Abstract:
A radiation image sensor (2) having a scintillator panel (4) and an imaging device (6), wherein the scintillator panel (4) comprises a radiation-transmitting substrate (10), a scintillator (12) provided on the substrate (10) and having a deliquescence, and an organic film (14) covering the scintillator (12) and having an elasticity, the scintillator panel (4) and the imaging device (6) are joined together with a matching oil (20) interposed therebetween, and the side walls of the scintillator panel (4) and the imaging device (6) are secured with resin (24).
Abstract:
A scintillator (12) having a columnar structure for converting incident radiation into visible light is provided on one side of an aluminum-made base (10) of a scintillator panel (2). All over the surface of the base (10) and the scintillator (12), a first polyparaxylene film (14) is formed. An SiO2 film (16) is formed on the polyparaxylene film (14) on the scintillator (12) side. A second polyparaxylene film (18) is formed on the SiO2 film (16) and the polyparaxylene film (14) on the base (10) side, that is, the whole scintillator is covered with the second polyparaxylene film (18).
Abstract:
A radiation detection device comprising: a light receiving element array (6) formed by arranging two-dimensionally light receiving elements (2) on a substrate (1), arranging bonding pads (4) on the outer periphery of the substrate (1) and electrically connecting them to light receiving elements (2) of each row or column with signal lines (3), and disposing a protective passivation film (5) on the light receiving elements (2) and on the signal lines (3); a scintillator (7) of a CsI columnar crystal deposited on the light receiving surface of the light receiving element array (6); a thinly elongated resin frame (8) so disposed inside the bonding pads (4) as to encompass the outer periphery of the light receiving portion; and a protective film (12) formed by sandwiching an inorganic film (10) with Parillen organic films (9 and 11), and laminated inside the resin frame (8). The outer periphery of the protective film (12) is brought into close contact with the resin frame (8) by a covering resin (13).
Abstract:
A scintillator panel (2) comprising a scintillator (12) formed on an FOP (10) and having a deliquescence and a polyparaxylene film (14) covering the scintillator (12), the FOP (10) having an uneven surface (10a) on the side wall part in contact with the polyparaxylene film (14) so as to prevent a protective film from separating.
Abstract:
A scintillator panel (2) comprising a radiation-transmitting substrate (10), a flat resin film (12) formed on the substrate (10), a reflecting film (14) formed on the flat resin film (12), a scintillator (16) formed on the reflecting film (14) and having a deliquescence, and a transparent organic film (18) covering the scintillator (16).
Abstract:
A method of organic deposition comprises a first step of supporting a substrate on which a scintillator is formed using at least three sample support needles rising from a turntable, a second step of introducing the turntable supporting the substrate into a CVD chamber, and a third step of depositing organic CVD film over the entire surface of the substrate including the scintillator formed on it.
Abstract:
The surface of an amorphous carbon base (10) of a scintillator panel (1) is sandblasted. A light-reflecting Al film (12) is formed on one of the sides of the base (10). A scintillator (14) having a columnar structure for converting incident radiation into visible light is provided on the Al film (12).