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    A PHOTOELECTRON SPECTROSCOPY APPARATUS AND METHOD OF USE
    31.
    发明公开
    A PHOTOELECTRON SPECTROSCOPY APPARATUS AND METHOD OF USE 审中-公开
    光电子能谱装置和使用方法

    公开(公告)号：EP1929258A4

    公开(公告)日：2014-05-28

    申请号：EP06814252

    申请日：2006-09-08

    Applicant: REVERA INC

    Inventor： SCHUELER BRUNO W ,  REED DAVID A

    IPC: G01J3/42 ,  G01N21/62 ,  H01J1/50 ,  H01J40/00 ,  H01L21/67

    CPC classification number: G01N23/2273 ,  G01N2223/085 ,  G01N2223/6116 ,  H01J2235/08

    Abstract: According to one aspect of the present invention, a substrate processing system is provided. The system may include a chamber wall enclosing a chamber, a substrate support positioned within the chamber to support a substrate, an electromagnetic radiation source to emit electromagnetic radiation onto the substrate on the substrate support, the electromagnetic radiation causing photoelectrons to be emitted from a material on the substrate, an analyzer to capture the photoelectrons emitted from the substrate, and a magnetic field generator to generate a magnetic field within the chamber and guide the photoelectrons from the substrate to the analyzer.

    ELECTRON COLLECTING ELEMENT WITH INCREASED THERMAL LOADABILITY, X-RAY GENERATING DEVICE AND X-RAY SYSTEM
    33.
    发明公开
    ELECTRON COLLECTING ELEMENT WITH INCREASED THERMAL LOADABILITY, X-RAY GENERATING DEVICE AND X-RAY SYSTEM 有权
    X射线发生器，X射线系统和X射线发生器的使用

    公开(公告)号：EP2494575A2

    公开(公告)日：2012-09-05

    申请号：EP10782026.8

    申请日：2010-10-18

    Applicant: Koninklijke Philips Electronics N.V. ,  Philips Intellectual Property & Standards GmbH

    Inventor： PIETIG, Rainer

    IPC: H01J35/10

    CPC classification number: H01J35/105 ,  H01J35/12 ,  H01J2235/08 ,  H01J2235/1204 ,  H01J2235/1291

    Abstract: The present invention relates to X-ray generating technology in general. Providing an electron collecting element of an X-ray generating device statically may allow for the manufacture of X-ray systems with reduced moving parts and actuating parts, possibly reducing manufacturing costs and sources for failure. Consequently, an electron collecting element with increased thermal loadability is presented. According to the present invention, an electron collecting element (28) is provided, comprising a surface element (22) and a heat conducting element (26). The heat conducting element (26) comprises a first thermal conductivity in a first direction and at least a second thermal conductivity in at least a second direction. The first thermal conductivity is greater than the second thermal conductivity. The first direction is substantially perpendicular to the surface element (22).

    TWO-STAGE X-RAY CONCENTRATOR
    34.
    发明公开
    TWO-STAGE X-RAY CONCENTRATOR 有权
    两级X射线浓缩器

    公开(公告)号：EP2084715A2

    公开(公告)日：2009-08-05

    申请号：EP07854356.8

    申请日：2007-10-23

    Applicant: Thermo Niton Analyzers LLC

    Inventor： GRODZINS, Lee ,  GRODZINS, Hal

    IPC: G21K1/06

    CPC classification number: G21K1/06 ,  G01N2223/316 ,  G21K2201/062 ,  H01J2235/08

    Abstract: A method for obtaining a concentrated, monochromatic x-ray beam from a standard x-ray tube or other source of polychromatic emission. X-rays from the anode of the x-ray tube fluoresce an adjoining, independent target that produces a monochromatic spectrum, a portion of which is focused by the x-ray optical system. This two-stage method gives the system considerably versatility without undue loss in signal. The two-stage concentrator makes practical the use of focusing optics in hand-held and portable instruments.

