公开(公告)号：US08800478B2

公开(公告)日：2014-08-12

申请号：US12891939

申请日：2010-09-28

Applicant: Cheng-Kuo Yeh

Inventor： Cheng-Kuo Yeh

IPC: B05C3/02 ,  B05C3/09 ,  B05D1/20 ,  B82Y30/00 ,  B82Y40/00

CPC classification number: B05C3/02 ,  B05C3/09 ,  B05D1/20 ,  B05D1/206 ,  B82Y30/00 ,  B82Y40/00 ,  H01L2933/0091

Abstract: A film formation system and a film formation method are disclosed. The film formation method includes the following steps performed in the film formation system that includes a container containing liquid, a liquid draining device for draining the liquid, a ring-shaped component installed in the container, and a carrying component installed in the liquid in the container for carrying at least a substrate: enabling the carrying component in the liquid and enabling the ring-shaped component to float on the liquid; when a film layer that is composed of nano-spheres is formed on the liquid, locating the film layer in a ring of the ring-shaped component; and removing the liquid, allowing the film layer to move downward in accordance with the ring-shaped component and be formed on the substrate, thereby preventing the nano-spheres from contacting an inner wall of the container and bursting, through the installation of the ring-shaped component.

Abstract translation: 公开了一种成膜体系和成膜方法。 成膜方法包括在成膜系统中执行的以下步骤，其包括容纳液体的容器，用于排出液体的液体排出装置，安装在容器中的环形部件和安装在容器中的液体中的承载部件 用于承载至少一个基底的容器：使所述液体中的载体组分能够使所述环状组分漂浮在所述液体上; 当在液体上形成由纳米球形成的膜层时，将膜层定位在环状部件的环中; 并移除液体，使膜层根据环状部件向下移动并形成在基板上，从而防止纳米球体与容器的内壁接触并通过安装环形件而爆裂 形组件。

公开(公告)号：US5143745A

公开(公告)日：1992-09-01

申请号：US746774

申请日：1991-08-16

Applicant: Thomas C. Maganas ,  Alan L. Harrington

Inventor： Thomas C. Maganas ,  Alan L. Harrington

IPC: B05D1/20

CPC classification number: B82Y30/00 ,  B05D1/206 ,  B82Y40/00

Abstract: A method and apparatus for continuously forming and depositing a layer of monomolecular amphiphilic molecules on a substrate, which include the continuous or intermittent removal of unused film after a substrate dipping. The amount of "dwell time" in which the film resides on the surface of the support media is controlled. A rotatable barrier provides a movable "film front" to achieve repeatable film pressures, consistencies and viscosities of high precision and accuracy.

Abstract translation: 一种用于在基板上连续形成和沉积单分子两亲分子层的方法和装置，其包括在基板浸渍之后连续或间歇地去除未使用的膜。 控制胶片驻留在支撑介质表面上的“停留时间”量。 可旋转的屏障提供可移动的“胶片前端”，以实现高精度和高精度的可重复的胶片压力，一致性和粘度。

公开(公告)号：US5106561A

公开(公告)日：1992-04-21

申请号：US641855

申请日：1991-01-16

Applicant: Brij D. Singh ,  Scott E. Rickert

Inventor： Brij D. Singh ,  Scott E. Rickert

IPC: B05D1/20 ,  B29C39/14 ,  B29C39/42 ,  B60T8/00

CPC classification number: B82Y30/00 ,  B05D1/206 ,  B29C39/14 ,  B29C39/42 ,  B60T8/00 ,  B82Y40/00

Abstract: An ultra-thin, self-assembling molecular film has ordered amphiphilic molecules that are oriented relative to one another in two directions. The improved method of the present application makes it possible to form the film in a continuous fashion with the ordered molecules arranged in oriented crystals.

