公开(公告)号：US09651503B2

公开(公告)日：2017-05-16

申请号：US14665748

申请日：2015-03-23

Applicant: GENERAL ELECTRIC COMPANY

Inventor： Manuel Kenneth Bueno ,  Robert Martin Roney, Jr.

IPC: G01B11/24 ,  G01N21/954 ,  G01S17/89 ,  G01N21/88 ,  G01S17/88 ,  G01S7/481

CPC classification number: G01N21/8851 ,  G01N21/88 ,  G01N21/954 ,  G01N2021/9544 ,  G01N2021/9546 ,  G01N2021/9548 ,  G01N2201/06113 ,  G01N2201/104 ,  G01N2201/1045 ,  G01S7/4815 ,  G01S7/4817 ,  G01S7/4818 ,  G01S17/88 ,  G01S17/89

Abstract: A system includes a vessel floating on a body of water. The system also includes at least one conduit extending from the vessel to below the body of water. The system also includes a scanning device disposed within the at least one conduit. The scanning device includes at least one two-dimensional (2D) line scanner and a rotary encoder coupled to the at least one 2D line scanner. The scanning device is configured to generate three-dimensional (3D) image data of a surface of the at least one conduit or at least one component disposed within the at least one conduit.

公开(公告)号：US09239287B2

公开(公告)日：2016-01-19

申请号：US14385033

申请日：2012-04-10

Applicant: Hyang-Sook Chun ,  Sung-Wook Choi ,  Hyun-Joo Chang ,  Na-Ri Lee ,  Gyeong-Sik Ok

Inventor： Hyang-Sook Chun ,  Sung-Wook Choi ,  Hyun-Joo Chang ,  Na-Ri Lee ,  Gyeong-Sik Ok

IPC: G01J5/02 ,  G01N21/3581 ,  H01Q15/08 ,  G01N21/88 ,  G02B3/00

CPC classification number: G01N21/3581 ,  G01N21/8806 ,  G01N21/94 ,  G01N2201/06113 ,  G01N2201/1045 ,  G01N2201/105 ,  G02B3/00 ,  H01Q15/08

Abstract: An object inspection apparatus includes a terahertz wave supplying unit for generating a terahertz wave and moving a path of the terahertz wave according to time so that the terahertz wave is supplied to an object to be inspected, a focusing lens located between the terahertz wave supplying unit and the object to be inspected to focus the terahertz wave supplied by the terahertz wave supplying unit, a rotating plate having a plate shape and including a plurality of the focusing lenses with different distances from the center thereof, the rotating plate rotating in the circumferential direction so that one of the focusing lenses is located at a path of the terahertz wave according to the path movement of the terahertz wave, and a terahertz wave detecting unit for collecting and detecting a terahertz wave incident to the object to be inspected.

Abstract translation: 物体检查装置包括：太赫兹波提供单元，用于产生太赫兹波，并根据时间移动太赫兹波的路径，使得太赫兹波被提供给被检测物体;聚焦透镜，位于太赫波提供单元 以及要被检查的物体聚焦太赫兹波供给单元提供的太赫兹波，具有板形的旋转板，并且包括多个离其中心距离不同的聚焦透镜，旋转板沿圆周方向旋转 使得一个聚焦透镜根据太赫兹波的路径移动位于太赫兹波的路径，以及用于收集和检测入射到待检查对象的太赫兹波的太赫兹波检测单元。

公开(公告)号：US08922764B2

公开(公告)日：2014-12-30

申请号：US13976178

申请日：2011-10-21

Applicant: Yuta Urano ,  Toshifumi Honda ,  Yukihiro Shibata

Inventor： Yuta Urano ,  Toshifumi Honda ,  Yukihiro Shibata

IPC: G01N21/956 ,  G01N21/95 ,  G01B11/06 ,  G01N21/88

CPC classification number: G01N21/956 ,  G01B11/0608 ,  G01N21/9501 ,  G01N21/95623 ,  G01N2021/8854 ,  G01N2201/1045

Abstract: A defect inspection method includes: illuminating an area on surface of a specimen as a test object under a specified illumination condition; scanning a specimen to translate and rotate the specimen; detecting scattering lights to separate each of scattering lights scattered in different directions from the illuminated area on the specimen into pixels to be detected according to a scan direction at the scanning a specimen and a direction approximately orthogonal to the scan direction; and processing to perform an addition process on each of scattering lights that are detected at the step and scatter approximately in the same direction from approximately the same area of the specimen, determine presence or absence of a defect based on scattering light treated by the addition process, and compute a size of the determined defect using at least one of the scattering lights corresponding to the determined defect.

