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    SIGNAL-TO-NOISE RATIO FOR PHOTOACOUSTIC GAS SENSORS
    42.
    发明公开
    SIGNAL-TO-NOISE RATIO FOR PHOTOACOUSTIC GAS SENSORS 审中-公开

    公开(公告)号：US20240060875A1

    公开(公告)日：2024-02-22

    申请号：US17890016

    申请日：2022-08-17

    Applicant: InvenSense, Inc.

    Inventor： Jeremy Parker ,  Nishit Goel ,  Stephen Bart

    IPC: G01N21/17 ,  B81B7/02

    CPC classification number: G01N21/1702 ,  B81B7/02 ,  G01N2021/1704 ,  G01N2201/1218 ,  B81B2203/0127

    Abstract: A bi-directional photoacoustic gas sensor includes a first photoacoustic cell, where an electromagnetic radiation source emits radiation to interact with an external gas and generate pressure waves that are detected by a MEMS diaphragm. A second photoacoustic cell has an interior volume and acoustic compliance that corresponds to the interior volume and acoustic compliance of the first photoacoustic cell. Processing circuitry within a substrate uses a first acoustic signal, received by the first photoacoustic cell, and a second acoustic signal, received by the second photoacoustic cell, to determine a bi-directional response of the gas sensor to remove noise and improve the sensor's signal-to-noise ratio.

    DIAMOND ATR ARTEFACT CORRECTION
    44.
    发明申请
    DIAMOND ATR ARTEFACT CORRECTION 有权
    钻石ATR ARTEFACT校正

    公开(公告)号：US20150177142A1

    公开(公告)日：2015-06-25

    申请号：US14420101

    申请日：2013-07-23

    Applicant: PerkinElmer Singapore PTE Ltd

    Inventor： Robert Alan Hoult

    IPC: G01N21/62 ,  G01J3/28

    CPC classification number: G01N21/62 ,  G01J3/28 ,  G01N21/274 ,  G01N21/552 ,  G01N2201/1218 ,  G01N2201/12784

    Abstract: A method of using a spectrometer to produce corrected diamond Attenuated Total Reflectance (ATR) spectral data includes acquiring, using the spectrometer, an initial set of ATR spectral data for a sample pressed into contact with a diamond ATR crystals; numerically matching, using the spectrometer, a pressure dependent diamond artefact reference spectrum to a corresponding pressure dependent diamond artefact in the initial set of ATR spectral data; and numerically subtracting out the numerically matched pressure dependent diamond artefact reference spectrum from the initial set of ATR spectral data to yield a corrected set of ATR spectral data for the sample for output by the spectrometer.

    Abstract translation: 使用光谱仪产生校正的菱形衰减全反射（ATR）光谱数据的方法包括采用光谱仪获取与菱形ATR晶体接触的样品的初始ATR光谱数据集; 使用光谱仪将压力依赖金刚石假象参考光谱数值匹配到初始ATR光谱数据集中相应的压力依赖金刚石伪影; 并从初始的ATR光谱数据集中数字地减去与数字匹配的压力相关金刚石伪像参考光谱，以产生用于由光谱仪输出的样品的校正的ATR光谱数据集。

    Sensor unit and measurement method
    45.
    发明授权
    Sensor unit and measurement method 有权
    传感器单元和测量方法

    公开(公告)号：US09016573B2

    公开(公告)日：2015-04-28

    申请号：US13471917

    申请日：2012-05-15

    Applicant: Achim Stangelmayer ,  Damian Andrzejewski

    Inventor： Achim Stangelmayer ,  Damian Andrzejewski

    IPC: G06K7/10 ,  G06T7/40

    CPC classification number: G06T7/40 ,  G01N21/274 ,  G01N21/78 ,  G01N2021/7786 ,  G01N2201/1211 ,  G01N2201/1218 ,  G01N2201/12746

    Abstract: A sensor unit is disclosed which includes a sensor and an information module. The sensor exhibits an optical behavior dependent on at least one variable of a sample. Sensor related information can be emitted by the information module as optical radiation. In embodiments the sensor related information includes calibration data for the sensor. The sensor related information may additionally include identification data for the sensor. In embodiments the information module measures at least one ambient parameter, and emits the measurement value in an optical signal. The measurement value is taken into account when determining at least one variable of a sample by means of the sensor unit. In embodiments the information module may also transmit status information of the sensor unit. Furthermore a method for determining a variable of a sample with a sensor unit and a measurement system is disclosed.

