公开(公告)号：HU0104694A2

公开(公告)日：2002-03-28

申请号：HU0104694

申请日：1999-12-17

Applicant: BAE SYSTEMS PLC

Inventor： FELL CHRISTOPHER PAUL ,  STURLAND IAN ,  TOWNSEND KEVIN

IPC: G01C19/56 ,  G01C19/5684

Abstract: A vibrating structure gyroscope having a silicon substantially planar ring vibrating structure (1) capacitive means for imparting drive motion to and sensing motion of the vibrating structure (1), and a screen layer (15) surrounding the capacitive means is made by depositing photoresist material (9) on a glass or silicon substrate (7), hardening, patterning and developing the photoresist (9) to expose areas of the substrate (7), etching the exposed areas to form cavities (10) therein, stripping any remaining photoresist material (9) attaching a silicon layer (8) to the cavitated substrate (7) depositing a layer of aluminium on the silicon layer (8), depositing photoresist material on the aluminium layer, hardening, patterning and developing the photoresist layer to expose areas of the aluminium layer, etching the exposed areas of the aluminium layer to leave regions of aluminium on the silicon layer providing bond pads (11, 12, 13 and 14), stripping the remaining photoresist from the aluminium layer, depositing another layer of photoresist material on the silicon layer (8) over the remaining deposited aluminium layer regions, hardening, patterning and developing the layer of photoresist material to expose areas of the silicon layer (8) and deep reactive ion etching the exposed areas of the silicon layer (8) to form therefrom the substantially planar ring vibrating structure (1) mounted by a hub (4) above the cavities (10).

公开(公告)号：NO20013151L

公开(公告)日：2001-08-22

申请号：NO20013151

申请日：2001-06-22

Applicant: BAE SYSTEMS PLC

Inventor： FELL CHRISTOPHER PAUL ,  TOWNSEND KEVIN ,  STURLAND IAN

IPC: G01C19/56 ,  G01C19/5684

Abstract: A vibrating structure gyroscope having a silicon substantially planar ring vibrating structure (1) capacitive means for imparting drive motion to and sensing motion of the vibrating structure (1), and a screen layer (15) surrounding the capacitive means is made by depositing photoresist material (9) on a glass or silicon substrate (7), hardening, patterning and developing the photoresist (9) to expose areas of the substrate (7), etching the exposed areas to form cavities (10) therein, stripping any remaining photoresist material (9) attaching a silicon layer (8) to the cavitated substrate (7) depositing a layer of aluminium on the silicon layer (8), depositing photoresist material on the aluminium layer, hardening, patterning and developing the photoresist layer to expose areas of the aluminium layer, etching the exposed areas of the aluminium layer to leave regions of aluminium on the silicon layer providing bond pads (11, 12, 13 and 14), stripping the remaining photoresist from the aluminium layer, depositing another layer of photoresist material on the silicon layer (8) over the remaining deposited aluminium layer regions, hardening, patterning and developing the layer of photoresist material to expose areas of the silicon layer (8) and deep reactive ion etching the exposed areas of the silicon layer (8) to form therefrom the substantially planar ring vibrating structure (1) mounted by a hub (4) above the cavities (10).

公开(公告)号：ES2236200T3

公开(公告)日：2005-07-16

申请号：ES01915526

申请日：2001-03-28

Applicant: BAE SYSTEMS PLC

Inventor： FELL CHRISTOPHER PAUL ,  TOWNSEND KEVIN

IPC: G01C19/56 ,  G01C19/567

Abstract: Un sistema de control para un giroscopio de estructura vibrante que tiene una estructura vibrante (3), medios primarios (4) de excitación y medios secundarior (7) de excitación para situar y mantener la estructura vibrante (3) en resonancia vibratoria de modo primario, medios primarios (2) de detección de vibración y medios secundarios (6) de detección de vibración para detectar la vibración de la estructura vibrante (3), cuyo sistema incluye un bucle cerrado primario (1) de control para variar de forma controlable la señal de excitación aplicada a los medios primarios (4) de excitación, y un bucle cerrado secundario (5) de control para variar de forma controlable la señal aplicada a los medios secundarios (7) de excitación con el fin de mantener un valor cero en los medios secundarios (6) de detección de vibración, caracterizado por incluir medios para realizar un ajuste activo del factor de escala en los bucles cerrados primario y secundario (1, 5) de control, cuyos medios (30) de ajusteactivo de factor de escala incluyen medios (34) para dividir una señal de respuesta de velocidad procedente del bucle secundario (5) de control por una señal que indica la amplitud de la vibración de modo primario, medios (36) para filtrar una señal de salida (35) de los medios (34) de división con el fin de proporcionar una salida que indica la velocidad aplicada, y un bucle (31) de factor de escala variable para recibir la señal de salida (35) de los medios (34) de división y realizar un ajuste activo de un nivel fijado de tensión de referencia del bucle cerrado primario (1) de control para ajustar dinámicamente el factor de escala en bucle del sistema de control.

