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公开(公告)号：KR1020140084860A
公开(公告)日：2014-07-07
申请号：KR1020120154822
申请日：2012-12-27
Applicant: 한국과학기술원
CPC classification number: G02B1/041 , B82Y30/00 , G02B1/113 , G02B3/0012
Abstract: The purpose of the present invention is to provide a manufacturing method for a lens with an anti-reflective nanostructure using nanowire growth, and a lens manufactured by the same. The provided manufacturing method for a lens with an anti-reflective nanostructure using nanowire growth comprises as follows: (step 1) a step of forming a seed layer on the surface of a lens; and (step 2) a step of submerging the lens with the seed layer formed in step 1 into a metallic oxide precursor solution and then heating the solution. In addition, provided in the present invention is the lens which is manufactured by the above method and includes an anti-reflective nanostructure where a metallic oxide nanowire is formed on the surface thereof. The manufacturing method can reduce the reflectivity of a plane lens or a lens with a curvature by forming a nanostructure with a height, a width, and a cycle less than an optical wavelength on the surface of the lens, can improve transmissivity, and can manufacture a high efficiency lens by an anti-reflective effect. In other words, the manufacturing method prepared by the present invention can manufacture a lens not only simply but also on a mass production basis, not by coating different types of materials on the lens as the conventional anti-reflective layer coating but by growing a metallic oxide nanowire on the surface of the lens.
Abstract translation: 本发明的目的是提供一种使用纳米线生长的具有抗反射纳米结构的透镜的制造方法和由其制造的透镜。 所提供的具有使用纳米线生长的抗反射纳米结构的透镜的制造方法包括如下：（步骤1）在透镜表面上形成晶种层的步骤; 和（步骤2）将在步骤1中形成的晶种层的透镜浸没在金属氧化物前体溶液中，然后加热溶液的步骤。 此外，本发明中提供的是通过上述方法制造并且在其表面上形成有金属氧化物纳米线的抗反射纳米结构的透镜。 该制造方法可以通过在透镜表面上形成具有低于光波长的高度，宽度和周期的纳米结构来降低平面透镜或具有曲率的透镜的反射率，可以提高透射率，并且可以制造 高效率的镜片采用防反射效果。 换句话说，本发明制备方法不仅可以简单地，而且在批量生产的基础上制造透镜，而不是通过在透镜上涂覆不同类型的材料作为常规的抗反射层涂层，而是通过生长金属 透镜表面上的氧化物纳米线。
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公开(公告)号：KR101397553B1
公开(公告)日：2014-05-20
申请号：KR1020120053628
申请日：2012-05-21
Applicant: 한국과학기술원
Abstract: 본 발명은 렌즈 제작 시 플루오르고분자 박막을 코팅하여 소수성 막을 형성시킴으로써 렌즈 배열의 충진률(Fill- Factor)를 향상시킬 수 있는 플루오르고분자 박막 코팅을 이용한 고충진률 렌즈 배열 및 이의 제조방법에 관한 것이다.
본 발명에 따른 플루오르고분자(fluoropolymer) 코팅을 이용한 고충진률 렌즈 제조방법은 기판에 적어도 하나의 원통의 실린더 형상 패턴을 형성하는 단계; 상기 원통의 실린더 형상 패턴의 상부 및 상기 기판의 표면에 플루오르 고분자 박막을 코팅하는 단계; 및 상기 플루오르 고분자 박막이 코팅된 상기 패턴에 대해 열처리 공정을 수행하여 미세 렌즈를 형성하는 단계;를 포함하는 것을 특징으로 한다.-
公开(公告)号：KR101338850B1
公开(公告)日：2013-12-06
申请号：KR1020100100250
申请日：2010-10-14
Applicant: 한국과학기술원
Abstract: 본 발명은 표면에 무반사 구조(anti-reflective structure, ARS)를 가지는 플라스틱 렌즈 제작에 이용되는 나노구조를 가지는 금속금형과 그 제조방법 및 그러한 금형을 이용한 무반사 플라스틱 렌즈 제작방법에 관한 것으로, 본 발명에 따르면, 소정의 곡률을 가지는 플라스틱 렌즈의 표면에 미세패턴이 형성되고, 미세패턴에 의해 보다 높은 투과율을 형성할 수 있어 에너지 효율이 높은 플라스틱 렌즈를 제조하기 위해, 양극산화(Anodic oxidation) 기술을 바탕으로 소정의 곡률과 나노구조를 가지는 금속금형을 제작하고, 이를 이용하여 플라스틱 몰딩 방법을 통하여 무반사 구조를 가지는 플라스틱 렌즈를 제조하는 방법이 제공되므로, 따라서 본 발명에 따르면, 상기한 금속금형을 이용하여 무반사 구조를 가지는 플라스틱 렌즈의 양산이 가능하게 된다.
