开(公告)号:US5233263A

    公开(公告)日:1993-08-03

    申请号:US722768

    申请日:1991-06-27

    CPC classification number: H01J9/025 H01J1/3042

    Abstract: Lateral cathode field emission devices and methods of fabrication are set forth. Conventional integrated circuit fabrication techniques are advantageously used to produce the lateral FEDs. Cathode tips on the order of several hundred angstroms are consistently obtained as well as exact spacing of the cathode to gate and cathode to anode. Various cathode and device configurations are described, including a circular field emission device. A single integrated structure having multiple cathodes and multiple gates is possible to perform various logic operations and/or enhance current output from the device. Multiple field effect devices, with cathodes disposed parallel or perpendicular to the substrate, are integrally coupled through a sharing of one or more metallization layers definitive of the elements of the devices. Significant advantages in current density and circuit layout can be obtained. Methods for fabricating the various devices are also explained.

    Abstract translation: 阐述了侧向阴极场发射器件及其制造方法。 传统的集成电路制造技术有利地用于产生横向FED。 一贯获得数百埃数量级的阴极尖端,以及阴极与栅极和阴极与阳极的精确间距。 描述了各种阴极和器件配置,包括圆形场致发射器件。 具有多个阴极和多个栅极的单个集成结构可以执行各种逻辑操作和/或增强来自该器件的电流输出。 具有平行或垂直于衬底设置的阴极的多个场效应器件通过共享设备元件的一个或多个金属化层而被一体地耦合。 可以获得电流密度和电路布局的显着优点。 还说明了制造各种装置的方法。

    PERMITTIVITY-BASED MATERIAL SENSOR
    33.
    发明申请
    PERMITTIVITY-BASED MATERIAL SENSOR 审中-公开
    基于绝缘材料的传感器

    公开(公告)号:US20080262740A1

    公开(公告)日:2008-10-23

    申请号:US11738214

    申请日:2007-04-20

    Abstract: A system for sensing a presence and/or a concentration of a target substance in a fluid has a sensor and a processor coupled to the sensor. The sensor has a test probe having at least first and second test electrodes, wherein at least the first test electrode is functionalized to create a permittivity change in the area between the first and second test electrodes in the presence of the target substance. The sensor also has a reference probe having at least first and second reference electrodes. The processor is configured to determine at least one permittivity-based metric for the test probe; determine the at least one permittivity-based metric for the reference probe; and determine the presence and/or the concentration of the target substance based on the at least one permittivity-based metric for the test probe and the at least one permittivity-based metric for the reference probe. Related methods are disclosed.

    Abstract translation: 用于感测流体中目标物质的存在和/或浓度的系统具有耦合到传感器的传感器和处理器。 传感器具有至少具有第一和第二测试电极的测试探针,其中至少第一测试电极在目标物质存在下在第一和第二测试电极之间的面积上产生介电常数变化。 传感器还具有至少具有第一和第二参考电极的参考探针。 所述处理器被配置为确定所述测试探针的至少一个介电常数度量; 确定参考探针的至少一个介电常数度量; 并且基于所述测试探针的所述至少一个基于介电常数的量度和所述参考探针的所述至少一个介电常数度量来确定所述目标物质的存在和/或浓度。 公开了相关方法。

    Method for non-damaging charge injection and system thereof
    34.
    发明授权
    Method for non-damaging charge injection and system thereof 失效
    无损电荷注入方法及其系统

    公开(公告)号:US07408236B2

    公开(公告)日:2008-08-05

    申请号:US11712724

    申请日:2007-03-01

    CPC classification number: H01L21/28176 H01J2237/316

    Abstract: A method and system for injecting charge includes providing a first material on a second material and injecting charge into the first material to trap charge at an interface between the first and second materials. The thickness of the first material is greater than a penetration depth of the injected charge in the first material.

