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公开(公告)号:US11500198B2
公开(公告)日:2022-11-15
申请号:US17146509
申请日:2021-01-12
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Won Suk Lee , Thomas G. Weeks, III , Michal Rakowski , Yusheng Bian , Roderick A. Augur , Alexander L. Martin , Petar I. Todorov
Abstract: Disclosed are a system, method, software tool, etc. for generating a layout indicating the paths for balanced optical waveguides (WGs) of a WG bus. A grid is used to route paths, which extend between corresponding first and second input/output nodes, respectively, and which are within boundaries of a defined area. The paths are automatically rerouted to balance for length and number of bends without overly increasing the lengths of or number of bends in those paths and further without moving the input/output nodes or falling outside the established boundaries. Automatic rerouting of the paths is performed iteratively based on results of various intersection operations related to different path-specific sets of points on the grid to determine when and where to insert additional linear segments and bends into the paths. Then, a layout indicating the balanced paths is generated. Also disclosed is a WG bus structure with balanced optical WGs.
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公开(公告)号:US11474294B2
公开(公告)日:2022-10-18
申请号:US17162303
申请日:2021-01-29
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Alec Hammond , Yusheng Bian , Michal Rakowski , Won Suk Lee , Asif J. Chowdhury , Roderick A. Augur
Abstract: Structures including a grating coupler and methods of forming a structure that includes a grating coupler. The grating coupler includes segments that are spaced along a longitudinal axis. Each segment is inclined relative to the longitudinal axis. Each segment includes a first curved section having a first curvature and a second curved section having a second curvature that is inverted relative to the first curvature.
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公开(公告)号:US20250147235A1
公开(公告)日:2025-05-08
申请号:US18501602
申请日:2023-11-03
Applicant: GlobalFoundries U.S. Inc.
Inventor: Yusheng Bian , Andreas D. Stricker , Abdelsalam Aboketaf , Judson R. Holt , Kevin K. Dezfulian , Kenneth J. Giewont , Alexander Derrickson , Won Suk Lee , Sujith Chandran , Ryan W. Sporer , Teng-Yin Lin
Abstract: Structures for a photonics chip that include a photodetector and methods of forming such structures. The structure comprises a photodetector that is disposed on a substrate and that includes a light-absorbing layer. The light-absorbing layer includes a sidewall and a notch in the sidewall. The structure further comprises a waveguide core including a section adjacent to the notch in the sidewall of the light-absorbing layer.
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公开(公告)号:US11609475B2
公开(公告)日:2023-03-21
申请号:US17119042
申请日:2020-12-11
Applicant: GLOBALFOUNDRIES U.S. INC.
Inventor: Michal Rakowski , Yusheng Bian , Won Suk Lee , Roderick A. Augur
IPC: G02F1/225
Abstract: Embodiments of the disclosure provide an optical ring modulator. The optical ring modulator includes waveguide with a first semiconductor material of a first doping type, and a second semiconductor material having a second doping type adjacent the first semiconductor material. A P-N junction is between the first semiconductor material and the second semiconductor material. A plurality of photonic crystal layers, each embedded within the first semiconductor material or the second semiconductor material, has an upper surface that is substantially coplanar with an upper surface of the waveguide structure.
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公开(公告)号:US11567260B1
公开(公告)日:2023-01-31
申请号:US17501508
申请日:2021-10-14
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Yusheng Bian , Won Suk Lee , Lin Jiang , Colleen Meagher
IPC: G02B6/122 , G02B6/36 , H01L31/0232
Abstract: Structures including an optical component and methods of forming a structure including an optical component. The structure includes an optical component on a substrate, and a back-end-of-line stack including multiple metal levels. Each of the metal levels includes a dielectric layer and metal features positioned over the optical component as metal fill in the dielectric layer. The metal features in at least two of the metal levels are arranged to overlap such that the optical component is fully covered normal to the substrate.
