公开(公告)号：AU6689896A

公开(公告)日：1997-03-27

申请号：AU6689896

申请日：1996-08-05

Applicant: PHASE METRICS

Inventor： LACEY CHRISTOPHER A ,  WOMACK KENNETH H

IPC: G01N21/21

Abstract: An apparatus and method for measuring the space between a transparent member such as a disk, and reflective member such as a slider, by detecting a change of polarization of a reflected light beam. The apparatus includes a light source that emits a light beam. The light beam is circularly polarized and directed onto the disk and reflected off of the interface between the disk and the slider. The reflected light beam is split into four separately polarized beams by a beam splitter/polarizer assembly. The four light beams have varying intensities that are measured by photodetectors. Stokes parameters are computed from electrical signals that are generated by the photodetectors. The Stokes parameters correlate to the change in polarization of the reflected light beam. Ellipsometric parameters delta and psi are computed from the Stokes parameters. The thickness of the space and the complex index of refraction (n and K) of the slider are computed from the delta and psi parameters, typically by computing two separate sets of ellipsometric parameters at two different spacing thicknesses.

公开(公告)号：AU2895892A

公开(公告)日：1993-05-21

申请号：AU2895892

申请日：1992-10-19

Applicant: PHASE METRICS

Inventor： CHRISTOPHER LACEY

IPC: G01B9/02 ,  G01B11/14 ,  G11B5/54 ,  G11B21/12 ,  G11B21/21 ,  G11B33/10

Abstract: Light is focused on an interface between a transparent probe and a surface to be analyzed. The probe is lowered onto the surface using a computer-controlled actuator. Light reflected from the surface of the probe which is closest to the surface and the surface itself recombines, producing interference effects from the spacing between the probe and the surface over a 2-dimensional area. Since the shape of the probe in known beforehand, the profile of the surface can be readily calculated from the 2-dimensional measurement of the spacing between the probe and the surface. This surface profile indicates the roughness of the surface. The surface hardness and other surface properties can be measured by pressing the probe onto the surface. The contact load between the probe and the surface is detected by a load cell. The force with which the probe is being pressed onto the surface is measured using the load cell. The surface profile can continue to be measured interferometrically while it is being deformed by the probe. The measurement of surface deformation as a function of contact pressure allows the measurement of surface hardness while causing a minimum amount of damage to the surface.

公开(公告)号：EP0722557A4

公开(公告)日：1997-01-22

申请号：EP92922814

申请日：1992-10-19

Applicant: PHASE METRICS

Inventor： LACEY CHRISTOPHER

IPC: G01B9/02 ,  G01B11/14 ,  G11B5/54 ,  G11B21/12 ,  G11B21/21 ,  G11B33/10 ,  G01N21/84

CPC classification number: G11B5/54 ,  G01B11/14 ,  G11B21/12 ,  G11B21/21 ,  G11B33/10

公开(公告)号：EP0689665A1

公开(公告)日：1996-01-03

申请号：EP95906029.0

申请日：1994-12-14

Applicant: PHASE METRICS

Inventor： LACEY, Christopher ,  ROSS, Edward, W.

IPC: G01B9 ,  G01B11 ,  G11B5 ,  G11B21 ,  G11B33

CPC classification number: G11B21/12 ,  G01B11/14 ,  G11B21/21 ,  G11B33/10

Abstract: The apparatus and method for measuring a small spacing down to contact uses interferometric fringe intensity calibration to calibrate maximum and minimum intensity of two or more monochromatic of quasi-monochromatic interference patterns caused by a spacing between two articles (10, 12), one of which is transparent (10). The intensity calibration is done by measuring maximum and minimum fringe intensity of each color (81, 82) while altering the spacing by at least 1/4 of the wavelength of the light or other electromagnetic radiation being used. The calibration by changing spacing allows the fringe order to be calculated for each wavelength of the radiation being used. This calibration procedure allows the maximum and minimum intensity of the radiation to be known, as well as the fringe order of the interference patterns to be calculated. With the maximum and minimum intensities and the fringe orders known, the spacing is readily calculated from the interferometric theory.

公开(公告)号：EP0722557A1

公开(公告)日：1996-07-24

申请号：EP92922814.0

申请日：1992-10-19

Applicant: PHASE METRICS

Inventor： LACEY, Christopher

IPC: G01B9 ,  G01B11 ,  G11B5 ,  G11B21 ,  G11B33

CPC classification number: G11B5/54 ,  G01B11/14 ,  G11B21/12 ,  G11B21/21 ,  G11B33/10

Abstract: The apparatus and method for measuring a small spacing down to contact uses an interferometric fringe intensity calibration to calibrate maximum and minimum intensity of two or more monochromatic or quasi-monochromatic interference patterns caused by a spacing between two articles (10, 12), one of which is transparent (10). The intensity calibration is done by measuring maximum and minimum fringe intensity of each color (2) while altering the spacing (51) by at least 1/4 of the wavelength of the light or other electromagnetic radiation being used. The calibration by changing spacing allows the fringe order to be calculated (26) for each wavelength of the radiation being used. This calibration procedure allows the maximum and minimum intensity of the radiation to be known, as well as the fringe order of the interference patterns to be calculated. With the maximum and minimum intensities and the fringe orders known, the spacing is readily calculated from interferometric theory.

公开(公告)号：EP0689665A4

公开(公告)日：1998-05-13

申请号：EP95906029

申请日：1994-12-14

Applicant: PHASE METRICS

Inventor： LACEY CHRISTOPHER ,  ROSS EDWARD W

IPC: G01B9/02 ,  G01B11/14 ,  G11B5/60 ,  G11B21/12 ,  G11B21/21 ,  G11B33/10 ,  G01C9/02

CPC classification number: G11B21/12 ,  G01B11/14 ,  G11B21/21 ,  G11B33/10

Abstract: The apparatus and method for measuring a small spacing down to contact uses interferometric fringe intensity calibration to calibrate maximum and minimum intensity of two or more monochromatic of quasi-monochromatic interference patterns caused by a spacing between two articles (10, 12), one of which is transparent (10). The intensity calibration is done by measuring maximum and minimum fringe intensity of each color (81, 82) while altering the spacing by at least 1/4 of the wavelength of the light or other electromagnetic radiation being used. The calibration by changing spacing allows the fringe order to be calculated for each wavelength of the radiation being used. This calibration procedure allows the maximum and minimum intensity of the radiation to be known, as well as the fringe order of the interference patterns to be calculated. With the maximum and minimum intensities and the fringe orders known, the spacing is readily calculated from the interferometric theory.

Abstract translation: 用于测量小的间隔下至接触的装置和方法使用于干涉条纹强度校准来校准由两篇文章中，所有这是透明一个之间的间隔引起的两个或更多个单色或准单色的干涉图案的最大和最小强度。 强度校准是通过测量每个颜色的最大和最小强度条纹，同时由光或其他电磁辐射的波长的至少四分之一改变间距被使用来完成。 通过改变间距的校准允许正在使用的辐射的波长的每个要计算的边缘的顺序。 此校准过程允许的辐射的最大和最小强度是已知的，以及所述干涉图案的边缘以进行计算。 与最大和最小强度与该条纹级数已知，间隔很容易从干涉理论计算值。