公开(公告)号：US08624187B2

公开(公告)日：2014-01-07

申请号：US11466347

申请日：2006-08-22

Applicant: Hakan Urey ,  Hamdi Torun

Inventor： Hakan Urey ,  Hamdi Torun

IPC: G01J5/00 ,  G01J5/02

CPC classification number: G01J5/58 ,  G01J5/38 ,  G01J5/40 ,  G01J2005/583

Abstract: The present invention relates to thermal detectors and the application of such to devices and methods of detecting the infrared images using thermal detectors. For example, by using optical measuring systems in combination with at least one light source to measure changes position of a movable anchored surface coupled to an absorption surface such that the movable anchored surface changes position due to absorption of infrared radiation by the absorption surface. In another example, by combining a detector pixel (infrared radiation sensitive) with an optical measuring device such as an interferometer.

Abstract translation: 本发明涉及热检测器及其应用于使用热检测器检测红外图像的装置和方法。 例如，通过使用与至少一个光源组合的光学测量系统来测量耦合到吸收表面的可移动锚定表面的变化位置，使得可移动锚定表面由于吸收表面吸收红外辐射而改变位置。 在另一个示例中，通过将检测器像素（红外辐射敏感）与诸如干涉仪的光学测量装置组合。

公开(公告)号：US08573837B2

公开(公告)日：2013-11-05

申请号：US13428198

申请日：2012-03-23

Applicant: Tatsuo Matsudo ,  Chishio Koshimizu

Inventor： Tatsuo Matsudo ,  Chishio Koshimizu

IPC: G01K11/00 ,  B32B3/00

CPC classification number: G01K11/12 ,  G01J5/0007 ,  G01J5/0044 ,  G01J5/0821 ,  G01J2005/583

Abstract: A temperature measuring apparatus and a temperature measuring method that may simultaneously measure temperatures of objects in processing chambers. The temperature measuring apparatus includes a first light separating unit which divides light from the light source into measurement lights; second light separating units which divide the measurement lights from the first light separating unit into measurement lights and reference lights; third light separating units which further divide the measurement lights into first to n-th measurement lights; a reference light reflecting unit which reflects the reference lights; an light path length changing unit which changes light path lengths of the reference lights reflected by the reference light reflecting unit; and photodetectors which measure interference between the first to n-th measurement lights reflected by the objects to be measured and the reference lights reflected by the reference light reflecting unit.

Abstract translation: 可以同时测量处理室中的物体的温度的温度测量装置和温度测量方法。 温度测量装置包括：将来自光源的光分成测量光的第一光分离单元; 第二光分离单元，其将测量光从第一光分离单元分离成测量光和参考光; 第三光分离单元，其进一步将测量光分为第一至第n测量光; 反射参考光的参考光反射单元; 光路长度改变单元，改变由参考光反射单元反射的参考光的光路长度; 以及光检测器，其测量由被测量物体反射的第一至第n测量光与由参考光反射单元反射的参考光之间的干涉。

公开(公告)号：US20120327393A1

公开(公告)日：2012-12-27

申请号：US13529368

申请日：2012-06-21

Applicant: Tatsuo MATSUDO ,  Kenji NAGAI

Inventor： Tatsuo MATSUDO ,  Kenji NAGAI

IPC: G01J5/48

CPC classification number: G01J5/0007 ,  G01J2005/583

Abstract: The temperature measuring apparatus includes a data input portion, a peak interval calculation portion, an optical path length calculation portion, and a temperature calculation portion. The data input portion inputs a spectrum of interference light that is obtained when measuring light is irradiated onto a surface of the object and the measuring light reflected from the surface and the measuring light reflected from a rear surface interfere with each other. The peak interval calculation portion calculates a peak interval of the input spectrum. The optical path length calculation portion calculates an optical path length based on the peak interval. The temperature calculation portion calculates the temperature of the object based on the optical path length.

Abstract translation: 温度测量装置包括数据输入部分，峰值间隔计算部分，光程长度计算部分和温度计算部分。 数据输入部输入将光照射到物体的表面上时所获得的干涉光的光谱和从表面反射的测量光，并且从后表面反射的测量光彼此干涉。 峰值间隔计算部分计算输入光谱的峰值间隔。 光路长度计算部分基于峰值间隔计算光程长度。 温度计算部根据光程长度来计算物体的温度。

公开(公告)号：US20120243572A1

公开(公告)日：2012-09-27

申请号：US13428198

申请日：2012-03-23

Applicant: Tatsuo MATSUDO ,  Chishio KOSHIMIZU

Inventor： Tatsuo MATSUDO ,  Chishio KOSHIMIZU

IPC: G01K11/32

CPC classification number: G01K11/12 ,  G01J5/0007 ,  G01J5/0044 ,  G01J5/0821 ,  G01J2005/583

