Abstract:
A broadcasting receiving apparatus for displaying closed caption data and a method therefor are provided to improve image quality by omitting the display of caption information although a caption information display function is activated when a large amount of noise exists in a composite image signal and preventing broken caption information from being displayed on a screen. A signal receiving unit(110) receives a certain composite image signal. A signal processing unit(120) processes the composite image signal to be converted into a certain output format signal. A noise calculating unit(130) calculates a noise level of the composite image signal. A caption data detecting unit(140) detects closed caption data from the composite image signal, provides the closed caption data to the signal processing unit(120) to be inserted into the output format signal only when the noise level is smaller than a certain threshold level.
Abstract:
양질의 코발트 실리사이드막 형성이 가능한 개선된 코발트 실리사이드 형성 방법 및 이를 이용한 반도체 소자의 제조 방법이 제공된다. 실리콘을 포함하는 도전 영역 위에 코발트를 포함하는 막을 형성한 후, 코발트를 포함하는 막 위에 티타늄의 원자% / 나머지 원소의 원자%가 1 보다 큰 티타늄이 풍부한 캡핑막을 형성한다. 이후 열처리에 의해 코발트가 실리콘과 반응하여 코발트 실리사이드막을 형성하도록 한다. 또, 선택적으로 코발트를 포함하는 막의 형성 공정을 고온에서 실시하여 확산 억제 계면막이 형성되도록 한다. 코발트 실리사이드, 캡핑막, 티타늄, 고온 증착
Abstract:
PURPOSE: An improved cobalt silicide forming method for forming an excellent cobalt silicide layer and a method for manufacturing a semiconductor device using the same are provided to be capable of easily controlling surface resistance. CONSTITUTION: A semiconductor substrate is defined with an insulation region and a silicon region. A predetermined layer containing cobalt is formed on the silicon region of the semiconductor substrate(S3). A capping layer is formed on the predetermined layer(S4). At this time, the titanium atom% to residual element atom% is larger than 1, so that the capping layer has abundant titanium. A heat treatment is performed on the resultant structure for forming a cobalt silicide layer by reacting the cobalt to the silicon of the silicon region.