Abstract:
The method for mfg. a sputtering target comprises (a) raising the temp. of La2O3-Al2O3 mixed powder 1550-1700 deg.C in alumina crucible under an air atmosphere at a rate of 10 deg.C/min, maintaining it for 2-4 hr, and cooling it to a room temp. at a rate of 5 deg.C/min to obtain an aluminate powder, and (b) raising the temp. of the aluminate powder under an Ar atmosphere to 1700-1900 deg.C at a rate of 5 deg.C/min for 2 hr, cooling it to a room temp. at a rate of 8 deg.C, and heat-treating the sintered material under an air atmosphere at 1500 deg.C for 3 hr. The target is used as a Josephson device.