公开(公告)号：US20060145321A1

公开(公告)日：2006-07-06

申请号：US11316442

申请日：2005-12-22

Applicant: John Fisher

Inventor： John Fisher

IPC: H01L23/02

CPC classification number: G02B6/4226 ,  B81B2201/04 ,  G02B6/3644 ,  G02B6/3656 ,  G02B6/3692 ,  G02B7/00 ,  G02B7/026

Abstract: Provided is a microcomponent holder for retaining a micro-scale component. The microcomponent holder includes at least one aperture for receiving a micro-scale component therein. At least one loop-shaped support member is disposed about the aperture for contacting the micro-scale component to retain the micro-scale component within the microcomponent holder. The invention allows for retaining of microscale objects, such as lenses or other parts of micro-optical, micro-mechanical, micro-electromechanical, and other micro-scale systems.

Abstract translation: 提供了用于保持微尺度部件的微部件保持器。 微元件支架包括用于在其中接收微尺度部件的至少一个孔。 至少一个环形支撑构件设置在孔周围，用于接触微尺度部件以将微尺度部件保持在微部件保持器内。 本发明允许保留诸如透镜或微光学，微机械，微机电和其他微尺度系统的其它部件的微尺寸物体。

公开(公告)号：US20060037933A1

公开(公告)日：2006-02-23

申请号：US10923026

申请日：2004-08-23

Applicant: Wei-Ya Wang ,  Chung-Yuan Cheng ,  Tzu-Yang Wu ,  Keven Hung ,  Fei-Yuh Chen

Inventor： Wei-Ya Wang ,  Chung-Yuan Cheng ,  Tzu-Yang Wu ,  Keven Hung ,  Fei-Yuh Chen

IPC: C23F1/00 ,  B44C1/22

CPC classification number: C23F4/00 ,  B81B2201/04 ,  G02B26/0833

Abstract: A mirror process uses a tungsten passivation layer to prevent metal-spiking induced mirror bridging and improve mirror curvature. A mirror structure is patterned on a first sacrificial layer overlying a substrate. A tungsten passivation layer is then blanket deposited to cover the top and sidewalls of the mirror structure. A second sacrificial layer is formed overlying the tungsten passivation layer. A releasing process with an etchant including XeF2 is performed to remove the second sacrificial layer, the tungsten passivation layer and the first sacrificial layer simultaneously.

Abstract translation: 镜面处理使用钨钝化层来防止金属尖峰引起的反射镜桥接并改善镜面曲率。 在覆盖衬底的第一牺牲层上图案化镜面结构。 钨钝化层然后被覆盖沉积以覆盖镜结构的顶部和侧壁。 覆盖钨钝化层的第二牺牲层被形成。 执行包括XeF 2＆gt; 2的蚀刻剂的释放过程以同时去除第二牺牲层，钨钝化层和第一牺牲层。

公开(公告)号：EP3313778A1

公开(公告)日：2018-05-02

申请号：EP16720628.3

申请日：2016-04-20

Applicant: Raytheon Company

Inventor： DIEP, Buu Q. ,  KENNEDY, Adam M. ,  KOCIAN, Thomas Allan ,  LAMB, Mark

IPC: B81C1/00 ,  B81B7/00

CPC classification number: B81B7/0058 ,  B81B7/0041 ,  B81B2201/0207 ,  B81B2201/04 ,  B81C1/00269 ,  B81C1/00317 ,  B81C2203/0109 ,  B81C2203/0118 ,  B81C2203/0145 ,  B81C2203/019

Abstract: A microelectromechanical systems (MEMS) package includes a substrate extending between a first pair of outer edges to define a length and a second pair of outer edges to define a width. A seal ring assembly is disposed on the substrate and includes at least one seal ring creating a first boundary point adjacent to at least one MEMS device and a second boundary point adjacent at least one of the outer edges. The package further includes a window lid on the seal ring assembly to define a seal gap containing the at least one MEMS device. The seal ring assembly anchors the window lid to the substrate at the second boundary point such that deflection of the window lid into the seal gap is reduced.

公开(公告)号：EP3109644A1

公开(公告)日：2016-12-28

申请号：EP16174671.4

申请日：2016-06-15

Applicant: Honeywell International Inc.

Inventor： HORNING, Robert D. ,  LODDEN, Grant

IPC: G01P15/093 ,  G01P21/00 ,  G01P15/08 ,  G01C19/5621 ,  G01C19/5656 ,  G01C25/00 ,  B81B5/00

CPC classification number: G01C19/5726 ,  B81B2201/0228 ,  B81B2201/04 ,  B81B2203/053 ,  G01C19/5621 ,  G01C19/5656 ,  G01C19/574 ,  G01C25/00 ,  G01P15/032 ,  G01P15/093 ,  G01P21/00 ,  G01P2015/0822 ,  G02B6/29331

Abstract: Systems and methods for a time-based optical pickoff for MEMS sensors are provided. In one embodiment, a method for an integrated waveguide time-based optical-pickoff sensor comprises: launching a light beam generated by a light source into an integrated waveguide optical-pickoff monolithically fabricated within a first substrate, the integrated waveguide optical-pickoff including an optical input port, a coupling port, and an optical output port; and detecting changes in an area of overlap between the coupling port and a moving sensor component separated from the coupling port by a gap by measuring an attenuation of the light beam at the optical output port, wherein the moving sensor component is moving in-plane with respect a surface of the first substrate comprising the coupling port and the coupling port is positioned to detect movement of an edge of the moving sensor component.

