ELECTRODE FOR PRODUCING A PLASMA, PLASMA CHAMBER HAVING SAID ELECTRODE, AND METHOD FOR ANALYZING OR PROCESSING A LAYER OR THE PLASMA IN SITU
    31.
    发明申请
    ELECTRODE FOR PRODUCING A PLASMA, PLASMA CHAMBER HAVING SAID ELECTRODE, AND METHOD FOR ANALYZING OR PROCESSING A LAYER OR THE PLASMA IN SITU 有权
    用于生产等离子体的电极,具有电极的等离子体室,以及用于分析或处理层或等离子体的方法

    公开(公告)号:US20130094022A1

    公开(公告)日:2013-04-18

    申请号:US13703190

    申请日:2011-07-07

    Abstract: A RF electrode for generating, plasma in a plasma chamber comprising an optical feedthrough. A plasma chamber comprising an RF electrode and a counter-electrode with a substrate support for holding a substrate, wherein a high-frequency alternating field for generating the plasma can be formed between the RF electrode and the counter-electrode. The chamber comprising an RF electrode with an optical feedthrough. A method, for in situ analysis or in situ processing of a layer or plasma in a plasma chamber, wherein the layer is disposed on counter-electrode and an RF electrode is: disposed on the side lacing the layer. Selection of an RF electrode having an optical feedthrough, and at least one step in which electromagnetic radiation is supplied through the optical feedthrough for purposes of analysis or processing of the layer or the plasma, and by at least one other step in which the scattered or emitted or reflected radiation is supplied to an analysis unit.

    Abstract translation: 一种用于在包括光学馈通的等离子体室中产生等离子体的RF电极。 一种包括RF电极和具有用于保持衬底的衬底支撑件的对电极的等离子体室,其中可以在RF电极和对电极之间形成用于产生等离子体的高频交变场。 该腔室包括具有光学馈通的RF电极。 一种用于等离子体室中的层或等离子体的原位分析或原位处理的方法,其中所述层设置在对电极上,并且RF电极:布置在装配所述层的一侧。 选择具有光学馈通的RF电极,以及至少一个步骤,其中通过光学馈通提供电磁辐射用于分析或处理该层或等离子体,以及至少一个其它步骤,其中散射或 发射或反射的辐射被提供给分析单元。

    Inorganic electroluminescence device
    32.
    发明授权
    Inorganic electroluminescence device 有权
    无机电致发光器件

    公开(公告)号:US08044581B2

    公开(公告)日:2011-10-25

    申请号:US12581357

    申请日:2009-10-19

    CPC classification number: H01J1/64 H01J1/02 H01J1/66

    Abstract: An inorganic field emission device includes a first electrode, a second electrode spaced apart from the first electrode, and a light emitting layer disposed therebetween. A dielectric layer is disposed between the first electrode and the light emitting layer and/or between the second electrode and the light emitting layer. A field reinforcing layer is disposed between a dielectric layer and the light emitting layer and includes carbon nanotubes having a length of about 20 nanometers to about 1 micrometer.

    Abstract translation: 无机场致发射器件包括第一电极,与第一电极间隔开的第二电极和设置在其间的发光层。 电介质层设置在第一电极和发光层之间和/或第二电极和发光层之间。 场强增强层设置在电介质层和发光层之间,并且包括长度为约20纳米至约1微米的碳纳米管。

    INORGANIC ELECTROLUMINESCENCE DEVICE
    33.
    发明申请
    INORGANIC ELECTROLUMINESCENCE DEVICE 有权
    无机电致发光器件

    公开(公告)号:US20100270918A1

    公开(公告)日:2010-10-28

    申请号:US12581357

    申请日:2009-10-19

    CPC classification number: H01J1/64 H01J1/02 H01J1/66

    Abstract: An inorganic field emission device includes a first electrode, a second electrode spaced apart from the first electrode, and a light emitting layer disposed therebetween. A dielectric layer is disposed between the first electrode and the light emitting layer and/or between the second electrode and the light emitting layer. A field reinforcing layer is disposed between a dielectric layer and the light emitting layer and includes carbon nanotubes having a length of about 20 nanometers to about 1 micrometer.

    Abstract translation: 无机场致发射器件包括第一电极,与第一电极间隔开的第二电极和设置在其间的发光层。 电介质层设置在第一电极和发光层之间和/或第二电极和发光层之间。 场强增强层设置在电介质层和发光层之间,并且包括长度为约20纳米至约1微米的碳纳米管。

    Electrodes in plasma display panel and fabrication method thereof

    公开(公告)号:US06517400B1

    公开(公告)日:2003-02-11

    申请号:US09501275

    申请日:2000-02-09

    Abstract: An electrode in a plasma display panel and a fabrication process thereof that is capable of reducing a line width of the electrode without increasing a resistance component of the electrode. In the method, a bus electrode is provided by laminating a metal film on a certain substrate and then patterning it. A transparent electrode is provided on the substrate in a shape of surrounding the bus electrode. Accordingly, the electrode is provided by the metal film such that a limit for a selection in a width or thickness of the electrode, so that a line width of the electrode can be reduced to improve the visible light transmissivity and the electrode is formed into a large thickness instead of making a minute electrode width to lower the resistance component, thereby reducing a power consumption of the PDP.

