公开(公告)号：EP0075708A2

公开(公告)日：1983-04-06

申请号：EP82107489.5

申请日：1982-08-17

Applicant: SIEMENS AKTIENGESELLSCHAFT

Inventor： Lischke, Burkhard, Prof. Dr. ,  Frosien, Jürgen, Dr.

IPC: H01J29/00 ,  H01J37/30

CPC classification number: H01J1/135 ,  H01J37/242

Abstract: Ein direktgeheizte Kathode mit Heizungsregelung in Elektronenstrahlgeräten soll über lange Zeiträume hinweg eine stabilisierte Temperatur(T) aufweisen. Erfindungsgemäß weist eine direktgeheizte Kathode Mittel (RS) zur Leistungsregelung der Kathodenheizung mit Hilfe von Mitteln (MV) zur Steuerung des Heizstromes (I) und der Heizspannung (U) auf. Erfindungsgemäß wird eine direktgeheizte Kathode so betrieben, daß ihre Kathodentemperatur konstant ist.

Abstract translation: 在电子束设备中具有灯丝加热控制的直接加热阴极旨在在长时间段内具有稳定的温度（T）。 根据本发明，直接加热阴极具有用于借助于控制加热器电流（I）和加热器电压（U）的装置（MV）来调节阴极加热功率的装置（RS）。 根据本发明，操作直接加热的阴极使其阴极温度恒定。

公开(公告)号：US09878060B2

公开(公告)日：2018-01-30

申请号：US15120079

申请日：2015-01-21

Applicant: TETRA LAVAL HOLDINGS & FINANCE S.A.

Inventor： Håkan Mellbin

IPC: A61L2/00 ,  A61L2/08 ,  B65B55/08 ,  G21K5/02 ,  H01J37/07 ,  H01J37/24

CPC classification number: A61L2/087 ,  A61L2202/11 ,  A61L2202/23 ,  B65B55/08 ,  G21K5/02 ,  H01J37/07 ,  H01J37/242

Abstract: Sterilization device, in particular for sterilization of packaging material, comprising a first chamber, a barrier element and a connection area. The first chamber is adapted to provide charge carriers for sterilization, and the connection area is connected to a third chamber so that the barrier element forms at least one part of the boundary of a volume in which a first atmosphere exists.

公开(公告)号：US20170049914A1

公开(公告)日：2017-02-23

申请号：US15119577

申请日：2015-01-21

Applicant: Tetra Laval Holdings & Finance S.A.

Inventor： Jonas DICKNER ,  Håkan MELLBIN ,  Roger LINDGREN ,  Mats ÅKESSON

IPC: A61L2/08 ,  H01J37/16 ,  H01J37/24 ,  B65B3/00 ,  B65B55/08

CPC classification number: A61L2/087 ,  A61L2202/23 ,  B65B3/00 ,  B65B55/08 ,  G21K5/02 ,  H01J37/07 ,  H01J37/165 ,  H01J37/242

Abstract: Sterilization apparatus for sterilizing packaging containers, the sterilization apparatus comprising a first carousel for supporting a plurality of sterilization devices, the sterilization devices being adapted to sterilize an interior of the packaging containers by electron beam irradiation, and a transport system for transporting the packaging containers, the transport system comprising a second carousel coaxial with the first carousel, wherein the first carousel comprises a first rotatable shaft and the second carousel comprises a separate second rotatable shaft coaxial with the first rotatable shaft.

Abstract translation: 灭菌装置，对包装容器进行消毒，所述杀菌装置包括：用于支撑多个灭菌装置的第一转盘，所述灭菌装置适于通过电子束照射对所述包装容器的内部进行灭菌;以及运送所述包装容器的运送系统， 所述运输系统包括与所述第一转盘同轴的第二转盘，其中所述第一转盘包括第一可旋转轴，所述第二转盘包括与所述第一可旋转轴同轴的单独的第二可旋转轴。

公开(公告)号：US20120101742A1

公开(公告)日：2012-04-26

申请号：US12912312

申请日：2010-10-26

Applicant: Russell J. Low ,  Kevin M. Daniels ,  Bon-Woong Koo ,  Richard M. White ,  James W. Blanchette

Inventor： Russell J. Low ,  Kevin M. Daniels ,  Bon-Woong Koo ,  Richard M. White ,  James W. Blanchette

IPC: G06F19/00

CPC classification number: H01J37/3171 ,  H01J37/08 ,  H01J37/242 ,  H01J2237/304

Abstract: A method of controlling operation of an indirectly-heated cathode (IHC) ion source comprises a step of measuring a rate of loss of cathode weight of the IHC ion source that occurs during operation using a first cathode configuration and under a first set of operation conditions. A maximum weight loss for the first cathode configuration is determined, and a cathode lifetime is calculated based upon the rate of cathode weight loss and the maximum weight loss. A further method comprises receiving a minimum source bias power value for operation of a cathode in a first configuration, measuring a rate of decrease in source bias power for a cathode in the first configuration, and calculating a lifetime of the cathode based upon the minimum source bias power and rate of decrease in source bias power.

