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公开(公告)号：AU7544587A
公开(公告)日：1988-01-29
申请号：AU7544587
申请日：1987-06-12
Applicant: ROSEMOUNT INC
Inventor： KNECHT THOMAS A , FRICK ROGER L , BRUESEHOFF STEVEN M
Abstract: A cell for sensing differential pressures has a single brittle material diaphragm mounted on support plates positioned on opposite sides of the diaphragm. The diaphragm surfaces when at zero differential pressure facing the support are concave and shaped to conform very closely to the shape the diaphragm has when it is deflected so that when the diaphragm is under a selected pressure and it is forced against one of the supports in either direction, the diaphragm is substantially planar or flat and supported fully on its support plate. The diaphragm may be shaped by placing it under a pressure so that it bows or deflects and then grinding the surface opposite from the applied pressure flat. When the pressure is removed, the diaphragm relaxes and a cavity with the exact required shape is produced on the surface that had been bowed out and ground flat. The same procedure can be done to the other side of the diaphragm or two diaphragm sections may be fixed together.
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公开(公告)号：ZA857791B
公开(公告)日：1986-09-24
申请号：ZA857791
申请日：1985-10-09
Applicant: ROSEMOUNT INC
Inventor： FRICK ROGER L , SCHULTE JOHN P , KNECHT THOMAS A
Abstract: A capacitive sensing cell is adapted for manufacture in a batch process, and uses a substrate or base from a rigid insulating material such as glass and a diaphragm assembly of a brittle semiconductor. The diaphragm assembly and the substrate are anodically bonded together. A very shallow recess is formed on either the diaphragm or the substrate to accommodate a deposited capacitor plate. Two such assemblies are connected together and the assembly is filled with noncompressible fluid to slightly bow the diaphragms away from the substrates. Differential pressure between the diaphragm assemblies is sensed by detecting the relative positions of the two diaphragms.
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公开(公告)号：BR8407212A
公开(公告)日：1985-11-26
申请号：BR8407212
申请日：1984-12-07
Applicant: ROSEMOUNT INC
Inventor： KNECHT THOMAS A
Abstract: A transducer has a first and second sensing diaphragm configured such that a first pressure P1 is applied to the first diaphragm and a second pressure P2 is applied to the second diaphragm and wherein both diaphragms are formed on the same substantially flat face of a diaphragm wafer. The transducer is configured such that each diaphragm responsive to P1 or P2 respectively also affects a fluid in a closed common fluid cavity such that the deflection of the diaphragm is representative of the pressure differential (P1-P2).
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公开(公告)号：DE3751546T2
公开(公告)日：1996-02-22
申请号：DE3751546
申请日：1987-06-12
Applicant: ROSEMOUNT INC
Inventor： KNECHT THOMAS A , FRICK ROGER L , BRUESEHOFF STEVEN M
Abstract: A cell for sensing differential pressures has a single brittle material diaphragm mounted on support plates positioned on opposite sides of the diaphragm. The diaphragm surfaces when at zero differential pressure facing the support are concave and shaped to conform very closely to the shape the diaphragm has when it is deflected so that when the diaphragm is under a selected pressure and it is forced against one of the supports in either direction, the diaphragm is substantially planar or flat and supported fully on its support plate. The diaphragm may be shaped by placing it under a pressure so that it bows or deflects and then grinding the surface opposite from the applied pressure flat. When the pressure is removed, the diaphragm relaxes and a cavity with the exact required shape is produced on the surface that had been bowed out and ground flat. The same procedure can be done to the other side of the diaphragm or two diaphragm sections may be fixed together.
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公开(公告)号：HK6396A
公开(公告)日：1996-01-19
申请号：HK6396
申请日：1996-01-11
Applicant: ROSEMOUNT INC
Inventor： KNECHT THOMAS A , FRICK ROGER L , BREUSEHOFF STEVEN M
Abstract: A cell for sensing differential pressures has a single brittle material diaphragm mounted on support plates positioned on opposite sides of the diaphragm. The diaphragm surfaces when at zero differential pressure facing the support are concave and shaped to conform very closely to the shape the diaphragm has when it is deflected so that when the diaphragm is under a selected pressure and it is forced against one of the supports in either direction, the diaphragm is substantially planar or flat and supported fully on its support plate. The diaphragm may be shaped by placing it under a pressure so that it bows or deflects and then grinding the surface opposite from the applied pressure flat. When the pressure is removed, the diaphragm relaxes and a cavity with the exact required shape is produced on the surface that had been bowed out and ground flat. The same procedure can be done to the other side of the diaphragm or two diaphragm sections may be fixed together.
