란탄늄 알루미네이트 박막 제조용 스퍼터링타켓의 제조방법
    34.
    发明授权
    란탄늄 알루미네이트 박막 제조용 스퍼터링타켓의 제조방법 失效
    铝铝薄膜制造喷射目标制造方法

    公开(公告)号:KR1019920009654B1

    公开(公告)日:1992-10-22

    申请号:KR1019900010551

    申请日:1990-07-12

    Abstract: The method for mfg. a sputtering target comprises (a) raising the temp. of La2O3-Al2O3 mixed powder 1550-1700 deg.C in alumina crucible under an air atmosphere at a rate of 10 deg.C/min, maintaining it for 2-4 hr, and cooling it to a room temp. at a rate of 5 deg.C/min to obtain an aluminate powder, and (b) raising the temp. of the aluminate powder under an Ar atmosphere to 1700-1900 deg.C at a rate of 5 deg.C/min for 2 hr, cooling it to a room temp. at a rate of 8 deg.C, and heat-treating the sintered material under an air atmosphere at 1500 deg.C for 3 hr. The target is used as a Josephson device.

    Abstract translation: 制造方法 溅射靶包括(a)提高温度。 的La2O3-Al2O3混合粉末在氧化铝坩埚中以10℃/ min的速度在空气气氛中保持2小时,并将其冷却至室温。 以5摄氏度/分钟的速度获得铝酸盐粉末,和(b)提高温度。 的铝酸盐粉末在Ar气氛下以5℃/ min的速度加热至1700-1900℃2小时,冷却至室温。 以8摄氏度的速度在1500℃下在空气气氛下对烧结材料进行热处理3小时。 目标被用作约瑟夫逊设备。

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