Abstract translation: 超薄的自组装分子膜已经排列了在两个方向上相对于彼此定向的两亲分子。 本申请的改进方法使得可以以排列成定向晶体的有序分子连续形成膜。

公开(公告)号：US4848270A

公开(公告)日：1989-07-18

申请号：US126929

申请日：1987-11-30

Applicant: Shigeru Wakayama ,  Akira Miura

Inventor： Shigeru Wakayama ,  Akira Miura

IPC: B05C3/10 ,  B05C3/109 ,  B05C11/11 ,  B05D1/20

CPC classification number: B82Y30/00 ,  B05C11/11 ,  B05C3/10 ,  B05C3/109 ,  B05D1/206 ,  B82Y40/00

Abstract: An apparatus for forming thin organic films includes a plurality of water tanks each containing water. Monomolecular films of different amphiphatic organic molecules are developed on the surfaces of the liquid in water tanks, respectively. A work is dipped into and raised out of a desired water tank, by a driving device, in a direction substantially perpendicular to the liquid surface, so that the monomolecular film in the water tank is adhered on a work surface. The work is transported by a transporting device to a position above another water tank, through an area lying above the water tanks. Then, the work is dipped into and raised out of the other water tank, by the driving device, in a direction substantially perpendicular to the monomolecular film, so that another monomolecular film is adhered on the monomolecular film already formed on the work surface.

公开(公告)号：US4783348A

公开(公告)日：1988-11-08

申请号：US934426

申请日：1986-11-24

Applicant: Otto Albrecht ,  Meir Bartur ,  Vladimir Rodov

Inventor： Otto Albrecht ,  Meir Bartur ,  Vladimir Rodov

IPC: B01J19/00 ,  B05C3/00 ,  B05C3/02 ,  B05C3/12 ,  B05D1/18 ,  B05D1/20 ,  B05D1/36 ,  B05D7/00 ,  C08J5/18 ,  H01L21/312

CPC classification number: B82Y30/00 ,  B05C3/02 ,  B05D1/202 ,  B05D1/206 ,  B82Y40/00

Abstract: Disclosed is a method and apparatus for continuously forming and depositing a layer of monomolecular amphiphilic molecules on a substrate. The present invention includes an apparatus and method for transferring and compressing an uncompressed molecular layer from one liquid surface region in a tank to another adjacent liquid surface region by using non-moving or static mechanical components which do not come into direct contact with the monomolecular layer. The present invention includes a method and apparatus which permit the continuous and simultaneous draining and replenishing of the liquid in the tank while maintaining the liquid surface level constant. The continuous replacement of the liquid in the tank with clean liquid reduces the level of contamination of the liquid in the tank. In addition, the level, as well as the type of contamination of the liquid, does not vary significantly with time. This aspect of the present invention reduces the variation in the quality and characteristics of the monolayers that are produced in the tank and are deposited onto the substrate. Also by reducing the need to replace the liquid in the tank periodically, the present invention increases the efficiency of the process.

公开(公告)号：US4674436A

公开(公告)日：1987-06-23

申请号：US723923

申请日：1985-04-16

Applicant: Toshihiko Miyazaki ,  Etsuko Sugawa ,  Yoshinori Tomida ,  Hirohide Munakata ,  Yukuo Nishimura ,  Ken Eguchi

Inventor： Toshihiko Miyazaki ,  Etsuko Sugawa ,  Yoshinori Tomida ,  Hirohide Munakata ,  Yukuo Nishimura ,  Ken Eguchi

IPC: B05C3/02 ,  B05C3/10 ,  B05D1/20

CPC classification number: B82Y30/00 ,  B05C3/02 ,  B05C3/10 ,  B05D1/206 ,  B82Y40/00

Abstract: An apparatus for forming a monomolecular film or a monomolecular built-up film on a substrate, which comprises a tank, a frame for dividing a liquid surface in the tank and a support for moving the substrate horizontally in the liquid without disordering the liquid surface within the frame which contains the film.

