MULTIPLE REFLECTION TYPE CELL AND ANALYZER
    41.
    发明申请

    公开(公告)号:US20170284929A1

    公开(公告)日:2017-10-05

    申请号:US15477329

    申请日:2017-04-03

    Applicant: HORIBA, Ltd.

    Abstract: This invention is a multiple reflection type cell that makes it possible to reduce a dead space resulting from a position adjusting mechanism and to adjust the light to a desired optical path length without complicating a structure. The multiple reflection type cell comprises a cell body where a cell chamber is formed, two or more reflecting members that are mounted on the cell body and whose reflecting surfaces locate in the cell chamber, and a position adjusting mechanism that adjusts a position of the reflecting member relative to the cell body. The cell body has a mounting part that communicates the cell chamber and the outside and on which the reflecting members are mounted. A seal member that seals a gap between the cell chamber and the outside of the cell body is arranged between the reflecting member mounted on the mounting part and the cell body so that the gap between the cell chamber and the outsider of the cell body is sealed by the seal member.

    FLUORESCENCE ILLUMINATION ASSEMBLY FOR AN IMAGING APPARATUS AND METHOD
    44.
    发明申请
    FLUORESCENCE ILLUMINATION ASSEMBLY FOR AN IMAGING APPARATUS AND METHOD 有权
    用于成像装置和方法的荧光照明装置

    公开(公告)号:US20070127118A1

    公开(公告)日:2007-06-07

    申请号:US11670376

    申请日:2007-02-01

    Abstract: A macroscopic fluorescence illumination assembly is provided for use with an imaging apparatus with a light-tight imaging compartment. The imaging apparatus includes an interior wall defining a view port extending into the imaging compartment to enable viewing of a specimen contained therein. The illumination assembly includes a specimen support surface facing toward the view port of the imaging apparatus. The support surface defines a window portion that enables the passage of light there through. The window portion is selectively sized and dimensioned such that the specimen, when supported atop the support surface, can be positioned and seated over the window portion in a manner forming a light-tight seal substantially there between.

    Abstract translation: 提供了一种宏观荧光照明组件,用于与具有不透光成像室的成像装置一起使用。 该成像设备包括限定了一个视图端口的内壁,该视图端口延伸到成像室中以使得能够观察其中容纳的样本。 照明组件包括面向成像设备的视口的样本支撑表面。 支撑表面限定了能够使光通过的窗口部分。 窗口部分被选择性地定尺寸和尺寸使得当被支撑在支撑表面上方时,样本可以以基本上在其之间形成不透光密封的方式被定位和安置在窗口部分上。

    Optical inspection equipment for semiconductor wafers with precleaning
    45.
    发明申请
    Optical inspection equipment for semiconductor wafers with precleaning 有权
    具有预清洗功能的半导体晶片的光学检测设备

    公开(公告)号:US20050231719A1

    公开(公告)日:2005-10-20

    申请号:US11151218

    申请日:2005-06-13

    Abstract: A method for improving the measurement of semiconductor wafers is disclosed. In the past, the repeatability of measurements was adversely affected due to the unpredictable growth of a layer of contamination over the intentionally deposited dielectric layers. Repeatability can be enhanced by removing this contamination layer prior to measurement. This contamination layer can be effectively removed in a non-destructive fashion by subjecting the wafer to a cleaning step. In one embodiment, the cleaning is performed by exposing the wafer to microwave radiation. Alternatively, the wafer can be cleaned with a radiant heat source. These two cleaning modalities can be used alone or in combination with each other or in combination with other cleaning modalities. The cleaning step may be carried out in air, an inert atmosphere or a vacuum. Once the cleaning has been performed, the wafer can be measured using any number of known optical measurement systems.

    Abstract translation: 公开了一种改善半导体晶片测量的方法。 在过去,由于在有意沉积的介电层上的污染层的不可预测的增长,测量的重复性受到不利影响。 在测量之前,通过去除这个污染层可以提高重复性。 通过使晶片进行清洁步骤,可以非破坏性地有效地去除该污染层。 在一个实施例中,通过将晶片暴露于微波辐射来进行清洁。 或者,可以用辐射热源清洁晶片。 这两种清洁方式可以单独使用或彼此组合使用或与其他清洁模式组合使用。 清洁步骤可以在空气,惰性气氛或真空中进行。 一旦执行了清洁,就可以使用任何数量的已知光学测量系统测量晶片。

    System and process for detecting leaks in sealed articles
    46.
    发明授权
    System and process for detecting leaks in sealed articles 有权
    用于检测密封物品泄漏的系统和过程