Abstract translation: 提供了用于MEMS传感器的基于时间的光学拾取的系统和方法。 在一个实施例中，一种用于集成波导时基的光学检测传感器的方法包括：将由光源产生的光束发射到在第一衬底内单片制造的集成波导光学检测器，所述集成波导光学检测器包括： 光输入端口，耦合端口和光输出端口; 并且通过测量光输出端口处的光束的衰减来检测耦合端口与从耦合端口分离的移动传感器部件之间的重叠区域的变化，其中移动传感器部件正在与 相对于包括耦合端口的第一基板的表面和耦合端口被定位成检测移动的传感器部件的边缘的移动。

公开(公告)号：EP1677133A1

公开(公告)日：2006-07-05

申请号：EP05258009.9

申请日：2005-12-22

Applicant: Rohm and Haas Electronic Materials, L.L.C.

Inventor： Fisher, John J.

IPC: G02B7/00 ,  B81B3/00 ,  G02B6/36 ,  G02B7/02

CPC classification number: G02B6/4226 ,  B81B2201/04 ,  G02B6/3644 ,  G02B6/3656 ,  G02B6/3692 ,  G02B7/00 ,  G02B7/026

Abstract: Provided is a microcomponent holder for retaining a micro-scale component The microcomponent holder includes at least one aperture for receiving a micro-scale component therein. At least one loop-shaped support member is disposed about the aperture for contacting the micro-scale component to retain the micro-scale component within the microcomponent holder. The invention allows for retaining of microseale objects, such as lenses or other parts of micro-optical, micro-mechanical, micro-electromechanieal, and other micro-scale systems.

Abstract translation: 提供了用于保持微尺度部件的微元件夹持器。微元件夹持器包括用于在其中接收微尺度部件的至少一个孔。 围绕孔径设置至少一个环形支撑构件，用于接触微尺度部件以将微尺度部件保持在微部件保持器内。 本发明允许保留诸如透镜或微光学，微机械，微机电和其他微尺度系统的其它部件的微缝隙物体。

公开(公告)号：WO2011146944A3

公开(公告)日：2012-03-01

申请号：PCT/US2011037621

申请日：2011-05-23

Applicant: KAIAM CORP ,  PEZESHKI BARDIA ,  SHERBACK MICHAEL ,  TON DINH

Inventor： PEZESHKI BARDIA ,  SHERBACK MICHAEL ,  TON DINH

IPC: G02B6/24

CPC classification number: G02B6/4219 ,  B81B3/0045 ,  B81B2201/04 ,  B81B2201/047 ,  B81B2203/0118 ,  G02B6/3656 ,  G02B6/366 ,  G02B6/4204 ,  G02B6/4244 ,  G02B6/4266 ,  G02B7/003 ,  G02B7/004 ,  G02B26/0808 ,  G02B26/0875

Abstract: A MEMS based alignment technology based on mounting an optical component on a released micromechanical lever configuration that uses multiple flexures rather than a single spring. The optical component may be a lens. The use of multiple flexures may reduce coupling between lens rotation and lens translation, and reduce effects of lever handle warping on lens position. The device can be optimized for various geometries.

Abstract translation: 基于MEMS的对准技术，其基于将光学部件安装在使用多个挠曲而不是单个弹簧的释放的微机械杆配置上。 光学部件可以是透镜。 使用多个弯曲可能会减少透镜旋转和透镜平移之间的耦合，并减少杠杆手柄翘曲对透镜位置的影响。 该设备可以针对各种几何形状进行优化。

公开(公告)号：WO2011146944A2

公开(公告)日：2011-11-24

申请号：PCT/US2011/037621

申请日：2011-05-23

Applicant: KAIAM CORP. ,  PEZESHKI, Bardia ,  SHERBACK, Michael ,  TON, Dinh

Inventor： PEZESHKI, Bardia ,  SHERBACK, Michael ,  TON, Dinh

CPC classification number: G02B6/4219 ,  B81B3/0045 ,  B81B2201/04 ,  B81B2201/047 ,  B81B2203/0118 ,  G02B6/3656 ,  G02B6/366 ,  G02B6/4204 ,  G02B6/4244 ,  G02B6/4266 ,  G02B7/003 ,  G02B7/004 ,  G02B26/0808 ,  G02B26/0875

Abstract: A MEMS based alignment technology based on mounting an optical component on a released micromechanical lever configuration that uses multiple flexures rather than a single spring. The optical component may be a lens. The use of multiple flexures may reduce coupling between lens rotation and lens translation, and reduce effects of lever handle warping on lens position. The device can be optimized for various geometries.

