公开(公告)号：EP3346281B1

公开(公告)日：2019-10-09

申请号：EP17172105.3

申请日：2017-05-20

Applicant: STMicroelectronics S.r.l.

Inventor： LAGHI, Giacomo ,  LANGFELDER, Giacomo ,  GATTERE, Gabriele ,  TOCCHIO, Alessandro ,  PACI, Dario

IPC: G01R33/00

公开(公告)号：EP3226007B1

公开(公告)日：2019-05-29

申请号：EP16194689.2

申请日：2016-10-19

Applicant: STMicroelectronics S.r.l.

Inventor： TOCCHIO, Alessandro ,  GATTERE, Gabriele

IPC: G01P15/125 ,  G01P15/08

公开(公告)号：EP3217147B1

公开(公告)日：2018-12-12

申请号：EP16194684.3

申请日：2016-10-19

Applicant: STMicroelectronics S.r.l.

Inventor： GATTERE, Gabriele ,  FALORNI, Luca Giuseppe ,  VALZASINA, Carlo

IPC: G01C19/5712

CPC classification number: G01C19/5712

Abstract: A micromechanical detection structure (20) comprises: a substrate (2) of semiconductor material; a driving-mass arrangement (4a-4c), coupled to a set of driving electrodes (7a-7c) and driven in a driving movement following upon biasing of the set of driving electrodes; a first anchorage unit (5a-5c, 6a-6c), coupled to the driving-mass arrangement for elastically coupling the driving-mass arrangement to the substrate (2) at first anchorages (5a-5c); a driven-mass arrangement (10, 30), elastically coupled to the driving-mass arrangement by a coupling unit (22a-22b) and designed to be driven by the driving movement; and a second anchorage unit (14, 34), coupled to the driven-mass arrangement for elastically coupling the driven-mass arrangement to the substrate (2) at second anchorages (17, 37). Following upon the driving movement, the resultant of the forces and of the torques exerted on the substrate (2) at the first and second anchorages is substantially zero.

公开(公告)号：EP3301398A1

公开(公告)日：2018-04-04

申请号：EP17162662.5

申请日：2017-03-23

Applicant: STMicroelectronics S.r.l.

Inventor： GATTERE, Gabriele ,  TOCCHIO, Alessandro ,  VALZASINA, Carlo

IPC: G01C19/5726 ,  G01C19/574 ,  G01C19/5755

Abstract: A MEMS device including a main die (22) that may be coupled to a secondary die (2), which forms a frame (4), and at least one first mobile mass (6) elastically coupled to the frame, the main die (22) forming: a driving stage (20, 24) that drives the first mobile mass so that it oscillates, parallel to a first direction, with frequency-modulated displacements; and a processing stage (35), which generates an output signal indicating an angular velocity of the MEMS device (100) as a function of displacements parallel to a second direction that are made by the first mobile mass, when driven by the driving stage, on account of a Coriolis force.

Abstract translation: 一种MEMS器件，包括可以耦合到形成框架（4）的次级管芯（2）的主模具（22）以及弹性耦合到框架的至少一个第一移动质量块（6），主管芯 22）形成：驱动台（20,24），所述驱动台驱动所述第一可移动质量块，使得所述第一可移动质量块平行于第一方向以频率调制位移振荡; 以及处理级（35），当由所述驱动级驱动时，所述处理级生成表示所述MEMS装置（100）的角速度的输出信号，所述输出信号作为由所述第一移动质量块形成的平行于第二方向的位移的函数， 由于科里奥利部队。

公开(公告)号：EP3225953A1

公开(公告)日：2017-10-04

申请号：EP16194685.0

申请日：2016-10-19

Applicant: STMicroelectronics S.r.l.