    Abstract translation: 一种从标准X射线管或其他多色发射源获得浓缩的单色X射线束的方法。 来自X射线管阳极的X射线发出相邻的独立靶，产生单色光谱，其一部分由X射线光学系统聚焦。 这种两阶段方法使系统具有相当的多功能性，而不会在信号中产生不适当的损失。 两级聚光器使得聚焦光学元件在手持式和便携式仪器中得到实际应用。

    APPARATUS FOR THE GENERATION OF LOW-ENERGY X-RAYS
    37.
    发明公开
    APPARATUS FOR THE GENERATION OF LOW-ENERGY X-RAYS 有权
    VORRICHTUNG ZUR ERZEUGUNG VONRÖNTGENSTRAHLENMIT GERINGER ENERGIE

    公开(公告)号：EP2962323A2

    公开(公告)日：2016-01-06

    申请号：EP14709739.8

    申请日：2014-02-25

    Applicant: Enxray Limited

    Inventor： UDALOV, Yuri ,  MITKO, Sergey

    IPC: H01J35/06 ,  H01J35/18 ,  H01J35/12

    CPC classification number: A61L2/082 ,  G01N23/02 ,  H01J35/06 ,  H01J35/08 ,  H01J35/12 ,  H01J35/18 ,  H01J2235/06 ,  H01J2235/08 ,  H01J2235/18

    Abstract: An X-ray source for producing soft X-rays, the X-ray source comprising: a cathode having an electron-emitting structure supported by a support structure, the electron-emitting structure being at least partially transparent to X-rays within a region bounded by the support structure;an anode having an X-ray emitting surface parallel to the electron-emitting structure of the cathode; and an electrically insulating spacer arranged between the anode and the cathode;wherein the electron-emitting structure of the cathode and the X-ray emitting surface of the anode are arranged such that, in use, the electron-emitting structure is operable to bombard the anode with electrons, causing X-rays to be emitted from the X-ray emitting surface and to pass through the cathode; and wherein the insulating spacer is arranged between the anode and the support structure of the cathode and projects beyond the support structure, across part of the anode,into the said region.

    Abstract translation: 一种用于产生软X射线的X射线源，所述X射线源包括：具有由支撑结构支撑的电子发射结构的阴极，所述电子发射结构对于区域内的X射线至少部分透明 以支撑结构为界; 具有平行于阴极的电子发射结构的X射线发射表面的阳极; 以及布置在所述阳极和所述阴极之间的电绝缘间隔物; 其中阴极的电子发射结构和阳极的X射线发射表面被布置为使得在使用中电子发射结构可操作地用电子轰击阳极，从而使X射线从 X射线发射表面并通过阴极; 并且其中所述绝缘间隔件布置在所述阳极和所述阴极的所述支撑结构之间，并且跨过所述阳极的一部分突出到所述支撑结构之外的所述区域中。

    X-RAY SOURCES
    38.
    发明公开
    X-RAY SOURCES 有权
    X射线源

    公开(公告)号：EP1618585A2

    公开(公告)日：2006-01-25

    申请号：EP04729152.1

    申请日：2004-04-23

    Applicant: CXR Limited

    Inventor： MORTON, Edward, James ,  LUGGAR, Russell, David ,  DE ANTONIS, Paul

    IPC: H01J35/08

    CPC classification number: H01J35/08 ,  H01J2235/068 ,  H01J2235/08

    Abstract: An anode for an X-ray source is formed in two parts, a main part (18) and a collimating part (22). The main part (18) has the target region (20) formed on it. The two parts between them define an electron aperture (36) through which electrons pass to reach the target region (20), and an X-ray aperture through which the X-rays produced at the target leave the anode. The anode produces at least the first stage of collimation of the X-ray beam produced.

    엑스-선 발생장치의 타겟홀더
    39.
    发明公开
    엑스-선 발생장치의 타겟홀더 无效
    一个X射线发生器目标的持有人

    公开(公告)号：KR1020050061776A

    公开(公告)日：2005-06-23

    申请号：KR1020030093195

    申请日：2003-12-18

    Applicant: 에스케이실트론 주식회사

    Inventor： 이동건

    IPC: H05G1/00

    CPC classification number: H01J35/02 ,  H01J2235/08 ,  H01J2235/084 ,  H05G1/02

    Abstract: 본 발명은 X-선 발생장치의 타겟홀더에 대한 것이다. 본 발명에 의한 X-선발생장치의 타겟홀더는, 고에너지 전자의 충돌되면 X-선을 발생시키는 각기 다른 물질로 형성된 복수개의 타겟과; 상기 복수개의 타겟이 설치될 수 있도록 일정 형상을 갖는 타겟부재와; 상기 타겟부재의 위치를 이동시켜 상기 타겟 중 선택적으로 어느 하나에 의해 X-선 발생을 가능케 하는 타겟 이동수단을 포함하여 구성되는 것을 특징으로 한다.

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