Abstract translation: 控制间接加热的阴极（IHC）离子源的操作的方法包括以下步骤：测量在使用第一阴极配置的操作期间和在第一组操作条件下发生的IHC离子源的阴极重量损失率 。 确定第一阴极构造的最大重量损失，并且基于阴极重量损失率和最大重量损失计算阴极寿命。 另一种方法包括：在第一配置中接收用于阴极操作的最小源极偏置功率值，测量第一配置中阴极的源偏置功率的降低率，以及基于最小源计算阴极的寿命 偏置功率和源偏置功率的降低率。

公开(公告)号：US07479634B2

公开(公告)日：2009-01-20

申请号：US11714130

申请日：2007-03-06

Applicant: Mamoru Nakasuji ,  Takao Kato ,  Kenji Watanabe ,  Shoji Yoshikawa ,  Tohru Satake ,  Nobuharu Noji

Inventor： Mamoru Nakasuji ,  Takao Kato ,  Kenji Watanabe ,  Shoji Yoshikawa ,  Tohru Satake ,  Nobuharu Noji

IPC: G21K7/00 ,  G21G4/00 ,  G01N23/00

CPC classification number: B82Y10/00 ,  G01N23/225 ,  G01R31/307 ,  H01J37/242 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/24507 ,  H01J2237/2817

Abstract: An electron beam apparatus is provided for reliably measuring a potential contrast and the like at a high throughput in a simple structure. The electron beam apparatus for irradiating a sample, such as a wafer, formed with a pattern with an electron beam to evaluate the sample comprises an electron-optical column for accommodating an electron beam source, an objective lens, an E×B separator, and a secondary electron beam detector; a stage for holding the sample, and relatively moving the sample with respect to the electron-optical column; a working chamber for accommodating the stage and capable of controlling the interior thereof in a vacuum atmosphere; a loader for supplying a sample to the stage; a voltage applying mechanism for applying a voltage to the sample, and capable of applying at least two voltages to a lower electrode of the objective lens; and an alignment mechanism for measuring a direction in which dies are arranged on the sample. When the sample is evaluated, a direction in which the stage is moved is corrected to align with the direction in which the dies are arranged.

Abstract translation: 提供电子束装置，用于以简单的结构以高通量可靠地测量电位对比度等。 用于照射形成有电子束图案的晶片的样品（如晶片）以评估样品的电子束装置包括用于容纳电子束源的电子 - 光学柱，物镜，ExB分离器和次级 电子束检测器 用于保持样品的阶段，并相对于电子 - 光学柱相对移动样品; 用于容纳舞台并能够在真空气氛中控制其内部的工作室; 用于将样品供应到载物台的装载机; 电压施加机构，用于向样品施加电压，并且能够向物镜的下电极施加至少两个电压; 以及用于测量模具布置在样品上的方向的对准机构。 当评估样品时，对载物台移动的方向进行校正，使其与模具的排列方向一致。

公开(公告)号：US20060250092A1

公开(公告)日：2006-11-09

申请号：US11373865

申请日：2006-03-10

Applicant: Gunter Klemm ,  Andreas Thiede ,  Hans-Jurgen Schneider

Inventor： Gunter Klemm ,  Andreas Thiede ,  Hans-Jurgen Schneider

IPC: H05B41/36

CPC classification number: H01J37/242

Abstract: An arrangement for the regulation of the electron beam power of an electron gun, which comprises a filament cathode, a block cathode and an anode. Between the filament cathode and the block cathode is applied a first voltage, while between the block cathode and the anode a second voltage is applied. With the aid of a first closed-loop regulated system the filament cathode is regulated to a constant current value, which has a filament temperature sufficient for the maximum beam power of the block cathode. A second closed-loop regulated system, such including a block power regulator, which is acted upon by the difference between instantaneous block power value and nominal block power value, regulates the voltage between the filament cathode and the block cathode.

Abstract translation: 用于调节电子枪的电子束功率的装置，其包括灯丝阴极，块阴极和阳极。 在灯丝阴极和阻挡阴极之间施加第一电压，而在阻挡阴极和阳极之间施加第二电压。 借助于第一闭环调节系统，灯丝阴极被调节到恒定电流值，其具有足以使块状阴极的最大光束功率足够的灯丝温度。 第二个闭环调节系统，包括由瞬时阻断功率值和标称功率值之间的差异作用的块功率调节器，调节灯丝阴极和块阴极之间的电压。

公开(公告)号：US20060226753A1

公开(公告)日：2006-10-12

申请号：US11387090

申请日：2006-03-22

Applicant: Pavel Adamec ,  Stefan Lanio

Inventor： Pavel Adamec ,  Stefan Lanio

IPC: H01J9/02

CPC classification number: H01J1/135 ,  H01J1/18 ,  H01J37/07 ,  H01J37/242 ,  H01J2237/06316

Abstract: An emitter for a charged particle beam apparatus is provided, said emitter comprising a filament extending between and being attached to first and second supports, an emitter tip attached to the filament, and a stabilization element attached to a third support and to the filament, wherein the first, second and third supports define a triangle so that the stabilization element extends at least partially in a direction perpendicular to the direction in which the filament extends.