Abstract translation: 一种用于在基板上形成单分子膜或单分子组合膜的装置，其包括罐，用于分割罐中的液体表面的框架和用于在液体中水平移动基板的支撑件，而不使液体表面无序化 包含电影的框架。

公开(公告)号：US4599969A

公开(公告)日：1986-07-15

申请号：US677012

申请日：1984-11-30

Applicant: Andre Barraud ,  Jean Lelcuf

Inventor： Andre Barraud ,  Jean Lelcuf

IPC: B05C9/00 ,  B05C3/02 ,  B05C3/09 ,  B05C3/10 ,  B05C11/10 ,  B05C11/11 ,  B05D1/20 ,  H01L21/368 ,  B05C3/00 ,  B05C11/00 ,  B05C19/02

CPC classification number: B82Y30/00 ,  B05C11/11 ,  B05C3/02 ,  B05C3/09 ,  B05D1/206 ,  B82Y40/00

Abstract: Tank for depositing a monomolecular film. It comprises a tank having walls and a base and containing a liquid, a barrier defining two areas on the surface of the liquid, means for displacing the barrier on the surface of the liquid, at least one substrate and means for displacing the substrate. The level of the liquid is below the horizontal rim of the tank. The barrier has a break at each of its ends and rests on the edges of the tank. The break defines a narrower portion partly submerged in the liquid. Sealing means are provided between the faces of the narrower portion and the facing walls.

Abstract translation: 用于沉积单分子膜的罐。 它包括具有壁和基部并且容纳液体的槽，限定液体表面上的两个区域的阻挡层，用于移动液体表面上的阻挡层的装置，至少一个基板和用于移动基板的装置。 液体的液位低于罐的水平边缘。 屏障在其每个端部都有一个断裂，并搁置在水箱的边缘上。 断裂定义了部分浸没在液体中的较窄部分。 密封装置设置在较窄部分的表面和相对的壁之间。

公开(公告)号：US4224896A

公开(公告)日：1980-09-30

申请号：US874533

申请日：1978-02-02

Applicant: Andre Barraud ,  Roger Gras ,  Michel Vandevyver

Inventor： Andre Barraud ,  Roger Gras ,  Michel Vandevyver

IPC: B05D7/24 ,  B05C3/12 ,  B05D1/20 ,  C23C2/00

CPC classification number: B82Y30/00 ,  B05C3/125 ,  B05D1/206 ,  B82Y40/00

Abstract: The monomolecular layer is first formed from a solution of amphiphilic molecules by introduction of the solution on a liquid surface which is divided into at least two compartments by at least one rotatable and partly immersed horizontal member. The solvent is then removed and the horizontal member is driven in rotation so as to apply a predetermined pressure to said layer as this latter is transferred from one compartment to the next, the layer being finally deposited on a substrate.This a division of application Ser. No. 765,063, filed Feb. 2, 1977, now U.S. Pat. No. 4,093,757, issued June 6, 1978.

Abstract translation: 首先通过将溶液引入到通过至少一个可旋转和部分浸没的水平构件至少两个隔室的液体表面上，由两亲分子的溶液形成单分子层。 然后除去溶剂，水平构件被旋转驱动，以便对所述层施加预定的压力，因为后者从一个隔室转移到下一层，该层最后沉积在基底上。

公开(公告)号：US855474A

公开(公告)日：1907-06-04

申请号：US1906302424

申请日：1906-02-23

Applicant: NEWBERY JOHN W

Inventor： NEWBERY JOHN W

CPC classification number: B05D1/206 ,  B05C3/02

公开(公告)号：US629756A

公开(公告)日：1899-07-25

申请号：US1898692473

申请日：1898-10-03

Applicant: LORENZO L MERRIMAN ,  ALBERT E JESSURUN ,  WILLIAM R RUMMLER ,  DAVIS JOHN H

Inventor： DAVIS JOHN H

CPC classification number: B05D1/206 ,  B05C3/02