Microphone, manufacturing method and control method thereof

    公开(公告)号:US10313797B2

    公开(公告)日:2019-06-04

    申请号:US15363701

    申请日:2016-11-29

    Inventor: Ilseon Yoo

    Abstract: A microphone, a manufacturing method and a control method of the microphone are provided. The microphone includes an insulating layer bonded to a surface of a substrate in which a sound inlet is formed and includes a plurality of sound apertures. A diaphragm is formed at a position that corresponds to the sound inlet of the substrate on an upper surface of the insulating layer. A displacement adjusting layer is disposed in a circumference of the diaphragm on the upper surface of the insulating layer and is configured to adjust hardness of the diaphragm based on an input sound. A fixing layer is disposed on the diaphragm and the displacement adjusting layer while spaced apart from the diaphragm and the displacement adjusting layer.

    Microphone having a sound delay filter

    公开(公告)号:US10212502B2

    公开(公告)日:2019-02-19

    申请号:US15654396

    申请日:2017-07-19

    Inventor: Ilseon Yoo

    Abstract: A microphone having a plural porous sound delay filter is provided. The microphone includes a housing that has a first sound passage, a second sound passage and a third sound passage. A sound element is disposed in a position that corresponds to the first sound passage in the housing, and a semiconductor chip is electrically connected with the sound element in the housing. A low frequency lag filter is disposed in the second sound passage and delays low frequency sound source and a high frequency lag filter is disposed in third sound passage and delays high frequency sound source.

    MEMS resonator
    36.
    发明授权

    公开(公告)号:US10177733B2

    公开(公告)日:2019-01-08

    申请号:US15152866

    申请日:2016-05-12

    Inventor: Ilseon Yoo

    Abstract: A MEMS resonator includes a main substrate forming a receiving part at a center of the main substrate; a mass body having one end part and a center part elastically supported by both sides of the main substrate; a driving unit configured at one side of the receiving part on the main substrate and producing a driving force by a voltage applied to both sides of the one end part of the mass body to move a position of the mass body with respect to the main substrate; and a tuning part including a pair of tuning units provided symmetrically with respect to the second elastic member, and having a beam member changing a length of the second elastic member by an actuating operation of each tuning unit to control a frequency.

    Microphone device and control method thereof

    公开(公告)号:US09872102B2

    公开(公告)日:2018-01-16

    申请号:US14853524

    申请日:2015-09-14

    Inventor: Ilseon Yoo

    CPC classification number: H04R3/00 H04R2410/01 H04R2499/13

    Abstract: A microphone device includes a case having a sound hole and a phase delay membrane. A plurality of non-directional microphones disposed in the case. A semiconductor chip is connected to the non-directional micro electro mechanical system (MEMS) microphones and operating in response to input signals, in which any one of the non-directional microphones forms a directional microphone by being connected with the sound hole and the phase delay membrane of the case.

    Microphone sensor
    39.
    发明授权

    公开(公告)号:US09693150B2

    公开(公告)日:2017-06-27

    申请号:US14847776

    申请日:2015-09-08

    CPC classification number: H04R17/02 H04R2201/003 H04R2410/03

    Abstract: A microphone, that increases sensitivity without a separate circuit is provided. The microphone includes an audio detection module having a vibration film that outputs capacitance signals by vibrating audio introduced from the exterior and a piezoresistive element that outputs a piezoresistive signal by a sound pressure of the audio. A semiconductor chip includes an amplifier electrically connected to the audio detection module to receive a capacitance signal and a piezoresistive signal from the audio detection module and amplifies the capacitance signal and piezoresistive signal to an electrical signal. The amplifier includes an input terminal that receives an input of the capacitance signal; a first resistor connected to the input terminal and the piezoresistive element; an output terminal that amplifies and outputs the capacitance signal and piezoresistive signal to an electrical signal; and a second resistor connected to the input terminal and the output terminal and connected to the piezoresistive element.

    Microphone and method of manufacturing the same
    40.
    发明授权
    Microphone and method of manufacturing the same 有权
    麦克风及其制造方法

    公开(公告)号:US09380391B2

    公开(公告)日:2016-06-28

    申请号:US14555873

    申请日:2014-11-28

    CPC classification number: H04R17/02 H04R31/00

    Abstract: A microphone and method of manufacturing the microphone are provided. The microphone includes a substrate that has a penetration aperture, a vibration film disposed on the substrate that covers the penetration aperture, and a first electrode disposed on the vibration film. The first electrode includes a first portion and a second portion separated from each other. In addition, the microphone includes a piezoelectric layer disposed on the second portion of the first electrode, a second electrode disposed on the piezoelectric layer, and a fixed electrode. Further, the first portion of the first electrodes is disposed at a substantially center portion of the vibration film and the second portion of the first electrode is disposed at an edge portion of the vibration film.

    Abstract translation: 提供麦克风和制造麦克风的方法。 麦克风包括具有穿透孔的基板,设置在基板上的覆盖穿透孔的振动膜以及设置在振动膜上的第一电极。 第一电极包括彼此分离的第一部分和第二部分。 此外,麦克风包括设置在第一电极的第二部分上的压电层,设置在压电层上的第二电极和固定电极。 此外,第一电极的第一部分设置在振动膜的大致中心部分,第一电极的第二部分设置在振动膜的边缘部分。

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