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41.发明申请公开(公告)号：US20210385584A1
公开(公告)日：2021-12-09
申请号：US17354412
申请日：2021-06-22
Applicant: Infineon Technologies AG
Inventor： Somu Goswami , Christian Bretthauer , Matthias Friedrich Herrmann , Gunar Lorenz , Pradyumna Mishra , Daniel Neumaier , David Tumpold
Abstract: A combined MicroElectroMechanical structure (MEMS) includes a first piezoelectric membrane having one or more first electrodes, the first piezoelectric membrane being affixed between a first holder and a second holder; and a second piezoelectric membrane having an inertial mass and one or more second electrodes, the second piezoelectric membrane being affixed between the second holder and a third holder.
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公开(公告)号：US20210220778A1
公开(公告)日：2021-07-22
申请号：US17144978
申请日：2021-01-08
Applicant: Infineon Technologies AG
Inventor： Abidin Güçlü Onaran , David Tumpold
Abstract: The present disclosure concerns a micromechanical device and a method for manufacturing the same. The micromechanical device may comprise a membrane structure suspended on a substrate. The membrane structure may comprise a perforated gas permeable membrane comprising a plurality of perforations, and a reinforcement structure being coupled with the perforated membrane for stiffening the perforated membrane and/or for increasing the mechanical stability of the perforated membrane in order to attenuate an oscillation of the perforated membrane.
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公开(公告)号：US10830691B2
公开(公告)日：2020-11-10
申请号：US16385395
申请日：2019-04-16
Applicant: Infineon Technologies AG
Inventor： Christoph Glacer , Alfons Dehe , David Tumpold
Abstract: A fluid sensor includes a housing and a thermal emitter in the housing to emit first thermal radiation into a detection volume of the housing at a first power level during a measurement interval and emit the first thermal radiation at a reduced first power level or not emit said first thermal radiation at all during an intermediate interval disposed outside of the measurement interval. The fluid sensor includes a measuring element in the detection volume to receive a radiation signal during the measurement interval. The fluid sensor includes a second thermal emitter in the housing to emit second thermal radiation at a second power level into the detection volume during the intermediate interval such that a thermal oscillation of thermal radiation in relation to an overall power level of the thermal radiation in the detection volume is at most ±50% during the measurement interval and the intermediate interval.
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公开(公告)号：US20200041460A1
公开(公告)日：2020-02-06
申请号：US16654087
申请日：2019-10-16
Applicant: Infineon Technologies AG
Inventor： David Tumpold , Christoph Glacer
Abstract: A method for measuring the concentration of a gas includes heating a first gas with a pulse of light, the pulse of light having a wavelength absorbed by the first gas, wherein the first gas exerts pressure on a flexible membrane. The method includes receiving a first signal indicating a first deflection of the membrane, wherein the first deflection is due to a change in pressure of the first gas and receiving a second signal indicating a second deflection of the membrane occurring after the first signal, wherein the second deflection is due to the change in pressure of the first gas. The method includes determining a difference between the first signal and the second signal and, based on the difference between the first signal and the second signal, determining a first concentration of the first gas.
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公开(公告)号：US10551356B2
公开(公告)日：2020-02-04
申请号：US15791132
申请日：2017-10-23
Applicant: Infineon Technologies AG
Inventor： David Tumpold , Christoph Glacer
Abstract: A method for measuring the concentration of a gas includes heating a first gas with a pulse of light, the pulse of light having a wavelength absorbed by the first gas, wherein the first gas exerts pressure on a flexible membrane. The method includes receiving a first signal indicating a first deflection of the membrane, wherein the first deflection is due to a change in pressure of the first gas and receiving a second signal indicating a second deflection of the membrane occurring after the first signal, wherein the second deflection is due to the change in pressure of the first gas. The method includes determining a difference between the first signal and the second signal and, based on the difference between the first signal and the second signal, determining a first concentration of the first gas.
