-
公开(公告)号：JPS6269637A
公开(公告)日：1987-03-30
申请号：JP21040085
申请日：1985-09-24
Applicant: MATSUSHITA ELECTRIC WORKS LTD
Inventor： OKA NAOMASA
IPC: H01L21/76 , H01L21/306 , H01L21/308 , H01L21/316
Abstract: PURPOSE:To realize element isolation as patterned by using selective isolation by a method wherein hydrazine is used for etching a silicon substrate for the formation of a U-geometry groove, a silicon nitride film is formed on the entire surface except on the bottom of the U-geometry groove, and an isolating oxide film is formed in the U-geometry groove. CONSTITUTION:After the formation of an oxide film 8 by thermal oxidation on the surface of a silicon substrate 4, a window 9 is provided in an element isolating region which is for the isolation of an element region 20 for the formation of a semiconductor element, an anisotropic etching process is accomplished for the silicon substrate 4 through the window 9, and the etching process is stopped midway for the formation of a V groove 11 with its cross section shaped after the letter U. Next, a silicon nitride film 12 is formed to serve as a mask for selective oxidation and a window 13 is provided in the silicon nitride film 12 only in the bottom of the V groove 11. Under such conditions, an isolating oxide film 14 fills up the V groove 11 after oxidation is accomplished for the isolating region. The silicon nitride film 12 impedes the isolating oxide film 14 from going into under the insulating region, which prevents bird's beaks. In this way, an element region is prevented from growing larger than necessary. The silicon nitride film is then removed for the establishment of high- precision element isolation.
-
公开(公告)号：JPS58145135A
公开(公告)日：1983-08-29
申请号：JP2776582
申请日：1982-02-22
Applicant: MATSUSHITA ELECTRIC WORKS LTD
Inventor： OKA NAOMASA
IPC: H01L21/31 , C23C8/10 , H01L21/316
Abstract: PURPOSE:To improve wet oxidation of an wafer by a method wherein vapor and oxygen only are supplied to the central part of a quartz tube. CONSTITUTION:An introduction tube 5 is branched at the connecting part 10 to the quartz tube 4 into a gas tube 5a and an water drop tube 5b. The gas tube 5a is protruded inside toward the axially central direction of the quartz tube 4, and the water drop tube 5b is made to creep on the inside bottom of the quartz tube 4. Water drops 9 condensed in dews roll down the water drop tube 5b at the connecting part 10, and vapor and oxygen only are absorbed in the central part of the quartz tube 4.
-
公开(公告)号：JP2006275660A
公开(公告)日：2006-10-12
申请号：JP2005093087
申请日：2005-03-28
Applicant: Matsushita Electric Works Ltd , 松下電工株式会社
Inventor： TAKEGAWA YOSHIYUKI , SUZUKI YUJI , OKUTO TAKASHI , BABA TORU , OKA NAOMASA , MIYAJIMA HISAKAZU , KATAOKA KAZUSHI
Abstract: PROBLEM TO BE SOLVED: To provide a semiconductor sensor, and its manufacturing method, capable of ensuring the airtightness of a space for housing the components of a moving part and a detecting element with good reproducibility, while enhancing the reproducibility of the electric property of a connecting part which electrically connects one end part of a feedthrough wiring conductor to the other end of which is connected to the conductor pattern of a packaging board without using a bonding wire, and a conductive material portion being opposed to the one end part.
SOLUTION: A first board 2 for a package is joined to one surface side of a sensor chip 1 having a weight portion 12 and a bending portion 13 as the moving part, and a second board 3 for a package is joined to the other surface side. A recession 25 formed in the first board 2 constitutes a recession for housing a pad 15 being the conductive material portion. The volume of the internal space of the recession is set to a value capable of house a connecting part 24 connecting the pad 15 and the feedthrough wiring conductor 23 electrically, in addition to the pad 15.
