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    THERMOMECHANICAL IN-PLANE MICROACTUATOR
    41.
    发明申请
    THERMOMECHANICAL IN-PLANE MICROACTUATOR 审中-公开
    温度计平面微粉碎机

    公开(公告)号：WO01099098A3

    公开(公告)日：2002-07-04

    申请号：PCT/US2001/019399

    申请日：2001-06-18

    IPC: B81B3/00 ,  F03G7/06 ,  H01H1/00 ,  H01H61/00 ,  H02N10/00 ,  H02K11/00 ,  H01G7/00 ,  H01L41/04 ,  H01N47/48

    CPC classification number: H01H1/0036 ,  B81B3/0037 ,  B81B2201/031 ,  B81B2203/0109 ,  B81B2203/051 ,  F03G7/06 ,  H01H61/00 ,  H01H2061/006 ,  H02N10/00

    Abstract: A microactuator (10) providing an output force and displacement in response to an increase in thermal energy is disposed. The microactuator (10) may have a substantially straight expansion member (20, 22) with a first and a second end. The first end may be coupled to a base (12, 16) and a second end may be coupled to a shuttle (24). The expansion member is capable of elongating in a elongation direction. Elongation of the expansion member may urge the shuttle to translate in an output direction substantially different than the elongation direction. In certain embodiments, multiple expansion members are arrayed along one side of the shuttle to drive the shuttle against a surface. Alternatively, expansion members may be disposed on both sides of the shuttle to provide balanced output force. If desired, multiple microactuators may be linked together to multiply the output displacement and/or output force.

    Abstract translation: 设置提供输出力和响应于热能增加的位移的微致动器（10）。 微致动器（10）可以具有带有第一和第二端的基本直的膨胀构件（20,22）。 第一端可以联接到基座（12,16），并且第二端可以联接到梭子（24）。 膨胀构件能够在伸长方向上伸长。 膨胀构件的伸长可以促使梭在基本上不同于伸长方向的输出方向上平移。 在某些实施例中，多个膨胀构件沿梭子的一侧排列以驱动穿梭件抵靠表面。 或者，扩展构件可以设置在梭子的两侧以提供平衡的输出力。 如果需要，多个微致动器可以连接在一起以乘以输出位移和/或输出力。

    Micromechanical thermal actuator
    42.
    发明公开
    Micromechanical thermal actuator 审中-公开
    Mikromechanisches thermisches Antriebselement

    公开(公告)号：EP2168908A1

    公开(公告)日：2010-03-31

    申请号：EP08305626.7

    申请日：2008-09-30

    Applicant: Alcatel Lucent

    Inventor： Gasparyan, Arman ,  Simon, Maria Elina ,  Gates, John

    IPC: B81B3/00

    CPC classification number: B81B3/0024 ,  B81B2201/031 ,  B81B2203/056 ,  B81B2203/058 ,  H01H61/04 ,  H01H2061/008

    Abstract: The present invention provides a microelectromechanical element comprising a cold beam and at least a first beam pair comprising a first beam member and a second beam member, the beam pair being coupled to said cold beam by a free end tether and configured to elongate when heated to a greater temperature than a temperature of said cold beam thereby causing the assembly to deflect in a first direction determined by a movement plane. The first beam member and the second beam member of the beam pair are arranged to determine a beam plane such that the beam plane is at an angle α from the movement plane where α≠Kπ and K is an integer. Various embodiments further relate to microelectromechanical element capable of performing unidirectional in-plane deflection, unidirectional out-of-plane deflection and bi-directional inplane deflection, as well as a latching relay using a combination of a unidirectional out-of-plane element with a bi-directional in-plane element.

    Abstract translation: 本发明提供一种微电子机械元件，其包括冷光束和至少一个包括第一光束部件和第二光束部件的第一光束对，所述光束对通过自由端系绳耦合到所述冷光束，并且被配置为当被加热到 比所述冷光束的温度更高的温度，从而使组件在由移动平面确定的第一方向上偏转。 梁对的第一梁构件和第二梁构件布置成确定梁平面，使得梁平面处于与运动平面成±的角度，其中±‰K和K是整数。 各种实施例还涉及能够执行单向面内偏转，单向面外偏转和双向内平面偏转的微机电元件，以及使用单向外平面元件与 双向平面内元件。

    MEMS-BASED MICRO AND NANO GRIPPERS WITH TWO- AXIS FORCE SENSORS
    43.
    发明公开
    MEMS-BASED MICRO AND NANO GRIPPERS WITH TWO- AXIS FORCE SENSORS 有权
    微米和纳米抢MEMS基地，两个力传感器