Abstract translation: 缺陷检查方法包括：在规定的照明条件下照射作为被检体的试样表面的面积; 扫描样品以平移和旋转样品; 检测散射光，根据扫描样本的扫描方向和与扫描方向大致正交的方向，将从样本上的照射区域向不同方向散射的散射光分离成要检测的像素; 对在步骤中检测到的每个散射光进行加法处理，并且从与样本的大致相同的区域大致相同的方向散射，基于通过加法处理的散射光确定缺陷的存在或不存在 并且使用与所确定的缺陷相对应的散射光中的至少一个来计算确定的缺陷的大小。

公开(公告)号：US08339593B2

公开(公告)日：2012-12-25

申请号：US12571791

申请日：2009-10-01

Applicant: Eiji Kamiyama ,  Takehiro Tsunemori ,  Kazuhiro Yamamoto ,  Kenji Aoki

Inventor： Eiji Kamiyama ,  Takehiro Tsunemori ,  Kazuhiro Yamamoto ,  Kenji Aoki

IPC: G01N21/00

CPC classification number: G01N21/9501 ,  G01N2201/1045 ,  G01N2201/106

Abstract: A laser scattering defect inspection system includes: a stage unit that rotates a workpiece W and transports the workpiece W in one direction; a laser light source that emits a laser beam LB toward the workpiece W mounted on the stage unit; an optical deflector that scans the laser beam LB emitted from the laser light source on the workpiece W; an optical detector that detects the laser beam LB scattered from the surface of the workpiece W; a storage unit that stores defect inspection conditions for each inspection step of a manufacturing process of the workpiece W, where the conditions include the rotation speed and the moving speed of the workpiece W by the stage unit, the scan width on the workpiece W and the scan frequency by the optical deflector; and a control unit that reads the defect inspection conditions stored for each inspection step in the storage unit and controls the driving of the stage unit and the optical deflector under the conditions.

Abstract translation: 激光散射缺陷检查系统包括：台架单元，其使工件W旋转并沿一个方向输送工件W; 激光光源，其向安装在平台单元上的工件W发射激光束LB; 光学偏转器，其对从工件W上的激光源发射的激光束LB进行扫描; 检测从工件W的表面散射的激光束LB的光检测器; 存储单元，其存储工件W的制造过程的每个检查步骤的缺陷检查条件，其中条件包括工件W的工件W的转速和移动速度，工件W上的扫描宽度和 扫描频率由光学偏转器; 以及控制单元，其读取存储单元中的每个检查步骤存储的缺陷检查条件，并且在条件下控制台单元和光偏转器的驱动。

公开(公告)号：US20060038984A9

公开(公告)日：2006-02-23

申请号：US10360512

申请日：2003-02-06

Applicant: Mehdi Vaez-Iravani ,  Guoheng Zhao ,  Stanley Stokowski

Inventor： Mehdi Vaez-Iravani ,  Guoheng Zhao ,  Stanley Stokowski

IPC: G01N21/00

CPC classification number: G01N21/95623 ,  G01N21/47 ,  G01N21/94 ,  G01N2201/1045

Abstract: A cylindrical mirror or lens is used to focus an input collimated beam of light onto a line on the surface to be inspected, where the line is substantially in the plane of incidence of the focused beam. An image of the beam is projected onto an array of charge-coupled devices parallel to the line for detecting anomalies and/or features of the surface, where the array is outside the plane of incidence of the focused beam. For inspecting surface with a pattern thereon, the light from the surface is first passed through a spatial filter before it is imaged onto the charge-coupled devices. The spatial filter includes stripes of scattering regions that shift in synchronism with relative motion between the beam and the surface to block Fourier components from the pattern. The spatial filter may be replaced by reflective strips that selectively reflects scattered radiation to the detector, where the reflective strips also shifts in synchronism with the relative motion.

公开(公告)号：US5875029A

公开(公告)日：1999-02-23

申请号：US908061

申请日：1997-08-11

Applicant: Peter C. Jann ,  Wayne W. Li ,  Igor Iosilevsky ,  Kenneth H. Womack ,  Vlastimil Cejna ,  George A. Burt, Jr.

Inventor： Peter C. Jann ,  Wayne W. Li ,  Igor Iosilevsky ,  Kenneth H. Womack ,  Vlastimil Cejna ,  George A. Burt, Jr.

