公开(公告)号：US07176048B1

公开(公告)日：2007-02-13

申请号：US10905036

申请日：2004-12-12

Applicant: David W. Burns

Inventor： David W. Burns

IPC: H01L21/00

CPC classification number: G01L9/002 ,  G01L1/103 ,  G01P15/093 ,  G01P15/097

Abstract: A process to form a laterally offset photodiode for an optically coupled resonator includes implanting a semiconductor substrate to form the laterally offset photodiode adjacent to the resonator. The resonator masks the implanting underneath the resonator when the semiconductor substrate is implanted. Also disclosed is an optically coupled resonator, a process for fabricating an optically coupled resonator, and a device including an optically coupled resonator having a laterally offset photodiode.

Abstract translation: 形成用于光耦合谐振器的横向偏移光电二极管的工艺包括：注入半导体衬底以形成与谐振器相邻的侧向偏移光电二极管。 当植入半导体衬底时，谐振器掩盖在谐振器下方的注入。 还公开了光耦合谐振器，用于制造光耦合谐振器的工艺，以及包括具有侧向偏移光电二极管的光耦合谐振器的器件。

公开(公告)号：US6031944A

公开(公告)日：2000-02-29

申请号：US999165

申请日：1997-12-30

Applicant: Daniel W. Youngner

Inventor： Daniel W. Youngner

IPC: B81B3/00 ,  G01L1/10 ,  G01L1/18 ,  G01L9/00 ,  G01P15/097 ,  G01P15/10 ,  G02B6/00

CPC classification number: G01P15/097 ,  G01L1/103 ,  G01L1/186 ,  G01L9/0011 ,  G01L9/002

Abstract: A very high temperature microbeam sensor of a resonant integrated microstructure having an electrostatic beam driver and an optical fiber pick-up for sensed light from the beam. The high temperature sensor has no components that are vulnerable to temperatures up to 600 degrees C. Associated components for detection, processing and driving are remote from the sensor environment. By using different materials in the beam assembly, such as tungsten for the beam, and sapphire for the substrate and the shell, the sensor can withstand temperatures up to 1000 degrees C. Also, optical fiber may be used for long distance connections between processing electronics and the driver in the sensing device, by locating a photo detector just outside the very or ultra high temperature sensing environment, and then using optical fiber for sending long distance signals from the processor to the driver photo detector, for eliminating electrical signal-to-noise problems.

Abstract translation: 具有静电束驱动器和用于来自光束的感测光的光纤拾取器的谐振集成微结构的非常高温的微束传感器。 高温传感器没有易受温度高达600摄氏度影响的组件。用于检测，处理和驱动的相关组件远离传感器环境。 通过在梁组件中使用不同的材料，例如用于梁的钨，以及用于衬底和壳的蓝宝石，传感器可以承受高达1000摄氏度的温度。此外，光纤可用于处理电子器件之间的长距离连接 以及感测装置中的驱动器，通过将光电检测器定位在非常或超高温感测环境之外，然后使用光纤将长距离信号从处理器发送到驱动器光电检测器，以消除电信号 - 噪音问题。

公开(公告)号：US5338929A

公开(公告)日：1994-08-16

申请号：US24995

申请日：1993-03-02

Applicant: Bindert S. Douma ,  Peter Eigenraam

Inventor： Bindert S. Douma ,  Peter Eigenraam

IPC: G01L1/10 ,  G01L9/00

CPC classification number: G01L9/002 ,  G01L1/103

Abstract: In a method for monitoring strain variations of a strain responsive element of a micromachined sensor device while subjected to outside parameter conditions, at least two oscillation resonance modes of said element are activated and interrogated optically. Thereby correspondingly at least two resonance frequencies are obtained. From parameter/frequency characteristics of said device correspondingly at least two parameter values are derived.