COPYRIGHT: (C)2007,JPO&INPITAbstract translation: 要解决的问题：提供一种半导体传感器及其制造方法，其能够确保用于容纳具有良好再现性的移动部件和检测元件的部件的空间的气密性，同时提高电气的再现性 电连接馈通布线导体的一个端部的连接部件的特性，其另一端连接到包装板的导体图案而不使用接合线;以及导电材料部分，其与所述一个端部 。 解决方案：用于封装的第一板2连接到具有重量部分12和弯曲部分13作为移动部分的传感器芯片1的一个表面侧，并且用于封装的第二板3接合到 其他表面。 形成在第一板2中的凹部25构成用于容纳作为导电材料部的焊盘15的凹部。 除了垫15之外，经济衰退的内部空间的体积被设定为能够容纳连接焊盘15和馈通布线导体23的连接部分24的值。（C）2007， JPO＆INPIT
-
公开(公告)号：JP2006154574A
公开(公告)日：2006-06-15
申请号：JP2004347793
申请日：2004-11-30
Applicant: Matsushita Electric Works Ltd , 松下電工株式会社
Inventor： JOMI HIROTAKA , YOSHIHARA TAKAAKI , OKA NAOMASA , FUKUSHIMA HIROSHI , SUZUKI YUJI , NOGE HIROSHI , HARADA HIROSHI , USHIYAMA NAOKI
Abstract: PROBLEM TO BE SOLVED: To provide an optical switch preventing an increase of an optical loss by enhancing the strength of mirror units formed according to a semiconductor process and the optical switch made by matrically arranging them and performing an accurate mirror operation. SOLUTION: The optical switch is provided with a mirror unit 60 which has a mirror 111 for reflecting a light beam; a support part 302 for movably supporting the mirror 111 and a movable part for moving the mirror 111, and switches an optical path of the light beam by the movement of the mirror 111, wherein a side wall 101 having cut-out parts on the optical path is disposed on the surrounding of the mirror unit 60 (a frame part 301). COPYRIGHT: (C)2006,JPO&NCIPI
Abstract translation: 要解决的问题：提供一种光学开关，通过提高根据半导体工艺形成的镜面单元的强度和通过其配置布置并执行精确的镜面操作而制造的光学开关来防止光损耗的增加。 解决方案：光开关设置有反射镜单元60，反射镜单元60具有用于反射光束的反射镜111; 用于可移动地支撑反射镜111的支撑部分302和用于移动反射镜111的可移动部分，并且通过反射镜111的移动来切换光束的光路，其中在光学部件上具有切口部分的侧壁101 路径设置在反射镜单元60的周围（框架部分301）。 版权所有（C）2006，JPO＆NCIPI
-
公开(公告)号：JP2006041201A
公开(公告)日：2006-02-09
申请号：JP2004219433
申请日：2004-07-27
Applicant: Matsushita Electric Works Ltd , 松下電工株式会社
Inventor： USHIYAMA NAOKI , KONO KIYOHIKO , HARADA HIROSHI , OGIWARA ATSUSHI , OKA NAOMASA , YOSHIHARA TAKAAKI
Abstract: PROBLEM TO BE SOLVED: To provide a packaged electronic part which is given a highly reliable sealing property by surely adhering a device with a protective member without specifying an adhesive agent.
SOLUTION: The package electronic part is provided with a substrate 5, a device 1 formed or mounted on/to the substrate 5, and a transparent protective member 2 to cover and protect the device 1. A photo-curing material 3 is used to seal a space between the device 1 and the protective member 2 together with its periphery, and a light (ultraviolet ray) is given thereto from the upside of the protective member 2 to photo-cure the photo-curing material 3. Furthermore, a thermosetting material 4 is applied as to cover the photo-curing material 3 and to fit the protective member 2 to the substrate 5, and the whole body is thermally cured to make the packaged electronic part.
