-
公开(公告)号：KR1020100022691A
公开(公告)日：2010-03-03
申请号：KR1020080081331
申请日：2008-08-20
IPC: G01P21/00
Abstract: PURPOSE: A phase sensitivity determining method and an apparatus thereof are provided to determine the phase delay of an accelerometer by analyzing an interferential signal acquired through a single optical detector. CONSTITUTION: A beam splitter(400) partitions a laser generated in a laser generator(300). A fixed mirror(500) radiates a reflected first split laser to the beam splitter. An accelerometer(100) radiates a reflected second split laser to the beam splitter. An optical detector measures an interference signal between the first split laser and the second split laser. A phase and magnitude calibrator(1020) measures the phase sensitivity and size sensitivity of the interferential signal transformed to the frequency domain.
Abstract translation: 目的：提供一种相位灵敏度确定方法及其装置，用于通过分析通过单个光学检测器获取的干涉信号来确定加速度计的相位延迟。 构成：分束器（400）分割在激光发生器（300）中产生的激光。 固定反射镜（500）将反射的第一分裂激光辐射到分束器。 加速度计（100）将反射的第二分裂激光辐射到分束器。 光学检测器测量第一分裂激光器和第二分割激光器之间的干涉信号。 相位和幅度校准器（1020）测量变换到频域的干扰信号的相位灵敏度和尺寸灵敏度。
-
公开(公告)号：KR1020080111723A
公开(公告)日：2008-12-24
申请号：KR1020070060033
申请日：2007-06-19
Applicant: 한국과학기술원
Abstract: A method for measuring the thickness and profile of a thin film by dispersive white-light interferometry based on reflectrometry is provided to effectively separate thickness and profile complicatedly mixed in interference patterns for measuring the thickness and profile of an ultra thin film of 100 nm or less. A method for measuring the thickness and profile of a thin film by dispersive white-light interferometry based on reflectrometry includes the steps of obtaining light intensity distribution according to the wavelength of the thin film by obtaining interference patterns of interference light, obtaining an absolute reflection rate by the light intensity distribution, obtaining the thickness(d) of the thin film by the absolute reflection rate, extracting a first phase change value according to the thickness and profile from the interference patterns of synthesized light, extracting a second phase change value according to the thickness included in the first phase change value, obtaining a third phase change value according to the profile by compensating the second phase change value from the first phase change value, and obtaining a profile value(h) from the third phase change value.
Abstract translation: 提供了一种通过基于反射测量的色散白光干涉测量来测量薄膜的厚度和轮廓的方法，以有效地分离在干涉图案中复杂混合的厚度和轮廓，以测量100nm或更小的超薄膜的厚度和轮廓 。 通过基于反射测量的色散白光干涉测量法测量薄膜的厚度和轮廓的方法包括以下步骤：通过获得干涉光的干涉图案来获得根据薄膜波长的光强分布，获得绝对反射率 通过光强分布，通过绝对反射率获得薄膜的厚度（d），根据合成光的干涉图案根据厚度和轮廓提取第一相变值，根据 包括在第一相变值中的厚度，通过从第一相变值补偿第二相变值，根据该轮廓获得第三相变值，并从第三相变值获得轮廓值（h）。
-
公开(公告)号：KR100840395B1
公开(公告)日：2008-06-23
申请号：KR1020060123856
申请日：2006-12-07
Applicant: 한국과학기술원
Abstract: 본 발명은 백색광주사간섭계를 이용한 미세한 삼차원 형상을 측정하는 장치의 설계에 있어서, 기존의 마이켈슨형의 백색광주사간섭계의 구성에 널리 사용되고 있는 현미경 대물렌즈를 매크로렌즈로 대치하여, 한 번에 측정할 수 있는 측정대상물의 횡방향 면적 영역을 획기적으로 확장할 수 있는 새로운 원리 및 이의 세부적 구현 방법에 관한 것이다. 매크로렌즈를 도입한 백색광주사간섭계는 백색광 조명광학계, 상기 백색광을 측정면과 기준면에 조사하기 위해 측정광과 기준광으로 분리하는 광분할기, 상기 측정면과 기준면에서 반사된 측정광과 기준광을 동시에 결상하기 위한 매크로렌즈, 그리고 상기 매크로렌즈로부터 얻어진 백색광 간섭무늬를 획득하는 영상획득부로 구성된다. 상기와 같이 구성되는 본 발명은 일반 카메라의 접사촬영에 널리 사용되는 매크로렌즈를 활용하여 한 번에 측정할 수 있는 미세한 삼차원 형상의 횡방향 면적 영역을 무제한적으로 확장하여, 대면적의 대상물을 고속으로 측정할 수 있는 장점을 제공한다.
