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    Optical ring resonator-based microfluidic sensor
    31.
    发明授权
    Optical ring resonator-based microfluidic sensor 有权

    公开(公告)号：US11768153B1

    公开(公告)日：2023-09-26

    申请号：US17689120

    申请日：2022-03-08

    Applicant: GlobalFoundries U.S. Inc.

    Inventor： Bartlomiej J. Pawlak ,  Michal Rakowski

    IPC: G01N21/31 ,  G02B6/293

    CPC classification number: G01N21/31 ,  G02B6/2935 ,  G02B6/29343

    Abstract: Disclosed is a structure (e.g., a lab-on-chip structure) including a substrate, an insulator layer on the substrate, and at least one optical ring resonator. Each ring resonator includes cladding material on the insulator layer and, embedded within the cladding material, a first waveguide core with an input and an output, and second waveguide core(s) (e.g., ring waveguide core(s)) positioned laterally adjacent to the first waveguide core. A reservoir is below the ring resonator within the insulator layer and substrate such that surfaces of the waveguide cores are exposed within the reservoir. During a sensing operation, the waveguide core surfaces contact with fluid within the reservoir and a light signal at the output of the first waveguide core is monitored (e.g., by a sensing circuit, which in some embodiments is also coupled to a reference optical ring resonator) and used, for example, for spectrum-based target identification and, optionally, characterization.

    Optical power modulators with unloaded transmission lines
    32.
    发明授权
    Optical power modulators with unloaded transmission lines 有权

    公开(公告)号：US11630335B2

    公开(公告)日：2023-04-18

    申请号：US17170237

    申请日：2021-02-08

    Applicant: GLOBALFOUNDRIES U.S. Inc.

    Inventor： Michal Rakowski ,  Abdelsalam Aboketaf ,  Kevin K. Dezfulian ,  Massimo Sorbara

    IPC: G02F1/025 ,  G02F1/225

    Abstract: Structures for an optical power modulator and methods of fabricating a structure for an optical power modulator. A first waveguide core includes first and second sections. A second waveguide core includes a first section laterally adjacent to the first section of the first waveguide core and a second section laterally adjacent to the second section of the first waveguide core. An interconnect structure is formed over the first waveguide core and the second waveguide core. The interconnect structure includes first and second transmission lines. The first transmission line is physically connected within the interconnect structure to the first section of the first waveguide core. The second transmission line includes a first section physically connected within the interconnect structure to the second section of the first waveguide core and a second section adjacent to the first transmission line.

    Optical ring modulator with photonic crystal
    33.
    发明授权
    Optical ring modulator with photonic crystal 有权

    公开(公告)号：US11609475B2

    公开(公告)日：2023-03-21

    申请号：US17119042

    申请日：2020-12-11

    Applicant: GLOBALFOUNDRIES U.S. INC.

    Inventor： Michal Rakowski ,  Yusheng Bian ,  Won Suk Lee ,  Roderick A. Augur

    IPC: G02F1/225

    Abstract: Embodiments of the disclosure provide an optical ring modulator. The optical ring modulator includes waveguide with a first semiconductor material of a first doping type, and a second semiconductor material having a second doping type adjacent the first semiconductor material. A P-N junction is between the first semiconductor material and the second semiconductor material. A plurality of photonic crystal layers, each embedded within the first semiconductor material or the second semiconductor material, has an upper surface that is substantially coplanar with an upper surface of the waveguide structure.

    OPTICAL DEVICE WITH LOW-LOSS THERMALLY TUNABLE CLOSED-CURVE OPTICAL WAVEGUIDE
    36.
    发明申请
    OPTICAL DEVICE WITH LOW-LOSS THERMALLY TUNABLE CLOSED-CURVE OPTICAL WAVEGUIDE 有权

    公开(公告)号：US20230003937A1

    公开(公告)日：2023-01-05

    申请号：US17363846

    申请日：2021-06-30

    Applicant: GLOBALFOUNDRIES U.S. Inc.

    Inventor： Michal Rakowski ,  Petar I. Todorov ,  Yusheng Bian ,  Won Suk Lee ,  Asif J. Chowdhury ,  Kenneth Giewont

    IPC: G02B6/125 ,  G02F1/01

    Abstract: Disclosed is a photonic structure and associated method. The structure includes a closed-curve waveguide having a first height, as measured from the top surface of an insulator layer, and an outer curved sidewall that extends essentially vertically the full first height (e.g., to minimize signal loss). The structure includes a closed-curve thermal coupler and a heating element. The closed-curve thermal coupler is thermally coupled to and laterally surrounded by the closed-curve waveguide and has a second height that is less than the first height. In some embodiments, the closed-curve waveguide and the closed-curve thermal coupler are continuous portions of the same semiconductor layer having different thicknesses. The heating element is thermally coupled to the closed-curve thermal coupler and thereby indirectly thermally coupled to the closed-curve waveguide. Thus, the heating element is usable for thermally tuning the closed-curve waveguide via the closed-curve thermal coupler to minimize any temperature-dependent resonance shift (TDRS).

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