Abstract: A temperature measuring apparatus and a temperature measuring method that may simultaneously measure temperatures of objects in processing chambers. The temperature measuring apparatus includes a first light separating unit which divides light from the light source into measurement lights; second light separating units which divide the measurement lights from the first light separating unit into measurement lights and reference lights; third light separating units which further divide the measurement lights into first to n-th measurement lights; a reference light reflecting unit which reflects the reference lights; an light path length changing unit which changes light path lengths of the reference lights reflected by the reference light reflecting unit; and photodetectors which measure interference between the first to n-th measurement lights reflected by the objects to be measured and the reference lights reflected by the reference light reflecting unit.

Abstract translation: 可以同时测量处理室中的物体的温度的温度测量装置和温度测量方法。 温度测量装置包括：将来自光源的光分成测量光的第一光分离单元; 第二光分离单元，其将测量光从第一光分离单元分离成测量光和参考光; 第三光分离单元，其进一步将测量光分为第一至第n测量光; 反射参考光的参考光反射单元; 光路长度改变单元，改变由参考光反射单元反射的参考光的光路长度; 以及光检测器，其测量由被测量物体反射的第一至第n测量光与由参考光反射单元反射的参考光之间的干涉。

公开(公告)号：US20120073781A1

公开(公告)日：2012-03-29

申请号：US13240274

申请日：2011-09-22

Applicant: Jun YAMAWAKU ,  Chishio KOSHIMIZU ,  Tatsuo MATSUDO ,  Kenji NAGAI

Inventor： Jun YAMAWAKU ,  Chishio KOSHIMIZU ,  Tatsuo MATSUDO ,  Kenji NAGAI

IPC: B60H1/00

CPC classification number: H01L21/67248 ,  G01J9/02 ,  G01J2005/583

Abstract: The temperature control system includes: a susceptor which allows an object to be processed to be held on a top surface thereof and includes a flow path, through which a temperature adjusting medium flows, formed therein; a temperature measuring unit which measures a temperature of the object to be processed held on the top surface of the susceptor; a first temperature adjusting unit which adjusts a temperature of the temperature adjusting medium flowing through the flow path; and a second temperature adjusting unit which is disposed between the susceptor and the first temperature adjusting unit, and adjusts a temperature of the temperature adjusting medium based on a result of the measurement of the temperature measuring unit.

Abstract translation: 温度控制系统包括：一个允许被处理物体被保持在其顶面上的基座，并且包括在其中形成温度调节介质流过的流路; 温度测量单元，其测量保持在所述基座的顶表面上的被处理物体的温度; 第一温度调节单元，其调节流过所述流路的温度调节介质的温度; 以及第二温度调节单元，其设置在所述基座和所述第一温度调节单元之间，并且基于所述温度测量单元的测量结果来调节所述温度调节介质的温度。

公开(公告)号：US07357570B2

公开(公告)日：2008-04-15

申请号：US10542298

申请日：2004-01-11

Applicant: Georg Schuele

Inventor： Georg Schuele

IPC: G01J5/00 ,  A61B5/00 ,  G01N21/85 ,  G01N21/47 ,  G01N21/63

CPC classification number: G01J5/58 ,  A61B5/0066 ,  A61B5/01 ,  A61F9/008 ,  A61F2009/00851 ,  A61F2009/00863 ,  G01J5/0022 ,  G01J5/0025 ,  G01J2005/583

Abstract: A method and device for determining the temperature of a sample, wherein a probing light beam is directed onto the sample whereby at least two partial beams of the probing light pass through paths of different lengths inside the sample by backscattering or reflecting the beams from at least two different depths in the sample, returning the partial beams to an analysis unit, and producing an interference pattern in the analysis unit by means of an interferometric device which uses one light beam as a reference for evaluating the interference pattern in an evaluating unit, wherein the signal intensity of the partial beam is determined counter to the optical path and the temperature displacement and temperature of the sample are determined by the temperature adjustment of the signal intensity.