IPC: G01N21/94 ,  G01N21/956 ,  G01B9/02

CPC classification number: G01N21/9501 ,  G01N21/94 ,  G01N2201/1045

Abstract: A simple yet versatile noncontact optical inspection instrument and method are described for the inspection of magnetic disk surfaces for surface defects. This instrument is capable of inspecting the disk surface at any point in the disk manufacturing process. Surface defects such as bumps, pits and scratches can be measured. Surface contaminants such as particles and stains can also be measured. The instrument is also capable of discriminating between surface defects and surface contaminants. The instrument is comprised of two identical optical sensors which are located on opposite sides of the disk. A carriage supports and translates these sensors along the disk radius while a spindle rotates the disk. Both surfaces of the disk are therefore simultaneously scanned in a spiral fashion. The sensor's illumination optics produce a monochromatic focused spot of light which is normally incident upon the disk surface. The sensor uses two collection optics channels which simultaneously detect both the specular reflected light and the diffuse scattered light produced by the disk surface. Both the angle and power of the specular reflected light are measured, while just the power of the diffuse scattered light is measured. The output signals from the sensors are processed to estimate the size of the defects and to determine the type of defect.

Abstract translation: 描述了一种简单而通用的非接触式光学检测仪器和方法，用于检查表面缺陷的磁盘表面。 该仪器能够在磁盘制造过程的任何时刻检查磁盘表面。 可以测量诸如凸块，凹坑和划痕的表面缺陷。 还可以测量颗粒和污渍等表面污染物。 该仪器还能够区分表面缺陷和表面污染物。 仪器由两个相同的光学传感器构成，位于光盘的相对两侧。 当主轴旋转磁盘时，滑架沿着磁盘半径支撑并平移这些传感器。 因此，盘的两个表面都以螺旋方式同时扫描。 传感器的照明光学器件产生通常入射在盘表面上的单色聚光光点。 该传感器使用两个收集光学通道，其同时检测镜面反射光和由盘表面产生的漫射散射光。 测量镜面反射光的角度和功率，同时测量漫射散射光的功率。 来自传感器的输出信号被处理以估计缺陷的尺寸并确定缺陷的类型。

公开(公告)号：US4800268A

公开(公告)日：1989-01-24

申请号：US91867

申请日：1987-09-01

Applicant: Motosuke Miyoshi ,  Katsuya Okumura ,  Shigeru Ogawa

Inventor： Motosuke Miyoshi ,  Katsuya Okumura ,  Shigeru Ogawa

IPC: H01L21/66 ,  G01B11/30 ,  G01N21/88 ,  G01N21/89 ,  G01N21/94 ,  G01N21/95 ,  G01N21/956 ,  H01J3/14

CPC classification number: G01N21/9501 ,  G01N2201/1045

Abstract: An apparatus for scanning a laser beam to examine the surface of a semiconductor wafer comprises a stage onto which a semiconductor wafer is mounted and a laser beam scanning unit for repeatedly rectilinearly scanning a laser beam in a predetermined direction on the semiconductor wafer. This scanning apparatus further has a drive unit for rotating the semiconductor wafer and for moving the semiconductor wafer by only a predetermined distance in the predetermined direction every rotation of the wafer. The laser beam scanning unit rectilinearly scans the laser beam at a swing width of a predetermined amount.

Abstract translation: 用于扫描激光束以检查半导体晶片的表面的装置包括其上安装半导体晶片的台和用于在半导体晶片上沿预定方向重复地直线扫描激光束的激光束扫描单元。 该扫描装置还具有驱动单元，用于旋转半导体晶片，并且用于每半转晶圆使预定方向仅移动半导体晶片预定距离。 激光束扫描单元以预定量的摆动宽度直线地扫描激光束。

公开(公告)号：US4626101A

公开(公告)日：1986-12-02

申请号：US675008

申请日：1984-11-26

Applicant: Shigeru Ogawa ,  Hiroshi Yamaji ,  Masaaki Kano

Inventor： Shigeru Ogawa ,  Hiroshi Yamaji ,  Masaaki Kano

IPC: G01N21/94 ,  G01N21/95 ,  G01N21/89

CPC classification number: G01N21/9501 ,  G01N21/94 ,  G01N2201/065 ,  G01N2201/1045

Abstract: The holding mechanism holds an object under inspection in a manner that the substantially entire surface of the object may relatively be scanned by a laser beam. A spherical integrating light collector has an opening disposed close to the inspected surface of the object held by the holding mechanism. A laser beam illuminating mechanism is coupled with the other end of the spherical integrating light collector, and illuminates the inspected surface of the object with the laser beam through the opening. A photo-electric converter receives the scattered light as is reflected by the inspected surface and collected by the spherical integrating light collector, and converts the scattered light into an electrical signal representing an amount of light. An analog to digital converter converts the electrical signal derived from the photo-electric converter into a digital signal. A peak detector receives the digital signal derived from the analog to digital converter to detect peak values at predetermined periods. A mean value calculator calculates a mean value using a digital signal output from the analog to digital converter. A reference value storing memory stores a reference value to determine defects present on the inspected surface of the object. A threshold level calculator calculates the threshold level using the reference value and the mean value. A defect detector compares peak values derived from the peak detector with the threshold level, and detects the surface defects on the basis of the result of the comparison.