    公开(公告)号:US06843107B2

    公开(公告)日:2005-01-18

    申请号:US10641545

    申请日:2003-08-15

    CPC classification number: G01M3/363 G01N2201/0227 G03H1/0443

    Abstract: A system and method for leak testing a plurality of hermetic electronic packages of the type that have an internal chamber that is isolated from ambient conditions by a seal structure is advantageously designed to be able to calculate the leak rate of each individual device in a manner that is independent of structural manufacturing variances that typically exist within a sampling of such devices. The method preferably involves positioning a plurality of the hermetic electronic packages within a test area, and then stimulating the hermetic electronic packages with a modulated input of energy, such as by varying the ambient pressure about the devices. A property such as the physical position of one portion of a lid of each of the hermetic electronic packages is then sensed. The sensed property is one that is known to change as a first function of the modulated input of energy and also as a second function of pressure conditions within the hermetically sealed internal chamber. The first and second functions are linearly independent of each other. By comparing the stimulation of the devices to the sensed property and by discriminating using the two known functions a leak rate is determined for each individual device that is substantially independent of variances, such as differences in lid thickness that may exist between the different devices. Accordingly, an accurate determination of leak rate may be made with a minimum of calibration.

    Abstract translation: 用于对具有通过密封结构与环境条件隔离的内部室的多个密封电子封装进行泄漏测试的系统和方法有利地设计成能够以下述方式计算每个单独设备的泄漏率: 独立于通常存在于这种设备的采样内的结构制造差异。 该方法优选地包括将多个密封电子封装定位在测试区域内,然后用调制的能量输入来刺激密封电子封装,例如通过改变围绕器件的环境压力。 然后感测诸如每个密封电子包装件的盖子的一部分的物理位置的属性。 感测的特性是已知的作为调制的能量输入的第一函数而变化的属性,并且还作为密封的内部腔室内的压力条件的第二函数。 第一和第二功能彼此线性独立。 通过将装置的刺激与感测到的属性进行比较,并且通过使用两个已知功能进行区分,确定每个单独装置的泄漏率基本上不依赖于方差,例如可能存在于不同装置之间的盖厚度的差异。 因此,可以用最小的校准来进行泄漏率的精确确定。

    Light-interference fluid characteristics analyzer and frame for such analyzer
    47.
    发明申请
    Light-interference fluid characteristics analyzer and frame for such analyzer 审中-公开
    光干扰流体特性分析仪和分析仪框架

    公开(公告)号:US20040057874A1

    公开(公告)日:2004-03-25

    申请号:US10253415

    申请日:2002-09-25

    Inventor: Tomoo Ishiguro

    CPC classification number: G01N21/45 G01N21/031 G01N2201/0227

    Abstract: A frame is formed by forming in a base having at least three through-holes 2, 3 and 4 in the same cross section cavities 6 and 7 crossing said through-holes 2 to 5 at a given distance. A cell is formed by sealing an area sandwiched by said two cavities 6 and 7 with translucent sheets 8 and 9. Interference fringes are generated by sending two beams from a light-source element 19 into the cell through as parallel plane mirror 14 and reflecting the beams from the cell to a single spot on the parallel plane mirror 14 through a prism 15.

    Abstract translation: 通过在具有至少三个通孔2,3和4的基座中形成框架,所述通孔2,3和4在相同的横截面空腔6和7中以给定距离与所述通孔2至5交叉。 通过用半透明片8和9密封由所述两个空腔6和7夹着的区域来形成电池。通过将来自光源元件19的两束光束通过作为平行平面镜14发射到电池中而产生干涉条纹, 通过棱镜15从单元到平行平面镜14上的单个光点的光束。

    System and process for detecting leaks in sealed articles
    48.
    发明申请
    System and process for detecting leaks in sealed articles 有权
    用于检测密封物品泄漏的系统和过程

    公开(公告)号:US20040057043A1

    公开(公告)日:2004-03-25

    申请号:US10641545

    申请日:2003-08-15

    CPC classification number: G01M3/363 G01N2201/0227 G03H1/0443

    Abstract: A system and method for leak testing a plurality of hermetic electronic devices of the type that have an internal chamber that is isolated from ambient conditions by a seal structure is advantageously designed to be able to calculate the leak rate of each individual device in a manner that is independent of structural manufacturing variances that typically exist within a sampling of such devices. The method preferably involves positioning a plurality of the hermetic electronic devices within a test area, and then stimulating the hermetic electronic devices with a modulated input of energy, such as by varying the ambient pressure about the devices. A property such as the physical position of one portion of a lid of each of the hermetic electronic devices is then sensed. The sensed property is one that is known to change as a first function of the modulated input of energy and also as a second function of pressure conditions within the hermetically sealed internal chamber. The first and second functions are linearly independent of each other. By comparing the stimulation of the devices to the sensed property and by discriminating using the two known functions a leak rate is determined for each individual device that is substantially independent of variances, such as differences in lid thickness that may exist between the different devices. Accordingly, an accurate determination of leak rate may be made with a minimum of calibration.

