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公开(公告)号:KR1020110067843A
公开(公告)日:2011-06-22
申请号:KR1020090124608
申请日:2009-12-15
Applicant: 한국생산기술연구원
IPC: H01L21/66
Abstract: PURPOSE: An apparatus and method for inspecting LED epiwafer using photoluminescence imaging are provided to reduce a time for monitoring an epiwafer by detecting PL(photoluminescence) with CCD camera or CMOS camera and analyzing an image signal. CONSTITUTION: In an apparatus and method for inspecting LED epiwafer using photoluminescence imaging, a lighting unit outputs light having wavelength shorter than that of an LED epiwafer to a target. A pickup unit(130) obtains the image of light emitted from the LED epitaxial wafer. A filter unit(140) is comprised of a plurality of bandpass filter passing an emitted light within a certain wavelength An image processing unit(150) calculates the strength of the light at sub-area corresponding to the LED epitaxial wafer.
Abstract translation: 目的:提供使用光致发光成像检测LED外延片的设备和方法,以通过用CCD相机或CMOS相机检测PL(光致发光)并分析图像信号来减少监视外延片的时间。 构成:在使用光致发光成像检查LED外延器的装置和方法中,照明单元将具有比LED外延器的波长短的波长的光输出到目标。 拾取单元(130)获得从LED外延晶片发射的光的图像。 滤波器单元(140)由通过一定波长内的发射光的多个带通滤波器构成。图像处理单元(150)计算与LED外延片对应的子区域的光强度。
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公开(公告)号:KR1020100045291A
公开(公告)日:2010-05-03
申请号:KR1020080104408
申请日:2008-10-23
Applicant: 한국생산기술연구원
Abstract: PURPOSE: A method for manufacturing a light emitting diode with a photonic crystal structure is provided to prevent an active layer from damaging due to the etching of a p-type clad layer. CONSTITUTION: An n-type clad layer is formed on a substrate. An active layer is formed on the n-type clad layer. A p-type clad layer is formed on the active layer(S100). A sub-micrometer pattern is formed on the upper side of the p-type clad layer(S200). An electrode layer is formed on the upper side of the p-type clad layer(S300).
Abstract translation: 目的:提供一种用于制造具有光子晶体结构的发光二极管的方法,以防止由于蚀刻p型覆盖层而导致的有源层损坏。 构成:在衬底上形成n型覆盖层。 在n型覆盖层上形成有源层。 在有源层上形成p型覆层(S100)。 在p型覆盖层的上侧形成亚微米图形(S200)。 在p型覆盖层的上侧形成电极层(S300)。
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公开(公告)号:KR100785096B1
公开(公告)日:2007-12-12
申请号:KR1020060102747
申请日:2006-10-23
Applicant: 한국생산기술연구원
IPC: H01S3/067
CPC classification number: H01S3/06704 , H01S5/02252 , H01S5/02284
Abstract: A rare-earth doped fiber laser at visible wavelength is provided to generate an optimum blue laser and an optimum green laser unharmful to a human body through a Tm-doped fiber and an Er-doped fiber. A semiconductor laser(10) emits a laser beam with infrared ray wavelength. A condenser lens(20) condenses the light emitted from the semiconductor laser. An Yb-doped optical fiber(40) outputs an infrared ray of 1050nm-1150nm wavelength and 950nm-975nm by exciting Yb ions by the light incident from the semiconductor laser. A coupler(90) distributes the infrared ray incident from the Yb-doped optical fiber into 950nm-975nm wavelength and 1050nm-1150nm wavelength. A Tm-doped optical fiber(60) outputs blue ray of 480nm wavelength by exciting Tm ions by the light of 1050nm-1150nm emitted through stimulated emission of a resonator among the infrared ray distributed through the coupler. An Er-doped optical fiber(80) outputs green ray of 525nm by exciting Er ions by the light of 950nm-975nm wavelength emitted through stimulated emission of the resonator among the infrared ray distributed through the coupler. The resonator amplifies and emits the infrared ray of each wavelength through stimulated emission.
