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    Apparatus and method for ozone production
    41.
    发明授权
    Apparatus and method for ozone production 失效
    用于臭氧生产的设备和方法

    公开(公告)号：US5004587A

    公开(公告)日：1991-04-02

    申请号：US475432

    申请日：1990-02-05

    Applicant: Ernest J. Tacchi

    Inventor： Ernest J. Tacchi

    IPC: C01B13/11

    CPC classification number: C01B13/11 ,  C01B2201/10 ,  C01B2201/22 ,  C01B2201/24 ,  C01B2201/32 ,  C01B2201/40 ,  C01B2201/74 ,  C01B2201/76

    Abstract: Disclosed herein is an apparatus and method for the production of ozone gas comprising: a parallel resonance circuit formed by a high voltage transformer and a companion flexible polymeric corona discharge chamber which encloses an electrode and serves as both a passageway and reservoir for oxygen bearing gas, and a fluid counter-electrode, all contained within an appropriate enclosure. Said corona discharge chamber possesses an electrical reactance which can be varied in order to match the electrical reactance of a companion high voltage transformer so that the components resonate, hereby maximizing the transfer of energy to the corona discharge gap. The dwell of corona discharge is further enhanced by an electrostatic potential incorporated across said tube wall (electret effect). Heat formed in said discharge gap (detrimental to ozone production) is advantageously transferred to said fluid counter-electrode which also serves as an electrolytic connection between said high voltage transformer and said corona discharge chamber. Within said chamber, relatively large volumes of oxygen may be exposed to the high field density, ozone producing, resonating discharges as consequence of its flexible and linear design. The apparatus and methods described herein permit and encourage the use of intermittent and cyclic application of resonating energy and therefore achieves an improved degree of electrical efficiency. The teachings of the present invention make practical the use of alternative sources of energy for the private and commercial generation of ozone gas.

    Abstract translation: 本文公开了一种用于生产臭氧气体的装置和方法，包括：由高压变压器和伴随的柔性聚合物电晕放电室形成的并联谐振电路，其包围电极并用作含氧气体的通道和储存器， 和流体对电极，均包含在适当的外壳内。 所述电晕放电室具有可以改变的电抗，以便匹配伴随的高压变压器的电抗，使得这些部件谐振，从而最大限度地将能量传递到电晕放电间隙。 电晕放电的驻留通过整个管壁（驻极体效应）并入的静电势进一步增强。 在所述放电间隙中形成的热量（对臭氧产生有害）有利地被传送到所述流体对电极，该电极也用作所述高压变压器和所述电晕放电室之间的电解连接。 在所述室内，由于其柔性和线性设计，相对较大体积的氧可能暴露于高场密度，产生臭氧，谐振放电。 本文描述的装置和方法允许并鼓励使用间歇和周期性地施加谐振能量，因此实现了提高的电效率。 本发明的教导使得可替代的能量源用于私人和商业生成臭氧气体。

    Ozone generating tube
    42.
    发明授权
    Ozone generating tube 失效
    臭氧发生管

    公开(公告)号：US4963331A

    公开(公告)日：1990-10-16

    申请号：US485175

    申请日：1990-02-26

    Applicant: Kenneth W. Mouw

    Inventor： Kenneth W. Mouw

    IPC: C01B13/11

    CPC classification number: C01B13/11 ,  C01B2201/14 ,  C01B2201/22 ,  C01B2201/24 ,  C01B2201/32

    Abstract: A sealed glass tube having an electrical conductor therein arranged when combined with a high voltage and an encircling perforated metal member on the tube to produce ozone. The tube has an electrically conducting cap fitted on and integrally secured to one end thereof, and an externally threaded adapter is mounted on the cap for quick attachment to and detachment from an ozone generator manifold. The conductor has a projecting end secured to an outer end wall of the cap, and such wall in turn has a lug attached thereto providing quick attachment to a source of high voltage.

    Abstract translation: 一个密封的玻璃管，其内部布置有电导体，与管上的高电压和环绕穿孔的金属构件组合以产生臭氧。 该管具有安装在其一端并一体地固定到其一端的导电帽，并且外螺纹适配器安装在帽上，用于快速附接到臭氧发生器歧管和从臭氧发生器歧管脱离。 导体具有固定到盖的外端壁的突出端，并且这样的壁依次具有连接到其上的凸耳，从而提供与高电压源的快速连接。

    Plasma generator
    43.
    发明授权
    Plasma generator 失效
    等离子发生器

    公开(公告)号：US4737885A

    公开(公告)日：1988-04-12

    申请号：US821919

    申请日：1986-01-21

    Applicant: Kensuke Akutsu

    Inventor： Kensuke Akutsu

    IPC: B01J19/08 ,  C01B13/11 ,  H05H1/48 ,  H05H1/24

    CPC classification number: B01J19/088 ,  C01B13/11 ,  H05H1/48 ,  C01B2201/22 ,  C01B2201/24 ,  C01B2201/32 ,  C01B2201/34 ,  Y10S422/907

    Abstract: A plasma generator including an excitation electrode and an opposite electrode confronting the excitation electrode such that plasma is generated upon impression of a high voltage between the excitation electrode and the opposite electrode. The plasma generator further includes granular material which is at least partially composed of dielectric grains and is provided between the excitation electrode and the opposite electrode.

