-
31.发明专利
公开(公告)号：JPH08304504A
公开(公告)日：1996-11-22
申请号：JP13562295
申请日：1995-05-11
Applicant: CANON KK
Inventor： KANEKO NORIO , MATSUTANI SHIGEKI
Abstract: PURPOSE: To make possible the quick detection of abnormality of a current lead, stable supply of source electric power and safety operation of a device by providing an optical waveguide in the neighborhood of a conductor and performing constitution for optically detecting the deformation. CONSTITUTION: An optical converter 3 separates reflection light and/or transmission light 11 from an optical waveguide mounted in the neighborhood of incident light 10 from a light source 1 and a conductor of a current lead 4 from the incident light. An optical detector 9 detects the transmission light 11 from the optical waveguide. A device 5 for operating at low temperature is set in the inside of a low temperature vessel 6, and electric power is supplied from an outside power source 7. Abnormality of the current lead can be detected in detail by processing a signal of the detector 9 with a controller 8. Furthermore, the power source 7 and a cooler 14 are controlled by the controller 8 if necessary, the reduction of supply power for the device 5, the increase of cooling efficiency of the cooler 14 or the like are automatically controlled. As the result, because dealing with quick detection of the abnormality produced in the current lead can be performed, the electric power can be supplied from the current lead to the device at the optimum condition.
-
公开(公告)号：JPH08304271A
公开(公告)日：1996-11-22
申请号：JP13562095
申请日：1995-05-11
Applicant: CANON KK
Inventor： MATSUTANI SHIGEKI , KANEKO NORIO
Abstract: PURPOSE: To detect the minute change of polarized light in an early state when quenching occurs by making the polarized light incident to an optical fiber wound around a superconducting wire. CONSTITUTION: Light from a light source 11 is passed through a fiber 15 after the light is polarized 12 and split 111 into two beams after coming out of the end 18 of the fiber 15. The split polarized beams are respectively made incident to polarizing plates 112 and 121. One of the beam is again polarized 112 and split 113 into two parts and a light intensity sensitive element 115 receives one part and measures the intensity of the part. The other part is passed through an optical system 127, changed in direction 119, and received 120. The other beam polarized through the polarizing plate 121 is again split 122 into two parts and one part is received 124 and measured for intensity. The other part is received 120 after its direction is changed 125 and 126 and both parts form interference fringes upon being received 120. Signal processors 129-131 process electric signals obtained from each sensitive element and, when, for example, the absolute value of a differentiated component is larger than a prescribed threshold, it is discriminated that the position of the fiber 15 wounds around a high-magnetic-field generator 16 is deviated. Since the positional deviation is equivalent to abnormality caused by quenching, the occurrent of quenching can be detected.
-
33.发明专利
公开(公告)号：JPH07182967A
公开(公告)日：1995-07-21
申请号：JP34548093
申请日：1993-12-22
Applicant: CANON KK
Inventor： MATSUTANI SHIGEKI , OKUDA MASAHIRO
Abstract: PURPOSE:To prevent the burning of a fluorescent plate and improve the durability by combining a cantilever with an electron emitting element. CONSTITUTION:An electron emitting element 4 is composed of a thin film 2, an electron emission part 3, element electrodes 5, 6, and element electrode wirings 9, 10. Electrode wiring patterns 11-13 are connected with respectively corresponding electrodes and proper voltage is applied to the electrodes through the wiring patterns, the cantilever 1 is bent and altered in z-direction due to the expansion and contraction of the piezoelectric thin film and the whole body of the element. The element 4 is formed on an insulating layer 14 and since an electric field covers over the element 4 in x-direction, the electron emission direction strongly depends on the inclination of the substrate on which the element 4 is set. Consequently, the electron emission angle can be altered and the radiation position on the fluorescent plate is altered by controlling the angle of the element 4 by the bending and altering of the lever 1. As a result, the emission angle of the element 4 can be controlled freely and, for example, in the case of the element 4 used as a display apparatus of a television, the convergence of electron distribution in the fluorescent plane can be avoided and deterioration of the fluorescent plate can be prevented.