    Abstract translation: 用于泄漏测试多个具有通过密封结构与环境条件隔离的内部室的密封电子设备的系统和方法有利地设计成能够以下列方式计算每个单独设备的泄漏率: 独立于通常存在于这种设备的采样内的结构制造差异。 该方法优选地包括将多个密封电子设备定位在测试区域内,然后利用调制的能量输入来刺激密封电子设备,例如通过改变围绕设备的环境压力。 然后感测诸如每个密封电子设备的盖子的一部分的物理位置的属性。 感测的特性是已知的作为调制的能量输入的第一函数而变化的属性,并且还作为密封的内部腔室内的压力条件的第二函数。 第一和第二功能彼此线性独立。 通过将装置的刺激与感测到的属性进行比较,并且通过使用两个已知功能进行区分,确定每个单独装置的泄漏率基本上不依赖于方差,例如可能存在于不同装置之间的盖厚度的差异。 因此,可以用最小的校准来进行泄漏率的精确确定。

    Analytical method and apparatus for liquid sample using near infrared spectroscopy
    49.
    发明申请
    Analytical method and apparatus for liquid sample using near infrared spectroscopy 审中-公开
    使用近红外光谱的液体样品的分析方法和装置

    公开(公告)号:US20020084415A1

    公开(公告)日:2002-07-04

    申请号:US09810278

    申请日:2001-03-16

    Abstract: First, monochromatic near infrared light in a wavelength range of 700 nm-1100 nm from the slit of the near infrared apparatus 1 is applied to a reference ceramic plate through the optical fiber 7 to measure a transmitted light intensity of the ceramic plate which is a reference material for spectrum measurement. Next, in place of the ceramic plate, the test tube 4 containing a liquid sample of which the temperature has been adjusted at a predetermined temperature by a water bath and the like is inserted into the housing portion 5. The transmitted light intensity of the liquid sample is then measured using the same procedure as above. A so-called near infrared absorption spectrum in which absorbance has been plotted against wavelengths is displayed on the screen of the computer 2. Information about each object characteristic is extracted from the spectrum data using a calibration equation.

    Abstract translation: 首先,从近红外线装置1的狭缝在700nm〜1100nm的波长范围内的单色近红外光通过光纤7施加到基准陶瓷板,以测量陶瓷板的透射光强度,其为 用于光谱测量的参考材料。 接下来,代替陶瓷板,将含有通过水浴等将温度调节到预定温度的液体样品的试管4插入到壳体部5中。液体的透射光强度 然后使用与上述相同的程序测量样品。 在计算机2的屏幕上显示吸光度相对于波长绘制的所谓的近红外吸收光谱。使用校准方程从频谱数据中提取关于每个对象特征的信息。

    Multispectral imaging probe
    50.
    发明授权
    Multispectral imaging probe 失效
    多光谱成像探针

    公开(公告)号:US5929985A

    公开(公告)日:1999-07-27

    申请号:US820299

    申请日:1997-03-18

    Abstract: A multispectral imaging probe delivers a range of wavelengths of excitation light to a target and collects a range of expressed light wavelengths. The multispectral imaging probe is adapted for mobile use and use in confined spaces, and is sealed against the effects of hostile environments. The multispectral imaging probe comprises a housing that defines a sealed volume that is substantially sealed from the surrounding environment. A beam splitting device mounts within the sealed volume. Excitation light is directed to the beam splitting device, which directs the excitation light to a target. Expressed light from the target reaches the beam splitting device along a path coaxial with the path traveled by the excitation light from the beam splitting device to the target. The beam splitting device directs expressed light to a collection subsystem for delivery to a detector.

    Abstract translation: 多光谱成像探针将一系列激发光的波长传送到目标,并收集一系列表达的光波长。 多光谱成像探头适用于移动使用并在密闭空间中使用,并且被密封以抵抗敌对环境的影响。 多光谱成像探针包括限定与周围环境基本密封的密封体积的壳体。 分束装置安装在密封体积内。 激发光被引导到分束装置,其将激发光引导到目标。 来自目标的表示光沿着与由分束装置到目标的激发光行进的路径同轴的路径到达分束装置。 分束装置将表示的光引导到收集子系统以传送到检测器。

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