    Abstract translation: 用于注入电荷的方法和系统包括在第二材料上提供第一材料并将电荷注入到第一材料中以在第一和第二材料之间的界面处收集电荷。 第一材料的厚度大于第一材料中注入的电荷的穿透深度。

    Motion based, electrostatic power source and methods thereof
    35.
    发明授权
    Motion based, electrostatic power source and methods thereof 失效
    基于运动的静电电源及其方法

    公开(公告)号:US07378775B2

    公开(公告)日:2008-05-27

    申请号:US10706016

    申请日:2003-11-12

    CPC classification number: H02N1/08

    Abstract: A power system includes a housing with a chamber, a member with a stored static electrical charge, and a pair of electrodes. The member is connected to the housing and extends at least partially across the chamber. The electrodes are connected to the housing, are spaced from and on substantially opposing sides of the member from each other, and are at least partially in alignment with each other. The member is movable with respect to the pair of electrodes or one of the pair of electrodes is movable with respect to the member.

    Abstract translation: 电力系统包括具有室的壳体,具有存储的静电荷的构件和一对电极。 该构件连接到壳体并且至少部分地延伸穿过该腔室。 电极连接到壳体,与构件彼此间隔开并基本相对的两侧,并且至少部分地彼此对准。 该构件可相对于一对电极移动,或者该对电极中的一个可相对于构件移动。

    Electrostatic pressure transducer and a method thereof
    36.
    发明授权
    Electrostatic pressure transducer and a method thereof 失效
    静电压力传感器及其方法

    公开(公告)号:US06688179B2

    公开(公告)日:2004-02-10

    申请号:US10280264

    申请日:2002-10-24

    Abstract: A pressure transducer system includes a housing with a chamber, a member with a stored electrical charge, and a pair of electrodes that are at least partially in alignment with each other. At least a portion of the chamber is at a reference pressure. The member is connected to the housing and extends across at least a portion of the chamber. Each of the pair of electrodes is connected to the housing and is spaced from and on substantially opposing sides of the member. The member is movable with respect to the pair of electrodes or one of the pair of electrodes is movable with respect to the member in response to a monitored pressure.

    Abstract translation: 压力传感器系统包括具有室的壳体,具有存储的电荷的构件和至少部分地彼此对准的一对电极。 腔室的至少一部分处于参考压力。 该构件连接到壳体并且延伸穿过腔室的至少一部分。 一对电极中的每一个连接到壳体并与构件的基本上相对的两侧间隔开。 该构件相对于一对电极是可移动的,或者该对电极中的一个可响应于所监视的压力而相对于构件移动。

    Micro-electro-mechanical varactor and a method of making and using thereof

    公开(公告)号:US06597560B2

    公开(公告)日:2003-07-22

    申请号:US10096398

    申请日:2002-03-12

    CPC classification number: H01G5/16

    Abstract: A varactor includes a first capacitor plate, a second capacitor plate, at least one fixed charge holder, and a control electrode. The second capacitor plate is spaced from and movable towards and away from the first capacitor plate. At least one fixed charge holder with an imbedded charge is on at least a portion of the second capacitor plate. The control electrode is spaced from the second capacitor plate. Applying a bias to the control electrode moves the second capacitor plate towards or away from the first capacitor plate depending on the polarity of the applied bias.

    Fabrication process for self-gettering electron field emitter
    39.
    发明授权
    Fabrication process for self-gettering electron field emitter 失效
    自吸电子场发射器的制作工艺

    公开(公告)号:US6017257A

    公开(公告)日:2000-01-25

    申请号:US990887

    申请日:1997-12-15

    Inventor: Michael D Potter

    CPC classification number: H01J29/94 H01J2201/30423 H01J2329/00

    Abstract: A self-gettering electron field emitter has a first portion formed of a low-work-function material for emitting electrons, and it has an integral second portion that acts both as a low-resistance electrical conductor and as a gettering surface. The self-gettering emitter is formed by disposing a thin film of the low-work-function material parallel to a substrate and by disposing a thin film of the low-resistance gettering material parallel to the substrate and in contact with the thin film of the low-work-function material. The self-gettering emitter is particularly suitable for use in lateral field emission devices. The preferred emitter structure has a tapered edge, with a salient portion of the low-work-function material extending a small distance beyond an edge of the gettering and low resistance material. A fabrication process specially adapted for in situ formation of the self-gettering electron field emitters while fabricating microelectronic field emission devices is also disclosed.