    Abstract translation: 公开了一种传感器单元，其包括传感器和信息模块。 传感器表现出取决于样品的至少一个变量的光学行为。 传感器相关信息可由信息模块作为光辐射发射。 在实施例中，传感器相关信息包括传感器的校准数据。 传感器相关信息可另外包括传感器的识别数据。 在实施例中，信息模块测量至少一个环境参数，并且在光信号中发射测量值。 当通过传感器单元确定样品的至少一个变量时，考虑测量值。 在实施例中，信息模块还可以传送传感器单元的状态信息。 此外，公开了一种用传感器单元和测量系统确定样品的变量的方法。

    METHOD FOR THE LASER SPECTROSCOPY OF GASES
    46.
    发明申请
    METHOD FOR THE LASER SPECTROSCOPY OF GASES 有权
    气体激光光谱法

    公开(公告)号：US20140340684A1

    公开(公告)日：2014-11-20

    申请号：US14279369

    申请日：2014-05-16

    Applicant: Sick AG

    Inventor： Julian EDLER ,  Thomas BEYER ,  Rolf DISCH

    IPC: G01N21/39

    CPC classification number: G01N21/39 ,  G01J3/433 ,  G01J3/4338 ,  G01N21/274 ,  G01N21/3504 ,  G01N21/3554 ,  G01N2021/399 ,  G01N2201/0691 ,  G01N2201/1211 ,  G01N2201/1215 ,  G01N2201/1218

    Abstract: A method of determining a concentration of a gas in a sample and/or the composition of a gas using a spectrometer comprises the transmitting of radiation whose wavelength substantially continuously runs through a wavelength range, wherein the continuous running through of the wavelength range is overlaid by a wavelength modulation; the measuring of an absorption signal from the absorption of the radiation by the gas as a function of the wavelength of the radiation; the converting of the absorption signal into a first and a second derivative signal; the deriving of a first measured gas concentration value from the first derivative signal and of a second measured gas concentration value from the second derivative signal; and the determining of the concentration and/or the composition of the gas from at least the first measured gas concentration value, wherein the wavelength modulation is adapted in response to a change of a state variable of the gas such that a ratio between the first measured gas concentration value and the second measured gas concentration value is kept substantially constant.

    Abstract translation: 使用光谱仪确定样品中气体浓度和/或气体组成的方法包括传输其波长基本上连续穿过波长范围的辐射，其中波长范围的连续穿过被覆盖在 波长调制; 通过气体吸收辐射的吸收信号作为辐射波长的函数的测量; 将吸收信号转换成第一和第二导数信号; 从所述一阶导数信号导出第一测量气体浓度值和从所述二阶导数信号得到第二测量气体浓度值; 以及从至少第一测量气体浓度值确定气体的浓度和/或组成，其中响应于气体的状态变量的变化而调整波长调制，使得第一测量的气体浓度值 气体浓度值和第二测量气体浓度值保持基本上恒定。

    Defect inspecting method and apparatus
    47.
    发明授权
    Defect inspecting method and apparatus 有权
    缺陷检查方法和装置

    公开(公告)号：US08134701B2

    公开(公告)日：2012-03-13

    申请号：US12774379

    申请日：2010-05-05

    Applicant: Shuichi Chikamatsu ,  Minori Noguchi ,  Kenji Aiko

    Inventor： Shuichi Chikamatsu ,  Minori Noguchi ,  Kenji Aiko

    IPC: G01N21/00

    CPC classification number: G01N21/9501 ,  G01N21/94 ,  G01N2021/8822 ,  G01N2201/1211 ,  G01N2201/1218

    Abstract: A defect inspecting apparatus of the invention solves a problem that in a defect inspecting apparatus, because of improving detection sensitivity of a microscopic defect by reducing a detection pixel size, a focal depth becomes shallow, a height of imaging is varied due to environmental change and the detection sensitivity of a defect becomes unstable. This apparatus comprises an XY stage, which carries a substrate to be inspected and scans in a predetermined direction, and a mechanism having a system of irradiating a defect on the inspected substrate at a slant and detecting the defect by a detection optical system disposed on the upper side, which corrects a height of imaging in real time for change in temperature and barometric pressure in order to keep the imaging in a best condition.

