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1.
公开(公告)号:US20230188899A1
公开(公告)日:2023-06-15
申请号:US18165014
申请日:2023-02-06
Applicant: Infineon Technologies AG
Inventor: Christian Bretthauer , David Tumpold , Pradyumna Mishra , Daniel Neumaier
IPC: H04R17/02 , B81B7/04 , G01P15/08 , G01P15/09 , G01P15/18 , H04R1/28 , G01H11/08 , H10N30/87 , H10N30/30
CPC classification number: H04R17/02 , B81B7/04 , G01P15/0802 , G01P15/09 , G01P15/18 , H04R1/28 , G01H11/08 , H10N30/87 , H10N30/302 , H10N30/308 , B81B2201/0235 , B81B2201/0257 , B81B2203/0127 , H04R2201/003 , G01P1/023
Abstract: A combined MicroElectroMechanical structure (MEMS) includes a first piezoelectric membrane having one or more first electrodes, the first piezoelectric membrane being affixed between a first holder and a second holder; and a second piezoelectric membrane having an inertial mass and one or more second electrodes, the second piezoelectric membrane being affixed between the second holder and a third holder.
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公开(公告)号:US20220377851A1
公开(公告)日:2022-11-24
申请号:US17817155
申请日:2022-08-03
Applicant: Infineon Technologies AG
Inventor: David Tumpold , Sebastian Anzinger , Christoph Glacer
IPC: H05B3/20 , G01J3/10 , G01N21/17 , G01N21/3504 , H05B3/03
Abstract: An emitter structure includes a substrate with a membrane arrangement. The membrane arrangement includes at least one first membrane, a first heating path and a second heating path in different substrate planes. The first heating path and the second heating path are positioned with respect to one another such that a projection of the first heating path and a projection of the second heating path onto a common plane lie at least partly next to one another in the common plane.
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3.
公开(公告)号:US20210382085A1
公开(公告)日:2021-12-09
申请号:US16896665
申请日:2020-06-09
Applicant: Infineon Technologies AG
Inventor: Christian Bretthauer , Pradyumna Mishra , Daniel Neumaier , David Tumpold
IPC: G01P15/08 , H01L41/113 , H01L41/047 , B81B7/04 , G01P15/09 , H04R17/02
Abstract: A combined MicroElectroMechanical structure (MEMS) includes a first piezoelectric membrane having one or more first electrodes, the first piezoelectric membrane being affixed between a first holder and a second holder; and a second piezoelectric membrane having an inertial mass and one or more second electrodes, the second piezoelectric membrane being affixed between the second holder and a third holder.
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4.
公开(公告)号:US11061002B2
公开(公告)日:2021-07-13
申请号:US16798476
申请日:2020-02-24
Applicant: Infineon Technologies AG
Inventor: David Tumpold , Gueclue Onaran , Christoph Glacer
IPC: G01N29/24 , G01N21/17 , G01N29/032
Abstract: A photoacoustic gas analyzer, including: a gas chamber to receive a gas to be analyzed; a radiation source that emits into the gas chamber electromagnetic radiation with a time-varying intensity to excite gas molecules of N mutually different gas types the concentrations of which are to be determined in the received gas, wherein the radiation source is operable in N mutually different modes, each mode having a unique emission spectrum different from the emission spectra of the other N−1 modes; an acoustic-wave sensor that detects acoustic waves generated by the electromagnetic radiation emitted into the gas to be analyzed; and a control unit to operate the radiation source in the different modes respectively to emit electromagnetic radiation with a time-varying intensity; to receive in each mode from the acoustic-wave sensor signals; and to determine from the signals received in each mode the concentrations of the N mutually different gas types.
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5.
公开(公告)号:US20200309665A1
公开(公告)日:2020-10-01
申请号:US16807698
申请日:2020-03-03
Applicant: Infineon Technologies AG
Inventor: Michael Schneider , Alfons Dehe , Manuel Dorfmeister , Christoph Glacer , Ulrich Krumbein , Ulrich Schmid , David Tumpold
IPC: G01N15/06
Abstract: A sensor element includes a membrane structure suspended on a frame structure, wherein the membrane structure includes a membrane element and an actuator. The membrane structure is deflectable in a first stable deflection state and in a second stable deflection state and is operable in a resonance mode in at least one of the first and the second stable deflection states. The actuator is configured to deflect the membrane structure in a first actuation state into one of the first and the second stable deflection states, and to operate the membrane structure in a second actuation state in a resonance mode having an associated resonance frequency.
