SENSING DEVICE
    32.
    发明公开
    SENSING DEVICE 审中-公开

    公开(公告)号:US20230314232A1

    公开(公告)日:2023-10-05

    申请号:US18110364

    申请日:2023-02-15

    CPC classification number: G01J5/20 G01J5/0853 G01J2005/103

    Abstract: The present disclosure provides a sensing device including a substrate and a sensing pixel. The sensing pixel is disposed on the substrate and includes an electrode and a thermistor. The thermistor is electrically connected to the electrode and is separated from the substrate by an air gap. When the sensing pixel is operated in a period, the electrode receives a voltage, and a part of the thermistor moves toward the substrate, such that the thermistor is in thermal conduction with the substrate.

    OPTICAL SENSOR
    33.
    发明公开
    OPTICAL SENSOR 审中-公开

    公开(公告)号:US20230255114A1

    公开(公告)日:2023-08-10

    申请号:US18070505

    申请日:2022-11-29

    CPC classification number: H01L35/32 G01J5/14 G01J2005/103

    Abstract: An optical sensor includes a support film, a thermoelectric conversion material portion, a heat sink, a light absorption film, a first electrode, and a second electrode. The thermoelectric conversion material portion includes a plurality of first material layers and a plurality of second material layers. The support film includes a first layer arranged on the heat sink side in a thickness direction and configured with a phononic structure having a large number of holes, and an insulating second layer arranged on the first layer and in contact with the thermoelectric conversion material portion.

    DETECTION DEVICE WITH SUSPENDED BOLOMETRIC MEMBRANES HAVING A HIGH ABSORPTION EFFICIENCY AND SIGNAL-TO- NOISE RATIO

    公开(公告)号:US20170167922A1

    公开(公告)日:2017-06-15

    申请号:US15355835

    申请日:2016-11-18

    Applicant: ULIS

    CPC classification number: G01J5/10 G01J5/024 G01J5/045 G01J5/20 G01J2005/103

    Abstract: A bolometric detection device includes a substrate having a read-out circuit. The device also includes an array of elementary detectors each including a membrane suspended above the substrate and connected to the read-out circuit by at least two electric conductors. The membrane has two electrically-conductive electrodes respectively connected to the two electric conductors, and a volume of transducer material electrically connecting the two electrodes. The read-out circuit is configured to apply an electrical stimulus between the two electrodes of the membrane and to form an electric signal as a response to said application. The volume includes a volume of a first transducer material electrically connecting the two electrodes of the membrane and forming walls of a closed enclosure having each of the electrodes at least partially housed therein; and a volume of a second transducer material, electrically connecting the two electrodes and housed in the enclosure, the electric resistivity of the second material being smaller than the electric resistivity of the first material; and the two transducer materials having a negative thermal coefficient of resistivity TCR.

    Infrared sensor
    36.
    发明授权
    Infrared sensor 有权
    红外传感器

    公开(公告)号:US09568371B2

    公开(公告)日:2017-02-14

    申请号:US14375065

    申请日:2013-01-29

    Abstract: Provided is an infrared sensor which is capable of measuring a temperature of an object to be measured with high accuracy even when lead wires are connected to one side thereof. The infrared sensor includes an insulating film; a first and a second heat sensitive element which are provided on one face of the insulating film; a first and a second wiring film that are respectively connected to the first and the second heat sensitive element; an infrared reflecting film; a plurality of terminal electrodes; and a thermal resistance adjusting film which is provided on the other face of the insulating film, is in opposition to at least a portion of the longer one of the first or the second wiring film in wiring distance from the terminal electrodes, and is formed of a material with greater heat dissipation than the insulating film.

    Abstract translation: 提供一种能够即使在将引线连接到其一侧时也能够以高精度测量被测量物体的温度的红外线传感器。 红外线传感器包括绝缘膜; 第一和第二热敏元件,设置在绝缘膜的一个面上; 分别连接到第一和第二热敏元件的第一和第二布线膜; 红外反射膜; 多个端子电极; 并且设置在所述绝缘膜的另一面上的热电阻调节膜与所述端子电极的布线距离处于与所述第一或第二布线膜中较长的一个的至少一部分相对,并且由所述热电阻调节膜形成为 具有比绝缘膜更大散热的材料。

    VUV光学素子の非接触サーマル測定

    公开(公告)号:JP2018535426A

    公开(公告)日:2018-11-29

    申请号:JP2018527940

    申请日:2016-11-29

    Abstract: 光学素子の非接触温度測定を、長波長赤外光で実行する方法およびシステムが本明細書において説明される。被測定光学素子は、長波長赤外光に対して低放射を示し、多くの場合、長波長赤外光に対して高反射性または高透過性である。一態様において、長波長IR波長での高放射性、低反射性および低透過性を有する材料コーティングが、計測または検査システムの1つ以上の光学素子の選択された部分を覆って配置される。材料コーティングの箇所は、試験片の測定を実行するために計測または検査システムによって用いられる一次測定光の直接光学経路の外部である。IR透過性光学素子の正面と背面の温度測定が、単一のIRカメラによって実行される。温度測定は、一次測定ビームの光学経路内の複数の光学素子によって実行される。

    NON-CONTACT THERMAL MEASUREMENTS OF VUV OPTICS
    38.
    发明申请
    NON-CONTACT THERMAL MEASUREMENTS OF VUV OPTICS 审中-公开
    真空紫外光学的非接触热测量