Abstract translation: 基于MEMS的对准技术，其基于将光学部件安装在使用多个挠曲而不是单个弹簧的释放的微机械杆配置上。 光学部件可以是透镜。 使用多个弯曲可能会减少透镜旋转和透镜平移之间的耦合，并减少杠杆手柄翘曲对透镜位置的影响。 该设备可以针对各种几何形状进行优化。

公开(公告)号：WO2010096706A3

公开(公告)日：2010-11-04

申请号：PCT/US2010024806

申请日：2010-02-19

Applicant: UNIV CORNELL ,  MANIPATRUNI SASIKANTH ,  LIPSON MICHAL

Inventor： MANIPATRUNI SASIKANTH ,  LIPSON MICHAL

IPC: H01S3/08

CPC classification number: G02B26/001 ,  A61F9/022 ,  A61F9/023 ,  B81B3/0083 ,  B81B2201/04 ,  B81B2201/047 ,  B81B2203/0118 ,  B81B2203/0315 ,  B81C1/0015 ,  B81C2201/013 ,  G02B1/005 ,  G02B6/4209 ,  G02C7/104 ,  G02C7/107 ,  H01S3/005 ,  H01S3/0064

Abstract: There is set forth herein an optomechanical device which can comprise a first mirror and a second mirror forming with the first mirror a cavity. In one aspect the first mirror can be a movable mirror. The optomechanical device can be adapted so that the first mirror is moveable responsively to radiation force.

Abstract translation: 这里提出了一种光学机械装置，其可以包括第一反射镜和形成有第一反射镜的第二反射镜的腔。 在一个方面，第一镜可以是可移动镜。 光学机械装置可以适于使得第一反射镜能够响应于辐射力而移动。

公开(公告)号：US11994620B2

公开(公告)日：2024-05-28

申请号：US16829812

申请日：2020-03-25

Applicant: INNOVIZ TECHNOLOGIES LTD

Inventor： Amit Steinberg ,  Alon Gan

IPC: G01S7/481 ,  B60S1/02 ,  B81B3/00 ,  G01H1/00 ,  G01S7/48 ,  G01S7/484 ,  G01S7/4863 ,  G01S7/4911 ,  G01S7/4914 ,  G01S7/497 ,  G01S17/06 ,  G01S17/10 ,  G01S17/32 ,  G01S17/42 ,  G01S17/58 ,  G01S17/89 ,  G01S17/931 ,  G02B26/12

CPC classification number: G01S7/4817 ,  B60S1/02 ,  B81B3/0018 ,  G01H1/00 ,  G01S7/4802 ,  G01S7/4808 ,  G01S7/4814 ,  G01S7/4815 ,  G01S7/4816 ,  G01S7/484 ,  G01S7/4863 ,  G01S7/4911 ,  G01S7/4914 ,  G01S7/497 ,  G01S17/06 ,  G01S17/10 ,  G01S17/32 ,  G01S17/42 ,  G01S17/58 ,  G01S17/89 ,  G01S17/931 ,  B81B2201/04 ,  G01S2007/4975 ,  G02B26/122

Abstract: A LIDAR system may include: a first housing containing a processor configured to control a light source to enable light flux of the light source to vary over a scan of a field of view; a second housing located in a vehicle remote from the first housing, the second housing containing a controllable light deflector, and an actuator configured to move the light deflector; and a data conduit configured to interconnect the first housing and the second housing, the data conduit is associated with a forward path from the first housing to the second housing and a return path from the second housing to the first housing, wherein the data conduit is configured to cooperate with the processor and the actuator such that the forward path conveys signals for controlling the actuator and the return path conveys reflections signals indicative of light reflected from objects in the field of view.

公开(公告)号：US11977220B2

公开(公告)日：2024-05-07

申请号：US17111309

申请日：2020-12-03

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： William Craig McDonald ,  James Norman Hall ,  Terry Alan Bartlett

IPC: G02B5/08 ,  B81B3/00 ,  B81B7/00 ,  G02B6/35 ,  G02B26/08

CPC classification number: G02B26/0833 ,  B81B3/0056 ,  B81B3/0078 ,  B81B3/0086 ,  B81B7/0022 ,  G02B6/352 ,  B81B2201/04 ,  G02B5/08 ,  G02F2203/12

Abstract: A digital micromirror device comprises an array of micromirror pixels, the array comprising a first micromirror pixel and a second micromirror pixel. The first micromirror pixel comprises a hinge, where the hinge is configured to tilt toward a first raised address electrode and toward a second raised address electrode. The first micromirror pixel also comprises a first micromirror coupled to the hinge, where the first micromirror has a sculpted edge. The second micromirror pixel comprises a second micromirror, where a first gap between a first point on the sculpted edge and a nearest point to the first point on the second micromirror is larger than a second gap between a second point on the sculpted edge and a nearest point to the second point on the second micromirror.