Photoacoustic gas analyzer for determining species concentrations using intensity modulation

    公开(公告)号:US11061002B2

    公开(公告)日:2021-07-13

    申请号:US16798476

    申请日:2020-02-24

    Abstract: A photoacoustic gas analyzer, including: a gas chamber to receive a gas to be analyzed; a radiation source that emits into the gas chamber electromagnetic radiation with a time-varying intensity to excite gas molecules of N mutually different gas types the concentrations of which are to be determined in the received gas, wherein the radiation source is operable in N mutually different modes, each mode having a unique emission spectrum different from the emission spectra of the other N−1 modes; an acoustic-wave sensor that detects acoustic waves generated by the electromagnetic radiation emitted into the gas to be analyzed; and a control unit to operate the radiation source in the different modes respectively to emit electromagnetic radiation with a time-varying intensity; to receive in each mode from the acoustic-wave sensor signals; and to determine from the signals received in each mode the concentrations of the N mutually different gas types.

    FLUID SENSOR AND METHOD FOR PROVIDING SAME
    7.
    发明申请

    公开(公告)号:US20190331531A1

    公开(公告)日:2019-10-31

    申请号:US16385395

    申请日:2019-04-16

    Abstract: A fluid sensor includes a housing and a thermal emitter in the housing to emit first thermal radiation into a detection volume of the housing at a first power level during a measurement interval and emit the first thermal radiation at a reduced first power level or not emit said first thermal radiation at all during an intermediate interval disposed outside of the measurement interval. The fluid sensor includes a measuring element in the detection volume to receive a radiation signal during the measurement interval. The fluid sensor includes a second thermal emitter in the housing to emit second thermal radiation at a second power level into the detection volume during the intermediate interval such that a thermal oscillation of thermal radiation in relation to an overall power level of the thermal radiation in the detection volume is at most ±50% during the measurement interval and the intermediate interval.

    Photoacoustic sensor valve
    10.
    发明授权

    公开(公告)号:US11788990B2

    公开(公告)日:2023-10-17

    申请号:US17647403

    申请日:2022-01-07

    CPC classification number: G01N29/2425 G01N1/22

    Abstract: A system for measuring gas concentration includes a package having a cavity and a port, a photoacoustic gas sensor device within the package, and a Micro Electro Mechanical System (“MEMS”) valve separate from the photoacoustic gas sensor device placed over the port of the package and to allow ambient gas diffusion into the cavity in a first mode of operation, and to prevent ambient gas diffusion into the cavity and to acoustically isolate the cavity in a second mode of operation.

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