Abstract translation: 提供可见光波长的稀土掺杂光纤激光器,以通过Tm掺杂光纤和掺铒光纤产生最佳的蓝色激光和对人体无伤害的最佳绿色激光。 半导体激光器(10)发射具有红外线波长的激光束。 聚光透镜(20)会聚半导体激光器发出的光。 Yb掺杂光纤(40)通过从半导体激光器入射的光激发Yb离子,输出1050nm-1150nm波长和950nm-975nm的红外线。 耦合器(90)将从掺杂Yb的光纤入射的红外线分布在波长为950nm-975nm和1050nm-1150nm的波长中。 掺入Tm的光纤(60)通过在分布在耦合器中的红外线中通过谐振器的受激发射发射的1050nm-1150nm的光激发Tm离子,输出480nm波长的蓝色光。 掺铒光纤(80)通过在通过耦合器分配的红外线中通过谐振器的受激发射发射的950nm-975nm波长的光激发Er离子来输出525nm的绿光。 谐振器通过受激发射放大并发射每个波长的红外线。
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公开(公告)号:KR100785063B1
公开(公告)日:2007-12-12
申请号:KR1020060062239
申请日:2006-07-04
Applicant: 한국생산기술연구원
IPC: H05K1/02
CPC classification number: H05K1/0274 , G02B5/32 , G02B6/122
Abstract: An optical printed circuit board using a holographic grating is provided to enhance accuracy of a process for transmitting and receiving signals between an optical waveguide and an element. A printed circuit board(11) includes holes(39) corresponding to optical transmitter and receiver(31,33). A plurality of core layers(13) are disposed in an internal layer of the printed circuit board in order to transmit an optical signal. A plurality of cladding layers(15) are disposed on the printed circuit board except for a hole forming part in order to surround the core layer. A volume type holographic grating(21) is formed on the cladding layer corresponding to the holes of the printed circuit board in order to change the path of the optical signal by diffraction. The holographic grating is arranged on the cladding layers between the cladding layers and the core layers corresponding to the holes of the printed circuit board in order to transmit the optical signal between the core layers by changing a path according to a wavelength of each signal.
Abstract translation: 提供了使用全息光栅的光学印刷电路板,以提高在光波导和元件之间发送和接收信号的处理的精度。 印刷电路板(11)包括对应于光发射器和接收器(31,33)的孔(39)。 多个芯层(13)设置在印刷电路板的内层中以便发送光信号。 为了包围芯层,除了孔形成部分之外,在印刷电路板上设置多个包覆层(15)。 为了通过衍射改变光信号的路径,在与印刷电路板的孔对应的包层上形成体积型全息光栅(21)。 全息光栅布置在包覆层和对应于印刷电路板的孔的芯层之间的包层上,以通过根据每个信号的波长改变路径来在核心层之间传输光信号。
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公开(公告)号:KR1020150091520A
公开(公告)日:2015-08-11
申请号:KR1020157018817
申请日:2012-05-24
Applicant: 한국생산기술연구원
IPC: H01L21/02 , H01L21/67 , H01L21/205 , H01L21/3065
CPC classification number: C23C16/45565
Abstract: 본 발명은 윗판과 아랫판 사이에 설치되는 분리격판(130)에 의해 내부 빈공간이 상부공간과 하부공간으로 구분되는 샤워헤드 몸체에 상기 윗판, 분리격판(130), 및 아랫판 중 적어도 상기 분리격판(130)을 관통하도록 기체안내관(133)이 설치되는 경우에 상기 기체안내관(133)이 관통하는 상기 윗판, 분리격판(130), 또는 아랫판 위에 필러시트(160)를 올려놓고 브레이징 처리함으로써 상기 기체안내관(133)과 상기 기체안내관(133)이 관통하는 윗판, 분리격판(130), 또는 아랫판 사이의 틈을 밀봉시키는 것을 특징으로 한다.
