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公开(公告)号：KR101085014B1
公开(公告)日：2011-11-21
申请号：KR1020090017175
申请日：2009-02-27
Applicant: 서강대학교산학협력단 , 연세대학교 산학협력단
CPC classification number: G01B9/02068 , G01B9/02063 , G01B11/0608 , G01B11/2441
Abstract: 본 발명은 광학식 표면 측정 장치 및 방법에 관한 것으로서, 측정대상물의 표면에서 각 지점의 미세한 높이변화(단차)나 돌출, 요입, 표면손상, 표면거칠기 등의 표면 상태를 광학식으로 정확히 측정할 수 있는 장치 및 방법에 관한 것이다. 특히, 본 발명은 기존 간섭계의 2π-모호성과 포커스 에러 시그널의 한계를 극복하기 위해 간섭계의 신호 및 PSD(Position Sensitive Detector)의 포커스 에러 시그널을 함께 이용함으로써, 측정대상물의 미세한 표면 상태를 보다 정확히 측정할 수 있는 광학식 표면 측정 장치 및 방법에 관한 것이다.
간섭계, PSD, 포토다이오드, 비점수차, 포커스 에러 시그널, FES-
公开(公告)号：KR1020110093348A
公开(公告)日：2011-08-18
申请号：KR1020100013336
申请日：2010-02-12
Applicant: 서강대학교산학협력단 , 연세대학교 산학협력단
Abstract: PURPOSE: An optical complex diagnosis measuring system and method are provided to reduce measuring time and processes by obtaining real-time data for correction during measurement and correcting the signal of an interferometer. CONSTITUTION: An optical complex diagnosis measuring system comprises an electric stage(10), an interferometer(20), an objective lens(30), an optical system(40), an auto-focusing device, and a main controller(60). The electric stage, in which a measurement object is placed, transfers the measurement object in the direction vertical to a laser beam. The interferometer irradiates the laser beam to the surface of the measurement object, receives the light reflected of the measurement object, and outputs an interference signal based on the surface state and optical characteristics of the measurement object. The objective lens focuses the laser beam irradiated by the interferometer to the surface of the measurement object. The optical system guides the laser beam from the interferometer to the objective lens and the reflected light to the interferometer and the auto-focusing device. The auto-focusing device detects the reflected light guide by the optical system and implement auto-focusing to match the focus of the laser beam to the surface of the measurement object. The main controller obtains information on the surface state and optical characteristics of the measurement object.
Abstract translation: 目的：提供一种光学复合诊断测量系统和方法，通过获得测量中的校正实时数据和校正干涉仪的信号来减少测量时间和过程。 构成：光复合诊断测量系统包括电级（10），干涉仪（20），物镜（30），光学系统（40），自动对焦装置和主控制器（60）。 放置测量对象的电气平台沿垂直于激光束的方向传送测量对象。 干涉仪将激光束照射到测量对象的表面，接收测量对象反射的光，并根据测量对象的表面状态和光学特性输出干涉信号。 物镜将由干涉仪照射的激光束聚焦到测量对象的表面上。 光学系统将来自干涉仪的激光束引导到物镜，并将反射光引导到干涉仪和自动聚焦装置。 自动聚焦装置通过光学系统检测反射光导，并实现自动聚焦，使激光束的焦点与测量对象的表面相匹配。 主控制器获取关于测量对象的表面状态和光学特性的信息。
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公开(公告)号：KR1020100098152A
公开(公告)日：2010-09-06
申请号：KR1020090017175
申请日：2009-02-27
Applicant: 서강대학교산학협력단 , 연세대학교 산학협력단
CPC classification number: G01B9/02068 , G01B9/02063 , G01B11/0608 , G01B11/2441
Abstract: PURPOSE: Optical surface measuring apparatus and method are provided to accurately measure the detailed surface state of a target using a signal of an interferometer and a focus error signal of a PSD(Position Sensitive Detector). CONSTITUTION: An optical surface measuring apparatus comprises an interferometer(13), an object lens(3), a vibration stage(2), a beam splitter(4), a collimator lens(5), an astigmatic lens(6), a FE (Focus Error) signal output part, and a controller(12). The interferometer radiates the laser light onto the surface of a traget(1), receives the laser light reflected from the surface and outputs the interferential signal depending on the distance between the interferometer and the surface. The object lens transmits the laser light and forms the focus on the measuring point of the surface of the target. The vibration stage adjusts the location of the target. The beam splitter separates the laser light reflected from the target surface. The collimator lens condenses the separated laser light. The astigmatic lens transmits the condensed laser light to generate the astigmatic characteristic. The FE signal output part outputs the FE signal depending on the distance from the target surface. The controller computes the distance variation based on the interferential signal output from the interferometer and the FE signal output from the FE signal output part and obtains the surface state information from the distance variation.