Abstract translation: 在用于监测微机械传感器装置的应变响应元件的受到外部参数条件的应变变化的方法中，所述元件的至少两个振荡谐振模式被激活并被光学询问。 从而相应地获得至少两个谐振频率。 从所述装置的参数/频率特性相应地导出至少两个参数值。

公开(公告)号：US12055453B2

公开(公告)日：2024-08-06

申请号：US17930024

申请日：2022-09-06

Applicant: KABUSHIKI KAISHA TOSHIBA ,  Toshiba Energy Systems & Solutions Corporation

Inventor： Jun Mitani ,  Takero Mukai ,  Takanobu Kojima ,  Masahiko Nakazono

IPC: G01L23/08 ,  G01L1/02 ,  G01L1/10 ,  G01L1/16 ,  G01L1/25

CPC classification number: G01L23/08 ,  G01L1/02 ,  G01L1/103 ,  G01L1/106 ,  G01L1/162 ,  G01L1/165 ,  G01L1/167 ,  G01L1/255

Abstract: A stress estimation method for a machine structure according to an embodiment is provided with a calculation step of calculating a relationship between the stress generated at the evaluation target position and a physical quantity including a sound pressure or vibration generated at a detection position different from the evaluation target position during vibration of the machine structure. The stress estimation method for a machine structure is provided with a detection step of detecting the physical quantity generated at the detection position during operation of the machine structure. The stress estimation method for a machine structure is provided with an estimation step of estimating the stress generated at the evaluation target position during operation of the machine structure on the basis of the relationship calculated in the calculation step and the physical quantity detected in the detection step.

公开(公告)号：US11906374B2

公开(公告)日：2024-02-20

申请号：US17015302

申请日：2019-02-06

Applicant: YAMAHA Corporation

Inventor： Tomoya Miyata

IPC: G01L1/16 ,  G01H11/08 ,  G01L1/10

CPC classification number: G01L1/167 ,  G01H11/08 ,  G01L1/103

Abstract: Provided is a measurement method including measuring, by using a piezoelectric sheet sensor in contact with a measurement object, vibration transmitted from the measurement object to the piezoelectric sheet sensor and measuring pressing force between the measurement object and the piezoelectric sheet sensor.

公开(公告)号：US20190234849A1

公开(公告)日：2019-08-01

申请号：US16242005

申请日：2019-01-08

Applicant: SHIMADZU CORPORATION

Inventor： Tohru MATSUURA

IPC: G01N3/62 ,  G01L1/10 ,  G01N3/30

CPC classification number: G01N3/62 ,  G01L1/103 ,  G01N3/08 ,  G01N3/30 ,  G01N2203/0003 ,  G01N2203/001 ,  G01N2203/0012 ,  G01N2203/0017 ,  G01N2203/021 ,  G01N2203/0218 ,  G01N2203/0252 ,  G01N2203/0268

Abstract: An amplitude detecting method and a material tester are provided. As functional blocks of a program that is installed in a personal computer and is stored in a memory, a measurement noise eliminating part that eliminates measurement noise, a vibration noise eliminating part that eliminates vibration noise assumed to be caused by an inertial force according to a natural vibration according to reach of an impact of breakage or destruction of a test piece at the entire tester, an amplitude detecting part that detects the amplitude of a natural vibration superimposed in the data period used for evaluating material characteristics, and a display control part that controls display of an amplitude value of the natural vibration and a test result on the display device are included.

公开(公告)号：US20180246006A1

公开(公告)日：2018-08-30

申请号：US15904376

申请日：2018-02-25

Applicant: Pile Dynamics, Inc.

Inventor： Garland E. Likins, JR. ,  George R. Piscsalko ,  Dean A. Cotton ,  Brent Robinson ,  Frank Rausche ,  Richard E. Berris, JR.

IPC: G01M11/08 ,  G01L1/22 ,  G01L1/10 ,  G01B11/16 ,  G06T7/246 ,  G01D5/347

CPC classification number: G01M11/081 ,  E02D5/22 ,  E02D13/005 ,  G01B11/16 ,  G01D5/34707 ,  G01L1/103 ,  G01L1/225 ,  G01M5/0058 ,  G06T7/248 ,  G06T7/254

Abstract: A non-contact strain and/or displacement measurement system for use with structural objects having an optical device, a data store and an image arrangement that is fixed relative to the structural object to be tested, the optical device including an image receiving device for receiving visual images and the data store being configured to record the received visual images, the image receiving device being spaced from the image arrangement by an optical spacing such that the image receiving device has a visual range that includes a portion of the structural object and the image arrangement being within the portion, the image arrangement having at least one image element wherein movement of the at least one image element during a measurement period provides image data to calculate structural object strain and/or structural object displacement.