백색광주사간섭, 매크로렌즈, 대영역 삼차원 형상측정.-
公开(公告)号：KR100484637B1
公开(公告)日：2005-04-22
申请号：KR1020020081578
申请日：2002-12-20
Applicant: 한국과학기술원
IPC: G01B11/25
Abstract: 본 발명은 다중채널 위상천이 모아레 기법을 이용한 임의 표면의 3차원 형상 측정에 관한 것으로, 특히 위상이 천이된 다수의 모아레 무늬를 얻기 위해, 종래에는 격자를 이송수단에 의해 이동시키면서 모아레 무늬를 획득하던 것을 홀로그램을 사용하여 별도의 이송수단을 사용하지 않고도 위상이 천이된 다수의 모아레 무늬를 얻고 상기 모아레 무늬를 해석함으로써 임의 표면의 3차원 형상 측정하는 것을 특징으로 한다.
본 발명에서 제시하는 다중채널 위상천이 모아레 기법을 이용한 삼차원 형상측정기는 크게 영사시스템, 결상시스템, 중앙처리부 및 측정결과 표시장치로 구성된다. 상기 영사시스템은 격자형상을 측정대상물체에 투영하는 부분으로 격자를 렌즈를 통하여 투영하는 형태 혹은 레이저를 이용하여 쉽게 얻을 수 있는 격자형태의 간섭무늬를 투영하는 형태가 주로 사용되며, 결상시스템은 렌즈, 홀로그램, 격자, 모아레무늬 획득부 등으로 구성되고, 상기 광학요소들은 시스템의 특성에 따라 제외되거나, 다른 광학요소로 대치될 수 있다. 상기 영사시스템으로 측정대상물체에 투영된 격자형상은 결상시스템의 렌즈를 통해 결상시스템 내의 홀로그램에 결상되어 모아레 무늬를 형성한다. 홀로그램은 렌즈를 통해서 들어온 광을 여러 개의 같은 광들로 분할하여 동시에 여러 개의 모아레 무늬를 형성할 수 있도록 하기 위해, 필요에 따라 일차원 혹은 이차원 회절격자 형태의 홀로그램이 사용된다. 모아레 무늬 획득부는 상기 격자에서 생성된 모아레 무늬를 렌즈 등을 통하여 영상획득 수단을 통해 획득하고 중앙처리부 및 측정결과 표시장치로 전송한다.-
公开(公告)号：KR100465784B1
公开(公告)日：2005-01-13
申请号：KR1020020024361
申请日：2002-05-03
Applicant: 한국과학기술원
IPC: G01B9/02
CPC classification number: G01B9/02074 , G01B9/02012 , G01B11/2441 , G01B2290/35 , G01D5/266
Abstract: Disclosed is a point diffraction interferometer for analyzing the surface profile of an object in a predetermined shape. The present invention relates to a phase-shifting point diffraction interferometer using inclined-section optical fiber light source, which is capable of minimizing a system error by directly using spherical waves emitted from a point beam source as a reference wavefront to move an error caused by a reference surface.