    公开(公告)号：EP2038205A1

    公开(公告)日：2009-03-25

    申请号：EP07720006.1

    申请日：2007-06-21

    Applicant: Sun, Yu ,  Kim, Keekyoung

    Inventor： Sun, Yu ,  Kim, Keekyoung

    IPC: B81C1/00 ,  B81B3/00 ,  B82B3/00

    CPC classification number: B81C99/002 ,  B25J9/104 ,  B81B2201/0292 ,  B81B2201/031 ,  B81B2201/033

    Abstract: The present invention relates to a design and microfabrication method for microgrippers that are capable of grasping micro and nano objects of a large range of sizes and two-axis force sensing capabilities. Gripping motion is produced by one or more electrothermal actuators. Integrated force sensors along x and y directions enable the measurement of gripping forces as well as the forces applied at the end of microgripper arms along the normal direction, both with a resolution down to nanoNewton. The microfabrication method enables monolithic integration of the actuators and the force sensors.

    MULTI-DIRECTIONAL THERMAL ACTUATOR
    44.
    发明公开
    MULTI-DIRECTIONAL THERMAL ACTUATOR 审中-公开
    多方向热驱动器

    公开(公告)号：EP1412282A2

    公开(公告)日：2004-04-28

    申请号：EP02709404.4

    申请日：2002-02-07

    Applicant: 3M Innovative Properties Company

    Inventor： GOETZ, Douglas, P. ,  HAMERLY, Michael, E. ,  PENDERGRASS, Daniel, B., Jr. ,  SMITH, Robert, G. ,  THEISS, Silva, K. ,  WEAVER, Billy, L.

    IPC: B81B3/00

    CPC classification number: B81B3/0021 ,  B81B2201/031 ,  B81B2203/0307 ,  B81B2203/051 ,  B81B2203/053 ,  H01G5/18 ,  H01G5/40 ,  H01H2061/008

    Abstract: A micrometer sized multi-directional thermal actuator capable of repeatable and rapid displacement in a substantially horizontal direction, a substantially vertical direction, and/or a combination thereof. The multi-directional thermal actuator constructed on a surface of a substrate includes three or more beams each cantilevered from one or more anchors at a first end to extend generally parallel to the surface of the substrate. A member mechanically and electrically couples the distal ends of the beams. Application of current to a circuit comprising combinations of any two or more of the beams displaces the member in one of three or more non-parallel radial directions, respectively.

    Abstract translation: 微米尺寸的多向热致动器能够在基本上水平的方向，基本垂直的方向和/或它们的组合上可重复和快速移位。 构造在基板表面上的多向热致动器包括三根或更多根梁，每根梁在第一端处从一个或多个锚固件悬臂伸出，以大致平行于基板的表面延伸。 构件机械地和电耦合梁的远端。 将电流施加到包括任何两个或更多个梁的组合的电路的电路中分别使构件在三个或更多个非平行径向方向中的一个上移位。

    DUAL POSITION LINEAR DISPLACEMENT MICROMECHANISM
    45.
    发明公开
    DUAL POSITION LINEAR DISPLACEMENT MICROMECHANISM 审中-公开
    双工位LINEA OUT转向微观机制

    公开(公告)号：EP1325515A1

    公开(公告)日：2003-07-09

    申请号：EP01970905.4

    申请日：2001-09-12

    Applicant: Brigham Young University

    Inventor： HOWELL, Larry ,  LYON, Scott ,  WEIGHT, Brent ,  CLEMENTS, Deanne

    IPC: H01L21/306 ,  H01H3/00

    CPC classification number: B81B3/0008 ,  B81B3/0054 ,  B81B2201/031 ,  B81B2201/13 ,  B81B2203/051 ,  G02B6/3552 ,  G02B6/358 ,  H01H1/0036 ,  H01H2001/0042

    Abstract: An apparatus (1) that is capable of a first stable configuration and a second stable configuration is disclosed. The bistable mechanism (10) has a leg (30, 32) that is coupled on one end by a base member (22, 24) and on the other end by a shuttle (20). The leg (30, 32) stores potential energy as it is deflected. The potential energy stored in the leg (30, 32) has a maximum potential energy position with a low potential energy position on either side of the maximum. An apparatus and method are also disclosed for a latching mechanism (910) and the associated method. The latching mechanism (910) is comprised of a grasping member (932), a lock slider (928), and a detent slider (916). These three members (916, 928, 932) operate together to induce a locked configuration and an unlocked configuration by actuating the lock slider (928) in a single direction.

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