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Patent Agency Ranking
公开(公告)号：US20190352175A1
公开(公告)日：2019-11-21
申请号：US16400365
申请日：2019-05-01
Applicant: Infineon Technologies AG
Inventor： David Tumpold , Dominic Maier
Abstract: A MEMS sensor includes a sensor package and a membrane arranged in the sensor package, wherein a first partial volume of the sensor package adjoins a first main side of the membrane and a second partial volume of the sensor package adjoins a second main side of the membrane, wherein the second main side is arranged opposite the first main side. The MEMS sensor includes a first opening in the sensor package, said first opening connecting the first partial volume to an external environment of the sensor package in an acoustically transparent fashion. The MEMS sensor includes a second opening in the sensor package, said second opening connecting the second partial volume to the external environment of the sensor package in an acoustically transparent fashion.
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公开(公告)号：US10462580B2
公开(公告)日：2019-10-29
申请号：US15928821
申请日：2018-03-22
Applicant: Infineon Technologies AG
Inventor： Alfons Dehe , Yauheni Belahurau , Manuel Dorfmeister , Christoph Glacer , Manfred Kaltenbacher , Ulrich Schmid , Michael Schneider , David Tumpold
Abstract: A microelectromechanical loudspeaker may include: a plurality of elementary loudspeakers each including a drive unit and a diaphragm deflectable by the drive unit, and a controller configured to respectively supply control signals to the drive units. The drive units may be respectively configured to deflect the corresponding diaphragms according to the respective control signals supplied by the controller to generate acoustic waves. The control signal supplied to at least one control unit may have at least one local extremum and a global extremum of a curvature of the control signal with a highest absolute value of the curvature may be located at a position of the control signal preceding a position of the at least one local extremum of the control signal.
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公开(公告)号：US10393658B2
公开(公告)日：2019-08-27
申请号：US15854848
申请日：2017-12-27
Applicant: Infineon Technologies AG
Inventor： Alfons Dehe , Christoph Glacer , David Tumpold
Abstract: An analysis apparatus includes a gas chamber for receiving a gas to be analyzed, a source to emit radiation into the chamber. The radiation is to selectively excite molecules of the gas. The apparatus further includes a sensor to detect a physical variable which contains information about a degree of interaction between the radiation and the gas. The source includes a heatable planar radiation element to emit radiation and a housing with a first wall and a second wall which, therebetween, define and immediately delimit a radiation element receptacle chamber that is separated in a fluid-tight manner from the surroundings of the source. At least one of the first or second housing wall is transparent to the electromagnetic radiation that is emittable by the radiation element.
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公开(公告)号：US20190041363A1
公开(公告)日：2019-02-07
申请号：US16053177
申请日：2018-08-02
Applicant: Infineon Technologies AG
Inventor： David Tumpold , Alfons Dehe
Abstract: A reference chamber for a fluid sensor comprises a housing, a deflectable structure, which is arranged movably within the housing, a control device configured to drive the deflectable structure at a first point in time such that the deflectable structure assumes a defined position, and to drive the deflectable structure at a second point in time such that the deflectable structure moves out of the defined position and a movement of the deflectable structure in the housing is obtained. The reference chamber comprises an evaluation device configured to determine a movement characteristic of the movement of the deflectable structure on the basis of the moving into the defined position or on the basis of the moving out of the defined position and to determine an atmospheric property in the housing on the basis of the movement characteristic.
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公开(公告)号：US10194226B2
公开(公告)日：2019-01-29
申请号：US15587535
申请日：2017-05-05
Applicant: Infineon Technologies AG
Inventor： Alfons Dehe , David Tumpold , Gueclue Onaran
Abstract: A device for detecting acoustic waves may include a housing having a housing wall with an inner surface, and an acoustic wave sensor provided at least partially inside the housing and configured to detect acoustic waves. The inner surface of the housing wall is made in at least half of its entire area of a thermally insulating material.
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