公开(公告)号：AU1440995A

公开(公告)日：1995-07-10

申请号：AU1440995

申请日：1994-12-14

Applicant: PHASE METRICS

Inventor： LACEY CHRISTOPHER ,  ROSS EDWARD W

IPC: G01B9/02 ,  G01B11/14 ,  G11B5/60 ,  G11B21/12 ,  G11B21/21 ,  G11B33/10 ,  G01C9/02

Abstract: The apparatus and method for measuring a small spacing down to contact uses an interferometric fringe intensity calibration to calibrate maximum and minimum intensity of two or more monochromatic or quasi-monochromatic interference patterns caused by a spacing between two articles, one of which is transparent. The intensity calibration is done by measuring maximum and minimum fringe intensity of each color while altering the spacing by at least 1/4 of the wavelength of the light or other electromagnetic radiation being used. The calibration by changing spacing allows the fringe order to be calculated for each wavelength of the radiation being used. This calibration procedure allows the maximum and minimum intensity of the radiation to be known, as well as the fringe order of the interference patterns to be calculated. With the maximum and minimum intensities and the fringe orders known, the spacing is readily calculated from interferometric theory.

公开(公告)号：SG86285A1

公开(公告)日：2002-02-19

申请号：SG1996000301

申请日：1994-12-14

Applicant: PHASE METRICS

Inventor： LACEY CHRISTOPHER ,  ROSS EDWARD W

IPC: G01B9/02 ,  G01B11/14 ,  G11B5/60 ,  G11B21/12 ,  G11B21/21 ,  G11B33/10 ,  G01C9/02

Abstract: The apparatus and method for measuring a small spacing down to contact uses an interferometric fringe intensity calibration to calibrate maximum and minimum intensity of two or more monochromatic or quasi-monochromatic interference patterns caused by a spacing between two articles, one of which is transparent. The intensity calibration is done by measuring maximum and minimum fringe intensity of each color while altering the spacing by at least 1/4 of the wavelength of the light or other electromagnetic radiation being used. The calibration by changing spacing allows the fringe order to be calculated for each wavelength of the radiation being used. This calibration procedure allows the maximum and minimum intensity of the radiation to be known, as well as the fringe order of the interference patterns to be calculated. With the maximum and minimum intensities and the fringe orders known, the spacing is readily calculated from interferometric theory.

公开(公告)号：EP0689665A4

公开(公告)日：1998-05-13

申请号：EP95906029

申请日：1994-12-14

Applicant: PHASE METRICS

Inventor： LACEY CHRISTOPHER ,  ROSS EDWARD W

IPC: G01B9/02 ,  G01B11/14 ,  G11B5/60 ,  G11B21/12 ,  G11B21/21 ,  G11B33/10 ,  G01C9/02

CPC classification number: G11B21/12 ,  G01B11/14 ,  G11B21/21 ,  G11B33/10

Abstract: The apparatus and method for measuring a small spacing down to contact uses interferometric fringe intensity calibration to calibrate maximum and minimum intensity of two or more monochromatic of quasi-monochromatic interference patterns caused by a spacing between two articles (10, 12), one of which is transparent (10). The intensity calibration is done by measuring maximum and minimum fringe intensity of each color (81, 82) while altering the spacing by at least 1/4 of the wavelength of the light or other electromagnetic radiation being used. The calibration by changing spacing allows the fringe order to be calculated for each wavelength of the radiation being used. This calibration procedure allows the maximum and minimum intensity of the radiation to be known, as well as the fringe order of the interference patterns to be calculated. With the maximum and minimum intensities and the fringe orders known, the spacing is readily calculated from the interferometric theory.

Abstract translation: 用于测量小的间隔下至接触的装置和方法使用于干涉条纹强度校准来校准由两篇文章中，所有这是透明一个之间的间隔引起的两个或更多个单色或准单色的干涉图案的最大和最小强度。 强度校准是通过测量每个颜色的最大和最小强度条纹，同时由光或其他电磁辐射的波长的至少四分之一改变间距被使用来完成。 通过改变间距的校准允许正在使用的辐射的波长的每个要计算的边缘的顺序。 此校准过程允许的辐射的最大和最小强度是已知的，以及所述干涉图案的边缘以进行计算。 与最大和最小强度与该条纹级数已知，间隔很容易从干涉理论计算值。