COPYRIGHT: (C)2006,JPO&NCIPIAbstract translation: 要解决的问题：提供一种封装的电子部件，其通过在不指定粘合剂的情况下确保地将装置与保护部件粘合而获得高度可靠的密封性。 解决方案：封装电子部件设置有基板5，形成或安装在基板5上的装置1和透明保护构件2，以覆盖和保护装置1.光固化材料3是 用于密封装置1和保护构件2与其周边之间的空间，并且从保护构件2的上侧向其施加光（紫外线）以使光固化材料3光固化。此外， 施加热硬化材料4以覆盖光固化材料3并将保护构件2装配到基板5，并且将整体热固化以制造封装的电子部件。 版权所有（C）2006，JPO＆NCIPI
-
Patent Agency Ranking
公开(公告)号：JP2005275100A
公开(公告)日：2005-10-06
申请号：JP2004089736
申请日：2004-03-25
Applicant: Matsushita Electric Works Ltd , 松下電工株式会社
Inventor： NOGE HIROSHI , SUZUMURA MASAHIKO , HARADA HIROSHI , OKA NAOMASA , SUZUKI YUJI , OGIWARA ATSUSHI , YOSHIHARA TAKAAKI , JOMI HIROTAKA , KONO KIYOHIKO
Abstract: PROBLEM TO BE SOLVED: To provide a matrix type optical switch in which a loss of light propagating on an optical path is suppressed, and method of manufacturing the matrix type optical switch. SOLUTION: The matrix type optical switch includes N×M movable mirrors R 1, 1 -R N, M disposed at crossings of optical paths (grooves) 2 rrayed in a grid shape and graded-index optical fibers Fr 1, 1 -Fr N-1, M , Fc 1, 1 -Fc N, M-1 inserted between adjacent mirrors R 1, 1 -R N, M , wherein the optical paths 2 are switched by putting the movable mirrors R 1, 1 -R N, M into and out of the crossings of the optical paths 2, and refractive index of the graded-index optical fibers Fr 1, 1 -Fr N-1, M , Fc 1, 1 -Fc N, M-1 are decreased diametrically from their center axis. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract translation: 解决的问题：提供抑制光路传播的光的损失的矩阵型光开关，以及矩阵式光开关的制造方法。
解决方案：矩阵型光开关包括设置在光路（凹槽）2的交叉处的N×M个可动镜R SB 1，1 SB，N，M SB 格子形状和渐变折射率光纤FR 1，1 -Fr SB，N-1，M ，Fc
1,1 / SB> N，M-1 插入在相邻反射镜R SB 1，1 SB，N，M / SB之间，其中光路2通过将可移动 从光路2的交叉点射出R＆lt; SB＆gt; 1，1＆lt; SB＆gt; N，M＆lt; / SB＆gt;和折射率光纤Fr 1，1-N，1，1，1，1，1，1，1，1，...，...， 从它们的中心轴。 版权所有（C）2006，JPO＆NCIPI -
公开(公告)号：JP2005153062A
公开(公告)日：2005-06-16
申请号：JP2003393980
申请日：2003-11-25
Applicant: Matsushita Electric Works Ltd , 松下電工株式会社
Inventor： YOSHIHARA TAKAAKI , OGIWARA ATSUSHI , OKA NAOMASA , USHIYAMA NAOKI , SUZUKI YUJI , HARADA HIROSHI , KONO KIYOHIKO
IPC: B81C1/00
Abstract: PROBLEM TO BE SOLVED: To provide a method for manufacturing a semiconductor structure having a movable part which is separated from a support substrate and composed of structurally integrated and electrically separated two or more parts.
SOLUTION: The method for manufacturing a semiconductor structure has a recessed part forming process, in which a recessed part is formed by selectively removing a first substrate from a first main surface of the first substrate, a recessed part embedding process, in which an insulator is embedded to the recessed part, and a rear face etching process in which a protruding part of the first substrate having the embedded insulator is left behind by uniformly removing the first substrate from a second main surface arranged oppositely to the first main surface.
COPYRIGHT: (C)2005,JPO&NCIPIAbstract translation: 要解决的问题：提供一种制造半导体结构的方法，该半导体结构具有与支撑基板分离并由结构上一体化且电气分离的两个或更多个部分组成的可移动部分。 解决方案：半导体结构的制造方法具有凹部形成工序，其中通过从第一基板的第一主表面选择性地去除第一基板而形成凹部，凹部嵌入工艺，其中 将绝缘体嵌入到凹部中，并且通过从与第一主表面相对布置的第二主表面均匀地除去第一基板而将具有嵌入绝缘体的第一基板的突出部分留下的背面蚀刻工艺。 版权所有（C）2005，JPO＆NCIPI
-
公开(公告)号：JP2004354458A
公开(公告)日：2004-12-16
申请号：JP2003148985
申请日：2003-05-27
Applicant: Matsushita Electric Works Ltd , 松下電工株式会社
Inventor： NOGE HIROSHI , HARADA HIROSHI , OKA NAOMASA , FUKUSHIMA HIROSHI , OGIWARA ATSUSHI , TSUJI KOJI , KONO KIYOHIKO , JOMI HIROTAKA