Abstract translation: 一种用于确定样品的温度的方法和装置，其中探测光束被引导到样品上，由此探测光的至少两个部分光束通过后向散射或至少反射来自样品中的不同长度的路径 样本中的两个不同的深度，将部分光束返回到分析单元，并且通过使用一个光束作为评估单元中的干涉图案的参考的干涉测量装置在分析单元中产生干涉图案，其中 确定部分光束的信号强度与光路相反，并且通过信号强度的温度调节来确定样品的温度位移和温度。

公开(公告)号：US20070045541A1

公开(公告)日：2007-03-01

申请号：US11466347

申请日：2006-08-22

Applicant: Hakan Urey ,  Hamdi Torun

Inventor： Hakan Urey ,  Hamdi Torun

IPC: G01J5/00

CPC classification number: G01J5/58 ,  G01J5/38 ,  G01J5/40 ,  G01J2005/583

Abstract: The present invention relates to thermal detectors and the application of such to devices and methods of detecting the infrared images using thermal detectors. For example, by using optical measuring systems in combination with at least one light source to measure changes position of a movable anchored surface coupled to an absorption surface such that the movable anchored surface changes position due to absorption of infrared radiation by the absorption surface. In another example, by combining a detector pixel (infrared radiation sensitive) with an optical measuring device such as an interferometer.

Abstract translation: 本发明涉及热检测器及其应用于使用热检测器检测红外图像的装置和方法。 例如，通过使用与至少一个光源组合的光学测量系统来测量耦合到吸收表面的可移动锚定表面的变化位置，使得可移动锚定表面由于吸收表面吸收红外辐射而改变位置。 在另一个示例中，通过将检测器像素（红外辐射敏感）与诸如干涉仪的光学测量装置组合。

公开(公告)号：US20040240517A1

公开(公告)日：2004-12-02

申请号：US10492889

申请日：2004-04-16

Inventor： John Howard

IPC: G01J005/00

CPC classification number: G01J5/58 ,  G01J3/45 ,  G01J5/00 ,  G01J5/0834 ,  G01J2005/583 ,  G01J2005/586

Abstract: Remote sensing of the temperature of a greybody or blackbody radiator is effected by passing its radiation (24) through a modulated infrared filter spectrometer. The infrared filter comprises, in sequence, a band pass filter (20), a first polariser (21) which polarises the radiation, an electro-optical element (22) which splits the polarised radiation into two orthogonally polarised components, and a second polariser (23). A lens (28) images the radiation leaving the second polariser onto a detector (27). The electrical signal from the detector (27) is input to a numerical analyser. The electro-optical element (22), typically comprising a birefringent crystal assembly (25) and a birefringent trim plate (26), is configured so that the net optical delay of the orthogonally polarised components passed through it is such that the recombined components are at or near a peak or trough in their interferogram. A sinusoidally varying voltage is applied to the electro-optical element to modulate the net delay of the components passed through the electro-optical element. The numerical analyser is programmed to compute the harmonic amplitude ratio (the ratio of signal amplitudes at the fundamental and second harmonic of the frequency of the modulating voltage) of the signal that it receives from the detector (27). The harmonic amplitude ratio is a function of the temperature of the radiator, which can be estimated by reference to a calibration look-up table.

Abstract translation: 通过使其辐射（24）通过调制的红外滤光器光谱仪来实现对灰体或黑体辐射体的温度的遥感。 红外滤光器依次包括带通滤波器（20），偏振辐射的第一偏振器（21），将偏振辐射分成两个正交极化分量的电光元件（22）和第二偏振器 （23）。 透镜（28）将离开第二偏振器的辐射图像到检测器（27）上。 来自检测器（27）的电信号被输入到数字分析器。 通常包括双折射晶体组件（25）和双折射装饰板（26）的电光元件（22）被配置为使得通过它的正交极化分量的净光学延迟使得重组组分为 在它们的干涉图中的峰或谷附近。 将正弦变化的电压施加到电光元件以调节通过电光元件的部件的净延迟。 数字分析仪被编程为计算其从检测器（27）接收的信号的谐波振幅比（在调制电压的频率的基波和二次谐波处的信号幅度的比率）。 谐波振幅比是散热器的温度的函数，可以通过参考校准查找表来估计。

公开(公告)号：US06351307B1

公开(公告)日：2002-02-26

申请号：US09511411

申请日：2000-02-23

Applicant: David J. Erskine

Inventor： David J. Erskine

IPC: G01B902

CPC classification number: G01P15/16 ,  G01B9/02023 ,  G01B9/02028 ,  G01B9/02044 ,  G01B9/02045 ,  G01B9/0209 ,  G01B2290/10 ,  G01B2290/20 ,  G01B2290/25 ,  G01J3/2823 ,  G01J3/45 ,  G01J3/453 ,  G01J9/04 ,  G01J2005/583 ,  G01P3/36 ,  G01S11/12