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34.发明授权
公开(公告)号：KR101272316B1
公开(公告)日：2013-06-07
申请号：KR1020110125805
申请日：2011-11-29
Applicant: 한국과학기술원
Abstract: PURPOSE: An SERS with plasmonic nanopillar array and a manufacturing method thereof are provided to form metallic structures with a plurality of nanogaps in the upper and lateral surfaces of nanopillars, thereby maximizing the SERS signals. CONSTITUTION: A manufacturing method of an SERS(Surface Enhanced Raman Scattering Substrate)(10) is as follows. A primary metal thin film(12) is deposited on a substrate so that at least one or more metallic nanoislands. The rest of the metallic nanoislands, except for portions where the nanoislands are formed, are etched by an etching mask so that nanopillar structures(13) are formed. A secondary metal thin film(14) is deposited on the each of the nanopillar structures so that one or more metallic nanoislands are formed in the upper and lateral units of the nanopillar structures.
Abstract translation: 目的：提供具有等离子体纳米柱阵列的SERS及其制造方法，以在纳米柱的上表面和侧表面形成具有多个纳米角的金属结构，从而最大化SERS信号。 构成：SERS（表面增强拉曼散射基板）（10）的制造方法如下。 将初级金属薄膜（12）沉积在基板上，使得至少一个或多个金属纳米区域。 除了形成纳米级区域的部分之外，金属纳米结构体的其余部分通过蚀刻掩模进行蚀刻，从而形成纳米柱结构（13）。 二次金属薄膜（14）沉积在每个纳米柱结构上，使得在纳米柱结构的上部和外侧单元中形成一个或多个金属纳米级。
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公开(公告)号：KR1020130057276A
公开(公告)日：2013-05-31
申请号：KR1020110123109
申请日：2011-11-23
Applicant: 한국과학기술원
Abstract: PURPOSE: A method of forming metal nanopatterns having nanogap is provided to form ultra-fine metal nanopatterns for Surface Enhanced Raman Scattering by causing the capillary phenomenon of polymer thin film contacted with a polymeric template. CONSTITUTION: A method of forming metal nanopatterns having nanogap comprises the following steps: a metallic thin film(110) of nano level is formed on a substrate(110); a polymer thin film(120) is formed on the metallic thin film; a patterned surface of a polymeric template(130) in which fine nanopatterns have been formed is contacted with the polymer thin film; the structure formed through the previous steps is heat-treated; fine nanopatterns of the polymer thin film having nanogap(150) are formed on the metallic thin film by the capillary phenomenon through the heat-treating step; and fine nanopatterns having nanogap are formed on the metallic thin film by etching with the fine nanopatterns of the polymer thin film as an etching mask. In the fine nanopattern formation step, the nanogap is a narrower gap than the pattern gap of the polymer template.
Abstract translation: 目的：提供一种形成具有纳米隙的金属纳米图案的方法，以通过使聚合物薄膜与聚合物模板接触的毛细现象形成用于表面增强拉曼散射的超细金属纳米图案。 构成：形成具有纳米凹槽的金属纳米图案的方法包括以下步骤：在基底（110）上形成纳米级的金属薄膜（110）; 在金属薄膜上形成聚合物薄膜（120）; 已经形成细微纳米图案的聚合物模板（130）的图案化表面与聚合物薄膜接触; 通过前述步骤形成的结构被热处理; 通过热处理步骤，通过毛细管现象，在金属薄膜上形成具有纳米隙（150）的聚合物薄膜的细小纳米图案; 通过用聚合物薄膜的细微纳米图案作为蚀刻掩模蚀刻，在金属薄膜上形成具有纳米隙的细小纳米图案。 在细微纳米图案形成步骤中，纳米间隙比聚合物模板的图案间隙更窄。
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Patent Agency Ranking
公开(公告)号：KR101083341B1
公开(公告)日：2011-11-14
申请号：KR1020090033962
申请日：2009-04-20
Applicant: 한국과학기술원
IPC: G02B6/13
Abstract: 본발명은고분자기반평면광도파로제작방법에관한것으로, 고분자물질이코팅된기판에고분자패턴을형성하는리소그래피단계, 상기고분자패턴에열을가하여열중합으로코어를형성하는코어형성단계및 상기코어가형성된기판상에상기고분자물질과동일한고분자물질을코팅하고열을가하여열중합으로클래딩을형성하는클래딩형성단계를포함하여제작공정이간소화됨으로써산업상효용성이증가하고, 적은비용으로제작이가능하여생산성을높이는효과가있다.