    Abstract translation: 本发明的缺陷检查装置解决了在缺陷检查装置中，由于通过减小检测像素尺寸来提高微观缺陷的检测灵敏度，焦点深度变浅，成像高度由于环境变化而变化， 缺陷的检测灵敏度变得不稳定。 该装置包括XY台，其承载要检查的基板并沿预定方向扫描;以及机构，其具有以倾斜方式照射被检查基板上的缺陷的系统，并且通过设置在所述检测光学系统上的检测光学系统检测所述缺陷 上部，其实时校正成像的高度以改变温度和大气压力，以便将成像保持在最佳状态。

    Pressure-invariant trace gas detection
    48.
    发明授权
    Pressure-invariant trace gas detection 有权
    压力不变痕量气体检测

    公开(公告)号：US07508521B2

    公开(公告)日：2009-03-24

    申请号：US11724665

    申请日：2007-03-14

    Applicant: Xiang Liu ,  Xin Zhou ,  Alfred Feitisch ,  Greg Sanger

    Inventor： Xiang Liu ,  Xin Zhou ,  Alfred Feitisch ,  Greg Sanger

    IPC: G01N21/00 ,  G01N7/00 ,  G01N9/00 ,  G01N19/00 ,  G01N25/00 ,  G01N27/00

    CPC classification number: G01N21/39 ,  G01J3/433 ,  G01N21/3504 ,  G01N2021/3513 ,  G01N2021/354 ,  G01N2021/399 ,  G01N2201/1218

    Abstract: A system includes a light source, a detector, at least one pressure sensor, and a control unit. The light source emits light at a wavelength substantially corresponding to an absorption line of a target gas. The detector is positioned to detect the intensity of light emitted from the light source that has passed through the target gas. The pressure sensor detects the pressure of the target gas. The control circuit is coupled to the detector and the light source to adjust the modulation amplitude of the light source based on the pressure detected by the at least one pressure sensor. Related systems, apparatus, methods, and/or articles are also described.

    Abstract translation: 系统包括光源，检测器，至少一个压力传感器和控制单元。 光源以基本对应于目标气体的吸收线的波长发射光。 检测器被定位成检测从已经通过目标气体的光源发射的光的强度。 压力传感器检测目标气体的压力。 控制电路耦合到检测器和光源，以基于由至少一个压力传感器检测到的压力来调节光源的调制幅度。 还描述了相关系统，装置，方法和/或制品。

    Defect inspecting apparatus
    49.
    发明申请
    Defect inspecting apparatus 失效
    缺陷检查装置

    公开(公告)号：US20070216896A1

    公开(公告)日：2007-09-20

    申请号：US11717651

    申请日：2007-03-14

    Applicant: Shuichi Chikamatsu ,  Minori Noguchi ,  Kenji Aiko

    Inventor： Shuichi Chikamatsu ,  Minori Noguchi ,  Kenji Aiko

    IPC: G01N21/88

    CPC classification number: G01N21/9501 ,  G01N21/94 ,  G01N2021/8822 ,  G01N2201/1211 ,  G01N2201/1218

    Abstract: A defect inspecting apparatus of the invention solves a problem that in a defect inspecting apparatus, because of improving detection sensitivity of a microscopic defect by reducing a detection pixel size, a focal depth becomes shallow, a height of imaging is varied due to environmental change and the detection sensitivity of a defect becomes unstable. This apparatus comprises an XY stage, which carries a substrate to be inspected and scans in a predetermined direction, and a mechanism having a system of irradiating a defect on the inspected substrate at a slant and detecting the defect by a detection optical system disposed on the upper side, which corrects a height of imaging in real time for change in temperature and barometric pressure in order to keep the imaging in a best condition.

    Abstract translation: 本发明的缺陷检查装置解决了在缺陷检查装置中，由于通过减小检测像素尺寸来提高微观缺陷的检测灵敏度，焦点深度变浅，成像高度由于环境变化而变化， 缺陷的检测灵敏度变得不稳定。 该装置包括XY台，其承载要检查的基板并沿预定方向扫描;以及机构，其具有以倾斜方式照射被检查基板上的缺陷的系统，并且通过设置在所述检测光学系统上的检测光学系统检测所述缺陷 上部，其实时校正成像的高度以改变温度和大气压力，以便将成像保持在最佳状态。

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