-
公开(公告)号：JPH06252461A
公开(公告)日：1994-09-09
申请号：JP6133093
申请日：1993-02-26
Applicant: CANON KK
Inventor： MATSUTANI SHIGEKI
IPC: G01N27/76 , H01L29/80 , H01L39/22 , H01L39/24 , H01L29/804
Abstract: PURPOSE:To enhance a magnetic quantization measuring device in electrical conductivity even if superconductor is employed by a method wherein a ring- shaped hollow is so formed in size as to quantize external magnetism, and a space wherein a superconductor and an electrical conductor are vertically stacked up so as to have the ring-shaped hollow in common is provided. CONSTITUTION:An AB device 2 of ring-shaped semiconductor is formed under a superconductive ring-shaped body 1. The ring-shaped body 1 and the AB device 2 are of the same shape and so arranged making their center hollows precisely overlap each other in a vertical direction as to have their center hollows in common. The AB device 2 joined to external paths 4 and 5 is so controlled in size and amount of impurities as to enable electrons to behave like waves. When a measuring operation is executed, electrons coherent to each other and uniform in phase are injected from a power supply 6.
-
公开(公告)号：JPH06221907A
公开(公告)日：1994-08-12
申请号：JP1099893
申请日：1993-01-26
Applicant: CANON KK
Inventor： KANEKO NORIO , MATSUTANI SHIGEKI
Abstract: PURPOSE:To provide a microvibration detector for detecting three-dimensional microvibration with high mechanical reliability. CONSTITUTION:A magnetic circuit 11 is worked into ring shape. A superconductor 2 levitates through Meissner effect and shields the irradiating light. A cylindrical lens 14 converts the shape of light beam emitted from a light generating source 13 from a circle into a line and irradiates the levitating superconductor 12 with the light beam thus converted. A superconductive sensor 15 detects the light which is not shielded by the superconductor 12 and comprises Josephson junctions arranged at an interval of 10mum. The magnetic circuit 11, the light generating source 13, the cylindrical lens and the superconductive sensor 15 are secured to one structure so that the relative positions do not vary.
-
Patent Agency Ranking
公开(公告)号：JPH0621375A
公开(公告)日：1994-01-28
申请号：JP19462792
申请日：1992-06-30
Applicant: CANON KK
Inventor： MATSUTANI SHIGEKI , TSURU HIDEO , TAKEDA TOSHIHIKO , TAKAHASHI RIE , SAKANO YOSHIKAZU , NOMURA ICHIRO , KANEKO TETSUYA , SUZUKI HIDETOSHI
Abstract: PURPOSE:To provide an electron emitting element which enables attainment of a stable electron emission characteristic, by providing a plurality of projecting electrodes between electrodes so that they are opposed to each other and by disposing a plurality of minute electron-emitting parts on a line thereof. CONSTITUTION:When projecting parts 27 being ready to generate concentration of an electric field are disposed between electrodes 23 and 24 forming an emitting part 26 on an insulative substrate 21, at a pitch being equal virtually to a gap of the electrodes, minute emitting parts are formed uniformly in the shape of a straight line connecting the projecting parts 27. Although the gap of the electrodes is five microns or less, it is made one micron or less when a higher precision is needed. Then, an organic metal is applied in dispersion by coating between the electrodes and baked and thereby metal particle films 25 are formed. When electrification is made, the films are made to be of low resistance partially and thereby electron-emitting parts 26 are formed. It is supposed in this respect that a temperature distribution or an electric field distribution becomes discontinuous at the projecting part 27 and consequently the electron-emitting parts 26 are formed along projections. Accordingly, an electron-emitting element being similar to the one formed by parallel connection of the minute emitting parts can be realized easily by the electrification processing and an excellent image being free from nonuniformity in display can be formed.
