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公开(公告)号：FR2845180B1
公开(公告)日：2004-12-17
申请号：FR0212022
申请日：2002-09-27
Applicant: ST MICROELECTRONICS SA , COMMISSARIAT ENERGIE ATOMIQUE
Inventor： POIROUX THIERRY , FLATRESSE PHILIPPE
IPC: G06F17/50 , H01L21/8238
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