Abstract: PROBLEM TO BE SOLVED: To provide an optical switch which can decrease insertion loss and cross talk. SOLUTION: The optical switch operates in such a manner that at least a pair of opposing optical waveguides is intersected with each other and the optical paths of light beams are switched by inserting and retracting a reflector into and from the intersection of the optical waveguides. In the state where the reflector is inserted into the intersection, the reflector is in a size larger than an ellipse having the diameter twice or more of the diameter of the light beam on the reflector with respect to the center of the light beam as the reference. Or, in the state where the reflector is retracted from the intersection, the reflector does not overlap the ellipse having the diameter twice the diameter of the light beam with respect to the center of the light beam as the reference. COPYRIGHT: (C)2005,JPO&NCIPI
Abstract translation: 要解决的问题：提供一种可以减少插入损耗和串扰的光开关。 解决方案：光开关的工作方式是使至少一对相对的光波导彼此相交，光束的光路通过将反射器插入和从光学器件 波导。 在反射器插入交叉点的状态下，反射器的尺寸大于椭圆，其直径相对于光束的中心为反射器的直径的两倍或更多的直径作为参考 。 或者，在反射器从交叉点缩回的状态下，反射器不重叠具有相对于光束中心的光束直径的两倍直径的椭圆作为基准。 版权所有（C）2005，JPO＆NCIPI
-
公开(公告)号：JP2003279864A
公开(公告)日：2003-10-02
申请号：JP2002079882
申请日：2002-03-22
Applicant: Matsushita Electric Works Ltd , 松下電工株式会社
Inventor： OKUTO TAKASHI , OKA NAOMASA , OGIWARA ATSUSHI , MIYAJIMA HISAKAZU , HIRATA KATSUHIRO
Abstract: PROBLEM TO BE SOLVED: To provide an electrostatic actuator for holding the displaced state of a needle even when a voltage applied between a movable electrode and a fixed electrode is eliminated and more saving a power consumption.
SOLUTION: The electrostatic actuator comprises the movable electrode 2 provided on the needle 21 integrally formed through an elastic supporting body 22 at a fixed part 23 fixed on the surface of a supporting substrate 1, a fixed electrode 3 fixed on the supporting substrate 1 and made to face the movable electrode 2 at an interval so as to be capacitively coupled, a switch plate 4 erected on the needle 21 for passing through light when the needle 21 is at one position and interrupting the light when it is at the other position; and a holding means composed of a fixed engaging part 6 recess-projection connected with a movable engaging part 5 fixed to the supporting substrate 1 and projectingly provided from the needle 1. Corresponding to electrostatic force generated between the movable electrode 2 and the fixed electrode 3, the recess-projection engagement of the movable engaging part 5 and the fixed engaging part 6 is set and released and the needle 21 is displaced.
COPYRIGHT: (C)2004,JPOAbstract translation: 要解决的问题：即使当消除施加在可动电极和固定电极之间的电压时，也提供用于保持针的位移状态的静电致动器，并且更节省功率消耗。 解决方案：静电致动器包括设置在针21上的可动电极2，固定在支撑基板1的表面上的固定部分23处通过弹性支撑体22整体形成，固定电极3固定在支撑基板上 1并以一定间隔与可动电极2面对以便电容耦合;当针21处于一个位置时，直立在针21上的通过光的开关板4，当它处于另一个位置时中断光 位置; 以及由与固定在支撑基板1上并从针1突出地设置的可动接合部5连接的固定接合部6的凹凸形成的保持机构。对应于在可动电极2和固定电极3之间产生的静电力 可移动接合部5和固定接合部6的凹凸接合被设置和释放，针21移位。 版权所有（C）2004，JPO
-
公开(公告)号：JPH11242050A
公开(公告)日：1999-09-07
申请号：JP6060998
申请日：1998-02-24
Applicant: MATSUSHITA ELECTRIC WORKS LTD
Inventor： NAKAMURA TAKURO , YOSHIDA HITOSHI , ISHIDA TAKUO , TOMONARI SHIGEAKI , KAMAKURA MASATOMO , OKA NAOMASA
Abstract: PROBLEM TO BE SOLVED: To provide a three-axis acceleration sensor with improved sensitivity by narrowing the essential total width of a beam for constituting a flexible part. SOLUTION: A flexible part 2 is constituted of two parallel beams 21 and another beam 22 that is formed for connecting base parts at the side of a fixing part, and the width of the essential flexible part 2 is narrowed. A piezo resistor 23 or 24 for x or y axis is formed at the connection site with a connection part 3 of each beam 21, and a piezo resistor 25 for z axis is formed at another beam 22.
-
-
-
-
-
-
-
-
-
Search Results
107
records
(took 0.027 seconds)