Abstract: A method of measuring the spectral properties of broadband waves that combines interferometry with a wavelength disperser having many spectral channels to produce a fringing spectrum. Spectral mapping, Doppler shifts, metrology of angles, distances and secondary effects such as temperature, pressure, and acceleration which change an interferometer cavity length can be measured accurately by a compact instrument using broadband illumination. Broadband illumination avoids the fringe skip ambiguities of monochromatic waves. The interferometer provides arbitrarily high spectral resolution, simple instrument response, compactness, low cost, high field of view and high efficiency. The inclusion of a disperser increases fringe visibility and signal to noise ratio over an interferometer used alone for broadband waves. The fringing spectrum is represented as a wavelength dependent 2-d vector, which describes the fringe amplitude and phase. Vector mathematics such as generalized dot products rapidly computes average broadband phase shifts to high accuracy. A Moire effect between the interferometer's sinusoidal transmission and the illumination heterodynes high resolution spectral detail to low spectral detail, allowing the use of a low resolution disperser. Multiple parallel interferometer cavities of fixed delay allow the instantaneous mapping of a spectrum, with an instrument more compact for the same spectral resolution than a conventional dispersive spectrometer, and not requiring a scanning delay.

Abstract translation: 测量宽带波的光谱性质的方法，其将干涉测量与具有许多光谱通道的波长分散器组合以产生边缘光谱。 可以通过使用宽带照明的紧凑型仪器，精确地测量光谱映射，多普勒频移，角度，距离和二次效应（如改变干涉仪腔长度的温度，压力和加速度）。 宽带照明避免了单色波的边缘跳跃模糊。 干涉仪提供任意高的光谱分辨率，简单的仪器响应，紧凑性，低成本，高视野和高效率。 分散器的包含增加了单独用于宽带波的干涉仪的边缘可见度和信噪比。 边缘光谱表示为波长相关的2-d矢量，其描述条纹幅度和相位。 矢量数学，如广义点产品可以快速计算平均宽带相移到高精度。 干涉仪的正弦波传播与照明外差高分辨率光谱细节之间的莫尔效应可以降低光谱细节，允许使用低分辨率分散器。 具有固定延迟的多个并行干涉仪腔允许频谱的瞬时映射，与常规色散光谱仪相比，仪器更紧凑，并且不需要扫描延迟。

公开(公告)号：US6080988A

公开(公告)日：2000-06-27

申请号：US994949

申请日：1997-12-19

Applicant: Tohru Ishizuya ,  Noboru Amemiya ,  Keiichi Akagawa

Inventor： Tohru Ishizuya ,  Noboru Amemiya ,  Keiichi Akagawa

IPC: G01J5/00 ,  G01J5/40 ,  G02B26/02 ,  G02B26/08 ,  H04N5/32 ,  H04N5/33 ,  G02F1/00

CPC classification number: G01J5/06 ,  G01J5/061 ,  G01J5/08 ,  G01J5/0809 ,  G01J5/0825 ,  G01J5/0831 ,  G01J5/0859 ,  G01J5/38 ,  G01J5/40 ,  G02B26/02 ,  G02B26/0866 ,  G01J2005/0077 ,  G01J2005/068 ,  G01J2005/583 ,  H04N5/32 ,  H04N5/33

Abstract: Optically readable radiation-displacement conversion devices and image-rendering apparatus that incorporate same are disclosed. Also disclosed are related methods for detecting images and rendering images using such devices and apparatus. Such devices, apparatus and methods allow improved accuracy and sensitivity of radiation detection without having to use a cooler. A representative conversion device includes a substrate and a suspended portion attached to the substrate via a leg portion. The conversion device includes a radiation-absorbing film that receives and absorbs and incident invisible radiation (e.g., UV, IR, or X-rays) and generates heat from the absorbed radiation. The suspended portion includes a displaceable member that exhibits a displacement with respect to the substrate. The displacement also imparts a change to an incident readout light flux in accordance with the magnitude of the displacement. The change to the readout light is detected and used to form an image.

Abstract translation: 公开了光学可读的辐射位移转换装置和包含其的图像再现装置。 还公开了用于使用这种装置和装置检测图像和渲染图像的相关方法。 这样的装置，装置和方法允许提高辐射检测的精度和灵敏度，而不必使用冷却器。 代表性的转换装置包括基板和经由支脚部分附着到基板的悬挂部分。 转换装置包括吸收和吸收不可见的辐射（例如，UV，IR或X射线）并从吸收的辐射产生热的辐射吸收膜。 悬挂部分包括相对于基板移位的位移构件。 位移还根据位移的大小对入射读出光通量进行改变。 检测到读出光的变化并用于形成图像。