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公开(公告)号:JP2530400B2
公开(公告)日:1996-09-04
申请号:JP32295291
申请日:1991-12-06
Applicant: SONY CORP
Inventor: NAKANE YASUAKI , SAKAMOTO SUSUMU , KYOMYA TADASHI , WATANABE KENJIRO
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公开(公告)号:JPH03100628A
公开(公告)日:1991-04-25
申请号:JP23873889
申请日:1989-09-14
Applicant: SONY CORP
Inventor: TAMADA SAKUYA , NAKANE YASUAKI
Abstract: PURPOSE:To obtain the plotter with few noise and superior durability and small and of light weight and to plot an image with high picture quality at high speed by performing the horizontal scan of a laser beam alternately with a pair of acousto-optical deflecting device. CONSTITUTION:The laser beam l0 is supplied to a cylindrical lens 11a, and after the beam width of the beam is magnified, it is supplied to a cylindrical lens 11b, and is returned to parallel rays, and is formed in flat shape in which the cross-sectional shape of the laser beam is magnified only in a horizontal scanning direction. A flat laser beam is supplied to a beam switch 12. The beam switch 12 is the acousto-optical deflecting device, and switches the emitting direction of an incident flat laser beam in the up-and-down direction. At such a case, since the deflection of the laser beam in the up-and-down direction with the beam switch 12 is not related to the resolution of a projecting image, it is not required to magnify beam size in a polarizing direction. By performing the horizontal scan alternately with intensity-modulated and divided laser beams, the plotter with few noise and superior durability and small and of light weight is obtained.
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公开(公告)号:JPH0343706A
公开(公告)日:1991-02-25
申请号:JP17858989
申请日:1989-07-11
Applicant: SONY CORP
Inventor: NAKANE YASUAKI , NAKAYAMA HIROSHI , SAKAMOTO SUSUMU
Abstract: PURPOSE:To securely correct the linearity of a display by obtaining a timing signal for scanning by using reference light, correcting the linearity of the display with this timing signal, and making a specific signal precede this timing signal. CONSTITUTION:The timing signal for scanning is obtained by using the reference light to correct the linearity of the display with the timing signal, and the specific signal is made to precede the timing signal. Namely, a dichroic mirror 21 and an infrared-ray laser light source 22 are provided on the optical path of laser beam Lw between a dielectric mirror and a polygon mirror 11 and a reference infrared laser beam Li is emitted by the light source 22. Further, a dichroic mirror 24 is provided on the optical path of the laser beam Lw be tween relay lenses 13 and 14 and separates the original display beam Lw and the reference beam Li ; and the beam Lw is supplied to a lens 14 and the beam Li is supplied to a grating plate 25. Consequently, the display with good linearity is made.
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公开(公告)号:JPH02170109A
公开(公告)日:1990-06-29
申请号:JP32487688
申请日:1988-12-23
Applicant: SONY CORP
Inventor: NAKANE YASUAKI
Abstract: PURPOSE:To display an excellent image having no vertical distortion by deciding the vertical deflection state of an image formed with a laser beam whose brightness is modulated from the deflection state of a reference beam and controlling a vertical deflecting means so that the position detection phase of the beam is coincident with the phase of the synchronizing signal of a video signal. CONSTITUTION:Optical modulators impose brightness modulation on laser beams of respective colors according to the video signal obtained at an input terminal 31 and the beam l1 composed of the respective color beams is made incident on a rotary polygon mirror 10, deflected horizontally, entered into a galvanomirror 7 through a projection lens 6, and deflected vertically to illuminate a screen 9. The reference laser beam ls1 is also made incident on the beam incidence point la of the mirror 7 and its reflected beam ls2 is made incident on an optical position sensor 20. The same deflection state of the beam ls2 is obtained because the incidence point l2 is the same and the same scanning state as the vertical scanning state a beam l3 on the screen 9 is obtained on the laser incidence surface of the sensor 20 as the excellent image having no vertical distortion.
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公开(公告)号:JPH02170108A
公开(公告)日:1990-06-29
申请号:JP32487588
申请日:1988-12-23
Applicant: SONY CORP
Inventor: NAKANE YASUAKI
Abstract: PURPOSE:To obtain an excellent distortionless image by deciding the distortion state of an image formed by deflecting a brightness-modulated laser beam from the deflection state of a reference beam and imposing brightness modulation by a video signal at timing based upon the position state of the beam. CONSTITUTION:Optical modulators 2a, 2b, and 2c impose brightness modulation upon laser beams of respective colors according to the video signal from an input terminal 41, the beam l1 composed of the modulated respective color beams is made incident on a rotary polygon mirror 10, and the horizontally deflected laser beam l2 is converted by a projection lens 6 into a projection beam l3, which is deflected vertically by a galvanomirror 7 to illuminate a screen 9. The reference laser beam ls1 is also made incident on the laser beam incidence point l3 of the polygon mirror 10 and the reflected beam ls2 of the beam ls1 is made incident on a cylindrical lens 13; and the reference laser beam ls3 is made incident on an optical position sensor 20 and the same scanning state as the scanning state of the beam l3 is reproduced on the laser beam incidence surface of the sensor 20 without any image distortion because the incidence point la is the same.