公开(公告)号：DE69828713D1

公开(公告)日：2005-03-03

申请号：DE69828713

申请日：1998-02-17

Applicant: BAE SYSTEMS PLC FARNBOROUGH

Inventor： HOPKIN IAN DAVID ,  FELL CHRISTOPHER PAUL ,  TOWNSEND KEVIN ,  MASON TIMOTHY ROBERT

IPC: G01C19/5677 ,  G01C19/56

Abstract: A vibrating structure gyroscope has a vibratory resonator (1) having a substantially ring or hoop-like shape structure, electromagnetic drive means for causing the resonator (1) to vibrate, support means including a plurality of flexible support beams (5) for supporting the resonator whilst allowing it to vibrate and electromagnetic sensing means for sensing movement of the resonator (1). The support beams (5) and resonator (1) are made from silicon and the electromagnetic drive and sensing means are provided by metal tracks (7, 8) which extend externally along each support beam (5) onto and along respective segments of an outer substantially planar surface (1a) the ring-like resonator (1). The resonator (1) is substantially planar and means (13, 14, 14a) are provided to produce a magnetic field substantially perpendicular to the plane of the resonator (1).

公开(公告)号：ES2217112T3

公开(公告)日：2004-11-01

申请号：ES01900486

申请日：2001-01-08

Applicant: BAE SYSTEMS PLC

Inventor： FELL CHRISTOPHER PAUL

IPC: B81B3/00 ,  G01C19/5684 ,  H01L29/84 ,  G01C19/56 ,  G01P9/04

Abstract: An angular rate sensor device (10) such as a micro-machined vibrating structure gyroscope, comprises a resonator (16), drive means (18), sensing means (20) and associated electronic control means. The resonator (16), drive means (18), sensing means (20) and control means are fabricated from a layer of crystalline silicon (12) having a [100] principal crystal plane. In order to make the resonator (16) operate in this type of material without degrading its performance, the resonator (16) is arranged to be operated by the drive and sensing means (18, 20) under the control of the electronic control means with a vibration mode pair having modal parameters, such as Young's Modulus, matched to provide a consistent resonator response. In particular, the resonator (16) is arranged to be operated with a Sin 3theta/Cos 3theta (vibration mode pair providing degenerate carrier and response parameters.

公开(公告)号：AT272206T

公开(公告)日：2004-08-15

申请号：AT99962348

申请日：1999-12-17

Applicant: BAE SYSTEMS PLC

Inventor： FELL CHRISTOPHER PAUL ,  TOWNSEND KEVIN ,  STURLAND IAN

IPC: G01C19/56 ,  G01C19/5684

Abstract: A vibrating structure gyroscope having a silicon substantially planar ring vibrating structure (1) capacitive means for imparting drive motion to and sensing motion of the vibrating structure (1), and a screen layer (15) surrounding the capacitive means is made by depositing photoresist material (9) on a glass or silicon substrate (7), hardening, patterning and developing the photoresist (9) to expose areas of the substrate (7), etching the exposed areas to form cavities (10) therein, stripping any remaining photoresist material (9) attaching a silicon layer (8) to the cavitated substrate (7) depositing a layer of aluminium on the silicon layer (8), depositing photoresist material on the aluminium layer, hardening, patterning and developing the photoresist layer to expose areas of the aluminium layer, etching the exposed areas of the aluminium layer to leave regions of aluminium on the silicon layer providing bond pads (11, 12, 13 and 14), stripping the remaining photoresist from the aluminium layer, depositing another layer of photoresist material on the silicon layer (8) over the remaining deposited aluminium layer regions, hardening, patterning and developing the layer of photoresist material to expose areas of the silicon layer (8) and deep reactive ion etching the exposed areas of the silicon layer (8) to form therefrom the substantially planar ring vibrating structure (1) mounted by a hub (4) above the cavities (10).