    公开(公告)号:WO2017095787A1

    公开(公告)日:2017-06-08

    申请号:PCT/US2016/063939

    申请日:2016-11-29

    Abstract: Methods and systems for performing non-contact temperature measurements of optical elements with long wavelength infrared light are described herein. The optical elements under measurement exhibit low emissivity to long wavelength infrared light and are often highly reflective or highly transmissive to long wavelength infrared light. In one aspect, a material coating having high emissivity, low reflectivity, and low transmission at long wavelength IR wavelengths is disposed over selected portions of one or more optical elements of a metrology or inspection system. The locations of the material coating are outside the direct optical path of the primary measurement light employed by the metrology or inspection system to perform measurements of a specimen. Temperature measurements of the front and back surfaces of an IR-transparent optical element are performed with a single IR camera. Temperature measurements are performed through multiple optical elements in an optical path of a primary measurement beam.

    Abstract translation: 本文描述了用于执行具有长波长红外光的光学元件的非接触温度测量的方法和系统。 测量中的光学元件对长波长红外光表现出低发射率,并且通常对长波长红外光具有高反射性或高透射性。 在一个方面,在长波长IR波长处具有高发射率,低反射率和低透射率的材料涂层设置在度量衡或检验系统的一个或多个光学元件的选定部分上方。 材料涂层的位置在测量或检查系统用于执行样本测量的主要测量光的直接光路之外。 IR透明光学元件的前后表面的温度测量采用单个红外热像仪进行。 温度测量是通过主测量光束的光路中的多个光学元件进行的。

    OPTICAL LAYERED STRUCTURE, MANUFACTURING METHOD, AND USE
    39.
    发明申请
    OPTICAL LAYERED STRUCTURE, MANUFACTURING METHOD, AND USE 审中-公开
    光学层状结构,制造方法和使用

    公开(公告)号:WO2014037622A1

    公开(公告)日:2014-03-13

    申请号:PCT/FI2013/050862

    申请日:2013-09-05

    Applicant: VAISALA OYJ

    Abstract: The present publication describes a heat-resistant optical layered structure, a manufacturing method for a layered structure, and the use of a layered structure as a detector, emitter, and reflecting surface. The layered structure comprises a reflecting layer (2), an optical structure on top of the reflecting layer (2), and preferably shielding layers (1, 3, 5, 7) for shielding the reflecting layer (2) and the optical structure. According to the invention, the optical structure on top of the reflecting layer (2) comprises at least one partially transparent layer (6), which is optically fitted at a distance to the reflecting layer (2).

    Abstract translation: 本公开描述了耐热光学层叠结构,层状结构的制造方法,以及层叠结构作为检测器,发射体和反射面的用途。 分层结构包括反射层(2),在反射层(2)的顶部上的光学结构,以及优选用于屏蔽反射层(2)和光学结构的屏蔽层(1,3,5,7)。 根据本发明,反射层(2)顶部上的光学结构包括至少一个部分透明的层(6),其在与反射层(2)一定距离上光学配合。

    PROCEDE DE REALISATION D'UN DISPOSITIF DE DETECTION DE RAYONNEMENT ELECTROMAGNETIQUE COMPORTANT UNE COUCHE EN UN MATERIAU GETTER
    40.
    发明公开
    PROCEDE DE REALISATION D'UN DISPOSITIF DE DETECTION DE RAYONNEMENT ELECTROMAGNETIQUE COMPORTANT UNE COUCHE EN UN MATERIAU GETTER 审中-公开
    生产包括一层吸气材料的电磁辐射检测装置的方法

    公开(公告)号:EP3239670A1

    公开(公告)日:2017-11-01

    申请号:EP17167659.6

    申请日:2017-04-23

    Abstract: L'invention porte sur un procédé de réalisation d'un dispositif de détection (1) de rayonnement électromagnétique comprenant au moins un détecteur thermique (10) à membrane absorbante (11) suspendue au-dessus d'un substrat (2), destiné à être situé dans une cavité hermétique (3), comportant les étapes suivantes :
    - dépôt, sur le substrat (2), d'une couche métallique dite getter (40) comprenant un matériau métallique à effet getter ;
    - dépôt d'une couche sacrificielle dite carbonée (50) en carbone amorphe sur la couche métallique getter (40) ;
    - dépôt d'au moins une couche sacrificielle minérale (60A, 60B) sur la couche sacrificielle carbonée (50) ;
    - aplanissement mécano-chimique de la couche sacrificielle minérale (60A) ;
    - réalisation du détecteur thermique (10) de sorte que la membrane absorbante (11) est réalisée sur la couche sacrificielle minérale (60A) ;
    - suppression de la couche sacrificielle minérale (60A, 60B) ;
    - suppression de la couche sacrificielle carbonée (50).

    Abstract translation: 本发明涉及一种制造用于检测电磁辐射的装置(1)的方法,该装置包括至少一个热探测器(10),该热探测器具有悬挂在衬底(2)上方的吸收膜(11) 包括以下步骤: - 在基板(2)上沉积称为吸气剂(40)的金属层,其包含金属材料吸气剂效应; 在吸气剂金属层(40)上沉积所谓的无定形碳的碳质牺牲层(50); 在碳质牺牲层(50)上沉积至少一层矿物牺牲层(60A,60B); - 矿物牺牲层(60A)的机械化学平面化; - 实现热检测器(10),使得吸收膜(11)形成在矿物牺牲层(60A)上; - 去除矿物牺牲层(60A,60B); - 去除碳质牺牲层(50)。

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