公开(公告)号：EP3838315A1

公开(公告)日：2021-06-23

申请号：EP20212023.4

申请日：2020-12-04

Applicant: STMicroelectronics S.r.l.

Inventor： GIUSTI, Domenico ,  MARTINI, Irene

IPC: A61M11/04 ,  A24F47/00 ,  A61M15/02 ,  A61M15/06

Abstract: The microfluidic dispensing device (50) has a plurality of chambers (52) arranged in sequence, each having an inlet receiving a liquid to be dispensed and a nozzle for emitting a drop of liquid; a plurality of actuators (59), one per chamber, receiving an actuation quantity and causing a drop of liquid to be emitted by the nozzle of the respective chamber; a plurality of drop emission detection elements (51), one for each chamber (52), generating an actuation command upon detecting the emission of a drop of liquid; and a sequential activation electric circuit including a plurality of sequential activation elements (60B, 60C, 60D), one for each chamber (52), each coupled to the drop emission detection element (51) of the respective chamber and to an actuator (59) associated with a subsequent chamber in the sequence of chambers. Each sequential activation element receives the actuation command from the drop emission detection element (51) associated with the respective chamber and, in response thereto, activates the actuator associated with the subsequent chamber in the sequence of chambers.

公开(公告)号：EP4083679A1

公开(公告)日：2022-11-02

申请号：EP22170130.3

申请日：2022-04-26

Applicant: STMicroelectronics S.r.l.

Inventor： CARMINATI, Roberto ,  BONI, Nicolò ,  MARTINI, Irene ,  MERLI, Massimiliano ,  OGGIONI, Laura

IPC: G02B26/08 ,  B81C1/00

Abstract: A process for manufacturing a microelectromechanical mirror device includes: in a semiconductor wafer (50), defining a support frame (2), a plate (5) connected to the support frame (2) so as to be orientable around at least one rotation axis (X) and cantilever structures (9) extending from the support frame (2) and coupled to the plate (5) so that bending of the cantilever structures (9) causes rotations of the plate (5) around the at least one rotation axis (X); forming piezoelectric actuators (10) on the cantilever structures (9); forming pads (12) on the support frame (2); and forming spacer structures (25) protruding from the support frame (2) more than both the pads (12) and the stacks of layers (15, 16, 17, 20, 21, 22) forming the piezoelectric actuators (10).

公开(公告)号：EP3975273A1

公开(公告)日：2022-03-30

申请号：EP21199247.4

申请日：2021-09-27

Applicant: STMicroelectronics S.r.l.

Inventor： GIUSTI, Domenico ,  MARTINI, Irene ,  ASSANELLI, Davide ,  FERRARINI, Paolo ,  PRELINI, Carlo Luigi ,  QUAGLIA, Fabio

IPC: H01L41/08 ,  H01L41/09 ,  H01L41/319 ,  B06B1/06

Abstract: A piezoelectric microelectromechanical structure (10), provided with a piezoelectric layer structure (11) having a main extension in a horizontal plane (xy) and a variable cross-section in a plane (xz) transverse to the horizontal plane, comprises a bottom electrode (12), a piezoelectric material (14) constituted by a PZT film arranged on the bottom electrode, and a top electrode (16) arranged on the piezoelectric material, wherein the piezoelectric material has a first thickness (w1) along a vertical axis (z) at a first area (14') and a second thickness (w2) along the vertical axis (z) at a second area (14"), the second thickness being smaller than the first thickness. A corresponding manufacturing process is also disclosed.

公开(公告)号：EP3441358B1

公开(公告)日：2020-09-30

申请号：EP18187742.4

申请日：2018-08-07

Applicant: STMicroelectronics S.r.l.

Inventor： PACI, Dario ,  GIUSTI, Domenico ,  MARTINI, Irene

IPC: B81B3/00

公开(公告)号：EP3742506A1

公开(公告)日：2020-11-25

申请号：EP20176147.5

申请日：2020-05-22

Applicant: STMicroelectronics S.r.l.

Inventor： ASSANELLI, Davide ,  MARTINI, Irene ,  VINCIGUERRA, Lorenzo ,  LAZZARI, Carla Maria ,  FERRARINI, Paolo

IPC: H01L41/29 ,  H01L41/23 ,  H01L41/047 ,  H01L41/053 ,  B41J2/14

Abstract: A method for manufacturing a piezoelectric transducer (100) is disclosed, which comprises forming a bottom electrode (34, 40) on a semiconductor body (32), forming a piezoelectric element (36) on the bottom electrode, forming a protective layer (42) having a first opening (44) through which a portion of the piezoelectric element is exposed and a second opening (45) through which a portion of the bottom electrode is exposed, forming a conductive layer on the protective layer and within the first and second openings, and patterning the conductive layer to contextually form a top electrode (48) in electrical contact with the piezoelectric element at the first opening, a first biasing stripe (51) in electrical contact with the top electrode, and a second biasing stripe (52) in electrical contact with the bottom electrode at the second opening. A passivation layer (56) and metal contacts (61, 62) may be formed thereafter.