公开(公告)号：US20130135620A1

公开(公告)日：2013-05-30

申请号：US13307427

申请日：2011-11-30

Applicant: Wilhelmus A. De Groot ,  Daniel Felnhofer

Inventor： Wilhelmus A. De Groot ,  Daniel Felnhofer

IPC: G01N21/55

CPC classification number: G01L1/103 ,  G01D5/28 ,  G01K11/26 ,  G01L5/0047 ,  G01L9/0011 ,  G01L9/002 ,  G01M99/005 ,  G02B26/001 ,  G09G3/006 ,  G09G3/3466

Abstract: This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for testing an electromechanical systems (EMS) device. In one aspect, a laser is directed at a driven EMS device, and the reflected light pattern is analyzed to provide information regarding the characteristics of the driven EMS device. In some aspects, the reflected light pattern is analyzed to determine a resonant frequency of the EMS device or the damping forces acting on the EMS device. The resonant frequency can then be used to determine stresses within the EMS device, or pressure or temperature within a device package encapsulating the EMS device.

Abstract translation: 本公开提供了用于测试机电系统（EMS）设备的系统，方法和装置，包括在计算机存储介质上编码的计算机程序。 在一个方面，激光被引导到被驱动的EMS装置，并且分析反射光图案以提供关于所驱动的EMS装置的特性的信息。 在一些方面，分析反射光图案以确定EMS装置的谐振频率或作用在EMS装置上的阻尼力。 然后谐振频率可用于确定EMS设备内的应力，或者封装EMS设备的设备封装内的压力或温度。

公开(公告)号：US06575035B2

公开(公告)日：2003-06-10

申请号：US09813030

申请日：2001-03-21

Applicant: Yoshihiko Suzuki

Inventor： Yoshihiko Suzuki

IPC: G01N2904

CPC classification number: G01L1/103 ,  G01L5/0047

Abstract: An apparatus for measuring internal stress of a membrane formed in a reticle, including a temperature adjustment device configured to change a temperature of the membrane from a first temperature to a second temperature; a resonance frequency finding device configured to find a first resonance frequency of the membrane at the first temperature and a second resonance frequency of the membrane at the second temperature; and a stress calculating device configured to calculate the internal stress based on the first and second resonance frequencies.

公开(公告)号：US5563348A

公开(公告)日：1996-10-08

申请号：US305189

申请日：1994-09-13

Applicant: Hideyo Suzuki ,  Isamu Yokoi ,  Qing Feng

Inventor： Hideyo Suzuki ,  Isamu Yokoi ,  Qing Feng

IPC: G01L1/00 ,  G01L1/10 ,  G08C23/04 ,  G01B11/00

CPC classification number: G01L1/103

Abstract: In a stress measuring, system sensor driving power and a signal sensed by a sensor are transmitted and received in the form of a light pulse signal to thereby improve a noise resistant property as well as a measuring accuracy and reliability. The stress measuring system includes a sensor head disposed at a sensing location and a measuring device disposed at a location remote from the sensing location. The sensor head includes a sensor having a sensing section for sensing a change in stress as a change in the natural frequency of an oscillation string, an output section for outputting a light pulse sensing signal corresponding to the natural frequency sensed by the sensing section and a driving section for causing oscillation at the natural frequency of the oscillation system of the sensing section in response to a driving light pulse signal. The measuring device includes a measuring section for measuring the stress based on the frequency of the light pulse sensing signal and a creating section for creating the driving light pulse signal having the frequency following a change in the natural frequency based on the light pulse sensing signal. The sensor head is connected to the measuring device through optical fibers for transmitting at least the light pulse sensing signal and the driving light pulse signal.

Abstract translation: 在应力测量中，以光脉冲信号的形式发送和接收由传感器感测的系统传感器驱动功率和信号，从而提高抗噪声性能以及测量精度和可靠性。 应力测量系统包括设置在感测位置处的传感器头和设置在远离检测位置的位置处的测量装置。 传感器头包括传感器，传感器具有感测部分，用于感测作为振荡线的固有频率的变化的应力变化;输出部分，用于输出对应于由感测部分感测的固有频率的光脉冲感测信号;以及 驱动部分，用于响应于驱动光脉冲信号在感测部分的振荡系统的固有频率处产生振荡。 测量装置包括：测量部分，用于基于光脉冲感测信号的频率测量应力;以及创建部分，用于基于光脉冲感测信号产生具有跟随固有频率变化的频率的驱动光脉冲信号。 传感器头通过光纤连接到测量装置，用于至少传输光脉冲感测信号和驱动光脉冲信号。