公开(公告)号：AT247817T

公开(公告)日：2003-09-15

申请号：AT98933784

申请日：1998-07-13

Applicant: BAE SYSTEMS PLC

Inventor： FELL CHRISTOPHER PAUL ,  HOPKIN IAN DAVID ,  TOWNSEND KEVIN

IPC: G01L1/10 ,  G01C19/567 ,  G01P15/10 ,  G01C19/56

公开(公告)号：AU762989B2

公开(公告)日：2003-07-10

申请号：AU1872000

申请日：1999-12-17

Applicant: BAE SYSTEMS PLC

Inventor： FELL CHRISTOPHER PAUL ,  TOWNSEND KEVIN ,  STURLAND IAN

IPC: G01C19/56 ,  G01C19/5684

Abstract: A vibrating structure gyroscope having a silicon substantially planar ring vibrating structure (1) capacitive means for imparting drive motion to and sensing motion of the vibrating structure (1), and a screen layer (15) surrounding the capacitive means is made by depositing photoresist material (9) on a glass or silicon substrate (7), hardening, patterning and developing the photoresist (9) to expose areas of the substrate (7), etching the exposed areas to form cavities (10) therein, stripping any remaining photoresist material (9) attaching a silicon layer (8) to the cavitated substrate (7) depositing a layer of aluminium on the silicon layer (8), depositing photoresist material on the aluminium layer, hardening, patterning and developing the photoresist layer to expose areas of the aluminium layer, etching the exposed areas of the aluminium layer to leave regions of aluminium on the silicon layer providing bond pads (11, 12, 13 and 14), stripping the remaining photoresist from the aluminium layer, depositing another layer of photoresist material on the silicon layer (8) over the remaining deposited aluminium layer regions, hardening, patterning and developing the layer of photoresist material to expose areas of the silicon layer (8) and deep reactive ion etching the exposed areas of the silicon layer (8) to form therefrom the substantially planar ring vibrating structure (1) mounted by a hub (4) above the cavities (10).

公开(公告)号：AT242867T

公开(公告)日：2003-06-15

申请号：AT01900191

申请日：2001-01-08

Applicant: BAE SYSTEMS PLC

Inventor： FELL CHRISTOPHER PAUL ,  TOWNSEND KEVIN

IPC: G01C19/5677 ,  G01C19/5691 ,  G01C19/56 ,  G01P9/04

Abstract: A vibrating structure gyroscope comprises a resonant body, a drive transducer for driving resonant motion of the body, a pick-off for producing signals representative of the resonant motion, and a signal processor for extracting z-axis orientation information and x- and y-axis rate information from the signals. The resonant body is planar and the resonant motion takes place in a vibration mode pattern whose orientation angle with respect to the body varies in accordance with z-axis orientation of the body and couples energy into an out-of-plane response mode motion in accordance with rotation of the body about the x- or y-axis. The signal processor resolves the out-of-plane response mode motion with reference to a z-axis orientation signal to extract the x- and y-axis rate information.

公开(公告)号：CA2458590A1

公开(公告)日：2003-03-27

申请号：CA2458590

申请日：2002-09-06

Applicant: BAE SYSTEMS PLC

Inventor： ELEY REBECKA ,  MCWILLIAM STEWART ,  FELL CHRISTOPHER PAUL ,  FOX COLIN HENRY JOHN

IPC: G01C19/5684 ,  G01C19/56 ,  G01P9/04

Abstract: A single axis rate sensor including a substantially planar vibratory resonat or (1) having a substantially ring or hoop-like structure with inner and outer peripheries (1a, 1b) extending around a common axis (z) drive means (6) for causing the resonator (1) to vibrate in a Cos2.theta. vibration mode, carrie r mode pick-off means (7) for sensing movement of the resonator (1) in respons e to said drive means pick-off means (9) for detecting Sin2.theta. vibration mode motion induced by rotation around the Z-axis, Sin2.theta. vibration mod e drive means (8) for nulling said motion and support means (2) for flexibly supporting the resonator (1) and for allowing the resonator (1) to vibrate relative to the support means (2) in response to the drive means, or to applied rotation wherein the support means comprises only L support beams, where L .noteq. 2K, and K = 0, 1, 2 or 3.