公开(公告)号：JPH05198540A

公开(公告)日：1993-08-06

申请号：JP17150692

申请日：1992-06-08

Applicant: SONY CORP

Inventor： UGAJIN RYUICHI ,  HASE ICHIRO ,  NARUI FUMIYO

IPC: H01L21/302 ,  H01L21/3065 ,  H01L21/338 ,  H01L21/822 ,  H01L27/04 ,  H01L29/778 ,  H01L29/812

Abstract: PURPOSE:To provide a trench formation method which is capable of forming a minute trench with high precision on a substrate, and what is more, forming the trench per wafer collectively. CONSTITUTION:A slanting trench formation method etches the portion of a first mask layer responding to a trench formation scheduled area after having formed the first mask layer 12 on a substrate and forms an offset portion on the first mask layer 12. Then, a second mask layer 18 is formed at least on the first mask layer 12 so as to produce a step out portion 20 on the offset portion. The surface of the substrate is etched on the slant, thereby forming a slanting trench 22 from the step cut portion 20 of the second mask layer up to the substrate 10 by way of the first mask layer 12.

公开(公告)号：JPS62189724A

公开(公告)日：1987-08-19

申请号：JP3110286

申请日：1986-02-15

Applicant: SONY CORP

Inventor： KAWAI HIROHARU ,  IMANAGA TOSHIHARU ,  HASE ICHIRO ,  KANEKO KUNIO ,  WATABE SHOZO

IPC: H01L21/205

Abstract: PURPOSE:To effectively control the growing conditions of a film by providing means for monitoring the growing conditions of the film by the reflected lights incident in a direction substantially perpendicular to the surfaces of a plurality of substrates to facilitate the growing velocity and/or the composition of the film grown on the substrates. CONSTITUTION:A reflected light on a substrate 1 is emitted externally of a bell-jar 5 from an optical window 7a, then incident to a photomultiplier 13, detected, its output signal is amplified by a lock-in amplifier 14, then input to a data acquisition unit 15, and a reflected intensity is recorded as a signal B1. A laser light 10 emitted from a laser light source 9 and reflected on a beam splitter 12 is incident to and detected by a photomultiplier 16, its output signal is amplified by a lock-in amplifier 17, input to the data acquisition unit 15, and recorded as a signal A1. The unit 15 is connected through a growth controller 18 with an MFC controller 19, which controls an MFC for adjusting the quantity of growing gas fed in the jar 5.

公开(公告)号：JPS62189723A

公开(公告)日：1987-08-19

申请号：JP3110186

申请日：1986-02-15

Applicant: SONY CORP

Inventor： KAWAI HIROHARU ,  IMANAGA TOSHIHARU ,  HASE ICHIRO ,  KANEKO KUNIO ,  WATABE SHOZO

IPC: H01L21/66 ,  H01L21/205

Abstract: PURPOSE:To effectively control the growing conditions of a film by providing monitor means for monitoring the growing conditions of the film and means for controlling the growing conditions by feeding back obtained information to film growing condition control system to facilitate the growing velocity and/or the composition of the film. CONSTITUTION:A photomultiplier 16 is connected with a lock-in amplifier 17, the amplifier 17 is connected with a chopper 10, an only an output signal of a laser light 4 selected by the chopper 10 is fed to a recorder 18 to record the timing change of a reflected light intensity by a thin film 2. After a part of a laser light 4 emitted from an He-Ne laser light source 9 is reflected on the flat surface of a lens 11, it is incident to and amplified by a power meter 20, fed to a recorder 22 to record the timing change of the reflected light intensity on a chart. Accordingly, the intensity recorded in the recorder 18 is divided by the intensity recorded in the recorder 22 to accurately measure the timing change of the intensity of the reflected light by the film 2 even if the output of the light source 9 is varied.

公开(公告)号：JPS62189722A

公开(公告)日：1987-08-19

申请号：JP3110086

申请日：1986-02-15

Applicant: SONY CORP

Inventor： KAWAI HIROHARU ,  IMANAGA TOSHIHARU ,  HASE ICHIRO ,  KANEKO KUNIO ,  WATABE SHOZO

IPC: H01L21/205

Abstract: PURPOSE:To effectively control the growing conditions of a film by introducing a light incident from a direction substantially perpendicular to the surface of the film, and controlling the growing conditions of the film on the basis of the intensity of a reflected light and the variation in the time, thereby facilitating the growing velocity and/or the composition of the film. CONSTITUTION:When a thin film 2 of thickness (d) is laminated on a substrate 1 and the (d) is increased by perpendicularly introducing light, i.e., the vibration of the intensity of the reflected light by growing is observed, the composition of the film 2 can be obtained. When the composition is identified, a refractive index (n) can be obtained. Accordingly, the thickness of the film to the first valley of the reflecting intensity can be obtained by using the refractive index (n) and the growing velocity of the film can be decided by dividing the thickness by the growing time. When it is different from a desired value or the value is desirably altered, the data are fed back to an MFC (Mass flow controller) of a MOCVD apparatus to readjust the growing gas density.