    Method for making a low work function electrode
    35.
    发明授权
    Method for making a low work function electrode 失效
    低功函电极制作方法

    公开(公告)号:US6103298A

    公开(公告)日:2000-08-15

    申请号:US955097

    申请日:1997-10-22

    Abstract: Methods for making low work function electrodes either made from or coated with an electride material in which the electride material has lattice defect sites are described. Lattice defect sites are regions of the crystal structure where irregularities and deformations occur. Also provided are methods for making electrodes which consist of a substrate coated with a layer of a compound comprised of a cation complexed by an electride former, in which said complex has lattice defect sites. In addition, methods for making electrodes which consist of a bulk metal coated with a layer of an electride former having lattice defect sites are described. The electride former stabilizes the loss of electrons by surface sites on the metal, lowering the work-function of the coated surface.

    Abstract translation: 描述了由电镀材料具有晶格缺陷部位的电极材料制成或涂覆低功函电极的方法。 晶格缺陷位点是发生不规则和变形的晶体结构区域。 还提供了制造电极的方法,其由涂覆有由电化学成形剂络合的阳离子组成的化合物层的基底组成,其中所述络合物具有晶格缺陷位点。 此外,描述了制造电极的方法,其由涂覆有具有晶格缺陷位点的电化学成形剂层的体金属组成。 电子前体通过金属上的表面位点稳定电子的损失,降低涂覆表面的功能。

    Field emitter array with cap material on anode electrode
    36.
    发明授权
    Field emitter array with cap material on anode electrode 失效
    在阳极电极上具有盖材料的场发射极阵列

    公开(公告)号:US5990612A

    公开(公告)日:1999-11-23

    申请号:US937656

    申请日:1997-09-24

    Applicant: Kazuo Konuma

    Inventor: Kazuo Konuma

    CPC classification number: H01J29/085 H01J1/02 H01J3/022

    Abstract: A field emitter array comprises a plurality of cathode electrodes and an anode electrode disposed opposite to the plurality of cathode electrodes. And the anode electrode is provided with a plurality of protrusions having a cap material disposed on the tip of each protrusion. A voltage below a designated value is applied between a gate electrode and the cathode electrodes, and electrons are released only from a cathode electrode with a low emission start voltage. When the electrons are emitted to the cap material provided on the protrusions, the cap material is sputtering-evaporated and is affixed to the cathode electrode. Then a cap is disposed on the each of the cathode electrodes. Then, the emission properties between each cathode electrode are consequently rendered uniform, thereby increasing the emission start voltage and maximum applied voltage of the overall field emitter array.

    Abstract translation: 场发射器阵列包括多个阴极电极和与多个阴极电极相对设置的阳极电极。 并且阳极电极设置有多个突起,其具有设置在每个突起的尖端上的盖材料。 在栅电极和阴极之间施加低于指定值的电压,并且仅从具有低发射起始电压的阴极释放电子。 当电子被发射到设置在突起上的盖材料时,盖材料被溅射蒸发并且固定到阴极电极。 然后在每个阴极上设置盖。 然后,各阴极之间的发射特性因此变得均匀,从而增加了整个场发射极阵列的发射开始电压和最大施加电压。

    ELECTRON GENERATION APPARATUS
    37.
    发明公开

    公开(公告)号:EP3404782A1

    公开(公告)日:2018-11-21

    申请号:EP18160887.8

    申请日:2018-03-09

    CPC classification number: H01J1/02 C02F1/305 C02F1/4608 H01T19/04 H01T23/00

    Abstract: An electron generation apparatus comprises a discharge pin module (150) provided with discharge pins (155) coupled to a support plate (151), and an elastic connection element (158) electrically connecting a group of discharge pins, a discharge plate (160) facing the discharge pins, a support structure (140) positioned at an opposite side to the discharge plate and provided with a coupling plate (145) to which the discharge pin module and the discharge plate are detachably coupled, and a circuit module (130) provided with a main board (131) and distribution processing boards (135) connected to the main board to apply individual high-voltage high-frequency pulsed power to the group of discharge pins. The coupling plate is provided with connection protrusions (146) each electrically connected to the distribution processing boards. An end of the elastic connection element comes into contact with the connection protrusion.

    ELECTRODE AND METHOD OF MANUFACTURING THE SAME
    39.
    发明公开
    ELECTRODE AND METHOD OF MANUFACTURING THE SAME 审中-公开
    电极及其制造方法

    公开(公告)号:EP2449571A1

    公开(公告)日:2012-05-09

    申请号:EP10735368.2

    申请日:2010-07-01

    Abstract: A low-resistance, fine electrode is formed by baking in air a photosensitive paste which has an inorganic component containing copper powder, boron powder, and glass frit, and an organic component containing a photopolymerization initiator, monomer, and organic vehicle, and in which the average particle size of the copper powder is 2.5 μm or less, and the content of boron powder based on the total amount of copper powder and boron powder is 8 to 25 wt%.

    Abstract translation: 低电阻微细电极通过在空气中烧结具有含铜粉末,硼粉末和玻璃料的无机成分的感光性糊剂和含有光聚合引发剂,单体和有机载体的有机成分而形成,并且其中 铜粉的平均粒径为2.5μm以下,基于铜粉和硼粉的总量的硼粉的含量为8〜25重量%。

Patent Agency Ranking