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公开(公告)号:KR101402917B1
公开(公告)日:2014-06-02
申请号:KR1020120110675
申请日:2012-10-05
Applicant: 한국생산기술연구원
Abstract: 본 발명은 전자종이의 구동전압 및 에어 갭 선정방법에 관한 것으로, 내부에 상부 전극, 하부 전극 및 대전입자를 가지며 소정의 에어 갭(air gap)을 갖는 전자종이 단일 셀을 제작하고, 상기 전자종이 단일 셀의 인가 전압별 동작 특성을 그래프화하고, 상기 그래프에서 문턱 전압(V
th ) 및 포화 전압(V
S )을 획득한 다음 Vs/2 ≥ V
th 이면 V
th /2 D th 를 만족하는 전압을 구동전압(V
D )으로 선정하고, V
S /2 th 이면 V
S /2 D
th 를 만족하는 전압을 구동전압(V
D )을 선정하는 단계가 개시된다.-
公开(公告)号:KR1020140044559A
公开(公告)日:2014-04-15
申请号:KR1020120110675
申请日:2012-10-05
Applicant: 한국생산기술연구원
Abstract: The present invention relates to a method for determining a driving voltage and an air gap of electronic paper. The method includes steps of: manufacturing a unit cell of electronic paper which has an upper electrode, a lower electrode, and charged particles inside and includes a certain air gap; making a graph about operation characteristics of the unit cell by applied voltage; acquiring a threshold voltage (Vth) and a saturation voltage (VS); determining a voltage satisfying Vth/2 = Vth or determining a voltage satisfying VS/2 = Vth or determining a voltage satisfying VS/2
Abstract translation: 本发明涉及一种用于确定电子纸的驱动电压和气隙的方法。 该方法包括以下步骤:制造具有上电极,下电极和带电粒子在内的电子纸的单元电池,并且包括一定气隙; 通过施加电压绘制单元电池的工作特性图; 获取阈值电压(Vth)和饱和电压(VS); 如果VS / 2> Vth,则确定满足Vth / 2
= Vth,则确定满足Vth / 2 = Vth则确定满足VS / 2 -
公开(公告)号:KR101334385B1
公开(公告)日:2013-12-05
申请号:KR1020120109673
申请日:2012-10-02
Applicant: 한국생산기술연구원
Inventor: 정훈
CPC classification number: G01N21/31 , G01J3/0208 , G01J3/28 , G01N21/3504
Abstract: Disclosed is a device which enables the improvement of the reliability of a process by analyzing process gas formed inside a process chamber before performing an actual process. For example, a device which analyzes process gas by being inserted into a process chamber includes a plate with flat top surface; a plurality of light collecting units which is arranged on the top surface of the plate and which collects lights inside the process chamber; a light transmission unit which is formed corresponding to the light collecting unit inside the plate and which receives the light of the light collecting unit; and a spectrum unit which is formed inside the plate and which receives the lights by being connected to the light transmission unit and analyzes spectra in respect to at least one frequency.
Abstract translation: 公开了一种能够通过在进行实际处理之前分析在处理室内形成的处理气体来提高处理的可靠性的装置。 例如,通过插入到处理室来分析处理气体的装置包括具有平坦顶面的板; 多个集光单元,其布置在所述板的顶表面上并且收集所述处理室内的光; 光传输单元,其与所述板内的所述聚光单元形成并且接收所述光收集单元的光; 以及光谱单元,其形成在所述板内部并且通过连接到所述光传输单元接收所述光并分析关于至少一个频率的光谱。
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公开(公告)号:KR1020100086835A
公开(公告)日:2010-08-02
申请号:KR1020090006269
申请日:2009-01-23
Applicant: 한국생산기술연구원
CPC classification number: H01S3/027 , B23K26/0057 , H01S3/067 , H01S3/0813
Abstract: PURPOSE: A system for a laser beam splitting control is provided to improve the accuracy of a laser projection process by outputting laser having certain power. CONSTITUTION: A light source(110) generates a laser having a fixed wavelength. One or more beam splitter(140) divides the laser by a setting rate. The light attenuator(150) reduces the output strength of the divided laser. One or more wave plate(130) is arranged in the end of the beam splitter. The Laser is polarized in consideration of the output of the light attenuator.
Abstract translation: 目的:提供一种用于激光束分割控制的系统,通过输出具有一定功率的激光来提高激光投射过程的精度。 构成:光源(110)产生具有固定波长的激光。 一个或多个分束器(140)将激光器分开设定速率。 光衰减器(150)降低分割激光器的输出强度。 一个或多个波片(130)布置在分束器的末端。 考虑到光衰减器的输出,激光器被极化。
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公开(公告)号:KR1020100002806A
公开(公告)日:2010-01-07
申请号:KR1020080062840
申请日:2008-06-30
Abstract: PURPOSE: A displacement sensor and a light irradiation device using the same are provided to focus a target accurately and irradiate light beam to the target efficiently. CONSTITUTION: A displacement sensor comprises a light emitting unit(100) which transmits laser beam to a target, a light receiving unit(200) which receives the laser beam reflected off the target, and a displacement sensing unit(300) which scans and calculates the location from which the laser beam is reflected and outputs the displacement of the target.
Abstract translation: 目的:提供一种位移传感器和使用该位移传感器的光照射装置,以准确地对准目标物并有效地将光束照射到目标物上。 构成:位移传感器包括将激光束发射到目标的发光单元(100),接收从目标反射的激光束的光接收单元(200)和扫描并计算的位移感测单元(300) 激光束被反射的位置并输出目标的位移。
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