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公开(公告)号：KR100926218B1
公开(公告)日：2009-11-09
申请号：KR1020080010225
申请日：2008-01-31
Applicant: 경희대학교 산학협력단
Abstract: 본 발명은 전자방출 디스플레이를 구성하는 탄소 나노튜브를 이용한 필드 에미터에 관한 것으로, 특히 기판 상부에 탄소 나노튜브로 형성된 에미터를 갖는 필드 에미터를 일정한 농도의 불산에 일정시간 동안 처리함으로써 전자방출 특성을 향상시킨 필드 에미터의 제조방법에 관한 것이다.
탄소나노튜브, 필드 에미터 제조방법, 전자방출 특성-
公开(公告)号：KR1020090111249A
公开(公告)日：2009-10-26
申请号：KR1020080051858
申请日：2008-06-02
Applicant: 경희대학교 산학협력단
CPC classification number: H01J1/30 , B82Y40/00 , H01J9/025 , H01J2201/30469
Abstract: PURPOSE: A manufacturing method of a stamp for an electron emitting element and a manufacturing method of the electron emitting element using the stamp are provided to form a pattern on a desired part in a method imprinting the stamp on the substrate. CONSTITUTION: A manufacturing method of a stamp for an electron emitting element and a manufacturing method of the electron emitting element using the stamp are comprised of the following step. The stamp used in the process prepares as the soft PDMS mold which has the hydrophobic surface. The mold which has the periodic streak pattern of a several micro meter thicknesses under the light lithography method is formed. The hardener 5 to 15 Wt% and the silicon carbon elastomeric 85 to 95Wt% are mixed to the prepared mold. The mixed result is dried in the vacuum dryer for the half an hour to remove the air bubble of mixture. Moreover, the mixed result is dried for 40 to 80 minutes at the temperature of 40 to 80. The PDMS stamp(10) in which the streak pattern is formed is manufactured by separating the hardened PDMS stamp from the mold. The dried mixture is separated from the mold.
Abstract translation: 目的：提供一种用于电子发射元件的印模的制造方法和使用该印模的电子发射元件的制造方法，以在印刷印模的方法中在所需部分上形成图案。 构成：用于电子发射元件的印模的制造方法和使用印模的电子发射元件的制造方法包括以下步骤。 该过程中使用的邮票准备为具有疏水表面的软PDMS模具。 形成了在光刻法下具有几微米厚度的周期条纹图案的模具。 将硬化剂5至15重量％和硅碳弹性体85至95重量％混合到制备的模具中。 将混合结果在真空干燥器中干燥半小时以除去混合物的气泡。 此外，将混合结果在40-80℃的温度下干燥40-80分钟。通过将硬化的PDMS印模与模具分离来制造其中形成条纹图案的PDMS印模（10）。 将干燥的混合物与模具分离。
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公开(公告)号：KR1020090084189A
公开(公告)日：2009-08-05
申请号：KR1020080010227
申请日：2008-01-31
Applicant: 경희대학교 산학협력단
CPC classification number: H01J1/304 , B82B3/008 , B82Y40/00 , H01J9/025 , H01J2201/30469 , H01J2329/0455
Abstract: A method of manufacturing field emitter to improve electron emission is provided to improve the electron emission property of the display device by performing the thermal process and solution process or the solution process and thermal process on the carbon nanotube. The method of manufacturing the field emitter comprises 7 steps. The first step is performed in order to form the field emitter on the substrate(100). The field emitter has the emitter consisting of the carbon nanotube(140). The second step is performed in order to put substrate into the heating tool. The third step is performed in order to gradually increase the temperature of the heating tool to the intended temperature. The fourth stage is performed to maintain the heating tool in the intended temperature. The fifth step is performed in order to take out substrate of the heating tool and perform the natural cooling. The sixth step is performed in order to dip substrate into the HF solution. The seventh step is performed in order to take out substrate of the HF solution and dry the substrate.
Abstract translation: 提供一种制造场发射体以改善电子发射的方法，通过对碳纳米管进行热处理和溶液处理或溶液处理和热处理来提高显示装置的电子发射性能。 制造场致发射体的方法包括7个步骤。 执行第一步骤以在衬底（100）上形成场致发射体。 场致发射体具有由碳纳米管（140）构成的发射极。 执行第二步骤以将基板放入加热工具中。 执行第三步以便将加热工具的温度逐渐提高到预期温度。 执行第四阶段以将加热工具保持在预期温度。 执行第五步骤以取出加热工具的基板并进行自然冷却。 执行第六步骤以将衬底浸入HF溶液中。 执行第七步以取出HF溶液的基底并干燥基底。
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公开(公告)号：KR1020090084187A
公开(公告)日：2009-08-05
申请号：KR1020080010225
申请日：2008-01-31
Applicant: 경희대학교 산학협력단
CPC classification number: H01J1/304 , B82Y40/00 , H01J9/025 , H01J2201/30469 , H01J2329/0455
Abstract: A method of manufacturing field emitter is provided to improve the electron emission property of the display device by dipping the carbon nanotube into the selected solution. The method of manufacturing the field emitter comprises 4 steps. The first step is performed in order to form the field emitter on the substrate(100). The field emitter has the carbon nanotube(140) in the emitter. The second step is performed in order to form the photoresist layer on the field emitter. The third step is performed in order to immerse the field emitter in the fluoric acid solution. The fourth stage is performed in order to dry the field emitter dipped into the fluoric acid solution.
Abstract translation: 提供一种制造场致发射体的方法，通过将碳纳米管浸入所选择的溶液中来改善显示装置的电子发射特性。 制造场致发射体的方法包括4个步骤。 执行第一步骤以在衬底（100）上形成场致发射体。 场致发射体在发射极中具有碳纳米管（140）。 执行第二步骤以在场致发射体上形成光致抗蚀剂层。 执行第三步骤以将场致发射体浸入氟酸溶液中。 执行第四阶段以便干燥浸入氟酸溶液中的场致发射体。
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