Abstract translation: 保持机构以使得物体的大致整个表面可以相对地被激光束扫描的方式保持被检查物体。 球形积分光收集器具有靠近被保持机构保持的物体的检查表面设置的开口。 激光束照明机构与球面积分光收集器的另一端耦合，并且通过开口用激光束照射物体的检查表面。 光电转换器接收由被检查表面反射并被球面积分光收集器收集的散射光，并将散射光转换成表示光量的电信号。 模数转换器将从光电转换器得到的电信号转换为数字信号。 峰值检测器接收从模数转换器得到的数字信号，以在预定周期检测峰值。 平均值计算器使用从模数转换器输出的数字信号来计算平均值。 参考值存储存储器存储参考值以确定存在于物体的被检查表面上的缺陷。 阈值电平计算器使用参考值和平均值来计算阈值电平。 缺陷检测器将从峰值检测器导出的峰值与阈值水平进行比较，并根据比较结果检测表面缺陷。

公开(公告)号：US20170234806A1

公开(公告)日：2017-08-17

申请号：US15584628

申请日：2017-05-02

Applicant: General Electric Company

Inventor： Manuel Kenneth Bueno ,  Robert Martin Roney, JR.

IPC: G01N21/88 ,  G01N21/954 ,  G01S17/89 ,  G01S7/481

CPC classification number: G01N21/8851 ,  G01N21/88 ,  G01N21/954 ,  G01N2021/9544 ,  G01N2021/9546 ,  G01N2021/9548 ,  G01N2201/06113 ,  G01N2201/104 ,  G01N2201/1045 ,  G01S7/4815 ,  G01S7/4817 ,  G01S7/4818 ,  G01S17/88 ,  G01S17/89

Abstract: A system includes a vessel floating on a body of water. The system also includes at least one conduit extending from the vessel to below the body of water. The system also includes a scanning device disposed within the at least one conduit. The scanning device includes at least one two-dimensional (2D) line scanner and a rotary encoder coupled to the at least one 2D line scanner. The scanning device is configured to generate three-dimensional (3D) image data of a surface of the at least one conduit or at least one component disposed within the at least one conduit.

公开(公告)号：US07239588B2

公开(公告)日：2007-07-03

申请号：US10516023

申请日：2003-05-30

Applicant: Yasuhiro Gotoh ,  Seiji Nishiwaki ,  Yoshiaki Komma

Inventor： Yasuhiro Gotoh ,  Seiji Nishiwaki ,  Yoshiaki Komma

IPC: G01N21/88

CPC classification number: G11B7/00375 ,  G01N21/94 ,  G01N21/9506 ,  G01N2201/1045 ,  G11B19/04

Abstract: In an foreign body detection apparatus, an optical signal detection unit irradiates a light spot onto a surface of an object to be inspected while scanning the surface by employing the light spot in a predetermined direction, and receives a reflected beam from the surface of the inspected object to generate a photodetection signal corresponding to the light intensity of the reflected beam. A foreign body detection unit generates a foreign body detection signal appearing with respect to a leader and a trailer in the scanning direction of a foreign body adhering to the inspected object from the photodetection signal. The foreign body detection signal is obtained, for example, as a difference signal between the photodetection signal and a delayed photodetection signal with a predetermined delay time. A foreign body discrimination unit generates a foreign body discriminating signal indicating a region in which the foreign body is present from the foreign body detection signal.

Abstract translation: 在异物检测装置中，光信号检测单元通过在预定方向上采用光点扫描表面，将光斑照射到待检查物体的表面上，并从被检查的表面接收反射光束 目的是产生对应于反射光束的光强度的光电检测信号。 异物检测单元从与光检测信号相对的被检查物体的异物的扫描方向上的引导部和拖车上产生异物检测信号。 例如，异物检测信号作为光检测信号和延迟光检测信号之间的差信号，具有预定的延迟时间。 异物识别单元从异物检测信号生成表示异物存在的区域的异物识别信号。