Abstract translation: 公开了用于分析预定形状的物体的表面轮廓的点衍射干涉仪。 本发明涉及一种使用倾斜截面光纤光源的相移点衍射干涉仪，其能够通过直接使用从点光束源发射的球形波作为参考波阵面来将系统误差最小化， 一个参考面。
-
Patent Agency Ranking46.发明公开이종모드 헬륨-네온 레이저와 슈퍼 헤테로다인위상측정법을 이용한 헤테로다인 레이저 간섭계 失效通过使用超级异相测量，HETERO模式HELIUM-NEON激光和HETERODYNE激光干涉仪
公开(公告)号：KR1020040001099A
公开(公告)日：2004-01-07
申请号：KR1020020036184
申请日：2002-06-27
Applicant: 한국과학기술원
IPC: G01N21/45
CPC classification number: G01B9/02003 , G01B2290/70
Abstract: PURPOSE: A hetero mode helium-neon laser and a heterodyne laser interferometer are provided to measure displacement of a moving object by using super heterodyne phase measurement. CONSTITUTION: A heterodyne laser interferometer includes a laser source section(70), an optical interferometer section(60), a frequency converting section(80), and a phase measuring device. The laser source section(70) includes a hetero mode helium-neon laser generator(71). Light generated from the laser source section(70) has two frequencies. A part(74) of light generated from the laser source section(70) is used as a reference signal and other light(75) generated from the laser source section(70) is used as a measuring signal. The reference signal is converted into an electric signal(76) through a photo detector(73).
Abstract translation: 目的：提供异质氦氖激光器和外差激光干涉仪，通过超外差相位测量来测量移动物体的位移。 构成：外差激光干涉仪包括激光源部分（70），光学干涉仪部分（60），频率转换部分（80）和相位测量装置。 激光源部（70）包括异质氦氖激光发生器（71）。 从激光源部（70）产生的光具有两个频率。 使用从激光源部（70）产生的光的一部分（74）作为参考信号，并且将从激光源部（70）生成的其他光（75）用作测量信号。 参考信号通过光电检测器（73）转换成电信号（76）。
-
公开(公告)号：KR1020030064966A
公开(公告)日：2003-08-06
申请号：KR1020020005062
申请日：2002-01-29
Applicant: 한국과학기술원
IPC: G01B11/24
CPC classification number: G01B11/2441 , G01B11/25
Abstract: PURPOSE: A method and a system for measuring a large-scaled image are provided to simultaneously determine various space coordination of an object to be measured by using a plurality of optical probe having two point-light sources. CONSTITUTION: A large-scaled image measuring system includes a light source section(500), a detecting section(530), and a central processing section(560). The light source section(500) has a plurality of optical probes having two point-light sources, a light source(501) for supplying light to two point-light sources, an optical switch(502) for adjusting an amount of light introduced into an optical distributor from the light source(501), and a plurality of phase shifting devices(506,507,508). The detecting section(530) includes a detecting device for detecting an interference pattern and a detecting device control section. The central processing section(560) has a calculating section(564), an image processing section(565), an optical switch control section(562), a phase shifting devices control section(561) and a central control section(563).
Abstract translation: 目的：提供一种用于测量大尺寸图像的方法和系统，以通过使用具有两个点光源的多个光学探针同时确定待测物体的各种空间协调。 构成：大型图像测量系统包括光源部分（500），检测部分（530）和中央处理部分（560）。 光源部（500）具有多个具有两点光源的光学探针，用于向两点光源供给光的光源（501），用于调整引入光的光量的光开关（502） 来自光源（501）的光分配器和多个相移装置（506,507,508）。 检测部分（530）包括用于检测干涉图案的检测装置和检测装置控制部分。 中央处理部（560）具有计算部（564），图像处理部（565），光开关控制部（562），移相装置控制部（561）和中央控制部（563）。
-
公开(公告)号：KR1020030061642A
公开(公告)日：2003-07-22
申请号：KR1020020002305
申请日：2002-01-15
IPC: G02B27/02
CPC classification number: G02B27/02 , G02B27/30 , H01S3/0071
Abstract: PURPOSE: A Fizeau interferometer using an oblique section fiber light source is provided to improve the reliability of measuring results by removing beam splitting elements from a measuring wavefront. CONSTITUTION: A Fizeau interferometer includes a single mode fiber(12), a laser generator(11) for outputting beams to the single mode fiber, a collimator for converting the light of the laser generator to the parallel light, a reference plate(17) for transmitting and reflecting the parallel light to a target(18) in order to generate a reference wavefront, and a CCD camera(14) for detecting an interference fringe of the reference wavefront. The Fizeau interferometer further includes an oblique section fiber light source which is coupled to the single mode fiber. A beam split coating layer is formed on an oblique section of the oblique section fiber light source.
