PLANAR THERMAL ARRAY
    43.
    发明专利

    公开(公告)号:CA2534190A1

    公开(公告)日:2005-04-14

    申请号:CA2534190

    申请日:2004-10-01

    Abstract: A thermal sensor structure having one level for an infrared detecting pixel including the sensor associated electronics. The electronics displace a smal l area thereby having little effect on the fill area of the pixel relative to a level having no pixel electronics. That level has thermally isolation for th e substrate through the limited structural attachment to the substrate because of the access vias to the silicon. It has additional isolation because of a pit of removed silicon from the substrate below that one level. The thermal sensor may have an array with a large number of pixels having the one level for the pixels and electronics structure.

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