    Abstract translation: 一种等离子体发生器，其包括激励电极和面对激励电极的相对电极，使得在激励电极和相对电极之间的高电压压印时产生等离子体。 等离子体发生器还包括至少部分地由电介质晶粒组成并且设置在激励电极和相对电极之间的颗粒材料。

    Ozone generator
    44.
    发明授权
    Ozone generator 失效
    臭氧发生器

    公开(公告)号：US4159971A

    公开(公告)日：1979-07-03

    申请号：US764219

    申请日：1977-01-31

    Applicant: Arthur Gneupel

    Inventor： Arthur Gneupel

    IPC: C01B13/11 ,  H01T23/00

    CPC classification number: C01B13/11 ,  H01T23/00 ,  C01B2201/14 ,  C01B2201/22 ,  C01B2201/24 ,  C01B2201/32 ,  C01B2201/34

    Abstract: A substantially tubular-shaped ozone generator embodying an inner electrode, a coaxial outer electrode surrounding the inner electrode and a tube member formed of dielectric material arranged between the inner electrode and the outer electrode. Within the tube member formed of dielectric material there is arranged a substantially cylindrical core provided at its outer surface with one or a number of substantially helically-shaped grooves extending in the axial direction of the core and forming a throughpass channel for the medium to be ozonized and the ozone which is generated.

    Abstract translation: 一个体积为管状的臭氧发生器，其包括内部电极，围绕内部电极的同轴外部电极和由内部电极和外部电极之间布置的电介质材料形成的管件。 在由电介质材料形成的管构件中，布置有基本上圆柱形的芯，其在其外表面处设置有沿芯的轴向方向延伸的一个或多个基本上为螺旋状的凹槽，并形成用于介质被臭化的通道 和产生的臭氧。

    Ozone generating apparatus
    45.
    发明授权
    Ozone generating apparatus 失效
    臭氧发生装置

    公开(公告)号：US4025441A

    公开(公告)日：1977-05-24

    申请号：US603655

    申请日：1975-08-11

    Applicant: Norikazu Tabata ,  Shigenori Yagi ,  Takanori Ueno

    Inventor： Norikazu Tabata ,  Shigenori Yagi ,  Takanori Ueno

    IPC: C01B13/11

    CPC classification number: C01B13/11 ,  C01B2201/24 ,  C01B2201/76

    Abstract: An ozone generating apparatus is disclosed which is quite compact and has a high yield of ozone and which prevents an abnormal rise of temperature in a discharge gap by recycling a liquid coolant having low electric conductivity through an inner part of a high voltage electrode tube of a silent discharge ozonizer to cool the electrode tube.

    Abstract translation: 公开了一种臭氧发生装置，该装置相当紧凑，臭氧产生量高，并且通过将具有低导电性的液体冷却剂再循环到高压电极管的内部，防止放电间隙中的温度异常升高 静音放电臭氧发生器冷却电极管。

    オゾン発生装置、及び、オゾン発生方法
    49.
    发明申请
    オゾン発生装置、及び、オゾン発生方法 审中-公开
    臭氧发生器和臭氧发生方法

    公开(公告)号：WO2014073686A1

    公开(公告)日：2014-05-15

    申请号：PCT/JP2013/080469

    申请日：2013-11-11

    Applicant: 株式会社和廣武

    Inventor： 楠原　昌樹

    IPC: C01B13/11 ,  H01L21/3065 ,  H01T23/00

    CPC classification number: C01B13/115 ,  C01B13/11 ,  C01B2201/12 ,  C01B2201/22 ,  C01B2201/24 ,  C23C16/345 ,  C23C16/505 ,  C23C16/515 ,  C23C16/54 ,  C25B1/13

    Abstract: 　アッシングやプラズマクリーニングに用いられるオゾンの発生には、従来、減圧チャンバーにおけるプラズマ発生が用いられていた。しかし、減圧プロセスは、設備コストやプロセスコストが高いため、オゾン発生のコストを低減するのが困難であった。　誘電体部材を介して電界又は磁界を印加しプラズマを発生させるプラズマヘッド単位部材を複数並列に並べたプラズマヘッドにより、誘電体バリア放電による大気圧プラズマＣＶＤでオゾンの発生を行うことにした。誘電体放電により大気圧でも安定したグロー放電プラズマを形成することができ、大気圧でのオゾン発生が可能になり、例えば、低コストの半導体装置の製造が可能になった。

    Abstract translation: 过去，减压室中的等离子体产生已被用于产生用于灰化和等离子体清洗的臭氧。 然而，由于高的设备成本和工艺成本，减压过程使得难以降低臭氧发生成本。 本发明被构造成使得包括多个等离子体头单元构件的等离子体头被用于通过等离子体化学气相沉积（CVD）产生臭氧，其通过电介质构件施加电场或磁场以产生等离子体， 在大气压下，通过电介质阻挡放电。 即使在大气压下也可以通过介电放电形成稳定的辉光放电等离子体，能够在大气压下产生臭氧，例如能够制造低成本的半导体器件。

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