公开(公告)号：EP3907177A1

公开(公告)日：2021-11-10

申请号：EP21171635.2

申请日：2021-04-30

Applicant: STMicroelectronics S.r.l.

Inventor： GIUSTI, Domenico ,  FERRERA, Marco ,  PRELINI, Carlo Luigi

IPC: B81B3/00 ,  H01L41/09 ,  H04R17/00 ,  H04R7/18

Abstract: The MEMS actuator (50) is formed by a body (51), which surrounds a cavity (52) and by a deformable structure (54), which is suspended on the cavity and is formed by a movable portion (56) and by a plurality of deformable elements (55). The deformable elements are arranged consecutively to each other, connect the movable portion to the body and are each subject to a deformation. The MEMS actuator (50) further comprises at least one plurality of actuation structures (80A, 80B), which are supported by the deformable elements (55) and are configured to cause a translation of the movable portion greater than the deformation of each deformable element (55). The actuation structures each have a respective first piezoelectric region (82).

公开(公告)号：EP3745482A1

公开(公告)日：2020-12-02

申请号：EP20176144.2

申请日：2020-05-22

Applicant: STMicroelectronics S.r.l.

Inventor： GIUSTI, Domenico ,  PACI, Dario

IPC: H01L41/09 ,  H01L41/22 ,  G02B7/02 ,  B81B3/00

Abstract: A MEMS actuator (100) including a monolithic body (101) of semiconductor material, including a supporting portion (102) of semiconductor material, orientable with respect to a first and to a second rotation axis (A, B), transverse to each other; a first frame (104) of semiconductor material with a hexagonal shape, coupled to the supporting portion through first deformable elements (115) configured to control a rotation of the supporting portion about the first rotation axis (A); and a second frame (108) of semiconductor material with a regular quadrangular shape, coupled to the first frame by second deformable elements (116), coupled between the first and the second frames and configured to control a rotation of the supporting portion about the second rotation axis (B). The first and the second deformable elements carry respective piezoelectric actuation elements (150).

公开(公告)号：EP3741566A1

公开(公告)日：2020-11-25

申请号：EP20176121.0

申请日：2020-05-22

Applicant: STMicroelectronics S.r.l.

Inventor： GIUSTI, Domenico ,  COLECCHIA, Andrea Nicola ,  SANTORUVO, Gaetano

IPC: B41J2/02 ,  B41J2/14 ,  B41J2/16 ,  B41J2/025 ,  B41J2/03 ,  B41J2/11

Abstract: A microfluidic device for continuous ejection of fluids, including: a semiconductor body (3) that laterally delimits the chambers (4; 904; 1004); an intermediate structure (5), which forms the membranes (15), each of which delimits a corresponding chamber at the top; and a nozzle body (200), which overlies the intermediate structure. The device includes, for each chamber: a corresponding piezoelectric actuator (20); a supply channel (40), which traverses the intermediate structure and communicates with the chamber; and a nozzle (240), which traverses the nozzle body and communicates with the supply channel. Each actuator can be controlled so as to operate i) in a resting condition such that the pressure of a fluid within the corresponding chamber is equal to a value such that the fluid passes through the supply channel and is ejected from the nozzle in the form of a continuous stream, and ii) in an active condition, where it causes a deformation of the corresponding membrane and a consequent variation of the pressure of the fluid, causing a temporary interruption of the continuous stream.

公开(公告)号：EP3441358B1

公开(公告)日：2020-09-30

申请号：EP18187742.4

申请日：2018-08-07

Applicant: STMicroelectronics S.r.l.

Inventor： PACI, Dario ,  GIUSTI, Domenico ,  MARTINI, Irene

IPC: B81B3/00

公开(公告)号：EP3252449B1

公开(公告)日：2020-02-05

申请号：EP16206884.5

申请日：2016-12-23

Applicant: STMicroelectronics S.r.l.

Inventor： CALTABIANO, Daniele ,  ABBASI GAVARTI, Mohammad ,  MURARI, Bruno ,  BRIOSCHI, Roberto ,  GIUSTI, Domenico

IPC: G01L9/00 ,  G01L1/04

公开(公告)号：EP3569275A1

公开(公告)日：2019-11-20

申请号：EP19174758.3

申请日：2019-05-15

Applicant: STMicroelectronics S.r.l.

Inventor： DI MARCO, Oriana Rita Antonia ,  GIUSTI, Domenico

IPC: A61M15/06 ,  A24F47/00 ,  A61M11/04 ,  A61M15/02

Abstract: A microfluidic dispenser device of inhalable substances includes a casing (2), housed in which are a driving circuit (3) and a microfluidic cartridge (5) having a tank (17) that contains a liquid (L) to be delivered. The microfluidic cartridge (5) is provided with at least one nebuliser (18) controlled by the driving device (3). The nebuliser (18) includes: a substrate (20); a plurality of chambers (30) formed on the substrate (20) and fluidically coupled to the tank (17) for receiving the liquid (L) to be delivered; and a plurality of heaters (33), which are formed on the substrate (20) in positions corresponding to respective chambers (30), are thermally coupled to the respective chambers (30) and are separated from the respective chambers (30) by an insulating layer (21), and are controlled by the driving device (3). Each chamber (30) is fluidically connected with the outside by at least one respective nozzle (32) .

公开(公告)号：EP3326964B1

公开(公告)日：2019-07-24

申请号：EP17172106.1

申请日：2017-05-20

Applicant: STMicroelectronics S.r.l.

Inventor： DUQI, Enri ,  BALDO, Lorenzo ,  GIUSTI, Domenico

IPC: B81C1/00 ,  B81B7/00