Abstract translation: 目的：提供光学表面测量装置和方法，以使用干涉仪的信号和PSD（位置敏感检测器）的聚焦误差信号来精确测量目标的详细表面状态。 构成：光学表面测量装置包括干涉仪（13），物镜（3），振动台（2），分束器（4），准直透镜（5），像散透镜（6）， FE（聚焦误差）信号输出部分和控制器（12）。 干涉仪将激光照射到耳机（1）的表面上，接收从表面反射的激光，并根据干涉仪与表面之间的距离输出干涉信号。 物镜透射激光并将焦点形成在目标表面的测量点上。 振动台调整目标的位置。 分束器分离从目标表面反射的激光。 准直透镜会将分离的激光冷凝。 散光透镜透射冷凝的激光以产生像散特征。 FE信号输出部根据与目标表面的距离输出FE信号。 控制器根据干涉仪输出的干扰信号和从FE信号输出部分输出的FE信号计算距离变化，并从距离变化中获取表面状态信息。
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公开(公告)号：KR100866038B1
公开(公告)日：2008-11-05
申请号：KR1020070077275
申请日：2007-08-01
Applicant: 서강대학교산학협력단 , 연세대학교 산학협력단
CPC classification number: G01B9/0207 , G01B9/02003 , G01B9/02081 , G01B2290/70
Abstract: A scanning electron microscope utilizing the heterodyne interferometer is provided to measure the phase and the amplitude swing induced from the penetration or the reflected signal light at the same time. The scanning electron microscope(10) utilizing the heterodyne interferometer includes the heterodyne interferometer(100) which converts and outputs the signal light and the reference light into the quadrature-phase signal and I-signal outputted the light concentration; the XY scanner(130) moving the sample holding stage to the dual type weaving by hands about the progressive direction of the signal light; the scanner drive unit(140) for controlling the movement of the XY scanner; the focusing apparatus(110) for condensing the signal light provided from the heterodyne interferometer with the surface of sample; the A/D converter(160) converting the quadrature-phase signal and the I-signal into the digital signal; the computer(150) transmitting the movement control signal controlling the movement of the XY scanner as the scanner drive unit.
Abstract translation: 提供利用外差干涉仪的扫描电子显微镜，以同时测量从穿透或反射信号光引起的相位和振幅摆动。 使用外差干涉仪的扫描电子显微镜（10）包括将信号光和参考光转换并输出到正交相位信号中的外差干涉仪（100），输出光浓度的I信号; XY扫描器（130）通过手围绕信号光的逐行方向将样品保持台移动到双重编织; 扫描器驱动单元（140），用于控制XY扫描器的移动; 聚焦装置（110），用于将从外差干涉仪提供的信号光与样品表面聚焦; 所述A / D转换器将所述正交相位信号和所述I信号转换为所述数字信号; 所述计算机（150）发送控制所述XY扫描器作为所述扫描仪驱动单元的移动的移动控制信号。
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公开(公告)号：KR100754695B1
公开(公告)日：2007-09-03
申请号：KR1020060055542
申请日：2006-06-20
Applicant: 삼성전자주식회사 , 서강대학교산학협력단
CPC classification number: H04B10/116 , H04B10/1149
Abstract: An optical transmitter and an optical wireless network using the same are provided to minimize ISI(Inter Symbol Interference) and to perform stable operation by low output power. An optical transmitter comprises an optical source(430a) and a scatterer(440a). The optical source(430a) outputs optical signals modulated from data. The scatterer(440a) has a concave inner surface facing an output surface of the optical source(430a), and projects scattered and retroreflected optical signals to a cell by scattering and retroreflecting the optical signals outputted from the optical source(430a). The scatterer(440a) includes a body and a sleeve unit. The body includes a concave inner face and the sleeve unit has a hollow shape extended from an end of the body.
Abstract translation: 提供了一种光发射机和使用该发射机的光无线网络，以最小化ISI（符号间干扰），并通过低输出功率进行稳定的操作。 光发射机包括光源（430a）和散射体（440a）。 光源（430a）输出从数据调制的光信号。 散射体（440a）具有面向光源（430a）的输出面的凹面内表面，并且通过散射和回射从光源（430a）输出的光信号而将散射和回射的光信号投射到单元。 散射体（440a）包括主体和套筒单元。 主体包括凹的内表面，并且套筒单元具有从主体的端部延伸的中空形状。
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Patent Agency Ranking
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公开(公告)号：KR20180064227A
公开(公告)日：2018-06-14
申请号：KR20160164614
申请日：2016-12-05
Applicant: 서강대학교산학협력단
CPC classification number: G02B26/001 , G02B27/283 , H01J37/26 , H01J37/28
Abstract: 본발명은평행빔광학소자및 이를이용한간섭계이다. 상기평행빔광학소자는, 제1면과제3면이서로대향배치되고, 제2면과제4면이서로대향배치되며, 제2면과제3면이만나는모서리와제1면과제4면이만나는모서리를연결하는편광빔분리면을갖는편광빔스플리터; 상기편광빔스플리터의제2면에배치된제1 QWP; 상기제1 QWP의일면에배치되어제1 QWP로부터출력된빔을되반사시켜제1 QWP 로다시제공하는반사경; 상기편광빔스플리터의제4면과마주보도록배치되어, 상기편광빔스플리터의제4면으로부터출력된빔을 2번수직반사시켜편광빔스플리터의제4면으로다시제공하는직각프리즘; 상기편광빔스플리터의제4면과직각프리즘의사이에배치되며, 상기편광빔스플리터로부터출력된빔의편광방향을 90도회전시켜상기편광빔 스플리터로재입사되도록하는위상지연소자;을구비한다. 상기평행빔광학소자는, PBS의제1 면으로입사된빔이편광성분에따라 2개의빔으로나뉘어각각서로다른제1 광경로와제2 광경로를따라진행하되, 상기 2개의빔은서로평행빔이되어상기제2 QWP를출사하며, 출사된 2개의빔은평행빔광학소자로재입사되어 PBS의제1면으로함께출사한다.
