Abstract:
A thermistor comprising an amorphous alloy semiconductor thin film, a single element semiconductor thin film, wherein the amorphous alloy semiconductor thin film held between the lower and upper single element semiconductor thin film.
Abstract:
The present disclosure provides a sensing device including a substrate and a sensing pixel. The sensing pixel is disposed on the substrate and includes an electrode and a thermistor. The thermistor is electrically connected to the electrode and is separated from the substrate by an air gap. When the sensing pixel is operated in a period, the electrode receives a voltage, and a part of the thermistor moves toward the substrate, such that the thermistor is in thermal conduction with the substrate.
Abstract:
An optical sensor includes a support film, a thermoelectric conversion material portion, a heat sink, a light absorption film, a first electrode, and a second electrode. The thermoelectric conversion material portion includes a plurality of first material layers and a plurality of second material layers. The support film includes a first layer arranged on the heat sink side in a thickness direction and configured with a phononic structure having a large number of holes, and an insulating second layer arranged on the first layer and in contact with the thermoelectric conversion material portion.
Abstract:
A method makes an electromagnetic radiation detecting device including at least one thermal detector with an absorbent membrane suspended above a substrate, intended to be located in a sealed cavity. The method includes depositing, on the substrate, a gettering metallic layer including a metallic material with a gettering effect; depositing a carbonaceous sacrificial layer of amorphous carbon on the gettering metallic layer; depositing at least one sacrificial mineral layer on the carbonaceous sacrificial layer; chemical-mechanical planarization of the sacrificial mineral layer; fabricating the thermal detector so that the absorbent membrane is produced on the sacrificial mineral layer; removing the sacrificial mineral layer; and removing the carbonaceous sacrificial layer.
Abstract:
A bolometric detection device includes a substrate having a read-out circuit. The device also includes an array of elementary detectors each including a membrane suspended above the substrate and connected to the read-out circuit by at least two electric conductors. The membrane has two electrically-conductive electrodes respectively connected to the two electric conductors, and a volume of transducer material electrically connecting the two electrodes. The read-out circuit is configured to apply an electrical stimulus between the two electrodes of the membrane and to form an electric signal as a response to said application. The volume includes a volume of a first transducer material electrically connecting the two electrodes of the membrane and forming walls of a closed enclosure having each of the electrodes at least partially housed therein; and a volume of a second transducer material, electrically connecting the two electrodes and housed in the enclosure, the electric resistivity of the second material being smaller than the electric resistivity of the first material; and the two transducer materials having a negative thermal coefficient of resistivity TCR.
Abstract:
Provided is an infrared sensor which is capable of measuring a temperature of an object to be measured with high accuracy even when lead wires are connected to one side thereof. The infrared sensor includes an insulating film; a first and a second heat sensitive element which are provided on one face of the insulating film; a first and a second wiring film that are respectively connected to the first and the second heat sensitive element; an infrared reflecting film; a plurality of terminal electrodes; and a thermal resistance adjusting film which is provided on the other face of the insulating film, is in opposition to at least a portion of the longer one of the first or the second wiring film in wiring distance from the terminal electrodes, and is formed of a material with greater heat dissipation than the insulating film.
Abstract:
Methods and systems for performing non-contact temperature measurements of optical elements with long wavelength infrared light are described herein. The optical elements under measurement exhibit low emissivity to long wavelength infrared light and are often highly reflective or highly transmissive to long wavelength infrared light. In one aspect, a material coating having high emissivity, low reflectivity, and low transmission at long wavelength IR wavelengths is disposed over selected portions of one or more optical elements of a metrology or inspection system. The locations of the material coating are outside the direct optical path of the primary measurement light employed by the metrology or inspection system to perform measurements of a specimen. Temperature measurements of the front and back surfaces of an IR-transparent optical element are performed with a single IR camera. Temperature measurements are performed through multiple optical elements in an optical path of a primary measurement beam.
Abstract:
The present publication describes a heat-resistant optical layered structure, a manufacturing method for a layered structure, and the use of a layered structure as a detector, emitter, and reflecting surface. The layered structure comprises a reflecting layer (2), an optical structure on top of the reflecting layer (2), and preferably shielding layers (1, 3, 5, 7) for shielding the reflecting layer (2) and the optical structure. According to the invention, the optical structure on top of the reflecting layer (2) comprises at least one partially transparent layer (6), which is optically fitted at a distance to the reflecting layer (2).
Abstract:
L'invention porte sur un procédé de réalisation d'un dispositif de détection (1) de rayonnement électromagnétique comprenant au moins un détecteur thermique (10) à membrane absorbante (11) suspendue au-dessus d'un substrat (2), destiné à être situé dans une cavité hermétique (3), comportant les étapes suivantes : - dépôt, sur le substrat (2), d'une couche métallique dite getter (40) comprenant un matériau métallique à effet getter ; - dépôt d'une couche sacrificielle dite carbonée (50) en carbone amorphe sur la couche métallique getter (40) ; - dépôt d'au moins une couche sacrificielle minérale (60A, 60B) sur la couche sacrificielle carbonée (50) ; - aplanissement mécano-chimique de la couche sacrificielle minérale (60A) ; - réalisation du détecteur thermique (10) de sorte que la membrane absorbante (11) est réalisée sur la couche sacrificielle minérale (60A) ; - suppression de la couche sacrificielle minérale (60A, 60B) ; - suppression de la couche sacrificielle carbonée (50).