    Abstract translation: 自吸电子场发射器具有由用于发射电子的低功函数材料形成的第一部分,并且其具有作为低电阻电导体和吸气表面的整体第二部分。 自吸收发射体通过将低功函数材料的薄膜平行于衬底设置并且将低电阻吸气材料的薄膜平行于衬底设置并与薄膜接触而形成 低功能材料。 自吸式发射器特别适用于横向场发射装置。 优选的发射极结构具有锥形边缘,低功函数材料的显着部分在吸气和低电阻材料的边缘之外延伸一小段距离。 还公开了专门用于在制造微电子场发射器件的同时形成自吸电子场发射体的制造工艺。

    Fabrication process for electron field-emission display
    40.
    发明授权
    Fabrication process for electron field-emission display 失效
    电子场发射显示的制作工艺

    公开(公告)号:US6015326A

    公开(公告)日:2000-01-18

    申请号:US900915

    申请日:1997-07-28

    Inventor: Michael D Potter

    Abstract: An electron field-emission display comprises one or more display cell structures, each having a field-emission cathode and an anode comprising at least one of several cathodoluminescent phosphors disclosed which are stimulable by electrons of very low energy. The display cell structures may also have gate elements for controlling electron current flowing from cathode to anode when suitable electrical bias voltages are applied. A preferred fabrication process integrates an etch stop with an in situ phosphor formation process. The etch stop precisely defines the depth of an opening in the display cell structure. Metal oxides or mixed-metal oxides of zinc, copper, tin, or indium are heated in the presence of a refractory metal such as titanium, zirconium, hafnium, vanadium, niobium, tantalum, chromium, molybdenum, tungsten, or combinations thereof to make phosphors of various chromaticities, which may also include dopants, such as a lanthanide rare earth element, manganese, chromium, or stoichiometrically excess zinc, copper, tin, or indium. A blue-light-emitting phosphor embodiment is based on ZnO treated with refractory metals, e.g. Ta, to prepare cathodoluminescent phosphor compositions, e.g. Ta.sub.2 Zn.sub.3 O.sub.8. Selective arrangement of various color phosphors may be made by selective deposition of suitable dopants. The selective deposition may be done, e.g. by chemical vapor deposition with appropriate masking, or by selective ion implantation.

    Abstract translation: 电子场致发射显示器包括一个或多个显示单元结构,每个显示单元结构都具有场发射阴极和阳极,其包括可被非常低能量的电子刺激的几种阴极发光荧光体中的至少一种。 当施加适当的电偏压时,显示单元结构还可以具有用于控制从阴极流向阳极的电子电流的栅极元件。 优选的制造工艺将蚀刻停止与原位磷光体形成工艺相结合。 蚀刻停止件精确地限定显示单元结构中的开口的深度。 金属氧化物或锌,铜,锡或铟的混合金属氧化物在难熔金属如钛,锆,铪,钒,铌,钽,铬,钼,钨或其组合的存在下加热, 各种色度的荧光体,其还可以包括掺杂剂,例如镧系元素稀土元素,锰,铬或化学计量过量的锌,铜,锡或铟。 蓝色发光荧光体实施方案基于用难熔金属处理的ZnO,例如, Ta,以制备阴极发光荧光体组合物,例如 Ta2Zn3O8。 可以通过选择性沉积合适的掺杂剂来进行各种彩色荧光体的选择性布置。 可以进行选择性沉积,例如 通过适当掩蔽的化学气相沉积,或通过选择性离子注入。

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