Abstract:
DETECTOR PARA PERCIBIR PRESIONES DIFERENCIALES EN FLUIDOS Y DIAFRAGMA PARA EL MISMO, EN DONDE EL DETECTOR COMPRENDE UN PAR DE ENTRADAS CON SENDAS ABERTURAS PARA TRANSMITIR PRESIONES DE FLUIDO, UN DIAFRAGMA UNICO DE MATERIAL NO DUCTIL, DOTADO DE UNA REGION FLEXIONABLE POR EFECTO DE LA PRESION Y MONTADO SOBRE PLACAS DE SOPORTE SITUADAS EN CARAS OPUESTAS DEL MISMO, Y UN SENSOR PARA PERCIBIR LA FLEXION DEL DIAFRAGMA Y SUMINISTRAR UNA SALIDA INDICATIVA DE DICHA PRESION. EL DIAFRAGMA TIENE UN REBORDE EXTERIOR QUE LIMITA DICHA REGION FLEXIONABLE Y QUE SE PEGA HERMETICAMENTE A DICHAS PLACAS DE SOPORTE PARA RODEAR A DICHAS ABERTURAS, SIENDO CONCAVA AL MENOS UNA DE LAS SUPERFICIES DEL DIAFRAGMA. EL INVENTO ES APLICABLE A CELULAS DE MEDIDA DE PRESION DIFERENCIAL PROTEGIDAS CONTRA LA ACCION DE SOBREPRESIONES.
Abstract:
A cell for sensing differential pressures has a single brittle material diaphragm mounted on support plates positioned on opposite sides of the diaphragm. The diaphragm surfaces when at zero differential pressure facing the support are concave and shaped to conform very closely to the shape the diaphragm has when it is deflected so that when the diaphragm is under a selected pressure and it is forced against one of the supports in either direction, the diaphragm is substantially planar or flat and supported fully on its support plate. The diaphragm may be shaped by placing it under a pressure so that it bows or deflects and then grinding the surface opposite from the applied pressure flat. When the pressure is removed, the diaphragm relaxes and a cavity with the exact required shape is produced on the surface that had been bowed out and ground flat. The same procedure can be done to the other side of the diaphragm or two diaphragm sections may be fixed together.
Abstract:
PRESSURE SENSING CELL USING BRITTLE DIAPHARGM A capacitive sensing cell is adapted for manufacture in a batch process, and uses a substrate or base from a rigid insulating material such as glass and a diaphragm assembly of a brittle semiconductor. The diaphragm assembly and the substrate are anodically bonded together. A very shallow recess is formed on either the diaphragm or the substrate to accommodate a deposited capacitor plate. Two such assemblies are connected together and the assembly is filled with noncompressible fluid to slightly bow the diaphragms away from the substrates. Differential pressure between the diaphragm assemblies is sensed by detecting the relative positions of the two diaphragms.
Abstract:
A cell for sensing differential pressures has a single brittle material diaphragm mounted on support plates positioned on opposite sides of the diaphragm. The diaphragm surfaces when at zero differential pressure facing the support are concave and shaped to conform very closely to the shape the diaphragm has when it is deflected so that when the diaphragm is under a selected pressure and it is forced against one of the supports in either direction, the diaphragm is substantially planar or flat and supported fully on its support plate. The diaphragm may be shaped by placing it under a pressure so that it bows or deflects and then grinding the surface opposite from the applied pressure flat. When the pressure is removed, the diaphragm relaxes and a cavity with the exact required shape is produced on the surface that had been bowed out and ground flat. The same procedure can be done to the other side of the diaphragm or two diaphragm sections may be fixed together.
Abstract:
Un détecteur à semi-conducteur (35) de pression utilise un diaphragme cassant (36) constitué d'un matériau tel que du silicium et monté entre des plaques de base en verre (37, 38), et qui se déforme en réponse à une pression. Les plaques de base en verre (37, 38) peuvent présenter des évidements (37A, 37B) pour recevoir le diaphragme (36) et constituer un support pour la totalité du diaphragme (36) lors de conditions de surpression et éviter de soumettre le diaphragme (36) à des contraintes excessives, ou bien le diaphragme (36) peut avoir des surfaces profilées (45, 46) pour former des surfaces d'arrêt de surpression contre la plaque de base opposée (37, 38). Le diaphragme (36) possède des rainures (43, 44) définissant une partie centrale (41) qui se déforme, et les rainures (43, 44) forment des âmes (42) joignant la partie centrale (41) à un bord externe (40) de sorte que le diaphragme (36) possède les mêmes caractéristiques de déflection que le diaphragme ''à bord libre''. Les rainures (43, 44) définissant les âmes (42) peuvent avoir diverses configurations pour obtenir les résultats désirés.
Abstract:
A cell for sensing differential pressures has a single brittle material diaphragm (63, 93, 102) mounted on support plates (50, 75, 120, 130) positioned on opposite sides of the diaphragm (63, 93, 102). The diaphragm surfaces (43C, 77C, 102A, 102C) when at zero differential pressure facing the support plate (50, 75, 120, 130) are concave and shaped to conform very closely to the shape the diaphragm (63, 93, 102) has when it is deflected so that when the diaphragm (63, 93, 102) is under a selected pressure and it is forced against one of the support plates (50, 75, 120, 130) in either direction, the diaphragm (63, 93, 102) is substantially planar or flat and supported fully on its support plate (50, 75, 120, 130). The diaphragm (63, 93, 102) may be shaped by placing it under a pressure so that it bows or deflects and then grinding the surface (43C, 77C) opposite from the applied pressure flat. When the pressure is removed, the diaphragm (63, 93, 102) relaxes and the exact required shape is produced on the surface (43C, 77C, 102A) that had been bowed out and ground flat. The same procedure can be done to the other side (102C) of the diaphragm (102) or two diaphragm sections (43, 43; 77, 77) may be fixed together.