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公开(公告)号:US10466174B2
公开(公告)日:2019-11-05
申请号:US15376738
申请日:2016-12-13
Applicant: Infineon Technologies AG
Inventor: Christoph Glacer , Alfons Dehe , David Tumpold , Gueclue Onaran
IPC: G01N21/64 , G01N21/84 , G01N21/17 , G01N21/3504
Abstract: A gas analyzer may include: a gas chamber configured to receive a gas to be analyzed therein, a radiation source configured to emit electromagnetic radiation into the gas chamber, the electromagnetic radiation being adapted to selectively excite gas molecules of a specific type that is to be detected in the gas received in the gas chamber, a collimator configured to collimate the electromagnetic radiation emitted by the radiation source, and a sensor configured to detect a physical quantity indicative of a degree of interaction between the electromagnetic radiation emitted by the radiation source and the gas to be analyzed.
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公开(公告)号:US20190331531A1
公开(公告)日:2019-10-31
申请号:US16385395
申请日:2019-04-16
Applicant: Infineon Technologies AG
Inventor: Christoph Glacer , Alfons Dehe , David Tumpold
Abstract: A fluid sensor includes a housing and a thermal emitter in the housing to emit first thermal radiation into a detection volume of the housing at a first power level during a measurement interval and emit the first thermal radiation at a reduced first power level or not emit said first thermal radiation at all during an intermediate interval disposed outside of the measurement interval. The fluid sensor includes a measuring element in the detection volume to receive a radiation signal during the measurement interval. The fluid sensor includes a second thermal emitter in the housing to emit second thermal radiation at a second power level into the detection volume during the intermediate interval such that a thermal oscillation of thermal radiation in relation to an overall power level of the thermal radiation in the detection volume is at most ±50% during the measurement interval and the intermediate interval.
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公开(公告)号:US20190132661A1
公开(公告)日:2019-05-02
申请号:US16219992
申请日:2018-12-14
Applicant: Infineon Technologies AG
Inventor: Alfons Dehe , David Tumpold , Gueclue Onaran
Abstract: A device for detecting acoustic waves may include a housing having a housing wall with an inner surface, and an acoustic wave sensor provided at least partially inside the housing and configured to detect acoustic waves. The inner surface of the housing wall is made in at least half of its entire area of a thermally insulating material.
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公开(公告)号:US20170201192A1
公开(公告)日:2017-07-13
申请号:US14992615
申请日:2016-01-11
Applicant: Infineon Technologies AG
Inventor: David Tumpold , Alfons Dehe , Christoph Glacer
CPC classification number: H02N1/006 , H01L41/081 , H01L41/0973 , H04R7/06 , H04R17/00 , H04R17/02 , H04R19/005 , H04R2201/003
Abstract: According to an embodiment, a microelectromechanical systems MEMS transducer includes a deflectable membrane attached to a support structure, an acoustic valve structure configured to cause the deflectable membrane to be acoustically transparent in a first mode and acoustically visible in a second mode, and an actuating mechanism coupled to the deflectable membrane. Other embodiments include corresponding systems and apparatus, each configured to perform various embodiment methods.
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公开(公告)号:US11788990B2
公开(公告)日:2023-10-17
申请号:US17647403
申请日:2022-01-07
Applicant: Infineon Technologies AG
Inventor: Johannes Manz , Wolfgang Klein , David Tumpold
CPC classification number: G01N29/2425 , G01N1/22
Abstract: A system for measuring gas concentration includes a package having a cavity and a port, a photoacoustic gas sensor device within the package, and a Micro Electro Mechanical System (“MEMS”) valve separate from the photoacoustic gas sensor device placed over the port of the package and to allow ambient gas diffusion into the cavity in a first mode of operation, and to prevent ambient gas diffusion into the cavity and to acoustically isolate the cavity in a second mode of operation.
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