-
公开(公告)号：JPH05181017A
公开(公告)日：1993-07-23
申请号：JP1815192
申请日：1992-01-06
Applicant: CANON KK
Inventor： MATSUTANI SHIGEKI
Abstract: PURPOSE:To transmit information without reflection even when the propagation direction of light is changed by composing the optical fiber of a system which is a connection part connecting for plural elements or devices which perform storing, operation, or measurement and forms a linear curve in such a shape that the transmission of light is not impeded. CONSTITUTION:The radius of curvature of the linear curve is cosh(as)/b based upon 1st and 2nd parameters (a) and (b) and coordinates (s) along the curve and a positive integer N and the two parameters (b) and (c) are so determined that b/a=2(N(N+1)) . A figure (a) when N=1 corresponds to a figure (b) when N=2, the curves actually has no intersection and a spatial interval, and a selfevident knot is obtained, so that the direction of the light can be changed without reflection. Therefore, the nonreflective optical fiber which has the finite radius of curvature is formed as the connection part for plural elements or devices which perform the storing, operation or measurement.
-
公开(公告)号：JPH04192318A
公开(公告)日：1992-07-10
申请号：JP31803390
申请日：1990-11-26
Applicant: CANON KK
Inventor： MATSUTANI SHIGEKI
IPC: G03F9/00 , H01L21/027 , H01L21/30
Abstract: PURPOSE:To eliminate unnecessary noise component, and detect position with high precision, by installing a means for correcting apparent errors caused by resist. CONSTITUTION:Alignment light passes a half-mirror 12 and a reticle R and subjected to demagnification projection by an exposing optical system. A pattern image on G1 is formed on a wafer mark M. The mark center contains errors due to the apparent image caused by resist, and therefore a lattice pattern 30 is arranged between a light source 18 for illuminating a wafer mark 31 and said wafer mark. The lattice pattern 30 has a constant period at a constant angle to the direction for position detection. The conjugate relation between the wafer mark and the pattern is sensed by an optical system. From the sensed signal, each of the positions of the wafer mark and the pattern is detected. Based on the above results, the distortion of the pattern image is measured, and the apparent quantity of the wafer mark caused by the resist is corrected by using the measured value.
-
39.发明专利
公开(公告)号：JP2003233602A
公开(公告)日：2003-08-22
申请号：JP2002030816
申请日：2002-02-07
Applicant: CANON KK
Inventor： KIMURA KEIKO , ASAI AKIRA , MATSUTANI SHIGEKI
Abstract: PROBLEM TO BE SOLVED: To provide a basis expansion method for a one-dimensional discontinuous function that can accelerate a more accurate expansion by reducing an error due to discontinuity even for constant width mesh generation without consideration to the place of a point of discontinuity, when expanding a one- dimensional discontinuous function in a basis, and an information processor using the expansion method. SOLUTION: For a basis expansion of a one-dimensional discontinuous function, the function is substituted once with a continuous function, and it is expanded in a polynomial basis of a given order. COPYRIGHT: (C)2003,JPO
-
公开(公告)号：JP2000249515A
公开(公告)日：2000-09-14
申请号：JP5204699
申请日：1999-02-26
Applicant: CANON KK
Inventor： MATSUTANI SHIGEKI
IPC: H01L21/027 , G01B11/00 , G03F9/00 , G06F17/14
Abstract: PROBLEM TO BE SOLVED: To detect the phase of a signal that is strong against noise and to improve position detection accuracy by performing the spectral decomposition of a time-series data and extracting a finite number of time-series data including the frequency with the maximum power intensity. SOLUTION: A pattern on a reticle 306 is printed onto a wafer 302 that is controlled by a control device 313 and an XY stage 301 according to light from a light source 304. Optical systems 303, 307, and 308 make an image pickup device 309 and an alignment mark 305 on a wafer optically conjugate each other, and a position detection device 312 detects a position from the image of an alignment mark 305 being picked up. Then, a finite number of time-series sample data including a specific frequency component are subjected to spectral decomposition for extracting a frequency f0 with the maximum power intensity, thus extracting the finite number of time-series data. Based on the finite number of time-series data, a Fourier component D0 of the frequency f0 is subjected to operation, and the phase component of a signal with a specific frequency is subjected to operation based on the obtained Fourier component.
-
-
-
-
-
-
-
-
-
Search Results
63
records
(took 0.027 seconds)