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Patent Agency Ranking
公开(公告)号：NO173074B
公开(公告)日：1993-07-12
申请号：NO880675
申请日：1988-02-16
Applicant: ROSEMOUNT INC
Inventor： KNECHT THOMAS A , BRUESEHOFF STEVEN M , FRICK ROGER L
Abstract: A cell for sensing differential pressures has a single brittle material diaphragm mounted on support plates positioned on opposite sides of the diaphragm. The diaphragm surfaces when at zero differential pressure facing the support are concave and shaped to conform very closely to the shape the diaphragm has when it is deflected so that when the diaphragm is under a selected pressure and it is forced against one of the supports in either direction, the diaphragm is substantially planar or flat and supported fully on its support plate. The diaphragm may be shaped by placing it under a pressure so that it bows or deflects and then grinding the surface opposite from the applied pressure flat. When the pressure is removed, the diaphragm relaxes and a cavity with the exact required shape is produced on the surface that had been bowed out and ground flat. The same procedure can be done to the other side of the diaphragm or two diaphragm sections may be fixed together.
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公开(公告)号：CA1297701C
公开(公告)日：1992-03-24
申请号：CA538826
申请日：1987-06-04
Applicant: ROSEMOUNT INC
Inventor： KNECHT THOMAS A , FRICK ROGER L
Abstract: A capacitive pressure sensor that is fabricated and a batch process affords isolation for the sensing element and leads from the pressure media and provides stress isolation as well. The pressure sensor is made up of a sandwich construction including a silicon wafer which is etched from one side to make cavities in a plurality of desired locations to form deflecting diaphragms, one surface of which acts as a capacitor plate. A glass layer is metalized on both sides and has holes drilled in locations that align with the diaphragms formed on the silicon wafer. The glass layer is anodically bonded to the wafer to form capacitance gap of a few microns relative to the one surface of each diaphragm. The assembly of the metalized glass layer and the silicon wafer is in a preferred form sandwiched between two additional layers, and bonded together in a vacuum atmosphere. The four layer sandwich is then cut up into individual sensors. The initial assembly can be formed to provide dampening of the diaphragm response times and to minimize the likelihood of false signals at high frequency inputs.
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公开(公告)号：DE3772992D1
公开(公告)日：1991-10-17
申请号：DE3772992
申请日：1987-06-01
Applicant: ROSEMOUNT INC
Inventor： KNECHT THOMAS A , RUF JAMES , SCHULTE JOHN P
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公开(公告)号：BR8707728A
公开(公告)日：1989-08-15
申请号：BR8707728
申请日：1987-05-29
Applicant: ROSEMOUNT INC
Inventor： KNECHT THOMAS A , FRICK ROGER L
Abstract: A capacitive pressure sensor that is fabricated by a batch process affords isolation for the sensing element and leads from the pressure media and provides stress isolation as well. The pressure sensor is made up of a sandwich construction including a silicon wafer which is etched from one side to make cavities in a plurality of desired locations to form deflecting diaphragms, one surface of which acts as a capacitor plate. A glass layer is metalized on both sides and has holes drilled in locations that align with the diaphragms formed on the silicon wafer. The glass layer is anodically bonded to the wafer to form capacitance gap of a few microns relative to the one surface of each diaphragm. The assembly of the metalized glass layer and the silicon wafer is in a preferred form sandwiched between two additional layers, and bonded together in a vacuum atmosphere. The four layer sandwich is then cut up into individual sensors. The initial assembly can be formed to provide dampening of the diaphragm response times and to minimize the likelihood of false signals at high frequency inputs.
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公开(公告)号：BR8707718A
公开(公告)日：1989-08-15
申请号：BR8707718
申请日：1987-06-01
Applicant: ROSEMOUNT INC
Inventor： KNECHT THOMAS A , RUF JAMES , SCHULTE JOHN P
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