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37.发明公开이중곡면을 갖는 미세복합형상렌즈 제조방법, 이에 의하여 제조된 미세복합형상렌즈 및 이를 포함하는 ＬＥＤ 소자 失效具有双曲线的微型复合表面的镜头的制造方法，具有由其制造的双曲线的微型复合表面的镜头和包含具有双曲线的微曲面复合表面的镜头的LED装置
公开(公告)号：KR1020110032019A
公开(公告)日：2011-03-30
申请号：KR1020090089314
申请日：2009-09-22
Applicant: 한국과학기술원
Abstract: PURPOSE: A method for manufacturing a micro-patterned complex surface lens is provided to improve light uniformity and to reduce heat radiation. CONSTITUTION: A method for manufacturing a micro-patterned complex surface lens comprises: a step of laminating a photoresist layer on a substrate(1); a step of laminating a thin film layer(3) on a micro-pattern array; a step of contacting one side of an elastic layer(200) with a thin film layer; a step of applying negative pressure to a common part; a step of filling a charged matter(100) on the thin film layer; and a step of forming the lens and separating the lens from the thin film layer.
Abstract translation: 目的：提供一种用于制造微图案复合表面透镜的方法，以改善光均匀性并减少热辐射。 构成：微图形复合表面透镜的制造方法包括：在基板（1）上层压光致抗蚀剂层的步骤; 将薄膜层（3）层叠在微图案阵列上的步骤; 将弹性层（200）的一侧与薄膜层接触的步骤; 向共同部分施加负压的步骤; 在所述薄膜层上填充带电物质（100）的步骤; 以及形成透镜并将透镜与薄膜层分离的步骤。
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公开(公告)号：KR1020100115417A
公开(公告)日：2010-10-28
申请号：KR1020090033962
申请日：2009-04-20
Applicant: 한국과학기술원
IPC: G02B6/13
Abstract: PURPOSE: By using the same polymer, the polymer base planar lightwave circuit manufacturing method manufactures the core and cladding of the optical waveguide. CONSTITUTION: The polymer pattern is formed in the substrate in which the polymer is coated(S100). The heat is added to the membranous polymers pattern and core is formed into the thermal polymerization(S200). The same polymer as the membranous polymers material is coated in the top of the substrate in which core is formed.
Abstract translation: 目的：通过使用相同的聚合物，聚合物基平面光波导线制造方法制造光波导的芯和包层。 构成：聚合物图案形成在其中涂布聚合物的基材中（S100）。 将热量加入到膜聚合物图案中，并将芯体形成热聚合（S200）。 与膜聚合物材料相同的聚合物涂覆在其中形成芯的衬底的顶部。
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公开(公告)号：KR1020210039038A
公开(公告)日：2021-04-09
申请号：KR1020190121332
申请日：2019-10-01
Applicant: 한국과학기술원
IPC: H01L21/02 , H01L21/768 , H01L21/324 , H01L51/56
Abstract: 본발명은기상증착공정을이용한갭필링방법및 그장치에관한것으로, 개시제를사용하는화학기상증착(initiated Chemical Vapor Deposition; iCVD) 공정을이용하여패턴상에고분자(polymer)를증착하여갭필링(gap filling)을통해상기패턴을평탄화하는단계를포함한다.
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公开(公告)号：KR1020210027763A
公开(公告)日：2021-03-11
申请号：KR1020190108590
申请日：2019-09-03
Applicant: 한국과학기술원
IPC: H04N13/254 , H04N13/236
Abstract: 본발명의일 실시예에따른, 스트라이프패턴을가지는가변구조광생성장치는변조된레이저광을출력하는광원부; 상기레이저광을반사하고서로직교하는양 축을가지는미러; 및상기미러의구동신호및 상기레이저광의변조신호를생성하여상기광원부및 상기미러에송신하는제어부;를포함하며, 상기변조신호의주파수를제어하여스트라이프패턴구조광을생성하는것을특징으로한다.
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