Abstract:
A substrate processing apparatus includes a holder that holds a substrate with a main surface of the substrate directed upwardly, the substrate having an at least partially circular outer periphery, a nozzle having a bottom portion in which a discharge port extending in one direction is formed, a mover that, above the substrate held by the holder, relatively moves at least one of the nozzle and the substrate with respect to another one in an intersecting direction that intersects with the one direction with a gap equal to or smaller than a predetermined distance provided between the bottom portion of the nozzle and the main surface of the substrate in order to cause a processing liquid to be discharged from the discharge port of the nozzle to the main surface of the substrate with use of capillary action, and a controller that controls the mover and relatively moves the nozzle and the substrate at a moving speed determined based on an outer peripheral shape of the substrate.
Abstract:
A lubricating system includes a port to provide access to a reservoir in a carriage base to allow lubricant to be injected into the reservoir and a number of channels molded into the carriage base to extract the lubricant from the reservoir and deliver the lubricant to locations where carriage bearings of the carriage base are in contact with a carriage rod of a printer to reduce friction.
Abstract:
A method for forming micron-sized or smaller drops of liquid, and the use of the method in fabricating micro electro mechanical and micro mechanical devices is disclosed. A micropipette is formed having an inside diameter no larger than the size of the drops to be formed. The micropipette is connected to a system capable of developing a positive and optionally negative pressure within the micropipette. The tip of the micropipette is placed in liquid. The liquid is drawn into the micropipette via capillary action or from the negative pressure developed by the system. The micropipette is then positioned to deliver liquid to an intended location on a surface. To deliver the liquid, a positive pressure is developed within the micropipette. The positive pressure forces a micron-sized or smaller drop of liquid out of the micropipette. The method can be used to form micron-sized or smaller drops of adhesive for fixing in place various structural members that form microdevices.
Abstract:
An improved release agent delivery apparatus is disclosed for use in laser printers, plain paper copiers, facsimile machines, and similar printing apparatus. The delivery apparatus comprises an absorbent textile core filled with release agent, a permeable membrane surrounding the textile core to form a sheathed wick member, and a mounting sleeve adapted to attach the sheathed wick member in operative contact with the printer. The apparatus has numerous operational advantages over existing oil delivery apparatus, including providing multiple contact surfaces for longer operational life before replacement, ease in cleaning and regeneration, improved durability and reduced wear, and more compact and versatile operation.
Abstract:
A surface of a substrate 11 (FIG. 2) is uniformly coated with a liquid L by wetting the surface with the liquid and compressibly contacting the wetted surface with an applicator member 10 having an outer layer 14 of a compressible liquid absorbing material with inverse sponge characteristics and an inner layer 13 of compliant material. Preferably the member is a roller 10 having a silicone rubber or polyurethane inner layer and a chamois outer layer. A plurality of the rollers 10 are arranged to be in compressive contact with the surfaces of a plurality of substrates 11 as the substrates are being removed from the liquid L (arrow A), the movement of the substrates 11 causing rotation (arrow F) of the rollers to apply a uniform coating of the liquid on the contacted surfaces.
Abstract:
Method of controlling the temperature of a tape element in a tape run utilizing a tape support element having a surface elongated in the direction of the tape run and for coaction with a surface of the tape element, the tape support surface having a tape-receiving part spaced from a tape delivery part, which method includes controlling the temperature of the tape support surface. The method includes the steps of intimately supporting the tape element by the support element, and introducing a relatively small quantity of a temperature-exchange liquid between the aforementioned elements in proximity to the tape receiving part to spread by capillarity in a thin film toward the tape delivery part. Such spreading of the thin liquid film is enhanced by moving the tape element toward the delivery part of the support.