Inventor： GATTERE, Gabriele ,  VALZASINA, Carlo ,  FALORNI, Luca Giuseppe

IPC: G01C19/5712

CPC classification number: G01C19/5747 ,  G01C19/5712

Abstract: A multi-axis MEMS gyroscope (42) is provided with a micromechanical detection structure (10) having: a substrate (12); a driving-mass arrangement (14a-14b); a driven-mass arrangement (20) with a central window (22); a sensing-mass arrangement (20; 35a-35b, 37a-37b), which undergoes sensing movements in the presence of angular velocities about a first horizontal axis (x) and a second horizontal axis (x); a sensing-electrode arrangement (29a-29b, 30a-30b), which is fixed with respect to the substrate and is set underneath the sensing-mass arrangement; and an anchorage assembly (24), set within the central window (22), for constraining the driven-mass arrangement to the substrate at anchorage elements (27). The anchorage assembly comprises a rigid structure (25a-25b), suspended above the substrate, elastically connected to the driven mass by elastic connection elements (26a-26b) at a central portion, and to the anchorage elements by elastic decoupling elements (28) at end portions thereof.

Abstract translation: 一种多轴MEMS陀螺仪（42）具有微机械检测结构（10），该微机械检测结构具有：衬底（12） 驱动质量装置（14a-14b）; 具有中央窗口（22）的驱动质量装置（20）; 感测质量装置（20; 35a-35b，37a-37b），其在围绕第一水平轴线（x）和第二水平轴线（x）的角速度存在下经历感测运动; 感测电极布置（29a-29b，30a-30b），所述感测电极布置相对于所述衬底固定并设置在所述感测质量布置下方; 和设置在中央窗口（22）内的锚固组件（24），用于在锚固元件（27）处约束从动块到衬底。 锚固组件包括悬挂在基底上方的刚性结构（25a-25b），其通过弹性连接元件（26a-26b）在中心部分弹性连接到从动物体，并通过弹性解耦元件（28）与锚固元件弹性连接， 在其端部。

公开(公告)号：EP3217147A1

公开(公告)日：2017-09-13

申请号：EP16194684.3

申请日：2016-10-19

Applicant: STMicroelectronics S.r.l.

Inventor： GATTERE, Gabriele ,  FALORNI, Luca Giuseppe ,  VALZASINA, Carlo

IPC: G01C19/5712

CPC classification number: G01C19/5712

Abstract: A micromechanical detection structure (20) comprises: a substrate (2) of semiconductor material; a driving-mass arrangement (4a-4c), coupled to a set of driving electrodes (7a-7c) and driven in a driving movement following upon biasing of the set of driving electrodes; a first anchorage unit (5a-5c, 6a-6c), coupled to the driving-mass arrangement for elastically coupling the driving-mass arrangement to the substrate (2) at first anchorages (5a-5c); a driven-mass arrangement (10, 30), elastically coupled to the driving-mass arrangement by a coupling unit (22a-22b) and designed to be driven by the driving movement; and a second anchorage unit (14, 34), coupled to the driven-mass arrangement for elastically coupling the driven-mass arrangement to the substrate (2) at second anchorages (17, 37). Following upon the driving movement, the resultant of the forces and of the torques exerted on the substrate (2) at the first and second anchorages is substantially zero.

Abstract translation: 微机械检测结构（20）包括：半导体材料的衬底（2） 驱动质量装置（4a-4c），所述驱动质量装置与一组驱动电极（7a-7c）耦合并且在所述一组驱动电极偏置之后在驱动运动中被驱动; 与所述驱动质量装置联接的第一锚定单元（5a-5c，6a-6c），用于在第一锚固件（5a-5c）处将所述驱动质量装置弹性联接到所述基板（2）; 驱动质量装置（10,30），其通过耦合单元（22a-22b）弹性耦合到所述驱动质量装置并且被设计为由所述驱动运动驱动; 和第二锚定单元（14,34），所述第二锚定单元联接到所述从动质量装置，用于在第二锚定件（17,37）处将所述从动质量装置弹性地联接到所述基底（2）。 在驱动运动之后，在第一和第二锚固件上施加在基板（2）上的力和扭矩的合力大致为零。