公开(公告)号：JP2000223411A

公开(公告)日：2000-08-11

申请号：JP2633599

申请日：1999-02-03

Applicant: CANON KK

Inventor： TSUI KOTARO ,  OSANAI EIJI

IPC: H01L21/027 ,  G01B11/00 ,  G03F7/20 ,  G03F9/00

Abstract: PROBLEM TO BE SOLVED: To enable highly accurate positioning by providing it with a noncontact bearing which supports a main stage and a sub stage in noncontact in the direction where the sub stage shifts, and a noncontact actuator which generates power between the main stage and the sub stage. SOLUTION: An XY stage 1 shifts a top plate 51 in XY direction to a surface plate 50. Three pieces of linear motors bring a retention board 4 and the top plate 51 close to or away from each other in z direction. The apparent bearing rigidity of a radial static pressure bearing 7 can be adjusted by an xy linear motor (noncontact actuator) which is provided in parallel with a radial static pressure bearing (noncontact bearing) 7 which supports the retention plate 4 in noncontact in XY direction to the top plate 51, so that the shifting in XY direction (shifting direction) of the retention plate (main stage) 4 may not cause phase lag to the shifting in XY direction by the XY stage (shifting mechanism) 1 of the top plate (sub stage) 51.

公开(公告)号：JPH11297795A

公开(公告)日：1999-10-29

申请号：JP11420898

申请日：1998-04-09

Applicant: CANON KK

Inventor： MATSUI SHIN ,  OSANAI EIJI ,  OISHI SHINJI ,  KUBO TADAYUKI

IPC: G03F7/20 ,  G05D3/00 ,  H01L21/027 ,  H01L21/68

Abstract: PROBLEM TO BE SOLVED: To improve the dynamic characteristics of a vertical-type stage. SOLUTION: In a stage device, an X-stage 30 for retaining a wafer or the like is driven in the direction of an X-axis by a linear motor 50, and a Y-stage 20 for supporting the X-stage 30 is driven in the direction of a Y-axis (in the vertical direction) by a Y linear motor 40. The Y-stage 20 is connected to a counter mass 61 for compensating for a dead weight by a belt 62, and the Y-stage 20 and the belt 62 are connected via an actuator 70, such as a bellows phragm and an air cylinder for the control of air pressure. By controlling the actuator 70 based on the position information of the X-stage 30, rotating moment is corrected and a load which is applied to the a Y-guide 11 is reduced.

公开(公告)号：JPH11297616A

公开(公告)日：1999-10-29

申请号：JP11421998

申请日：1998-04-09

Applicant: CANON KK

Inventor： MATSUI SHIN ,  OSANAI EIJI ,  OISHI SHINJI ,  KUBO TADAYUKI

IPC: B23B47/26 ,  B23Q1/00 ,  B23Q1/62 ,  B23Q1/72 ,  G03F7/20 ,  H01L21/027 ,  H01L21/68 ,  B23Q1/25

Abstract: PROBLEM TO BE SOLVED: To improve dynamic characteristics of a vertical stage. SOLUTION: A Y-stage 20 driven in the Y-axis direction (vertical direction) by a Y-linear motor 40 is linked with a counter mass 61 for self-weight compensation by using a belt 62. The Y-stage 20 is coupled with the belt 62 via an actuator 70 such as a fellowfram and an air cylinder which can control air pressure. On the basis of position information of the X-stage 30, the actuator 70 is controlled. Thereby angular moment is corrected, and a load applied to a Y-guide 11 is reduced. A linear motor accelerating the counter mass 61 in the direction opposite to the Y-linear motor 40 is installed on the back side of a surface plate 10. Thereby natural vibration of the counter mass 61 is eliminated, and vibration removing property is improved, together with the actuator 70.

