電子銃
    34.
    发明申请
    電子銃 审中-公开
    电子枪

    公开(公告)号:WO2004073010A1

    公开(公告)日:2004-08-26

    申请号:PCT/JP2004/001686

    申请日:2004-02-17

    Abstract: An electron source suitable for an electron beam exposure system, an Auger electronic spectrometer or the like, and provides a small total emission current amount even during a high-angular-current-density operation. An electron gun provided with a cathode (1) consisting of tungsten or molybdenum single crystal and provided on the surface thereof with a coating layer consisting of oxygen and at least one kind of metal element selected from a group consisting of 2A group, 3A group and 4A group, characterized in that the end of the cathode (1) has a conical trapezoid shape, a total conical angle of a conical trapezoid portion (8) is between 25° and 95°, and the diameter of the top face (9) is 5mum through 200mum.

    Abstract translation: 适用于电子束曝光系统的电子源,俄歇电子光谱仪等,甚至在高角度 - 电流密度的操作中也提供小的总发射电流量。 一种具有由钨或钼单晶组成的阴极(1)的电子枪,其表面上设置有由氧组成的涂层和至少一种选自2A组,3A组和 4A,其特征在于,阴极(1)的端部具有锥形梯形形状,锥形梯形部分(8)的总锥形角在25°和95°之间,并且顶面(9)的直径 是5mum到200mum。

    TUNSTEN WIRE, CATHODE HEATER, AND FILAMENT FOR VIBRATION SERVICE LAMP
    36.
    发明公开
    TUNSTEN WIRE, CATHODE HEATER, AND FILAMENT FOR VIBRATION SERVICE LAMP 有权
    WOLFRAMDRAHT,KATHODENHEIZER UNDGLÜHFADENFÜRLAMPE ZUR VERWENDUNG UNTER VIBRATIONEN

    公开(公告)号:EP1435398A1

    公开(公告)日:2004-07-07

    申请号:EP02800792.0

    申请日:2002-10-09

    Abstract: A tungsten wire containing 1 to 10% by mass of rhenium has a point which indicates a 2% elongation within a quadrangle formed by joining points with straight lines, where the values of x and y are point (20, 75), point (20, 87), point (90, 75), and point (90, 58), in this order, wherein the wire diameter of the aforementioned tungsten wire is represented by x µm, and the elongation of the tungsten wire is 2% after electrically heating with an electrical current which is a ratio of y% to the fusion current (FC) at the wire diameter x µm, and wherein a semi-logarithmic system of coordinates is expressed by a horizontal axis using a logarithmic scale of the aforementioned wire diameter x and a vertical axis using a normal scale of ratio y to the fusion current. According to the above-described configuration, a tungsten wire having a great elongation even under conditions of high temperature can be provided, and the tungsten wire can exhibit an excellent durability when used as component material for constituting cathode heaters and so forth, and the tungsten wire can be manufactured efficiently.

    Abstract translation: 含有1〜10质量%的铼的钨丝具有表示在通过连接点与直线形成的四边形内的2%伸长率的点,其中x和y的值为点(20,75),点(20 ,87),点(90,75)和点(90,58),其中上述钨丝的线径由x m表示,钨丝的伸长率在2%之后 在线径x m处以与电流(FC)的比率y%的电流进行电加热,并且其中使用上述的对数标度由水平轴表示坐标的半对数系统 线径x和垂直轴,使用与融合电流的比y的正常刻度。 根据上述结构,可以提供即使在高温条件下具有大的伸长率的钨丝,并且当用作构成阴极加热器等的组分材料时,钨丝可以表现出优异的耐久性,钨 电线可以有效地制造。

    Thermionic electron emitter
    37.
    发明公开
    Thermionic electron emitter 失效
    热电离子发射器。

    公开(公告)号:EP0156454A1

    公开(公告)日:1985-10-02

    申请号:EP85300230.1

    申请日:1985-01-14

    CPC classification number: H01J1/28 H01J1/146

    Abstract: A thermionic electron emitter includes an electron emissive layer (5) formed solely of an alloy containing osmium in the proportion, expressed in atomic percent, in the range from 32 percent to 34 percent inclusive, the balance being of tungsten, and a porous refractory medium (4) impregnated with an alkaline earth activator (FIG.2). In another example the activator is confined on the side of the medium remote from the layer (FIG.3). Alternatively (FIG.4) the layer is porous and is impregnated with the activator, or the activator is confined on the side of the porous layer remote from the electron emissive surface thereof (FIG.5).

    Abstract translation: 热离子电子发射器包括仅由含有锇的合金形成的电子发射层(5),所述合金的比例以原子百分比表示,在32%至34%(含余量)范围内,其余为钨,多孔耐火介质 (4)用碱土活化剂浸渍。 在另一个实例中,活化剂被限制在远离该层的介质侧上。 或者,层是多孔的并且用活化剂浸渍,或者活化剂被限制在远离其电子发射表面的多孔层的侧面上。

Patent Agency Ranking