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公开(公告)号:US20230003937A1
公开(公告)日:2023-01-05
申请号:US17363846
申请日:2021-06-30
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Michal Rakowski , Petar I. Todorov , Yusheng Bian , Won Suk Lee , Asif J. Chowdhury , Kenneth Giewont
Abstract: Disclosed is a photonic structure and associated method. The structure includes a closed-curve waveguide having a first height, as measured from the top surface of an insulator layer, and an outer curved sidewall that extends essentially vertically the full first height (e.g., to minimize signal loss). The structure includes a closed-curve thermal coupler and a heating element. The closed-curve thermal coupler is thermally coupled to and laterally surrounded by the closed-curve waveguide and has a second height that is less than the first height. In some embodiments, the closed-curve waveguide and the closed-curve thermal coupler are continuous portions of the same semiconductor layer having different thicknesses. The heating element is thermally coupled to the closed-curve thermal coupler and thereby indirectly thermally coupled to the closed-curve waveguide. Thus, the heating element is usable for thermally tuning the closed-curve waveguide via the closed-curve thermal coupler to minimize any temperature-dependent resonance shift (TDRS).
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公开(公告)号:US11353651B2
公开(公告)日:2022-06-07
申请号:US17087182
申请日:2020-11-02
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Abdelsalam A. Aboketaf , Won Suk Lee , Yusheng Bian
Abstract: The present disclosure relates to semiconductor structures and, more particularly, to multi-mode optical waveguide structures with isolated absorbers and methods of manufacture. The structure includes: a waveguide structure including tapered segments; and at least one isolated waveguide absorber adjacent to the waveguide structure along its length.
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公开(公告)号:US12271030B2
公开(公告)日:2025-04-08
申请号:US17952969
申请日:2022-09-26
Applicant: GlobalFoundries U.S. Inc.
Inventor: Yusheng Bian , Won Suk Lee
Abstract: Structures for an optical coupler and methods of forming a structure for an optical coupler. The structure comprises a stacked waveguide core including a first waveguide core and a second waveguide core. The first waveguide core includes a first tapered section, and the second waveguide core includes a second tapered section positioned to overlap with the first tapered section. The structure further comprises a third waveguide core including a third tapered section positioned adjacent to the first tapered section of the first waveguide core and the second tapered section of the second waveguide core.
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公开(公告)号:US12189183B2
公开(公告)日:2025-01-07
申请号:US18046189
申请日:2022-10-13
Applicant: GlobalFoundries U.S. Inc.
Inventor: Yusheng Bian , Won Suk Lee , Andreas D. Stricker
Abstract: A structure includes a polarization device such as a polarization splitter, a polarization combiner or a polarization splitter rotator including a waveguide having a light absorber at an end section with an at least hook shape, e.g., it can be hooked or spiral shape. The structure also includes another waveguide adjacent the stated waveguide. The hook or spiral shape acts as a light absorber that reduces undesired optical noise such as excessive light insertion loss and/or light scattering. The hook or spiral shape may also be used on supplemental waveguides used to further filter and/or refine an optical signal in one of the waveguides of the polarization device, e.g., downstream of an output section of the polarization splitter and/or rotator.
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公开(公告)号:US20230073958A1
公开(公告)日:2023-03-09
申请号:US18055576
申请日:2022-11-15
Applicant: GlobalFoundries U.S. Inc.
Inventor: Michal Rakowski , Petar I. Todorov , Yusheng Bian , Won Suk Lee , Asif J. Chowdhury , Kenneth J. Giewont
Abstract: Disclosed is a photonic structure and associated method. The structure includes a closed-curve waveguide having a first height, as measured from the top surface of an insulator layer, and an outer curved sidewall that extends essentially vertically the full first height (e.g., to minimize signal loss). The structure includes a closed-curve thermal coupler and a heating element. The closed-curve thermal coupler is thermally coupled to and laterally surrounded by the closed-curve waveguide and has a second height that is less than the first height. In some embodiments, the closed-curve waveguide and the closed-curve thermal coupler are continuous portions of the same semiconductor layer having different thicknesses. The heating element is thermally coupled to the closed-curve thermal coupler and thereby indirectly thermally coupled to the closed-curve waveguide. Thus, the heating element is usable for thermally tuning the closed-curve waveguide via the closed-curve thermal coupler to minimize any temperature-dependent resonance shift (TDRS).
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