Abstract translation: 目的：提供使用斜截面纤维光源的Fizeau干涉仪，通过从测量波前去除分束元件来提高测量结果的可靠性。 规格：斐索干涉仪包括单模光纤（12），用于向单模光纤输出光束的激光发生器（11），用于将激光发生器的光转换成平行光的准直器，参考板（17） 用于将平行光发送并反射到目标（18）以产生参考波前;以及CCD相机（14），用于检测参考波阵面的干涉条纹。 斐索干涉仪还包括耦合到单模光纤的斜截面光纤光源。 在斜截面纤维光源的倾斜部分上形成光束分裂涂层。
-
公开(公告)号：KR1020020088852A
公开(公告)日：2002-11-29
申请号：KR1020010027878
申请日：2001-05-22
Applicant: 한국과학기술원
IPC: G01B9/02
CPC classification number: G01B11/005 , G01B11/002
Abstract: PURPOSE: A method and system for determination of coordinates is provided to reduce measurement error by permitting two optical fibers in the probe to approach closely to a three-dimensional object, while simplifying configuration of the system. CONSTITUTION: A system for determination of coordinates, comprises two optical fibers(50,60) for radiation arranged in a probe(80) disposed in a three-dimensional space; a light source(10) for providing light to optical fibers; a single mode fiber(30) interconnected between optical fibers for radiation and the light source, and which transmits light; a piezo-electric element(70) for changing optical path; an image obtaining unit for obtaining interference patterns generated by the light radiated from optical fibers for radiation; and a control/analysis unit for obtaining curvature of the obtained interference pattern and determining central point of the curvature.
Abstract translation: 目的：提供一种用于确定坐标的方法和系统，以通过允许探头中的两根光纤紧密接近三维物体来减少测量误差，同时简化系统的配置。 构成：用于确定坐标的系统包括布置在设置在三维空间中的探针（80）中的用于辐射的两根光纤（50,60） 用于向光纤提供光的光源（10）; 在用于辐射的光纤和光源之间互连并且透射光的单模光纤（30）; 用于改变光路的压电元件（70）; 图像获取单元，用于获得由用于辐射的光纤辐射的光产生的干涉图案; 以及用于获得所获得的干涉图案的曲率并确定曲率的中心点的控制/分析单元。
-
公开(公告)号：KR1020020078301A
公开(公告)日：2002-10-18
申请号：KR1020010018617
申请日：2001-04-09
Applicant: 한국과학기술원
IPC: G01B9/02
CPC classification number: G01B11/0608 , G01B9/02007 , G01B9/02057 , G01B9/02084 , G01B9/0209
Abstract: PURPOSE: A two-dimensional white light interference method and interferometry is provided to minimize error of measurement, while compensating for the error caused due to the change of phase, through a single measurement. CONSTITUTION: An interferometry is characterized in that the step height(h) of differential metal materials is measured by an equation which is defined by a step height value(H) measured by using a Fringe peak of a white light interferogram, a step height value(h1) measured at a frequency k1(wavelength lambda1) by using a monochromatic light interference method, and a step height value(h2) measured at a frequency k2(wavelength lambda2) by using a monochromatic light interference method. The equation is h (equals) H(minus)1/2(k0(h2(minus)h1))/(k2(minus)k1), wherein k0 is the central frequency of white light source, k1 is the frequency of white light source for measuring the step height value(h1), and k2 is the frequency of light source for measuring the step height value(h2).
Abstract translation: 目的：提供二维白光干涉法和干涉测量法，以最小化测量误差，同时通过单次测量补偿相位变化引起的误差。 构成：干涉测量的特征在于，差分金属材料的台阶高度（h）通过由通过使用白光干涉图的边缘峰值测量的台阶高度值（H）定义的等式来测量，台阶高度值 通过使用单色光干涉法在频率k1（波长λ1）下测量的（h1）和通过使用单色光干涉法在频率k2（波长λ2）下测量的台阶高度值（h2）。 方程为h（等于）H（负）1/2（k0（h2（负）h1））/（k2（负）k1），其中k0是白光源的中心频率，k1是白色的频率 用于测量台阶高度值（h1）的光源，k2是用于测量台阶高度值（h2）的光源的频率。
-
-
-
-
-
-
-
-
-
Search Results
117
records
(took 0.028 seconds)