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公开(公告)号:JPH02168219A
公开(公告)日:1990-06-28
申请号:JP32455788
申请日:1988-12-22
Applicant: SONY CORP
Inventor: MIYAOKA CHISATO , NAKANE YASUAKI , TAMADA SAKUYA , NAKAYAMA HIROSHI
IPC: G02B26/10 , G02B26/12 , G09F9/00 , G09G3/02 , G09G3/20 , H01S3/00 , H01S3/101 , H04N3/08 , H04N5/74
Abstract: PURPOSE:To contrive the decrease, etc., of a rotating speed of a rotary polygon mirror by allowing a focusing light beam to be made incident on the rotary polygon mirror so that it is not shielded by a fixed plane mirror, reflecting repeatedly this focusing light beam between the rotary polygon mirror and the fixed plane mirror, and enlarging a deflection angle made by the rotary polygon mirror. CONSTITUTION:A fixed plane mirror 20 is placed so as to be opposed to a specular surface part 11 of a rotary polygon mirror 10, and a focusing light beam l1 is made incident on the rotary polygon mirror 10 at a prescribed elevation angle phi against a virtual plane being orthogonal to a rotation axis (m) of the rotary polygon mirror 10 so that it is not shielded by this fixed plane mirror 20. This focusing light beam l1 is reflected repeatedly between the rotary polygon mirror 10 and the fixed plane mirror 20 so as to enlarge a deflection angle made by the rotary polygon mirror 10. In such a way, by a simple constitution for only placing the fixed plane mirror in a prescribed position, the deflection angle can be enlarged satisfactorily, and the decrease, etc., of a rotating speed of the rotary polygon mirror can be contrived.
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公开(公告)号:JPH0115594B2
公开(公告)日:1989-03-17
申请号:JP9443681
申请日:1981-06-18
Applicant: SONY CORP
Inventor: NAKANE YASUAKI , SATO TADASHI , NOBUSAWA TOSHIO
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公开(公告)号:JPS5694745A
公开(公告)日:1981-07-31
申请号:JP17252779
申请日:1979-12-28
Applicant: SONY CORP
Inventor: NAKANE YASUAKI , NISHIMOTO YOSHITSUGU
IPC: H01L21/302 , H01J37/32 , H01L21/3065
Abstract: PURPOSE:To perform an etching of high accuracy and of high efficiency avoiding an impact of particles obstructing the etching by a method wherein the 3rd electrode which can make ion transmit is installed between the 1st electrode and the 2nd electrode having a sample on it, of a plasma treatment device. CONSTITUTION:The 3rd electrode 7 which can transmit ion is installed between the 1st electrode 2 and the 2nd electrode 3 having a sample 4 on it which are installed in a container 1 of a plasma treatment device. And then, a high frequency voltage is applied across the electrodes 2, 7 and a DC voltage to control the ion accelerating energy is applied between the electrode 3 and the electrode 7 and then, needless neutral radical molecules are forcibly exhausted from an exhaust gas port 6b. With this, an etching can be performed selectively by means of a required particle, accordingly, a fine pattern can be formed with high efficiency.
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公开(公告)号:JPS5362475A
公开(公告)日:1978-06-03
申请号:JP13807776
申请日:1976-11-16
Applicant: SONY CORP
Inventor: MIFUNE TADAYOSHI , NAKANE YASUAKI , MORI IWAO
IPC: H01L21/027 , G03F7/20 , H01L21/312 , H05K3/06
Abstract: PURPOSE:To facilitate photographic processing of semiconductor wafers by bonding a transparent thin plate for mask to transparent plate for supporting and using an exposure mask which is so arranged as to give atmospheric pressure in the space between both.
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公开(公告)号:JPH09153259A
公开(公告)日:1997-06-10
申请号:JP31334195
申请日:1995-11-30
Applicant: SONY CORP
Inventor: NAKANE YASUAKI , TAKEUCHI ATSUSHI
Abstract: PROBLEM TO BE SOLVED: To improve the error correction capability against Q high density and large capacity recording medium. SOLUTION: In the recording system, additional data for error correction are added to original data to be recorded by an error correction computing circuit 2. A data dividing circuit 3 divides the original data, to which error correction coded data are added, into data columns having a basic interleave length. The divided data columns are alternatively recorded onto an A surface 10a and a B surface 10b of an optical disk 10 by an A surface recording data buffer 4a, an A surface laser oscillator 7a, a B surface recording data buffer 4b and a B surface laser oscillator 7b. Moreover, in a reproducing system, the data columns read from the A surface 10a and the B surface 10b for every one of the columns of two dimensional array, whose column length corresponds to the basic interleave length, are successively arranged and error correction is conducted for every other column of the two dimensional array.
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