Abstract translation: 提供了一种用于带电粒子束装置的发射器，所述发射器包括在第一和第二支撑件之间延伸并连接到第一和第二支撑件的灯丝，连接到灯丝的发射极尖端以及连接到第三支撑件和灯丝的稳定元件，其中 第一，第二和第三支撑件限定三角形，使得稳定元件至少部分地沿垂直于灯丝延伸方向的方向延伸。

公开(公告)号：US06590216B1

公开(公告)日：2003-07-08

申请号：US09492076

申请日：2000-01-27

Applicant: Samuel K. Doran ,  Steven D. Golladay

Inventor： Samuel K. Doran ,  Steven D. Golladay

IPC: B23K1500

CPC classification number: H01J37/242 ,  H01J1/135

Abstract: An automatic control servo system having a number of cascaded loops equal in number to the number of voltage sources applied to elements of a high-emittance electron source provides accurate and stable electron emission current control independently of beam energy and accommodates large differences in thermal mass between the elements of the electron source, as may be encountered in high-emittance, indirectly heated cathode electron sources. Individual loops of the system may be critically tuned independently of each other.

Abstract translation: 具有数量等于施加到高发射电子源的元件的电压源的数量的级联回路的自动控制伺服系统提供精确和稳定的电子发射电流控制，独立于束能量，并且适应于 电子源的元素，如高发射率可能遇到的，间接加热的阴极电子源。 可以独立于彼此独立地调节系统的各个循环。

公开(公告)号：US4594554A

公开(公告)日：1986-06-10

申请号：US509517

申请日：1983-06-30

Applicant: Jerome D. Schick

Inventor： Jerome D. Schick

IPC: H01J37/06 ,  H01J1/13 ,  H01J37/24 ,  H01J37/244 ,  H01J19/82 ,  H05G1/52

CPC classification number: H01J37/242 ,  H01J1/135

Abstract: A method of extending the lifetime of an electron beam filament, typically LaB.sub.6 by applying power to the filament over a preselected period in a substantially linear manner. The time period is typically 20 minutes before a steady state power level is attained with a fully stabilized instrument. Power-down is a reverse of the power-up sequence until all power is removed.

Abstract translation: 一种延长电子束灯丝寿命的方法，通常在大部分线性方式的预选时间内，通过在灯丝上施加电力来延长寿命。 在完全稳定的仪器达到稳态功率水平之前，时间通常为20分钟。 断电功能与上电顺序相反，直到所有电源都被去除。

公开(公告)号：US4317983A

公开(公告)日：1982-03-02

申请号：US83384

申请日：1979-10-10

Applicant: Wilhelm Scheffels ,  Ruprecht Hoffmann

Inventor： Wilhelm Scheffels ,  Ruprecht Hoffmann

IPC: H01J37/315 ,  H01J37/24 ,  H05B39/04 ,  B23K15/00 ,  H05B41/36

CPC classification number: H01J37/242

Abstract: In an electron beam machine for e.g. beam welding, the beam current I.sub.em is stabilized by negative feedback applied to the grid of the electron gun. The optimum cathode heating current is ascertained by causing the cathode heating current I.sub.H to decrease steadily from a maximum value. The beam current is kept constant by the feedback, which adjusts the grid voltage U.sub.W to offset the decrease in cathode temperature caused by the decreasing heating current; the rate of change of the grid voltage U.sub.W is monitored, and when this rate of change exceeds a threshold, the decrease in heating current is arrested, and the heating current is maintained at the thus established optimal value or preferably set at a slightly higher value, which secures an extended length of life of the cathode. This setting of the cathode heating current is repeated after a predetermined interval of time to establish a new value in response to a change of the condition of the cathode.

Abstract translation: 在例如电子束机中。 光束焊接，通过施加到电子枪的栅格的负反馈使束电流Iem稳定。 通过使阴极加热电流IH从最大值稳定地降低来确定最佳阴极加热电流。 光束电流通过反馈保持恒定，这调整电网电压UW以抵消由于加热电流的降低引起的阴极温度的降低; 监测电网电压UW的变化率，当该变化率超过阈值时，停止加热电流的减少，并且将加热电流维持在如此确定的最佳值或优选设定在略高的值 ，其确保阴极延长的使用寿命。 在预定的时间间隔之后重复该阴极加热电流的设定，以响应于阴极的状况的改变而建立新的值。