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公开(公告)号：KR1020170083812A
公开(公告)日：2017-07-19
申请号：KR1020160003145
申请日：2016-01-11
Applicant: 주식회사 카스 , 서강대학교산학협력단
Abstract: 본발명은무게측정장치에관한것으로, 본발명에따른무게측정장치는몸체를관통하는중공부가형성되며, 상기몸체의양단의제1 고정부와제2 고정부의상부를연결하는상부연결부와하부를연결하는하부연결부를포함하는로드셀; 상기상부연결부의하중이인가되는위치에대응하여상기상부연결부의저면에부착되는타겟반사판; 상기하부연결부의저면에부착되는기준반사판; 상기타겟반사판에입사하여반사된제1 빛살과상기기준반사판에입사하여반사된제2 빛살의간섭된광에따른경로길이를기준경로길이와비교하여하중의인가에따른광의경로변위를산출하는광 경로변위산출부; 및상기광의경로변위에상응하는상기로드셀의변위를기초로무게를산출하는무게산출부를포함한다. 이를통하여, 레이저를활용한고정밀도의측정범위가큰 무게측정이가능하다.
Abstract translation: 本发明涉及称重装置，根据本发明的称重装置与所述穿入体的研究中，以及连接所述第一固定部和所述主体底部的两端的上部第二固定部上的上部连接形成 包括用于连接称重传感器的下部连接部分的称重传感器; 目标反射器，该目标反射器连接到与上部连接部分的负载施加的位置对应的上部连接部分的底部表面; 附连到下连接部分的底表面的参考反射器; 光为相比于对应于入射到目标反射器的第二光束的光路长度的干扰的参考路径长度计算根据负载的应用的光路位移基准反射板与所述第一光束反射并入射在反射 路径位移计算单元; 以及重量计算单元，用于基于与光的路径位移相对应的测力传感器的位移来计算重量。 这使得可以使用激光在高精度测量范围内测量重量。
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公开(公告)号：KR1020160017718A
公开(公告)日：2016-02-17
申请号：KR1020140098955
申请日：2014-08-01
Applicant: 서강대학교산학협력단
IPC: G02B27/30
CPC classification number: G02B27/30 , G02B27/283
Abstract: 본발명은입사빔을서로평행한제1 및제2 출사빔으로나누어출력하는광학적소자에관한것이다. 상기광학적소자는, 적어도하나의입사면과제1 출사면및 제2 출사면을포함하는투명재질의육면체로구성되어상기입사면으로입사된입사빔을반사또는투과시켜제1 및제2 출사면으로각각제1 및제2 출사빔으로출력시키는것을특징으로하며, 상기제1 출사면과제2 출사면은사전설정된각도로서로이격되어배치되고, 상기제1 출사면과제2 출사면의사이에코팅면이형성되어, 상기입사빔의일부는상기코팅면에서반사된후 제1 출사면을통해출력되어제1 출사빔을구성하고, 상기입사빔의나머지는상기코팅면에서투과된후 제2 출사면을통해출력되어제2 출사빔을구성하는것을특징으로하며, 상기제1 출사면과제2 출사면의이격각도는상기제1 및제2 출사빔이서로평행하도록설정된다.
Abstract translation: 本发明涉及通过将入射光束分成彼此平行的第一输出光束和第二输出光束来输出入射光束的光学装置。 该光学装置由包括至少一个入射面，第一发光面和第二发光面的透明材料的六面体构成，并输出输入入射面的入射光束作为第一输出光束和第二输出 通过反射或透射入射光束将光束射向第一光发射表面和第二发光表面。 第一光发射表面和第二发光表面以预定角度分开布置，并且在第一发光表面和第二发光表面之间形成涂覆表面。 因此，入射光束的一部分从涂层表面反射，然后通过第一发光面输出，形成第一输出光束。 并且入射光束中的另一个穿透涂层表面，然后通过第二发光表面输出以形成第二输出光束。 为了使第一和第二输出光束彼此平行，设置第一发光表面和第二发光表面之间的间隔角。
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