公开(公告)号：JPH11166991A

公开(公告)日：1999-06-22

申请号：JP34730297

申请日：1997-12-03

Applicant: CANON KK

Inventor： OSANAI EIJI

IPC: G12B5/00 ,  B23Q1/30 ,  B23Q1/72 ,  G03F7/20 ,  H01L21/027

Abstract: PROBLEM TO BE SOLVED: To achieve rapid and accurate positioning, by setting an interferometer mirror to a hollow structure where both edges in a longitudinal direction are open edges. SOLUTION: A wafer to be exposed to light is placed at a top stage 5, a drive signal is given from an external controller to an XY stage, and the wafer is driven to a specific position. Deviation for the target position of the wafer in the direction of X, Y, and θ is calculated by the external controller based on the output of a laser measurement system, and is fed back to the drive part of the XY stage, and the wafer is controlled to be positioned at a specific position. Then, reflection mirrors 23c and 23d with hollow holes 22c and 22d are used to reduce mass of a mirror itself, increase characteristic vibration frequency of the bending direction and the twisting direction or the like of the reflection mirror itself, and improve positioning control accuracy.

公开(公告)号：JPH10206714A

公开(公告)日：1998-08-07

申请号：JP1960197

申请日：1997-01-20

Applicant: CANON KK

Inventor： OSANAI EIJI

IPC: G02B7/02 ,  G02B7/04 ,  G03F7/20 ,  H01L21/027

Abstract: PROBLEM TO BE SOLVED: To make an inclinable angle large, to make bearing rigidity high in a radial direction, and to prolong stroke in an optical axis direction so as to improve positioning accuracy by supporting the guide surface of a lens holding board by means of a static pressure bearing means in a non-contact state, and respectively and individually supporting driving means by means of a base board. SOLUTION: The inside peripheral surface of a fixing member 2 and the outside peripheral surface being the guide surface of the lens holding board 3 are supported in the non-contact state each other by the static pressure or pressure fluid jetted from a porous pad 7 being an annular porous drawing type static pressure bearing means held by the inside peripheral surface, and a lens 4 can freely reciprocate along the axis (Z axis) of the member 2 and the guiding member 3. By making the size of the pad 7 in the Z-axis direction small, the allowable value of the inclination angle to the Z axis can be made large. A Z linear motor is provided with rotors 51a to 51c and stators 52a to 52c, and disposed outside the member 2 in a peripheral direction at an equal interval; and the rotors 51a to 51c are driven in the Z axis direction in accordance with supplied current amount.

公开(公告)号：JPH08114230A

公开(公告)日：1996-05-07

申请号：JP25064894

申请日：1994-10-17

Applicant: CANON KK

Inventor： TSUI KOTARO ,  OSANAI EIJI ,  KASE KATSUSABURO

IPC: F16C32/06 ,  G03F7/20 ,  H01L21/027 ,  H01L21/68

Abstract: PURPOSE: To reduce a possibility of a porous pad peeled off from a housing by making the rear surface side of the porous pad rugged and providing a rugged part fitted in the rugged shape on the housing. CONSTITUTION: A hydrostatic bearing device 1 is composed of a porous pad 2 made of a porous material and a housing 3 for holding the hydrostatic pressure bearing device 1 to supply pressurized fluid to the same. The porous pad 2 has a bearing surface 21, pad side 22 and pad rear surface 23 provided with a rugged part 24 continuously extending in the direction perpendicular to the paper surface. The housing 3 has an air supply groove 31 fitted on the rugged part of the pad rear surface 23 and worked to continue in the direction perpendicular to the paper surface, an adhesion groove 32, an attachably mounting surface 35 and a supply hole 36 communicating to the air supply groove 31. The rugged part of the pad rear surface 23 is jointed to the housing 3 through adhesives 4 filled in the air supply groove 32. The adhesives 4 are filled between the rugged part 24 and the adhesive groove 32 and soaks into the porous material and solidifies in hardening to get strong against peeling-off.

公开(公告)号：JPH0571536A

公开(公告)日：1993-03-23

申请号：JP25956891

申请日：1991-09-11

Applicant: CANON KK

Inventor： ASAMI MASAYOSHI ,  OSANAI EIJI

IPC: F16C32/00 ,  F16C32/06

Abstract: PURPOSE:To facilitate the assembly of a static pressure bearing device having a magnetic means, and to prevent occurrence of a bending stress on an outer surface where the static pressure device is set. CONSTITUTION:A ring-like porous member 6 as a fluid jetting means and a permanent magnet 7 are coupled integrally with each other by means of a housing 2 which is secured to a movable member A by a well-known fixing means. Pressurized fluid is jetted from the porous member 6 to a guide member B so that the static pressure of the pressurized fluid causes the movable member A separate from the guide member B. Since the guide member B is made of magnetic materials, the movable member A is attracted to the guide member B by means of the permanent magnet 7. The porous member 6 and the permanent magnet 7 are coaxially positioned.

公开(公告)号：JPH0510330A

公开(公告)日：1993-01-19

申请号：JP15922491

申请日：1991-06-29

Applicant: CANON KK

Inventor： CHIBA SHINICHI ,  OSANAI EIJI

IPC: F16C32/06

Abstract: PURPOSE:To stabilize the dynamic attitude as well as the static attitude by supporting a moving body with high rigidity. CONSTITUTION:In a static pressure bearing device, a pressure fluid is fed to a bearing section B between a porous member 102 and a guide member 106, and a moving body 101 connected to the porous member 102 is supported and moved in no contact with the guide member 106. At least one or more air inlets 107 are provided on the porous member 102, and an exhaust groove 104 for exhausting the pressure fluid is provided around the air inlets 107 of the face on the guide member 106 side.

公开(公告)号：JPH0425334A

公开(公告)日：1992-01-29

申请号：JP12537990

申请日：1990-05-17

Applicant: CANON KK

Inventor： KUBO TADAYUKI ,  OSANAI EIJI

IPC: G12B5/00 ,  B23Q1/00 ,  B23Q1/34 ,  B23Q1/64 ,  G05D3/00 ,  G05D3/12 ,  H01L21/027 ,  H01L21/30 ,  H01L21/68

Abstract: PURPOSE:To attenuate vibration of a driven body effectively by arranging a damper at the position where phase is deviated from the position of an actuator of the driven body in an object positioning device of an exposure burning device which is used in the semiconductor lithography process. CONSTITUTION:When a command voltage is applied to a piezo-electric device 2, a driven body 1 is positioned in up and down direction and tilt direction. The driven body 1 is also positioned at an arbitrary position in X-Y plane by X-Y stage 9. The amount of displacement of the driven body 1 is measured by a non-contact displacement gauge 6 and feedback controlled from an external controller by its output. Highly accurate positioning becomes possible for target plane because the displacement gauge 6 is arranged opposingly to a reference plane 10a. Also, it becomes possible to attenuate vibration which occurs when start of the X-Y stage 9 is stopped, residual vibration due to the piezo-electric device 2, and vibration due to external disturbance effectively because a damping rubber 12 as a member for damper is arranged.

公开(公告)号：JPH0422807A

公开(公告)日：1992-01-27

申请号：JP12537890

申请日：1990-05-17

Applicant: CANON KK

Inventor： KUBO TADAYUKI ,  OSANAI EIJI

IPC: G01B21/00 ,  B23Q17/00 ,  G05D3/00 ,  G05D3/12 ,  G12B5/00 ,  H01L21/027 ,  H01L21/30

Abstract: PURPOSE:To reduce the influence of the posture accuracy and vibration of an X-Y stage, etc., and to perform positioning at high speed and with high accuracy by measuring the displacement quantity of a driven body in a positioning device in upward/downward and oblique directions setting the installing plane of the X-Y stage as reference. CONSTITUTION:When a command voltage is applied from an external controller to a piezoelectric element 2, the driven body 1 is positioned in the upward/ downward and oblique directions. Also, the driven body 1 is positioned at an arbitrary position in an (x-y) plane with the X-Y stage 9. In such a case, the displacement quantity in the upward/downward and oblique directions of the driven body 1 is measured with a non-contact displacement gage 6, and is feedback-controlled from the external controller based on the output, however, since the non-contact displacement gage 6 is arranged so as to be confronted with a reference plane 10a, it is possible to measure the displacement quantity of the driven body 1 including the posture change of the X-Y stage, which enables the positioning with high accuracy to be performed for a targeted plane.